| | |
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| 2013 | Far infrared digital IRFPA baed on uncooled microbolometer for automotive and military applications
Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee G.; Hochschulz, Frank; Wang, Qiang; Geruschke, Thomas; Heß, Jennifer; Vogt, Holger | Abstract, Conference Paper |
| 2013 | Galvanik in der Mikrosystemtechnik
Vogt, Holger; Heiermann, Wolfgang; Heß, Jennifer | Journal Article |
| 2013 | Hybrid sensor integration by wafer-to-wafer bonding
Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger | Book Article |
| 2012 | Adaptive readout circuit for pinned and lateral drift-field photo diodes
Süss, Andreas; Hosticka, Bedrich J.; Vogt, Holger | Conference Paper |
| 2012 | Direct integration of carbon nanotubes on CMOS with high-temperature tungsten metallization
Jupe, Andreas; Hoeren, André; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger | Conference Paper |
| 2012 | High temperature characterization up to 450 °C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe | Conference Paper |
| 2012 | An improved electrical and thermal model of a microbolometer for electronic circuit simulation
Würfel, Daniel; Vogt, Holger | Journal Article, Conference Paper |
| 2012 | Microelectromechanical implants: Encapsulation concepts and test procedures
Betz, Wolfgang; Trieu, Hoc-Khiem; Vogt, Holger | Abstract, Conference Paper |
| 2012 | A novel fully implantable wireless sensor system for monitoring hypertension patients
Cleven, Nina J.; Müntjes, Jutta A.; Fassbender, Holger; Urban, Ute; Görtz, Michael; Vogt, Holger; Gräfe, Maik; Göttsche, Thorsten; Penzkofer, Tobias; Schmitz-Rode, Thomas; Mokwa, Wilfried | Journal Article |
| 2012 | Process window of thermosonic palladium wire bonding on electroplated gold layers for high temperature applications
Heiermann, Wolfgang; Heß, Jennifer; Geruschke, Thomas; Bauer, Jochen; Ruß, Marco; Kappert, Holger; Vogt, Holger | Presentation |
| 2012 | Quantum efficiency determination of a novel CMOS design for fast imaging applications in the extreme ultraviolet
Herbert, Stefan; Banyay, Matus; Maryasov, Alexey; Hochschulz, Frank; Paschen, Uwe; Vogt, Holger; Juschkin, Larissa | Journal Article |
| 2012 | Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
Heiermann, Wolfgang; Geruschke, Thomas; Grella, Katharina; Bartsch, M.; Borrmann, Thomas; Ruß, Marco; Vogt, Holger | Conference Paper |
| 2012 | Sacrificial ion beam etching process for seed layer removal of 6 µm pitch CuSn micro bumps
Heß, Jennifer; Vogt, Holger | Conference Paper |
| 2012 | Simulation method for LWIR radiation distribution using a visual ray-tracer
Utz, Alexander; Gendrisch, Lutz; Weiler, Dirk; Kolnsberg, Stephan; Vogt, Holger | Journal Article, Conference Paper |
| 2012 | Untersuchung einer neuen Methode zur Integration von angebundenen Doppellipidschichten in CMOS-Strukturen zur Realisierung bioelektrischer Sensoren
Kißler, S.
: Vogt, H. (Prüfer) | Dissertation |
| 2011 | Bestimmung der NETD von Fern-Infrarot Imagern auf Wafer-Level unter Umgebungsdruck in der Serienproduktion
Utz, A.; Gendrisch, L.; Brögger, D.; Weiler, D.; Vogt, H. | Conference Paper |
| 2011 | CMOS photodiodes for narrow linewidth applications
Hochschulz, Frank; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe | Conference Paper |
| 2011 | CMOS-based EUV sensor
Hochschulz, F.; Paschen, U.; Vogt, H. | Book Article |
| 2011 | Development of an uncooled 25µm pixel-pitch VGA-IRFPA
Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Heß, J.; Kropelnicki, P.; Vogt, H. | Conference Paper |
| 2011 | A far infrared VGA detector based on uncooled microbolometers for automotive applications
Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Kropelnicki, P.; Heß, J.; Vogt, H. | Conference Paper |
| 2011 | Flexible mikroelektromechanische Implantate für den chronischen Einsatz
Betz, W.
