Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20193D applicable ALD film for humidity detection
Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Characterization of the charge transfer in an enhanced pinned photodiode with a collection gate
Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
Conference Paper
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Measurement concept for direct time-of-flight sensors at high ambient light
Haase, Jan F.; Beer, Maik; Schrey, Olaf; Ruskowski, Jennifer; Brockherde, Werner; Vogt, Holger
Conference Paper
2019Mechanical test structures for the determination of normal stress in multilayer freestanding MEMS-membranes
Michel, Marvin D.; Vogt, Holger
Conference Paper
2019Modeling of thermal conductivity for a CMOS-compatible MEMS-ROIC contact by TiN nanotubes
Michel, Marvin D.; Vogt, Holger
Journal Article
2019Optimization of the dielectric layer for electrowetting on dielectric
Türk, Semih; Schug, Alexander; Viga, Reinhard; Jupe, Andreas; Vogt, Holger
Journal Article
2019Post-CMOS 3D-integration of a nanopellistor
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2019Wafer-Level-3D-Integrationsverfahren für hochsensitive optische Sensoren
Kalwa, Lukas; Gläsener, Stefan; Ruskowski, Jennifer; Figge, Martin; Kappert, Holger; Vogt, Holger
Conference Paper
2018Analysis and simulation of super-hydrophobic layers for micro-fluidic applications
Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
Conference Paper
2018Decreasing the actuation voltage in electrowetting on dielectric with thin and micro-structured dielectric
Türk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger
Conference Paper
2018Development of a MEMS technology for the monolithic post-CMOS integration of capacitive pressure sensors
Walk, Christian
: Vogt, Holger (Erstgutachter); Mokwa, Wilfried
Dissertation
2018Development of a piezoelectric flexural plate-wave (FPW) bioMEMS-sensor for rapid point-of-care diagnostics
Jupe, Andreas; Livshits, Pavel; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Conference Paper
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Die-level patterning of parylene F by laser-ablation for further processing with ALD functional layers
Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
Conference Paper
2018Digital uncooled IRFPAs based on microbolometers with 17 μm and 12μm pixel pitch
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Kuhl, Andreas; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018Evaluation of a median threshold based EEPROM-PUF concept implemented in a high temperature SOI CMOS technology
Willsch, Benjamin; Heesen, Marius te; Hauser, Julia; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Würfel, Daniel; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018Multi object detection in direct Time-of-Flight measurements with SPADs
Haase, Jan F.; Beer, Maik; Ruskowski, Jennifer; Vogt, Holger
Conference Paper
2018New concept for post-CMOS pellistor integration
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018Penetrating nanoelectrodes for an electrical cell interface on CMOS ASIC
Allani, Sonja; Jupe, Andreas; Utz, Alexander; Schaal, Christopher; Rustom, Amin; Kappert, Holger; Vogt, Holger
Conference Paper
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Simulation results of prospective next generation 3D thermopile sensor and array circuitry options
Verheyen, Erik; Erbslöh, Andreas; Viga, Reinhard; Vogt, Holger
Journal Article
2018Thin film ALD materials as functional layer for 3D-integrated metal oxide gas-sensors
Knauß, Anna M.; Münchenberger, Finja M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Analysis of semiconductor process variations by means of hierarchical median polish
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Analytical model for thin-film SOI PIN-diode leakage current
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Goehlich, Andreas; Paschen, Uwe
Journal Article
2017Automating wafer-level test of uncooled infrared detectors using wafer-prober
Makhlouf, Mohamed; Goller, Diana; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Utz, Alexander; Weiler, Dirk; Vogt, Holger
Conference Paper
2017CMOS SiPM with integrated amplifier
Schwinger, Alexander; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Journal Article, Conference Paper, Poster
