Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20193D applicable ALD film for humidity detection
Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Characterization of the charge transfer in an enhanced pinned photodiode with a collection gate
Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
Conference Paper
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Measurement concept for direct time-of-flight sensors at high ambient light
Haase, Jan F.; Beer, Maik; Schrey, Olaf; Ruskowski, Jennifer; Brockherde, Werner; Vogt, Holger
Conference Paper
2019Mechanical test structures for the determination of normal stress in multilayer freestanding MEMS-membranes
Michel, Marvin D.; Vogt, Holger
Conference Paper
2019Modeling of thermal conductivity for a CMOS-compatible MEMS-ROIC contact by TiN nanotubes
Michel, Marvin D.; Vogt, Holger
Journal Article
2019Optimization of the dielectric layer for electrowetting on dielectric
Türk, Semih; Schug, Alexander; Viga, Reinhard; Jupe, Andreas; Vogt, Holger
Journal Article
2019Post-CMOS 3D-integration of a nanopellistor
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2019Wafer-Level-3D-Integrationsverfahren für hochsensitive optische Sensoren
Kalwa, Lukas; Gläsener, Stefan; Ruskowski, Jennifer; Figge, Martin; Kappert, Holger; Vogt, Holger
Conference Paper
2018Analysis and simulation of super-hydrophobic layers for micro-fluidic applications
Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
Conference Paper
2018Decreasing the actuation voltage in electrowetting on dielectric with thin and micro-structured dielectric
Türk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger
Conference Paper
2018Development of a MEMS technology for the monolithic post-CMOS integration of capacitive pressure sensors
Walk, Christian
: Vogt, Holger (Erstgutachter); Mokwa, Wilfried
Dissertation
2018Development of a piezoelectric flexural plate-wave (FPW) bioMEMS-sensor for rapid point-of-care diagnostics
Jupe, Andreas; Livshits, Pavel; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Conference Paper
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Die-level patterning of parylene F by laser-ablation for further processing with ALD functional layers
Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
Conference Paper
2018Digital uncooled IRFPAs based on microbolometers with 17 μm and 12μm pixel pitch
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Kuhl, Andreas; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018Evaluation of a median threshold based EEPROM-PUF concept implemented in a high temperature SOI CMOS technology
Willsch, Benjamin; Heesen, Marius te; Hauser, Julia; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Würfel, Daniel; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018Multi object detection in direct Time-of-Flight measurements with SPADs
Haase, Jan F.; Beer, Maik; Ruskowski, Jennifer; Vogt, Holger
Conference Paper
2018New concept for post-CMOS pellistor integration
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018Penetrating nanoelectrodes for an electrical cell interface on CMOS ASIC
Allani, Sonja; Jupe, Andreas; Utz, Alexander; Schaal, Christopher; Rustom, Amin; Kappert, Holger; Vogt, Holger
Conference Paper
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Simulation results of prospective next generation 3D thermopile sensor and array circuitry options
Verheyen, Erik; Erbslöh, Andreas; Viga, Reinhard; Vogt, Holger
Journal Article
2018Thin film ALD materials as functional layer for 3D-integrated metal oxide gas-sensors
Knauß, Anna M.; Münchenberger, Finja M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Analysis of semiconductor process variations by means of hierarchical median polish
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Analytical model for thin-film SOI PIN-diode leakage current
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Goehlich, Andreas; Paschen, Uwe
Journal Article
2017Automating wafer-level test of uncooled infrared detectors using wafer-prober
Makhlouf, Mohamed; Goller, Diana; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Utz, Alexander; Weiler, Dirk; Vogt, Holger
Conference Paper
2017CMOS SiPM with integrated amplifier
Schwinger, Alexander; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Journal Article, Conference Paper, Poster
2017Elektro-optische Charakterisierung von Ferninfrarot-Bildaufnehmern mittels Bauelementetest in der Serienproduktion
Goller, Diana; Makhlouf, Mohamed; Utz, Alexander; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Weiler, Dirk; Vogt, Holger
Conference Paper
2017Entwicklung eines Hochtemperatur-Trench-Kondensators mit Hilfe von Methoden der Atomlagenabscheidung
Dietz, Dorothee
: Vogt, Holger (Erstgutachter); Fiedler, Horst-Lothar (Zweitgutachter)
Dissertation
2017Fabrication and electrochemical characterization of ruthenium nanoelectrodes
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Journal Article
2017Implementation of an integrated differential readout circuit for transistor-based physically unclonable functions
Willsch, Benjamin; Müller, Kai-Uwe; Zhang, Qi; Hauser, Julia; Dreiner, Stefan; Stanitzki, Alexander; Kappert, Holger; Kokozinski, Rainer; Vogt, Holger
Conference Paper
2017Optimization of transfer times in pinned photodiodes
Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Study of enzyme sensors with wide, adjustable measurement ranges for in-situ monitoring of biotechnological processes
Mross, Stefan; Zimmermann, Tom; Zenzes, Sebastian; Kraft, Michael; Vogt, Holger
Journal Article
2017Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Conference Paper
2017Ungekühlte Mikrobolometer-Arrays mit einer Pixelgröße von 12 µm basierend auf einer neuartigen thermisch isolierenden Struktur
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Lerch, Renee G.; Würfel, Daniel; Vogt, Holger
Journal Article
2017Untersuchung von dreidimensionalen Nanoelektroden für die intrazelluläre Kontaktierung auf integrierten Schaltungen
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2016ALD-based 3D-capacitors for harsh environments
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016CMOS-kompatible Nanotube-Mikrobolometer-Infrarot-Detektoren
Muckensturm, Kai-Marcel
: Vogt, Holger (Erstgutachter); Schmechel, Roland (Zweitgutachter)
Dissertation
2016Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Görtz, Michael; Vogt, H.