: Vogt, H. (Prüfer) | Dissertation |
| 2011 | Hall-Sensor und Verfahren zu dessen Herstellung
Goehlich, A.; Trieu, H.K.; Vogt, H. | Patent |
| 2011 | High temperature reliability investigations of EEPROM memory cells realised in Silicon-on-Insulator (SOI) technology
Grella, K.; Vogt, H.; Paschen, U. | Conference Paper |
| 2011 | Improvements of a digital 25 µm pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massively parallel Sigma-Delta- ADC readout
Weiler, D.; Ruß, M.; Lerch, R.G.; Yang, P.; Bauer, J.; Heß, J.; Kropelnicki, P.; Vogt, H. | Conference Paper |
| 2011 | Light switched plasma charging protection device for high-field characterization and flash memory protection
Sommer, S.P.; Paschen, U.; Figge, M.; Vogt, H. | Journal Article |
| 2011 | Micro- and nanosystem technologies on CMOS
Vogt, H.; Ruß, M. | Book Article |
| 2011 | Multiphysics simulations for the optimisation of CMOS processes for high precision optical measurement applications
Hochschulz, F.; Paschen, U.; Vogt, H. | Journal Issue |
| 2011 | Neue CMOS-Bildsensoren erweitern Einsatzmöglichkeiten
Hochschulz, F.; Brockherde, W.; Vogt, H.; Paschen, U. | Journal Article |
| 2011 | A new approach for detecting ionophore concentrations in tethered bilayer lipid membranes
Dierk, Sarah; Ünlübayir, Sinan; Trieu, Hoc-Khiem; Vogt, Holger; Köper, Ingo | Abstract, Conference Paper |
| 2011 | A novel mass sensitive sensor
Goehlich, A.; Jonville, C.; Klieber, R.; Mao, X.; Martens, K.; Jansen, T.; Trieu, H.-K.; Vogt, H. | Conference Paper |
| 2011 | Simulating far-infrared scenarios with the radiance synthetic imaging system
Utz, A.; Gendrisch, L.; Vogt, H. | Journal Article |
| 2011 | Simulation method for LWIR radiation distribution using a visual ray-tracer
Utz, A.; Gendrisch, L.; Weiler, D.; Kolnsberg, S.; Vogt, H. | Conference Paper |
| 2011 | Telemetrisches Drucksensorsystem zur kontinuierlichen Blutdruckmessung im Herzen
Hennig, A.; Bögel, G. vom; Grabmaier, A.; Vogt, H. | Conference Paper |
| 2011 | An uncooled VGA-IRFPA with novel readout architecture
Würfel, D.; Ruß, M.; Lerch, R.G.; Weiler, D.; Yang, P.; Vogt, H. | Journal Article |
| 2010 | CMOS process enhancement for high precision narrow linewidth applications
Hochschulz, F.; Vogt, H.; Paschen, U. | Conference Paper |
| 2010 | Customized mems process development. A pressure sensor for high temperature and high pressure applications
Goehlich, A.; Vogt, H.; Debusmann, K.; Trieu, H.-K. | Book Article |
| 2010 | A digital 25 m pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massive parallel Sigma-Delta-ADC readout
Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Vogt, H. | Conference Paper |
| 2010 | Fabrication method for chip-scale-vacuum-packages based on a chip-to-wafer-process
Bauer, J.; Weiler, D.; Ruß, M.; Heß, J.; Yang, P.; Voß, J.; Arnold, N.; Vogt, H. | Conference Paper |
| 2010 | Lateral drift-field photodiode for low noise, high-speed, large photoactive-area CMOS imaging applications
Durini, D.; Spickermann, A.; Mahdi, R.; Brockherde, W.; Vogt, H.; Grabmaier, A.; Hosticka, B.J. | Conference Paper, Journal Article |
| 2010 | Multiphysics simulation for the optimisation of CMOS processes for high precision optical measurement applications
Hochschulz, F.; Paschen, U.; Vogt, H. | Conference Paper |
| 2010 | A new DC-temperature model for a diode bolometer based on SOI-pin-diode test structures
Kropelnicki, P.; Vogt, H. | Conference Paper |
| 2010 | Noise of short-time integrators for readout of uncooled infrared bolometer arrays