2017Elektro-optische Charakterisierung von Ferninfrarot-Bildaufnehmern mittels Bauelementetest in der Serienproduktion
Goller, Diana; Makhlouf, Mohamed; Utz, Alexander; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Weiler, Dirk; Vogt, Holger
Conference Paper
2017Entwicklung eines Hochtemperatur-Trench-Kondensators mit Hilfe von Methoden der Atomlagenabscheidung
Dietz, Dorothee
: Vogt, Holger (Erstgutachter); Fiedler, Horst-Lothar (Zweitgutachter)
Dissertation
2017Fabrication and electrochemical characterization of ruthenium nanoelectrodes
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Journal Article
2017Implementation of an integrated differential readout circuit for transistor-based physically unclonable functions
Willsch, Benjamin; Müller, Kai-Uwe; Zhang, Qi; Hauser, Julia; Dreiner, Stefan; Stanitzki, Alexander; Kappert, Holger; Kokozinski, Rainer; Vogt, Holger
Conference Paper
2017Optimization of transfer times in pinned photodiodes
Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Study of enzyme sensors with wide, adjustable measurement ranges for in-situ monitoring of biotechnological processes
Mross, Stefan; Zimmermann, Tom; Zenzes, Sebastian; Kraft, Michael; Vogt, Holger
Journal Article
2017Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Conference Paper
2017Ungekühlte Mikrobolometer-Arrays mit einer Pixelgröße von 12 µm basierend auf einer neuartigen thermisch isolierenden Struktur
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Lerch, Renee G.; Würfel, Daniel; Vogt, Holger
Journal Article
2017Untersuchung von dreidimensionalen Nanoelektroden für die intrazelluläre Kontaktierung auf integrierten Schaltungen
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2016ALD-based 3D-capacitors for harsh environments
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016CMOS-kompatible Nanotube-Mikrobolometer-Infrarot-Detektoren
Muckensturm, Kai-Marcel
: Vogt, Holger (Erstgutachter); Schmechel, Roland (Zweitgutachter)
Dissertation
2016Digital microfluidics for microchip-based cell sorting
Kahnert, Stefan; Schreiber, Fedor; Goehlich, Andreas; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Erni, Daniel; Küppers, Ralf; Vogt, Holger
Conference Paper
2016Entwicklung einer Mikrochip-navigierten Zellsortieranlage
Kahnert, Stefan
: Vogt, Holger (1. Gutachter); Erni, Daniel (2. Gutachter)
Dissertation
2016Entwicklung eines piezoresistiven Drucksensors für Hochtemperaturanwendungen auf Basis eines SOI-Substrats
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Andrei; Vogt, Holger
Conference Paper
2016Entwicklung und Untersuchung von Photodetektoren in einer Dünnfilm-SOI-Technologie
Schmidt, Andrei
: Vogt, Holger (Erstgutachter); Stöhr, Andreas (Zweitgutachter); Dreiner, Stefan (Betreuer)
Dissertation
2016Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2016HOT-300 - a multidisciplinary technology approach targeting microelectronic systems at 300 °C operating temperature
Vogt, Holger; Altmann, Frank; Braun, Sebastian; Celik, Yusuf; Dietrich, Lothar; Dietz, Dorothee; Dijk, Marius van; Dreiner, Stefan; Döring, Ralf; Gabler, Felix; Goehlich, Andreas; Hutter, Matthias; Ihle, Martin; Kappert, Holger; Kordas, Norbert; Kokozinski, Rainer; Naumann, Falk; Nowak, Torsten; Oppermann, Hermann; Partsch, Uwe; Petzold, Matthias; Roscher, Frank; Rzepka, Sven; Schubert, Ralph; Weber, Constanze; Wiemer, Maik; Wittler, Olaf; Ziesche, Steffen
Conference Paper
2016Integrated multi-sensor system for parallel in-situ monitoring of biotechnological processes
Mross, Stefan
: Vogt, Holger (1. Gutachter); Kraft, Michael (2. Gutachter)
Dissertation
2016Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites, cell density and pH in biotechnological processes
Mross, Stefan; Zimmermann, Tom; Winkin, Nadine; Kraft, Michael; Vogt, Holger
Journal Article
2016Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments
Gabler, Felix; Roscher, Frank; Döring, Ralf; Otto, Alexander; Ziesche, Steffen; Ihle, Martin; Celik, Yusuf; Dietz, Dorothee; Goehlich, Andreas; Kappert, Holger; Vogt, Holger; Naumann, Falk; Geßner, Thomas
Conference Paper
2016Measurement results of a 12 μm pixel size microbolometer array based on a novel thermally isolating structure using a 17 μm ROIC
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Würfel, Daniel; Lerch, Renee; Vogt, Holger