Conference Paper
2016Digital microfluidics for microchip-based cell sorting
Kahnert, Stefan; Schreiber, Fedor; Goehlich, Andreas; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Erni, Daniel; Küppers, Ralf; Vogt, Holger
Conference Paper
2016Entwicklung einer Mikrochip-navigierten Zellsortieranlage
Kahnert, Stefan
: Vogt, Holger (1. Gutachter); Erni, Daniel (2. Gutachter)
Dissertation
2016Entwicklung eines piezoresistiven Drucksensors für Hochtemperaturanwendungen auf Basis eines SOI-Substrats
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Andrei; Vogt, Holger
Conference Paper
2016Entwicklung und Untersuchung von Photodetektoren in einer Dünnfilm-SOI-Technologie
Schmidt, Andrei
: Vogt, Holger (Erstgutachter); Stöhr, Andreas (Zweitgutachter); Dreiner, Stefan (Betreuer)
Dissertation
2016Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2016HOT-300 - a multidisciplinary technology approach targeting microelectronic systems at 300 °C operating temperature
Vogt, Holger; Altmann, Frank; Braun, Sebastian; Celik, Yusuf; Dietrich, Lothar; Dietz, Dorothee; Dijk, Marius van; Dreiner, Stefan; Döring, Ralf; Gabler, Felix; Goehlich, Andreas; Hutter, Matthias; Ihle, Martin; Kappert, Holger; Kordas, Norbert; Kokozinski, Rainer; Naumann, Falk; Nowak, Torsten; Oppermann, Hermann; Partsch, Uwe; Petzold, Matthias; Roscher, Frank; Rzepka, Sven; Schubert, Ralph; Weber, Constanze; Wiemer, Maik; Wittler, Olaf; Ziesche, Steffen
Conference Paper
2016Integrated multi-sensor system for parallel in-situ monitoring of biotechnological processes
Mross, Stefan
: Vogt, Holger (1. Gutachter); Kraft, Michael (2. Gutachter)
Dissertation
2016Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites, cell density and pH in biotechnological processes
Mross, Stefan; Zimmermann, Tom; Winkin, Nadine; Kraft, Michael; Vogt, Holger
Journal Article
2016Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments
Gabler, Felix; Roscher, Frank; Döring, Ralf; Otto, Alexander; Ziesche, Steffen; Ihle, Martin; Celik, Yusuf; Dietz, Dorothee; Goehlich, Andreas; Kappert, Holger; Vogt, Holger; Naumann, Falk; Geßner, Thomas
Conference Paper
2016Measurement results of a 12 μm pixel size microbolometer array based on a novel thermally isolating structure using a 17 μm ROIC
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Würfel, Daniel; Lerch, Renee; Vogt, Holger
Conference Paper
2016Modeling of the charge transfer in a lateral drift field photo detector
Driewer, Adrian; Hosticka, Bedrich J.; Spickermann, Andreas; Vogt, Holger
Journal Article
2016Modellierung von 3D-Time-of-Flight-Sensoren und -Systemen
Driewer, Adrian
: Vogt, Holger (Gutachter); Waasen, Stefan van (Gutachter)
Dissertation
2016Nanostructures on CMOS-intelligent sensors and actuators by post processing
Goehlich, Andreas; Vogt, Holger
Conference Paper
2016Optimierung und Modellierung von Bauelementen in einer 0,35 μm-CMOS-Hochtemperaturtechnologie
Kelberer, Andreas
: Vogt, Holger (Gutachter); Fiedler, Horst-Lothar (Gutachter); Dreiner, Stefan (Betreuer)
Dissertation
2016Post-CMOS integrated ALD 3D micro- and nanostructures and application for multi-electrode arrays
Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016Post-CMOS integration of miniaturized solar cells for energy harvesting of autonomous sensor nodes
Stühlmeyer, Martin; Goehlich, Andreas; Figge, Martin; Vogt, Holger
Conference Paper
2016Statistical tests to determine spatial correlations in the response behavior of PUFs
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016Ungekühlte Mikrobolometer-Arrays mit einer Picelgröße von 12 μm basierend auf einer neuartigen thermischen isolierenden Struktur
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Lerch, Renee; Würfel, Daniel; Vogt, Holger
Conference Paper
2015ALD-basierte, monolithisch integrierte 3D-Nanostrukturen
Jupe, Andreas; Goehlich, Andreas; Feizi, Khadijeh; Vogt, Holger
Conference Paper
2015Beschleunigte Zuverlässigkeitsuntersuchung von Siliziumnitrid bei schmalbandiger UV-Bestrahlung
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2015Charakterisierung und Modellierung freistehender Silizium Membranen auf SOI-Basis für Drucksensor-Anwendungen
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Alexander; Vogt, Holger
Conference Paper
2015CMOS integrated miniaturized photovoltaic cells for autonomous sensor nodes: Simulations and experimental results
Goehlich, Andreas; Stühlmeyer, Martin; Vogt, Holger
Conference Paper
2015Entwicklung einer Mikrochip navigierten Zellsortieranlage
Kahnert, Stefan; Schreiber, Fedor; Erni, Daniel; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Küppers, Ralf; Vogt, Holger
Conference Paper
2015Entwicklung eines CMOS-integrierten massensensitiven Sensors zur Anwendung in der Biologie
Burmester, K.