Würfel, D.; Weiler, D.; Hosticka, B.J.; Vogt, H. | Journal Article, Conference Paper |
| 2009 | CMOS Post-Processing für kompakte, intelligente Mikrosysteme
Vogt, H. | Conference Paper |
| 2009 | A fast WLR test for the evaluation of EEPROM endurance
Uhlemann, A.; Aal, A.; Vogt, H. | Conference Paper |
| 2009 | In-vitro tests for biostability of materials for micro implants
Betz, W.; Trieu, H.-K.; Vogt, H. | Conference Paper |
| 2009 | Indium-Tin-Oxide (ITO) layer integration in single-polysilicon standard CMOS processes to improve the CTE in photogate pixels
Durini, D.; Dreiner, S.; Vogt, H. | Conference Paper |
| 2009 | Light switched plasma charging damage protection device allowing high field characterization
Sommer, S.P.; Paschen, U.; Figge, M.; Vogt, H. | Conference Paper |
| 2009 | Monocrystalline diode bolometer made by low temperature direct wafer bonding
Kropelnicki, P.; Vogt, H. | Conference Paper |
| 2009 | Simulation des Laserabgleichs von Dünnfilmwiderständen mit Widerstandsnetzwerk im Schaltungssimulator
Vogt, H.; Vogt, H. | Conference Paper |
| 2008 | Films - Ein Programm zur Simulation von AR-Schichten
Vogt, H. | Conference Paper |
| 2008 | Positive charge trapping induced by plasma charging damage in NMOS transistors
Sommer, S.P.; Paschen, U.; Vogt, H. | Conference Paper |
| 2008 | Ti/Ni(80%)Cr(20%) thin-film resistor with a nearly zero temperature coefficient of resistance for integration in a standard CMOS process
Nachrodt, D.; Paschen, U.; Have, A. ten; Vogt, H. | Journal Article |
| 2007 | The geometric design of microbolometer elements for uncooled focal plane arrays
Ruß, M.; Bauer, J.; Vogt, H. | Conference Paper |
| 2007 | Herstellungsverfahren fuer ein gehaeustes Bauelement
Vogt, H.; Bauer, J. | Patent |
| 2006 | SPICE modeling of resistive, diode, and pyroelectric bolometer cells
Vogt, H. | Conference Paper |
| 2005 | 200 mm conversion of IMS fab completed
Vogt, H.; Debusmann, K.; Awater, H.; Weyers, S. | Book Article |
| 2005 | On the security of fair non-repudiation protocols
Gürgens, S.; Rudolph, C.; Vogt, H. | Journal Article |
| 2004 | Cost-effective test, calibration and assembly infrastructure for turnkey integrated pressure sensors
Trieu, H.-K.; Köster, O.; Vogt, H. | Conference Paper |
| 2004 | Medizinelektronik: Fraunhofer-Institut Mikroelektronische Schaltungen und Systeme
Vogt, H. | Conference Paper |
| 2004 | A new method to determine the tool count of a semiconductor factory using FabSim
Vogt, H. | Conference Paper |
| 2004 | Production of customer ICs at IMS
Vogt, H.; Paschen, U. | Book Article |
| 2003 | Discrete-event simulation using systemC: Interactive semiconductor factory modeling with FabSim
Vogt, H. | Conference Paper |
| 2003 | Lithography for 0.25 µm CMOS
Wickenbrock, J.; Vogt, H. | Book Article |
| 2003 | On the security of fair non-repudiation protocols
Gürgens, S.; Rudolph, C.; Vogt, H. | Conference Paper |
| 2003 | Synchronous discrete event simulation for fast and efficient simulation of a complete semiconductor factory
Vogt, H. | Conference Paper |
| 2002 | Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H. | Conference Paper |
| 2002 | Investigation of the spatial distribution of current density and heat dissipation in high-power-semiconductor devices
Sauerland, F.; Paschen, U.; Vogt, H. | Conference Paper |
| 2002 | Investigations on silicon thermal flow sensors with mesa structures
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H. | Conference Paper |
| 2002 | Microsystems flow sensor operated in thermal time-of-flight mode
Hariadi, I.; Trieu, H.-K.; Vogt, H. | Book Article |