Conference Paper
2016Modeling of the charge transfer in a lateral drift field photo detector
Driewer, Adrian; Hosticka, Bedrich J.; Spickermann, Andreas; Vogt, Holger
Journal Article
2016Modellierung von 3D-Time-of-Flight-Sensoren und -Systemen
Driewer, Adrian
: Vogt, Holger (Gutachter); Waasen, Stefan van (Gutachter)
Dissertation
2016Nanostructures on CMOS-intelligent sensors and actuators by post processing
Goehlich, Andreas; Vogt, Holger
Conference Paper
2016Optimierung und Modellierung von Bauelementen in einer 0,35 μm-CMOS-Hochtemperaturtechnologie
Kelberer, Andreas
: Vogt, Holger (Gutachter); Fiedler, Horst-Lothar (Gutachter); Dreiner, Stefan (Betreuer)
Dissertation
2016Post-CMOS integrated ALD 3D micro- and nanostructures and application for multi-electrode arrays
Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016Post-CMOS integration of miniaturized solar cells for energy harvesting of autonomous sensor nodes
Stühlmeyer, Martin; Goehlich, Andreas; Figge, Martin; Vogt, Holger
Conference Paper
2016Statistical tests to determine spatial correlations in the response behavior of PUFs
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016Ungekühlte Mikrobolometer-Arrays mit einer Picelgröße von 12 μm basierend auf einer neuartigen thermischen isolierenden Struktur
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Lerch, Renee; Würfel, Daniel; Vogt, Holger
Conference Paper
2015ALD-basierte, monolithisch integrierte 3D-Nanostrukturen
Jupe, Andreas; Goehlich, Andreas; Feizi, Khadijeh; Vogt, Holger
Conference Paper
2015Beschleunigte Zuverlässigkeitsuntersuchung von Siliziumnitrid bei schmalbandiger UV-Bestrahlung
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2015Charakterisierung und Modellierung freistehender Silizium Membranen auf SOI-Basis für Drucksensor-Anwendungen
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Alexander; Vogt, Holger
Conference Paper
2015CMOS integrated miniaturized photovoltaic cells for autonomous sensor nodes: Simulations and experimental results
Goehlich, Andreas; Stühlmeyer, Martin; Vogt, Holger
Conference Paper
2015Entwicklung einer Mikrochip navigierten Zellsortieranlage
Kahnert, Stefan; Schreiber, Fedor; Erni, Daniel; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Küppers, Ralf; Vogt, Holger
Conference Paper
2015Entwicklung eines hermetisch verkapselten mikrosystemtechnischen Drucksensorsystems für den Einsatz als Biosensor in wässrigen Medien
Gembaczka, Pierre
: Vogt, Holger (Gutachter); Kraft, Michael (Gutachter); Trieu, Hoc-Khiem (Gutachter)
Dissertation
2015Entwicklung von Hochtemperatur Trench-Kondensatoren unter Verwendung von dünnen ALD-Dielektrika
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
Conference Paper
2015Enzyme sensor with polydimethylsiloxane membrane and CMOS potentiostat for wide-range glucose measurements
Mross, Stefan; Fürst, Peter; Pierrat, Sebastien; Zimmermann, Tom; Vogt, Holger; Kraft, Michael
Journal Article
2015Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Conference Paper
2015Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Conference Paper, Journal Article
2015Failure mechanisms of microbolometer thermal imager sensors using chip-scale packaging
Elßner, Michael; Vogt, Holger
Journal Article, Conference Paper
2015High-temperature trench capacitors, using thin-film ALD dielectrics
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
Journal Article, Conference Paper
2015High-temperature trench capacitors, using thin-film ALD dielectrics
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
Conference Paper
2015Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites and cell mass in biotechnological processes
Mross, Stefan; Zimmermann, Tom; Winkin, Nadine; Kraft, Michael; Vogt, Holger
Journal Article, Conference Paper
2015Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael
Conference Paper
2015Large area CMOS photosensors for time-resolved measurements
Poklonskaya, Elena
: Vogt, Holger (Gutachter); Oehm, Jürgen (Gutachter)
Dissertation
2015Modeling of CMOS image sensors for time-of-flight applications
Driewer, Adrian; Hosticka, Bedrich J.; Spickermann, Andreas; Vogt, Holger
Conference Paper
2015Reliability of microbolometer thermal imager sensors using chip-scale packaging
Elßner, Michael; Vogt, Holger