: Vogt, H.; Beek, Teris A. van
Dissertation
2015Entwicklung eines hermetisch verkapselten mikrosystemtechnischen Drucksensorsystems für den Einsatz als Biosensor in wässrigen Medien
Gembaczka, Pierre
: Vogt, Holger (Gutachter); Kraft, Michael (Gutachter); Trieu, Hoc-Khiem (Gutachter)
Dissertation
2015Entwicklung von Hochtemperatur Trench-Kondensatoren unter Verwendung von dünnen ALD-Dielektrika
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
Conference Paper
2015Enzyme sensor with polydimethylsiloxane membrane and CMOS potentiostat for wide-range glucose measurements
Mross, Stefan; Fürst, Peter; Pierrat, Sebastien; Zimmermann, Tom; Vogt, Holger; Kraft, Michael
Journal Article
2015Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Conference Paper
2015Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Conference Paper, Journal Article
2015Failure mechanisms of microbolometer thermal imager sensors using chip-scale packaging
Elßner, Michael; Vogt, Holger
Journal Article, Conference Paper
2015High-temperature trench capacitors, using thin-film ALD dielectrics
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
Journal Article, Conference Paper
2015High-temperature trench capacitors, using thin-film ALD dielectrics
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger; Kappert, Holger
Conference Paper
2015Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites and cell mass in biotechnological processes
Mross, Stefan; Zimmermann, Tom; Winkin, Nadine; Kraft, Michael; Vogt, Holger
Journal Article, Conference Paper
2015Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael
Conference Paper
2015Large area CMOS photosensors for time-resolved measurements
Poklonskaya, Elena
: Vogt, Holger (Gutachter); Oehm, Jürgen (Gutachter)
Dissertation
2015Modeling of CMOS image sensors for time-of-flight applications
Driewer, Adrian; Hosticka, Bedrich J.; Spickermann, Andreas; Vogt, Holger
Conference Paper
2015Reliability of microbolometer thermal imager sensors using chip-scale packaging
Elßner, Michael; Vogt, Holger
Journal Article, Conference Paper
2015Thin-film SOI PIN-diode leakage current dependence on back-gate-potential and HCI traps
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2014CMOS integrated biosensor for the detection of biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Manova, Radostina K.; Scheres, Luc; Roeven, Esther; Trilling, Anke; Schmidt, Andreas; Hutten, Ulrike; Neureiter, Katrin; Pierrat, Sebastien; Beek, Teris A. van; Vogt, Holger
Abstract
2014Development of a microchip based cell sorting device
Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Goellner, B.; Michelsen, U.; Bartels, Frank; Schreiber, F.; Rennings, A.; Erni, Daniel
Abstract
2014Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
Gembaczka, Pierre; Görtz, Michael; Celik, Yusuf; Jupe, Andreas; Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger; Mokwa, Wilfried; Kraft, Michael
Journal Article
2014Hybrider Detektor zum Detektieren elektromagnetischer Strahlung
Romero, Daniel Durini; Brockherde, Werner; Vogt, Holger
Patent
2014Mikrobump-Entwicklung mit einem Pitch von 6 μm unter Verwendung eines Ionenstrahlätzprozesses
Heß, Jennifer
: Vogt, Holger (Betreuer); Schmechtel, Roland (Betreuer)
Dissertation
2014PECVD of poly-SiGe/Ge layers with increased total gas flow
Wang, Qiang; Goehlich, Andreas; Ruß, Marco; Yang, Pin; Vogt, Holger
Journal Article
2014Performance analysis of a large photoactive area CMOS line sensor for fast, time-resolved spectroscopy applications
Poklonskaya, Elena; Durini, Daniel; Jung, Melanie; Schrey, Olaf; Driewer, Adrian; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2014Reliability of CMOS on silicon-on-insulator for use at 250 °C
Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Journal Article
2014Uncooled digital IRFPA-family with 17µm pixel-pitch based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Weiler, Dirk; Hochschulz, Frank; Würfel, Daniel; Lerch, Renee G.; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Wang, Qiang; Vogt, Holger
Conference Paper
2014Zuverlässigkeitsuntersuchungen an einer hochtemperaturtauglichen SOI-CMOS-Technologie
Dreiner, Stefan; Grella, Katharina; Heiermann, Wolfgang; Kelberer, Andreas; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2013CMOS integrated free standing circular membrane for the detection of allergens and biomarkers
Burmester, Kim; Goehlich, Andreas; Celik, Yusuf; Schmidt, Alexander; Klieber, Robert; Haas, Norbert; Greifendorf, Dieter; Vogt, Holger
Conference Paper
2013CMOS kompatible, nanomodifizierte Multi-Elektroden-Arrays
Jupe, Andreas; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger
Conference Paper
2013CMOS-compatible ruggedized high temperature Lamb wave pressure sensor
Kropelnicki, Piotr; Muckensturm, Kai-Marcel; Mu, X. J.; Randles, A. B.; Cai, H.; Ang, W. C.; Tsai, J. M.; Vogt, Holger
Journal Article
2013Development of an universial allergen sensor system
Goehlich, Andreas; Burmester, Kim; Celik, Yusuf; Klieber, Robert; Greifendorf, Dieter; Haas, Norbert; Vogt, Holger
Conference Paper
2013Entwicklung einer Mikrochip navigierten Zellsortieranlage
Kahnert, Stefan; Goehlich, Andreas; Greifendorf, Dieter; Vogt, Holger; Lennartz, Klaus; Kirstein, Uwe; Goellner, B.; Michelsen, U.; Bartels, F.