| 2002 | Modeling of microsystem flow sensor based on thermal time-of-flight mode
Hariadi, I.; Trieu, H.-K.; Vogt, H. | Conference Paper |
| 2002 | New IMS Cleanroom for 0.25 µm CMOS
Vogt, H. | Book Article |
| 2001 | Correcting organ motion artifacts in X-ray CT systems based on tracking of motion phase by the spatial overlap correlator. II. Experimental study
Dhanantwari, A.C.; Stergiopoulos, S.; Zamboglou, N.; Baltas, D.; Vogt, H.-G.; Karangelis, G. | Journal Article |
| 2001 | Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W. | Conference Paper, Journal Article |
| 2001 | Trench technology for power devices
Vogt, H. | Book Article |
| 2000 | Investigation of the properties of a single-chip potentiostat supporting three electrode cells for its operation with voltammetric and AC modes
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W. | Conference Paper |
| 2000 | Navigation System for Interstitial Brachytherapy
Straßmann, G.; Kolotas, C.; Heyd, R.; Walter, S.; Baltas, D.; Martin, T.; Vogt, H.; Ioannidis, G.; Sakas, G.; Zamboglou, N. | Journal Article |
| 2000 | Optimization of vertical 600 and 1500 V SOI-ESTs with low on-state voltages
Steck, B.; Vogt, H. | Journal Article |
| 2000 | Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W. | Conference Paper |
| 2000 | Smart power integration on SOI: thin and thick film (local) SOI processes and devices
Paschen, U.; Weyers, J.; Bentum, R. van; Steck, B.; Vogt, F.P.; Vogt, H. | Conference Paper |
| 2000 | STROEMUNGSSENSORKOMPONENTE
Kersjes, R.; Mokwa, W.; Zimmer, G.; Vogt, H. | Patent |
| 1998 | Integrierte Leistungsschalterstruktur
Muetterlein, B.; Vogt, H. | Patent |
| 1998 | Structural characterization of local SIMOX-substrates
Bentum, R.v.; Vogt, H. | Conference Paper |
| 1997 | Single-chip class-E converter for compact fluorescent lamp ballast
Radecker, M.; Fiedler, H.-L.; Vogt, F.P.; Vogt, H. | Conference Paper |
| 1997 | Smart power with 1200V DMOS
Vogt, F.P.; Vogt, H.; Radecker, M.; Fiedler, H.-L. | Conference Paper |
| 1996 | A CMOS image sensor with combined analog nonvolatile storage capability
Aslam, A.; Brockherde, W.; Hosticka, B.J.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1996 | Entwicklung eines BICMOS-Smart-Power-Prozessor in lokaler SIMOX-Technologie
Weyers, J.; Rost, W.; Vogt, H. | Journal Article |
| 1996 | An intelligent vertical trench DMOS on SIMOX-substrate
Vogt, F.P.; Vogt, H.; Brücker, J.; Zimmermann, C.; Richter, F. | Conference Paper |
| 1996 | Mikroelektronik-Dienstleistungszentrum für den Technologietransfer in die mittelständische Wirtschaft
Vogt, H. | Book Article |
| 1996 | Prozeßentwicklung und -transfer für MOS-Leistungsbauelemente
Vogt, F.P.; Vogt, H. | Book Article |
| 1996 | Smart-Power-ICs für Automobilanwendungen
Zimmermann, C.; Fiedler, H.-L.; Vogt, F.P.; Vogt, H. | Book Article |
| 1996 | Verfahren zum Herstellen eines vertikalen Leistungsbauelementes mit reduzierter Minoritaetstraegerlebensdauer in dessen Driftstrecke
Gassel, H.; Muetterlein, B.; Priefert, D.; Truong, D.N.; Vogt, H. | Patent |
| 1995 | BELICHTUNGSVORRICHTUNG
Gehner, A.; Hess, G.; Kueck, H.; Vogt, H. | Patent |
| 1995 | BELICHTUNGSVORRICHTUNG
Vogt, H.; Hess, G.; Gehner, A.; Kueck, H. | Patent |
| 1995 | BELICHTUNGSVORRICHTUNG
Vogt, H.; Hess, G.; Gehner, A.; Kueck, H. | Patent |
| 1995 | Low-Power-CMOS-Technologie auf Bulk- und SIMOX-Substrat
Raab, M.; Stephan, R.; Kück, H.; Vogt, H. | Book Article |
| 1995 | Mikroelektronik-Ausbildung im Diplomstudiengang Elektrotechnik an der Gerhard-Mercator-Universität-GH Duisburg.