Journal Article, Conference Paper
2015Thin-film SOI PIN-diode leakage current dependence on back-gate-potential and HCI traps
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2014CMOS integrated biosensor for the detection of biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Manova, Radostina K.; Scheres, Luc; Roeven, Esther; Trilling, Anke; Schmidt, Andreas; Hutten, Ulrike; Neureiter, Katrin; Pierrat, Sebastien; Beek, Teris A. van; Vogt, Holger
Abstract
2014Development of a microchip based cell sorting device
Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Goellner, B.; Michelsen, U.; Bartels, Frank; Schreiber, F.; Rennings, A.; Erni, Daniel
Abstract
2014Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
Journal Article
2014Hybrider Detektor zum Detektieren elektromagnetischer Strahlung
Romero, Daniel Durini; Brockherde, Werner; Vogt, Holger
Patent
2014Mikrobump-Entwicklung mit einem Pitch von 6 μm unter Verwendung eines Ionenstrahlätzprozesses
Heß, Jennifer
: Vogt, Holger (Betreuer); Schmechtel, Roland (Betreuer)
Dissertation
2014PECVD of poly-SiGe/Ge layers with increased total gas flow
Wang, Qiang; Goehlich, Andreas; Ruß, Marco; Yang, Pin; Vogt, Holger
Journal Article
2014Performance analysis of a large photoactive area CMOS line sensor for fast, time-resolved spectroscopy applications
Poklonskaya, Elena; Durini, Daniel; Jung, Melanie; Schrey, Olaf; Driewer, Adrian; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2014Reliability of CMOS on silicon-on-insulator for use at 250 °C
Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Journal Article
2014Uncooled digital IRFPA-family with 17µm pixel-pitch based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Weiler, Dirk; Hochschulz, Frank; Würfel, Daniel; Lerch, Renee G.; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Wang, Qiang; Vogt, Holger
Conference Paper
2014Zuverlässigkeitsuntersuchungen an einer hochtemperaturtauglichen SOI-CMOS-Technologie
Dreiner, Stefan; Grella, Katharina; Heiermann, Wolfgang; Kelberer, Andreas; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2013CMOS integrated free standing circular membrane for the detection of allergens and biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Schmidt, Alexander; Klieber, Robert; Haas, Norbert; Greifendorf, Dieter; Vogt, Holger
Conference Paper
2013CMOS kompatible, nanomodifizierte Multi-Elektroden-Arrays
Jupe, Andreas; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger
Conference Paper
2013CMOS-compatible ruggedized high temperature Lamb wave pressure sensor
Kropelnicki, Piotr; Muckensturm, Kai-Marcel; Mu, X. J.; Randles, A. B.; Cai, H.; Ang, W. C.; Tsai, J. M.; Vogt, Holger
Journal Article
2013Development of an universial allergen sensor system
Goehlich, Andreas; Burmester, Kim; Celik, Yusuf; Klieber, Robert; Greifendorf, Dieter; Haas, Norbert; Vogt, Holger
Conference Paper
2013Entwicklung einer Mikrochip navigierten Zellsortieranlage
Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Goellner, B.; Michelsen, U.; Bartels, F.
Conference Paper
2013Entwicklung eines hochtemperaturfesten Kondensators für die Mikrosystemtechnik
Celik, Yusuf; Goehlich, Andreas; Jupe, Andreas; Vogt, Holger
Conference Paper
2013Far infrared digital IRFPA baed on uncooled microbolometer for automotive and military applications
Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee G.; Hochschulz, Frank; Wang, Qiang; Geruschke, Thomas; Heß, Jennifer; Vogt, Holger
Abstract
2013Flip-Chip Technologie für Anwendungstemperaturen > 250 °C
Heiermann, Wolfgang; Geruschke, Thomas; Ruß, Marco; Vogt, Holger
Conference Paper
2013Galvanik in der Mikrosystemtechnik
Vogt, Holger; Heiermann, Wolfgang; Heß, Jennifer
Journal Article
2013High temperature characterization up to 450°C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2013High temperature reliability investigations up to 350 °C of gate oxid capacitors realized in a Silicon-on-Insulator CMOS-technology
Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2013Hybrid sensor integration by wafer-to-wafer bonding
Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger
Book Article
2013Integrierte Sensorstruktur
Vogt, Holger; Goehlich, Andreas; Jupe, Andreas
Patent
2013Reliability investigations up to 350°C of gate oxid capacitors realized in a Silicon-on-Insulator CMOS-technology
Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Journal Article
2013Speed considerations for LDPD based Time-of-Flight CMOS 3D image sensors
Süss, Andreas; Nitta, Christian; Spickermann, Andreas; Durini, Daniel; Varga, Gabor; Jung, Melanie; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger; Schwope, Stefan
Conference Paper
2013Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
Görtz, Michael; Betz, Wolfgang; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
Conference Paper
2012Adaptive readout circuit for pinned and lateral drift-field photo diodes
Süss, Andreas; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2012CMOS-Back-End-of-Line-Prozesse für optische Bauelemente
Hochschulz, Frank
: Vogt, Holger (Referent); Tegude, Franz-Josef (Koreferent)
Dissertation
2012Direct integration of carbon nanotubes on CMOS with high-temperature tungsten metallization
Jupe, Andreas; Hoeren, André; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger
Conference Paper
2012High temperature characterization up to 450 °C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Conference Paper
2012An improved electrical and thermal model of a microbolometer for electronic circuit simulation
Würfel, Daniel; Vogt, Holger
Journal Article, Conference Paper
2012Microelectromechanical implants: Encapsulation concepts and test procedures
Betz, Wolfgang; Trieu, Hoc-Khiem; Vogt, Holger
Abstract
2012A novel fully implantable wireless sensor system for monitoring hypertension patients
Cleven, Nina J.; Müntjes, Jutta A.; Fassbender, Holger; Urban, Ute; Görtz, Michael; Vogt, Holger; Gräfe, Maik; Göttsche, Thorsten; Penzkofer, Tobias; Schmitz-Rode, Thomas; Mokwa, Wilfried
Journal Article
2012Process window of thermosonic palladium wire bonding on electroplated gold layers for high temperature applications
Heiermann, Wolfgang; Heß, Jennifer; Geruschke, Thomas; Bauer, Jochen; Ruß, Marco; Kappert, Holger; Vogt, Holger
Presentation
2012Quantum efficiency determination of a novel CMOS design for fast imaging applications in the extreme ultraviolet
Herbert, Stefan; Banyay, Matus; Maryasov, Alexey; Hochschulz, Frank; Paschen, Uwe; Vogt, Holger; Juschkin, Larissa
Journal Article
2012Reducing the impact of process variations on the sensitivity of CMOS photodiodes
Hochschulz, Frank; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Book Article
2012Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
Heiermann, Wolfgang; Geruschke, Thomas; Grella, Katharina; Bartsch, M.; Borrmann, Thomas; Ruß, Marco; Vogt, Holger
Conference Paper
2012Sacrificial ion beam etching process for seed layer removal of 6 µm pitch CuSn micro bumps
Heß, Jennifer; Vogt, Holger
Conference Paper
2012Simulation method for LWIR radiation distribution using a visual ray-tracer
Utz, Alexander; Gendrisch, Lutz; Weiler, Dirk; Kolnsberg, Stephan; Vogt, Holger
Journal Article, Conference Paper
2011CMOS photodiodes for narrow linewidth applications
Hochschulz, Frank; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2011A new approach for detecting ionophore concentrations in tethered bilayer lipid membranes
Dierk, Sarah; Ünlübayir, Sinan; Trieu, Hoc-Khiem; Vogt, Holger; Köper, Ingo
Abstract
2011Sensor und Verfahren zum Herstellen eines Sensors
Kropelnicki, Piotr; Vogt, Holger; Weiler, Dirk
Patent
1994Advanced SOI MOSFET for low voltage, low power and fast application
Stephan, Rolf; Raab, Michael; Kück, Heinz; Vogt, Holger
Conference Paper
1992Geringes Gewicht, kleinste Abmessungen durch Integration auf kleinstem Raum
Mokwa, Wilfried; Vogt, Holger
Journal Article
1992A miniature single-chip pressure and temperature sensor
Kandler, Michael; Manoli, Yiannakis; Mokwa, Wilfried; Spiegel, Egbert; Vogt, Holger
Journal Article
1991JFET-PMOS technology, in the design of monolithic preamplifier systems for multielectrode detectors
Buttler, Werner; Vogt, Holger; Lutz, Gerhard; Manfredi, Pier Francesco; Speziali, Valeria
Journal Article, Conference Paper
1989MESFETs in thin silicon on SIMOX
Vogt, Holger; Burbach, Gert; Belz, Joachim; Zimmer, Günter
Journal Article
1982DICMOS - novel MOS logic
Hosticka, Bedrich J.; Kleine, Ulrich; Vogt, Holger; Zimmer, Günter
Journal Article
1981Performance of a scaled Si gate n-well CMOS technology
Zimmer, Günter; Fiedler, Horst-Lothar; Höfflinger, Bernd; Neubert, E.; Vogt, Holger
Journal Article