Conference Paper
2013Entwicklung eines hochtemperaturfesten Kondensators für die Mikrosystemtechnik
Celik, Yusuf; Goehlich, Andreas; Jupe, Andreas; Vogt, Holger
Conference Paper
2013Far infrared digital IRFPA baed on uncooled microbolometer for automotive and military applications
Weiler, Dirk; Ruß, Marco; Würfel, Daniel; Lerch, Renee G.; Hochschulz, Frank; Wang, Qiang; Geruschke, Thomas; Heß, Jennifer; Vogt, Holger
Abstract
2013Flip-Chip Technologie für Anwendungstemperaturen > 250 °C
Heiermann, Wolfgang; Geruschke, Thomas; Ruß, Marco; Vogt, Holger
Conference Paper
2013Galvanik in der Mikrosystemtechnik
Vogt, Holger; Heiermann, Wolfgang; Heß, Jennifer
Journal Article
2013High temperature characterization up to 450°C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2013High temperature reliability investigations up to 350 °C of gate oxid capacitors realized in a Silicon-on-Insulator CMOS-technology
Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2013Hybrid sensor integration by wafer-to-wafer bonding
Stühlmeyer, Martin; Goehlich, Andreas; Vogt, Holger
Book Article
2013Integrierte Sensorstruktur
Vogt, Holger; Goehlich, Andreas; Jupe, Andreas
Patent
2013Reliability investigations up to 350°C of gate oxid capacitors realized in a Silicon-on-Insulator CMOS-technology
Grella, Katharina; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Journal Article
2013Speed considerations for LDPD based Time-of-Flight CMOS 3D image sensors
Süss, Andreas; Nitta, Christian; Spickermann, Andreas; Durini, Daniel; Varga, Gabor; Jung, Melanie; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger; Schwope, Stefan
Conference Paper
2013Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren
Görtz, Michael; Betz, Wolfgang; Mokwa, Wilfried; Vogt, Holger; Kraft, Michael
Conference Paper
2012Adaptive readout circuit for pinned and lateral drift-field photo diodes
Süss, Andreas; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2012CMOS-Back-End-of-Line-Prozesse für optische Bauelemente
Hochschulz, Frank
: Vogt, Holger (Referent); Tegude, Franz-Josef (Koreferent)
Dissertation
2012Direct integration of carbon nanotubes on CMOS with high-temperature tungsten metallization
Jupe, Andreas; Hoeren, André; Goehlich, Andreas; Meißner, Frank; Endler, Ingolf; Vogt, Holger
Conference Paper
2012High temperature characterization up to 450 °C of MOSFETs and basic circuits realized in a Silicon-on-Insulator (SOI) CMOS-technology
Grella, Katharina; Dreiner, Stefan; Schmidt, Alexander; Heiermann, Wolfgang; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Conference Paper
2012An improved electrical and thermal model of a microbolometer for electronic circuit simulation
Würfel, Daniel; Vogt, Holger
Journal Article, Conference Paper
2012Microelectromechanical implants: Encapsulation concepts and test procedures
Betz, Wolfgang; Trieu, Hoc-Khiem; Vogt, Holger
Abstract
2012A novel fully implantable wireless sensor system for monitoring hypertension patients
Cleven, Nina J.; Müntjes, Jutta A.; Fassbender, Holger; Urban, Ute; Görtz, Michael; Vogt, Holger; Gräfe, Maik; Göttsche, Thorsten; Penzkofer, Tobias; Schmitz-Rode, Thomas; Mokwa, Wilfried
Journal Article
2012Process window of thermosonic palladium wire bonding on electroplated gold layers for high temperature applications
Heiermann, Wolfgang; Heß, Jennifer; Geruschke, Thomas; Bauer, Jochen; Ruß, Marco; Kappert, Holger; Vogt, Holger
Presentation
2012Quantum efficiency determination of a novel CMOS design for fast imaging applications in the extreme ultraviolet
Herbert, Stefan; Banyay, Matus; Maryasov, Alexey; Hochschulz, Frank; Paschen, Uwe; Vogt, Holger; Juschkin, Larissa
Journal Article
2012Reducing the impact of process variations on the sensitivity of CMOS photodiodes
Hochschulz, Frank; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Book Article
2012Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
Heiermann, Wolfgang; Geruschke, Thomas; Grella, Katharina; Bartsch, M.; Borrmann, Thomas; Ruß, Marco; Vogt, Holger
Conference Paper
2012Sacrificial ion beam etching process for seed layer removal of 6 µm pitch CuSn micro bumps
Heß, Jennifer; Vogt, Holger
Conference Paper
2012Simulation method for LWIR radiation distribution using a visual ray-tracer
Utz, Alexander; Gendrisch, Lutz; Weiler, Dirk; Kolnsberg, Stephan; Vogt, Holger
Journal Article, Conference Paper
2012Untersuchung einer neuen Methode zur Integration von angebundenen Doppellipidschichten in CMOS-Strukturen zur Realisierung bioelektrischer Sensoren
Kißler, S.
: Vogt, H. (Prüfer)
Dissertation
2011Bestimmung der NETD von Fern-Infrarot Imagern auf Wafer-Level unter Umgebungsdruck in der Serienproduktion
Utz, A.; Gendrisch, L.; Brögger, D.; Weiler, D.; Vogt, H.
Conference Paper
2011CMOS photodiodes for narrow linewidth applications
Hochschulz, Frank; Dreiner, Stefan; Vogt, Holger; Paschen, Uwe
Conference Paper
2011CMOS-based EUV sensor
Hochschulz, F.; Paschen, U.; Vogt, H.
Book Article
2011Development of an uncooled 25µm pixel-pitch VGA-IRFPA
Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Heß, J.; Kropelnicki, P.; Vogt, H.
Conference Paper
2011A far infrared VGA detector based on uncooled microbolometers for automotive applications
Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Kropelnicki, P.; Heß, J.; Vogt, H.
Conference Paper
2011Flexible mikroelektromechanische Implantate für den chronischen Einsatz
Betz, W.
: Vogt, H. (Prüfer)
Dissertation
2011Hall-Sensor und Verfahren zu dessen Herstellung
Goehlich, A.; Trieu, H.K.; Vogt, H.
Patent
2011High temperature reliability investigations of EEPROM memory cells realised in Silicon-on-Insulator (SOI) technology
Grella, K.; Vogt, H.; Paschen, U.
Conference Paper
2011Improvements of a digital 25 µm pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massively parallel Sigma-Delta- ADC readout
Weiler, D.; Ruß, M.; Lerch, R.G.; Yang, P.; Bauer, J.; Heß, J.; Kropelnicki, P.; Vogt, H.
Conference Paper
2011Light switched plasma charging protection device for high-field characterization and flash memory protection
Sommer, S.P.; Paschen, U.; Figge, M.; Vogt, H.
Journal Article
2011Micro- and nanosystem technologies on CMOS
Vogt, H.; Ruß, M.
Book Article
2011Multiphysics simulations for the optimisation of CMOS processes for high precision optical measurement applications
Hochschulz, F.; Paschen, U.; Vogt, H.
Journal Article, Conference Paper
2011Neue CMOS-Bildsensoren erweitern Einsatzmöglichkeiten
Hochschulz, F.; Brockherde, W.; Vogt, H.; Paschen, U.