Vogt, H. | Book Article |
| 1995 | Ein monolithischer PWM-Dimmer für Automobilanwendungen in SIMOX-Technologie
Zimmermann, C.; Fiedler, H.-L.; Vogt, F.P.; Vogt, H.; Müsch, E. | Conference Paper |
| 1995 | Qualitätssicherungsstrategie bei der Kleinstserienfertigung von Wasserstoffsensoren auf der Basis von MOS-Bauelementen
Dura, H.-G.; Mokwa, W.; Vogt, H. | Conference Paper |
| 1995 | Verfahren zum Herstellen einer Halbleiterstruktur fuer eine integrierte Leistungsschaltung mit einem vertikalen Leistungsbauelement
Gassel, H.; Muetterlein, B.; Vogt, H.; Zimmer, G. | Patent |
| 1994 | Advanced SOI MOSFET for low voltage, low power and fast application
Stephan, R.; Raab, M.; Kück, H.; Vogt, H. | Conference Paper |
| 1994 | Advantages and potential of SOI structures for smart sensors
Vogt, H. | Conference Paper |
| 1994 | Entwicklung eines miniaturisierten Feuchtesensors auf der Basis der Silizium-Technologie
Werno, J.; Mokwa, W.; Steegmanns, A.; Vogt, H. | Book Article |
| 1994 | Improvement of SIMOX buried oxide breakdown voltage by multiple step and multiple energy implantation
Gassel, H.; Vogt, H. | Conference Paper |
| 1994 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Journal Article |
| 1994 | Reduzierung des Wärmeverlustes von Si-Membranen durch Trenchisolierung
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Book Article |
| 1994 | Verfahren zum Erzeugen einer isolierten, einkristallinen Siliziuminsel
Vogt, H. | Patent |
| 1994 | Verfahren zum Erzeugen einer isolierten, einkristallinen Siliziuminsel
Vogt, H. | Patent |
| 1993 | A bulk-JFET and CMOS/SIMOX technology for low noise, high speed charge-sensitive amplifier
Buttler, W.; Cesura, G.; Manfredi, P.F.; Re, V.; Speziali, V.; Burbach, G.; Vogt, H. | Conference Paper |
| 1993 | Fabrication of sensors and microsystems on SIMOX substrates
Gottfried-Gottfried, R.; Köhler, R.; Kück, H.; Mokwa, W.; Vogt, H. | Conference Paper |
| 1993 | An intelligent 600 V vertical IGBT on SIMOX substrate
Mütterlein, B.; Vogt, F.P.; Weyers, J.; Vogt, H. | Conference Paper |
| 1993 | Intelligente Sensoren auf dem Weg zum ASIC
Vogt, H. | Journal Article |
| 1993 | Mehrlagenmetallisierung für hochintegrierte mikroelektronische Schaltungen
Vogt, H. | Habilitation |
| 1993 | Monolithischer Phasenabschnitt-Dimmer in 500-V-SIMOX-Technologie
Fiedler, H.-L.; Goldyn, D.; Hemming, E.; Mütterlein, B.; Rosch, R.; Vogt, F.P.; Vogt, H.; Zapp, R. | Conference Paper |
| 1993 | Novel approach to defect etching in thin film silicon-on-insulator
Gassel, H.; Peter-Weidemann, J.; Vogt, H. | Journal Article |
| 1993 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Conference Paper |
| 1993 | SIMOX and wafer bonding, combination of competitors complements one another
Gassel, H.; Vogt, H. | Conference Paper |
| 1993 | Smart power technology with dielectric insulation. Processes and applications
Vogt, H. | Journal Article |
| 1993 | Smart power, neue Chancen durch intelligente Leistungshalbleiter
Vogt, H.; Vogt, F.P.; Mütterlein, B. | Book |
| 1993 | Strahlungsresistente ICs. Technologie und Schaltungstechnik
Brockherde, W.; Vogt, H. | Book Article |
| 1993 | Ein thermoelektrischer Infrarotsensor als Beispiel für den Einsatz von SIMOX-Substraten für die Herstellung von Sensoren und Mikrosystemen
Müller, M.; Köhler, R.; Gottfried-Gottfried, R.; Kück, H.; Mokwa, W.; Vogt, H. | Conference Paper |
| 1993 | Verfahren zum Herstellen einer monokristallinen Siliziumschicht auf einem vergrabenen Dielektrikum
Gassel, H.; Vogt, H. | Patent |
| 1992 | A 50 V smart power process with dielectric isolation by SIMOX
Vogt, H.; Weyers, J. | Conference Paper |
| 1992 | 50V BCDMOS-Prozeß mit dielektrischer Isolation zur Herstellung intelligenter Leistungshalbleiter
