Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017175 nm period grating fabricated by i-line proximity mask-aligner lithography
Bourgin, Y.; Voigt, D.; Käsebier, T.; Siefke, T.; Kley, E.-B.; Zeitner, U.D.
Journal Article
2016Periodic sub-100nm structures fabricated by proximity i-line mask-aligner lithography (and self-aligned double patterning)
Bourgin, Y.; Voigt, D.; Käsebier, T.; Kley, E.-B.; Zeitner, U.D.
Conference Paper
2013Asymmetric direction selective filter elements based on high-contrast gratings
Steiner, Stefan; Kroker, Stefanie; Käsebier, Thomas; Voigt, Daniel; Fuchs, Jörg; Fuchs, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Conference Paper
2012The EMRP project "thermal design and dimensional drift"
Flügge, J.; Beckert, Erik; Jennett, N.; Maxwell, T.; Petit, D.; Rudtsch, S.; Salgado, J.; Schalles, M.; Schödel, R.; Voigt, D.; Voigt, M.
Conference Paper