Journal Article
2011A new approach for detecting ionophore concentrations in tethered bilayer lipid membranes
Dierk, Sarah; Ünlübayir, Sinan; Trieu, Hoc-Khiem; Vogt, Holger; Köper, Ingo
Abstract
2011A novel mass sensitive sensor
Goehlich, A.; Jonville, C.; Klieber, R.; Mao, X.; Martens, K.; Jansen, T.; Trieu, H.-K.; Vogt, H.
Conference Paper
2011Piezoresistive pressure sensor, has substrate with insulation layer, and resistor element arranged in pressure-sensitive area of substrate, where resistor element is defined by portion of semiconductor layer arranged on insulation layer
Vogt, H.; Trieu, H.-K.; Goehlich, A.; Debusmann, K.
Patent
2011Sensor und Verfahren zum Herstellen eines Sensors
Kropelnicki, Piotr; Vogt, Holger; Weiler, Dirk
Patent
2011Simulating far-infrared scenarios with the radiance synthetic imaging system
Utz, A.; Gendrisch, L.; Vogt, H.
Journal Article
2011Simulation method for LWIR radiation distribution using a visual ray-tracer
Utz, A.; Gendrisch, L.; Weiler, D.; Kolnsberg, S.; Vogt, H.
Conference Paper
2011Telemetrisches Drucksensorsystem zur kontinuierlichen Blutdruckmessung im Herzen
Hennig, A.; Bögel, G. vom; Grabmaier, A.; Vogt, H.
Conference Paper
2011An uncooled VGA-IRFPA with novel readout architecture
Würfel, D.; Ruß, M.; Lerch, R.G.; Weiler, D.; Yang, P.; Vogt, H.
Journal Article
2010CMOS process enhancement for high precision narrow linewidth applications
Hochschulz, F.; Vogt, H.; Paschen, U.
Conference Paper
2010Customized mems process development. A pressure sensor for high temperature and high pressure applications
Goehlich, A.; Vogt, H.; Debusmann, K.; Trieu, H.-K.
Book Article
2010A digital 25 m pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massive parallel Sigma-Delta-ADC readout
Weiler, D.; Ruß, M.; Würfel, D.; Lerch, R.G.; Yang, P.; Bauer, J.; Vogt, H.
Conference Paper
2010Fabrication method for chip-scale-vacuum-packages based on a chip-to-wafer-process
Bauer, J.; Weiler, D.; Ruß, M.; Heß, J.; Yang, P.; Voß, J.; Arnold, N.; Vogt, H.
Conference Paper
2010Lateral drift-field photodiode for low noise, high-speed, large photoactive-area CMOS imaging applications
Durini, D.; Spickermann, A.; Mahdi, R.; Brockherde, W.; Vogt, H.; Grabmaier, A.; Hosticka, B.J.
Conference Paper, Journal Article
2010Multiphysics simulation for the optimisation of CMOS processes for high precision optical measurement applications
Hochschulz, F.; Paschen, U.; Vogt, H.
Conference Paper
2010A new DC-temperature model for a diode bolometer based on SOI-pin-diode test structures
Kropelnicki, P.; Vogt, H.
Conference Paper
2010Noise of short-time integrators for readout of uncooled infrared bolometer arrays
Würfel, D.; Weiler, D.; Hosticka, B.J.; Vogt, H.
Journal Article, Conference Paper
2009CMOS Post-Processing für kompakte, intelligente Mikrosysteme
Vogt, H.
Conference Paper
2009A fast WLR test for the evaluation of EEPROM endurance
Uhlemann, A.; Aal, A.; Vogt, H.
Conference Paper
2009In-vitro tests for biostability of materials for micro implants
Betz, W.; Trieu, H.-K.; Vogt, H.
Conference Paper
2009Indium-Tin-Oxide (ITO) layer integration in single-polysilicon standard CMOS processes to improve the CTE in photogate pixels
Durini, D.; Dreiner, S.; Vogt, H.
Conference Paper
2009Light switched plasma charging damage protection device allowing high field characterization
Sommer, S.P.; Paschen, U.; Figge, M.; Vogt, H.
Conference Paper
2009Monocrystalline diode bolometer made by low temperature direct wafer bonding
Kropelnicki, P.; Vogt, H.
Conference Paper
2009Simulation des Laserabgleichs von Dünnfilmwiderständen mit Widerstandsnetzwerk im Schaltungssimulator
Vogt, H.; Vogt, H.
Conference Paper
2008Films - Ein Programm zur Simulation von AR-Schichten
Vogt, H.
Conference Paper
2008Positive charge trapping induced by plasma charging damage in NMOS transistors
Sommer, S.P.; Paschen, U.; Vogt, H.
Conference Paper
2008Ti/Ni(80%)Cr(20%) thin-film resistor with a nearly zero temperature coefficient of resistance for integration in a standard CMOS process
Nachrodt, D.; Paschen, U.; Have, A. ten; Vogt, H.
Journal Article
2007The geometric design of microbolometer elements for uncooled focal plane arrays
Ruß, M.; Bauer, J.; Vogt, H.
Conference Paper
2007Herstellungsverfahren fuer ein gehaeustes Bauelement
Vogt, H.; Bauer, J.
Patent
2006SPICE modeling of resistive, diode, and pyroelectric bolometer cells
Vogt, H.
Conference Paper
2005200 mm conversion of IMS fab completed
Vogt, H.; Debusmann, K.; Awater, H.; Weyers, S.
Book Article
2005On the security of fair non-repudiation protocols
Gürgens, S.; Rudolph, C.; Vogt, H.
Journal Article
2004Cost-effective test, calibration and assembly infrastructure for turnkey integrated pressure sensors
Trieu, H.-K.; Köster, O.; Vogt, H.
Conference Paper
2004Medizinelektronik: Fraunhofer-Institut Mikroelektronische Schaltungen und Systeme
Vogt, H.
Conference Paper
2004A new method to determine the tool count of a semiconductor factory using FabSim
Vogt, H.
Conference Paper
2004Production of customer ICs at IMS
Vogt, H.; Paschen, U.