Weyers, J.; Vogt, H. | Book Article |
| 1992 | Geringes Gewicht, kleinste Abmessungen durch Integration auf kleinstem Raum
Mokwa, W.; Vogt, H. | Journal Article |
| 1992 | Integration of vertical/quasivertical DMOS, CMOS and bipolar transistors in a 50V SIMOX process
Berger, M.; Mach, W.; Mütterlein, B.; Raab, M.; Richter, F.; Vogt, F.P.; Vogt, H.; Weyers, J. | Conference Paper |
| 1992 | Integrierte Leistungsschalterstruktur
Muetterlein, B.; Vogt, H. | Patent |
| 1992 | An intelligent 500 V power vertical DMOS on SIMOX substrate. Part 1
Mütterlein, B.; Vogt, F.P.; Vogt, H. | Conference Paper |
| 1992 | An intelligent 500 V power vertical DMOS on SIMOX substrate. Part 2
Mütterlein, B.; Vogt, F.P.; Vogt, H. | Conference Paper |
| 1992 | A miniature single chip pressure and temperature sensor
Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.; Vogt, H. | Conference Paper |
| 1992 | Minimum oxygen dose for reliable application of SIMOX
Badenes, G.; Burbach, G.; Gassel, H.; Vogt, H.; Walter, A. | Conference Paper |
| 1992 | Novel approach to defect etching in thin film SOI. Part 1
Gassel, H.; Peter-Weidemann, J.; Vogt, H. | Conference Paper |
| 1992 | Novel approach to defect etching in thin film SOI. Part 2
Gassel, H.; Peter-Weidemann, J.; Vogt, H. | Conference Paper |
| 1992 | Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H. | Conference Paper |
| 1992 | SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H. | Conference Paper |
| 1992 | SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 2
Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H. | Conference Paper |
| 1992 | Smart power technology with dielectric insulation. Processes and applications
Vogt, H. | Conference Paper |
| 1991 | Characterization of CMOS-process using test chips and automatic test system
Pieczynski, J.; Vogt, H. | Conference Paper |
| 1991 | High-quality SOI-substrates for CMOS transistors
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1991 | JFET-PMOS technology, in the design of monolithic preamplifier systems for multielectrode detectors
Buttler, W.; Vogt, H. | Conference Paper |
| 1991 | Measurement of SOI film thickness
Badenes, G.; Abel, H.B.; Burbach, G.; Gassel, H.; Vogt, H. | Conference Paper |
| 1991 | Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H. | Conference Paper |
| 1991 | Silicon-on-Insulator development in Europe
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G. | Journal Article |
| 1991 | SIMOX-devices for analog circuits
Badenes, G.; Burbach, G.; Gassel, H.; Vogt, H. | Conference Paper |
| 1991 | Verfahren zum Erzeugen einer isolierten, einkristallinen Siliziuminsel
Vogt, H. | Patent |
| 1990 | Batch process for the production of single crystal silicon membranes by the use of SIMOX-wafers
Belz, J.; Dura, H.-G.; Mokwa, W.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1990 | Characterization of CMOS-devices and circuits build on SIMOX-substrates
Belz, J.; Burbach, G.; Pieczynski, J.; Vogt, H. | Conference Paper |
| 1990 | Characterization of CMOS-devices and circuits build on SIMOX-substrates
Belz, J.; Burbach, G.; Pieczynski, J.; Vogt, H. | Conference Paper |
| 1990 | CMOS-Technologie auf SIMOX-Wafern
Belz, J.; Burbach, G.; Gassel, H.; Peter-Weidemann, J.; Vogt, H. | Book Article |
| 1990 | Integrierbare Kondensatorstruktur
Vogt, H. | Patent |
| 1990 | Introduction to VLSI technology
Vogt, H.; Zimmer, G. | Conference Paper |
| 1990 | Leistungsschalter für 500 V mit dielektrisch isolierter CMOS-Signalelektronik
Boguszewicz, R.; Burbach, G.; Fiedler, H.-L.; Mütterlein, B.; Vogt, F.P.; Vogt, H. | Journal Article |