Book Article
2003Discrete-event simulation using systemC: Interactive semiconductor factory modeling with FabSim
Vogt, H.
Conference Paper
2003Lithography for 0.25 µm CMOS
Wickenbrock, J.; Vogt, H.
Book Article
2003On the security of fair non-repudiation protocols
Gürgens, S.; Rudolph, C.; Vogt, H.
Conference Paper
2003Synchronous discrete event simulation for fast and efficient simulation of a complete semiconductor factory
Vogt, H.
Conference Paper
2002Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.
Conference Paper
2002Investigation of the spatial distribution of current density and heat dissipation in high-power-semiconductor devices
Sauerland, F.; Paschen, U.; Vogt, H.
Conference Paper
2002Investigations on silicon thermal flow sensors with mesa structures
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.
Conference Paper
2002Microsystems flow sensor operated in thermal time-of-flight mode
Hariadi, I.; Trieu, H.-K.; Vogt, H.
Book Article
2002Modeling of microsystem flow sensor based on thermal time-of-flight mode
Hariadi, I.; Trieu, H.-K.; Vogt, H.
Conference Paper
2002New IMS Cleanroom for 0.25 µm CMOS
Vogt, H.
Book Article
2001Correcting organ motion artifacts in X-ray CT systems based on tracking of motion phase by the spatial overlap correlator. II. Experimental study
Dhanantwari, A.C.; Stergiopoulos, S.; Zamboglou, N.; Baltas, D.; Vogt, H.-G.; Karangelis, G.
Journal Article
2001Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.
Conference Paper, Journal Article
2001Trench technology for power devices
Vogt, H.
Book Article
2000Investigation of the properties of a single-chip potentiostat supporting three electrode cells for its operation with voltammetric and AC modes
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.
Conference Paper
2000Navigation System for Interstitial Brachytherapy
Straßmann, G.; Kolotas, C.; Heyd, R.; Walter, S.; Baltas, D.; Martin, T.; Vogt, H.; Ioannidis, G.; Sakas, G.; Zamboglou, N.
Journal Article
2000Optimization of vertical 600 and 1500 V SOI-ESTs with low on-state voltages
Steck, B.; Vogt, H.
Journal Article
2000Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Köster, O.; Schuhmann, W.; Vogt, H.; Mokwa, W.
Conference Paper
2000Smart power integration on SOI: thin and thick film (local) SOI processes and devices
Paschen, U.; Weyers, J.; Bentum, R. van; Steck, B.; Vogt, F.P.; Vogt, H.
Conference Paper
2000Strömungssensorkomponente
Kersjes, R.; Mokwa, W.; Zimmer, G.; Vogt, H.
Patent
1998Integrierte Leistungsschalterstruktur
Muetterlein, B.; Vogt, H.
Patent
1998Structural characterization of local SIMOX-substrates
Bentum, R.v.; Vogt, H.
Conference Paper
1997Single-chip class-E converter for compact fluorescent lamp ballast
Radecker, M.; Fiedler, H.-L.; Vogt, F.P.; Vogt, H.
Conference Paper
1997Smart power with 1200V DMOS
Vogt, F.P.; Vogt, H.; Radecker, M.; Fiedler, H.-L.
Conference Paper
1996A CMOS image sensor with combined analog nonvolatile storage capability
Aslam, A.; Brockherde, W.; Hosticka, B.J.; Vogt, H.; Zimmer, G.
Conference Paper
1996Entwicklung eines BICMOS-Smart-Power-Prozessor in lokaler SIMOX-Technologie
Weyers, J.; Rost, W.; Vogt, H.
Journal Article
1996An intelligent vertical trench DMOS on SIMOX-substrate
Vogt, F.P.; Vogt, H.; Brücker, J.; Zimmermann, C.; Richter, F.
Conference Paper
1996Mikroelektronik-Dienstleistungszentrum für den Technologietransfer in die mittelständische Wirtschaft
Vogt, H.
Book Article
1996Prozeßentwicklung und -transfer für MOS-Leistungsbauelemente
Vogt, F.P.; Vogt, H.
Book Article
1996Smart-Power-ICs für Automobilanwendungen
Zimmermann, C.; Fiedler, H.-L.; Vogt, F.P.; Vogt, H.
Book Article
1996Verfahren zum Herstellen eines vertikalen Leistungsbauelementes mit reduzierter Minoritaetstraegerlebensdauer in dessen Driftstrecke
Gassel, H.; Muetterlein, B.; Priefert, D.; Truong, D.N.; Vogt, H.
Patent
1995BELICHTUNGSVORRICHTUNG
Gehner, A.; Hess, G.; Kueck, H.; Vogt, H.
Patent
1995BELICHTUNGSVORRICHTUNG
Vogt, H.; Hess, G.; Gehner, A.; Kueck, H.
Patent
1995BELICHTUNGSVORRICHTUNG
Vogt, H.; Hess, G.; Gehner, A.; Kueck, H.
Patent
1995Low-Power-CMOS-Technologie auf Bulk- und SIMOX-Substrat
Raab, M.; Stephan, R.; Kück, H.; Vogt, H.
Book Article
1995Mikroelektronik-Ausbildung im Diplomstudiengang Elektrotechnik an der Gerhard-Mercator-Universität-GH Duisburg.
Vogt, H.
Book Article
1995Ein monolithischer PWM-Dimmer für Automobilanwendungen in SIMOX-Technologie
Zimmermann, C.; Fiedler, H.-L.; Vogt, F.P.; Vogt, H.; Müsch, E.
Conference Paper
1995Qualitätssicherungsstrategie bei der Kleinstserienfertigung von Wasserstoffsensoren auf der Basis von MOS-Bauelementen
Dura, H.-G.; Mokwa, W.; Vogt, H.
Conference Paper
1995Verfahren zum Herstellen einer Halbleiterstruktur fuer eine integrierte Leistungsschaltung mit einem vertikalen Leistungsbauelement
Gassel, H.; Muetterlein, B.; Vogt, H.; Zimmer, G.
Patent
1994Advanced SOI MOSFET for low voltage, low power and fast application
Stephan, Rolf; Raab, Michael; Kück, Heinz; Vogt, Holger
Conference Paper
1994Advantages and potential of SOI structures for smart sensors
Vogt, H.
Conference Paper
1994Entwicklung eines miniaturisierten Feuchtesensors auf der Basis der Silizium-Technologie
Werno, J.; Mokwa, W.; Steegmanns, A.; Vogt, H.
Book Article
1994Improvement of SIMOX buried oxide breakdown voltage by multiple step and multiple energy implantation
Gassel, H.; Vogt, H.
Conference Paper
1994Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Journal Article
1994Reduzierung des Wärmeverlustes von Si-Membranen durch Trenchisolierung
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Book Article
1994Verfahren zum Erzeugen einer isolierten, einkristallinen Siliziuminsel
Vogt, H.
Patent
1994Verfahren zum Erzeugen einer isolierten, einkristallinen Siliziuminsel
Vogt, H.
Patent
1993A bulk-JFET and CMOS/SIMOX technology for low noise, high speed charge-sensitive amplifier
Buttler, W.; Cesura, G.; Manfredi, P.F.; Re, V.; Speziali, V.; Burbach, G.; Vogt, H.
Conference Paper
1993Fabrication of sensors and microsystems on SIMOX substrates
Gottfried-Gottfried, R.; Köhler, R.; Kück, H.; Mokwa, W.; Vogt, H.
Conference Paper
1993An intelligent 600 V vertical IGBT on SIMOX substrate
Mütterlein, B.; Vogt, F.P.; Weyers, J.; Vogt, H.
Conference Paper
1993Intelligente Sensoren auf dem Weg zum ASIC
Vogt, H.
Journal Article
1993Mehrlagenmetallisierung für hochintegrierte mikroelektronische Schaltungen
Vogt, H.
Habilitation
1993Monolithischer Phasenabschnitt-Dimmer in 500-V-SIMOX-Technologie
Fiedler, H.-L.; Goldyn, D.; Hemming, E.; Mütterlein, B.; Rosch, R.; Vogt, F.P.; Vogt, H.; Zapp, R.
Conference Paper
1993Novel approach to defect etching in thin film silicon-on-insulator
Gassel, H.; Peter-Weidemann, J.; Vogt, H.
Journal Article
1993Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Conference Paper
1993SIMOX and wafer bonding, combination of competitors complements one another
Gassel, H.; Vogt, H.
Conference Paper
1993Smart power technology with dielectric insulation. Processes and applications
Vogt, H.
Journal Article
1993Smart power, neue Chancen durch intelligente Leistungshalbleiter
Vogt, H.; Vogt, F.P.; Mütterlein, B.
Book
1993Strahlungsresistente ICs. Technologie und Schaltungstechnik
Brockherde, W.; Vogt, H.
Book Article
1993Ein thermoelektrischer Infrarotsensor als Beispiel für den Einsatz von SIMOX-Substraten für die Herstellung von Sensoren und Mikrosystemen
Müller, M.; Köhler, R.; Gottfried-Gottfried, R.; Kück, H.; Mokwa, W.; Vogt, H.
Conference Paper
1993Verfahren zum Herstellen einer monokristallinen Siliziumschicht auf einem vergrabenen Dielektrikum
Gassel, H.; Vogt, H.
Patent
1992A 50 V smart power process with dielectric isolation by SIMOX
Vogt, H.; Weyers, J.
Conference Paper
199250V BCDMOS-Prozeß mit dielektrischer Isolation zur Herstellung intelligenter Leistungshalbleiter
Weyers, J.; Vogt, H.
Book Article
1992Geringes Gewicht, kleinste Abmessungen durch Integration auf kleinstem Raum
Mokwa, Wilfried; Vogt, Holger
Journal Article
1992Integration of vertical/quasivertical DMOS, CMOS and bipolar transistors in a 50V SIMOX process
Berger, M.; Mach, W.; Mütterlein, B.; Raab, M.; Richter, F.; Vogt, F.P.; Vogt, H.; Weyers, J.
Conference Paper
1992Integrierte Leistungsschalterstruktur
Muetterlein, B.; Vogt, H.
Patent
1992An intelligent 500 V power vertical DMOS on SIMOX substrate. Part 1
Mütterlein, B.; Vogt, F.P.; Vogt, H.
Conference Paper
1992An intelligent 500 V power vertical DMOS on SIMOX substrate. Part 2
Mütterlein, B.; Vogt, F.P.; Vogt, H.
Conference Paper
1992A miniature single chip pressure and temperature sensor
Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.; Vogt, H.
Conference Paper
1992A miniature single-chip pressure and temperature sensor
Kandler, Michael; Manoli, Yiannakis; Mokwa, Wilfried; Spiegel, Egbert; Vogt, Holger
Journal Article
1992Minimum oxygen dose for reliable application of SIMOX
Badenes, G.; Burbach, G.; Gassel, H.; Vogt, H.; Walter, A.
Conference Paper
1992Novel approach to defect etching in thin film SOI. Part 1
Gassel, H.; Peter-Weidemann, J.; Vogt, H.
Conference Paper
1992Novel approach to defect etching in thin film SOI. Part 2
Gassel, H.; Peter-Weidemann, J.; Vogt, H.
Conference Paper
1992Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H.
Conference Paper
1992SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 1
Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H.
Conference Paper
1992SIMOX, an efficient etch-stop to fabricate silicon membranes with well defined thickness. Part 2
Dura, H.-G.; Gassel, H.; Mokwa, W.; Vogt, H.
Conference Paper
1992Smart power technology with dielectric insulation. Processes and applications
Vogt, H.
Conference Paper
1991Characterization of CMOS-process using test chips and automatic test system
Pieczynski, J.; Vogt, H.
Conference Paper
1991High-quality SOI-substrates for CMOS transistors
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G.