| 1990 | Leistungsschaltung mit einer integrierten CMOS- oder Bipolar-Schaltung und Verfahren zum Herstellen einer integrierten Schaltung
Vogt, H. | Patent |
| 1990 | Smart-Power-Schalter mit integrierter, dielektrisch isolierter CMOS-Ansteuerung
Belz, J.; Boguszewicz, R.; Burbach, G.; Fiedler, H.-L.; Karl, R.; Mütterlein, B.; Stein, E.; Vogt, F.P.; Vogt, H. | Conference Paper |
| 1990 | Temperature behaviour of CMOS devices built on SIMOX substrates
Zimmermann, W.; Belz, J.; Burbach, G.; Vogt, H. | Conference Paper |
| 1990 | Trends in VLSI technologies
Lackmann, R.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1990 | Untersuchung und Entwicklung der CMOS-Technologie auf vergrabenem Isolator als einer neuen VLSI-Technologie. Berichtszeitraum 01.07.1987 - 31.09.1990. BMFT-Abschlußbericht 110620
Abel, H.B.; Gassel, H.; Belz, J.; Burbach, G.; Vogt, H.; Debusmann, K.; Peter-Weidemann, J.; Redlich, S.; Götzen, R. | Book |
| 1989 | Automatic parameter extraction system with process failure diagnosis for CMOS process
Pieczinski, J.; Vogt, H. | Conference Paper |
| 1989 | CMOS-Technologie auf SIMOX-Wafern
Belz, J.; Burbach, G.; Peter-Weidemann, J.; Vogt, H. | Book Article |
| 1989 | CMOS/SOI-Technologie auf implantiert vergrabenem Isolator
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1989 | High quality silicon-on-insulator substrates by implanted oxygen ions
Belz, J.; Burbach, G.; Peter-Weidemann, J.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1989 | MESFET's in thin silicon on SIMOX
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G. | Journal Article |
| 1989 | Multi-Project-Chip Foundry Service
Herber, K.-H.; Vogt, H. | Book Article |
| 1989 | Rauscharme und strahlungsfeste JFET - CMOS Auslese-Verstärker
Lutz, G.; Manfredi, P.F.; Buttler, W.; Vogt, H. | Conference Paper |
| 1988 | MOSFET gas sensor with integrated temperature measurement and heating elements fabricated with standard CMOS technology
Dobos, K.; Mokwa, W.; Vogt, H.; Zhang, Y.; Zimmer, G.; Xiao, G. | Conference Paper |
| 1988 | On the design of a JFET-CMOS front-end for low noise data acquisition from microstrip detectors
Lutz, G.; Maloberti, F.; Manfredi, P.F.; Speziali, V.; Buttler, W.; Vogt, H. | Journal Article |
| 1987 | Characterization of buried silicon-nitride formed by nitrogen implantation
Beltz, J.; Vogt, H.; Kaat, E.H. te; Zimmer, G. | Journal Article |
| 1987 | Development of CMOS-compatible p-channel junction-field-effect transistors for very low noise application
Skapa, H.; Stuch, D.; Vogt, H.; Zimmer, G. | Conference Paper |
| 1987 | A technology concept for integrated detector electronics with CMOS compatible devices
Vogt, H. | Journal Article |
| 1986 | Anwendung des Lasers zur Herstellung neuer Strukturen für die Mikroelektronik.
Vogt, H.; Zimmer, G. | Journal Article |
| 1986 | Buried silicon nitride formed by nitrogen implantation
Vogt, H.; Beltz, J.; Zimmer, G.; Kaat, E.H. te | Conference Paper |
| 1986 | The growth of buried silicon nitride formed by nitrogen implantation
Beltz, J.; Vogt, H.; Kaat, E.H. te; Zimmer, G. | Conference Paper |
| 1986 | Hochdosisimplantation von Stickstoff in Silizium - Eine Technik zur Erzeugung von dielektrisch isolierten CMOS-Bauelementen mit hoher Integrationsdichte
Vogt, H. | Book |
| 1986 | Optimization of contacts for CMOS
Vogt, H.; Gruber, V.; Zimmer, G. | Conference Paper |
| 1985 | Characterization of CMOS compatible JFETs
Vogt, H.; Stein, E.; Zimmer, G. | Conference Paper |
| 1985 | Material and interface characterisation of buried silicon nitride for SOI-IC technology
Belz, J.; Vogt, H.; Zimmer, G.; Kaat, E.H. te | Conference Paper |
| 1985 | Technology for VLSI devices on ion implanted buried silicon nitride
Vogt, H.; Zimmer, G. | Conference Paper |