Conference Paper
1991JFET-PMOS technology, in the design of monolithic preamplifier systems for multielectrode detectors
Buttler, Werner; Vogt, Holger; Lutz, Gerhard; Manfredi, Pier Francesco; Speziali, Valeria
Journal Article, Conference Paper
1991Measurement of SOI film thickness
Badenes, G.; Abel, H.B.; Burbach, G.; Gassel, H.; Vogt, H.
Conference Paper
1991Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H.
Conference Paper
1991Silicon-on-Insulator development in Europe
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G.
Journal Article
1991SIMOX-devices for analog circuits
Badenes, G.; Burbach, G.; Gassel, H.; Vogt, H.
Conference Paper
1991Verfahren zum Erzeugen einer isolierten, einkristallinen Siliziuminsel
Vogt, H.
Patent
1990Batch process for the production of single crystal silicon membranes by the use of SIMOX-wafers
Belz, J.; Dura, H.-G.; Mokwa, W.; Vogt, H.; Zimmer, G.
Conference Paper
1990Characterization of CMOS-devices and circuits build on SIMOX-substrates
Belz, J.; Burbach, G.; Pieczynski, J.; Vogt, H.
Conference Paper
1990Characterization of CMOS-devices and circuits build on SIMOX-substrates
Belz, J.; Burbach, G.; Pieczynski, J.; Vogt, H.
Conference Paper
1990CMOS-Technologie auf SIMOX-Wafern
Belz, J.; Burbach, G.; Gassel, H.; Peter-Weidemann, J.; Vogt, H.
Book Article
1990Integrierbare Kondensatorstruktur
Vogt, H.
Patent
1990Introduction to VLSI technology
Vogt, H.; Zimmer, G.
Conference Paper
1990Leistungsschalter für 500 V mit dielektrisch isolierter CMOS-Signalelektronik
Boguszewicz, R.; Burbach, G.; Fiedler, H.-L.; Mütterlein, B.; Vogt, F.P.; Vogt, H.
Journal Article
1990Leistungsschaltung mit einer integrierten CMOS- oder Bipolar-Schaltung und Verfahren zum Herstellen einer integrierten Schaltung
Vogt, H.
Patent
1990Smart-Power-Schalter mit integrierter, dielektrisch isolierter CMOS-Ansteuerung
Belz, J.; Boguszewicz, R.; Burbach, G.; Fiedler, H.-L.; Karl, R.; Mütterlein, B.; Stein, E.; Vogt, F.P.; Vogt, H.
Conference Paper
1990Temperature behaviour of CMOS devices built on SIMOX substrates
Zimmermann, W.; Belz, J.; Burbach, G.; Vogt, H.
Conference Paper
1990Trends in VLSI technologies
Lackmann, R.; Vogt, H.; Zimmer, G.
Conference Paper
1990Untersuchung und Entwicklung der CMOS-Technologie auf vergrabenem Isolator als einer neuen VLSI-Technologie. Berichtszeitraum 01.07.1987 - 31.09.1990. BMFT-Abschlußbericht 110620
Abel, H.B.; Gassel, H.; Belz, J.; Burbach, G.; Vogt, H.; Debusmann, K.; Peter-Weidemann, J.; Redlich, S.; Götzen, R.
Book
1989Automatic parameter extraction system with process failure diagnosis for CMOS process
Pieczinski, J.; Vogt, H.
Conference Paper
1989CMOS-Technologie auf SIMOX-Wafern
Belz, J.; Burbach, G.; Peter-Weidemann, J.; Vogt, H.
Book Article
1989CMOS/SOI-Technologie auf implantiert vergrabenem Isolator
Belz, J.; Burbach, G.; Vogt, H.; Zimmer, G.
Conference Paper
1989High quality silicon-on-insulator substrates by implanted oxygen ions
Belz, J.; Burbach, G.; Peter-Weidemann, J.; Vogt, H.; Zimmer, G.
Conference Paper
1989MESFETs in thin silicon on SIMOX
Vogt, Holger; Burbach, Gert; Belz, Joachim; Zimmer, Günter
Journal Article
1989Multi-Project-Chip Foundry Service
Herber, K.-H.; Vogt, H.
Book Article
1989Rauscharme und strahlungsfeste JFET - CMOS Auslese-Verstärker
Lutz, G.; Manfredi, P.F.; Buttler, W.; Vogt, H.
Conference Paper
1988MOSFET gas sensor with integrated temperature measurement and heating elements fabricated with standard CMOS technology
Dobos, K.; Mokwa, W.; Vogt, H.; Zhang, Y.; Zimmer, G.; Xiao, G.
Conference Paper
1988On the design of a JFET-CMOS front-end for low noise data acquisition from microstrip detectors
Lutz, G.; Maloberti, F.; Manfredi, P.F.; Speziali, V.; Buttler, W.; Vogt, H.
Journal Article
1987Characterization of buried silicon-nitride formed by nitrogen implantation
Beltz, J.; Vogt, H.; Kaat, E.H. te; Zimmer, G.
Journal Article
1987Development of CMOS-compatible p-channel junction-field-effect transistors for very low noise application
Skapa, H.; Stuch, D.; Vogt, H.; Zimmer, G.
Conference Paper
1987A technology concept for integrated detector electronics with CMOS compatible devices
Vogt, H.
Journal Article
1986Anwendung des Lasers zur Herstellung neuer Strukturen für die Mikroelektronik.
Vogt, H.; Zimmer, G.
Journal Article
1986Buried silicon nitride formed by nitrogen implantation
Vogt, H.; Beltz, J.; Zimmer, G.; Kaat, E.H. te
Conference Paper
1986The growth of buried silicon nitride formed by nitrogen implantation
Beltz, J.; Vogt, H.; Kaat, E.H. te; Zimmer, G.
Conference Paper
1986Hochdosisimplantation von Stickstoff in Silizium - Eine Technik zur Erzeugung von dielektrisch isolierten CMOS-Bauelementen mit hoher Integrationsdichte
Vogt, H.
Book
1986Optimization of contacts for CMOS
Vogt, H.; Gruber, V.; Zimmer, G.
Conference Paper
1985Characterization of CMOS compatible JFETs
Vogt, H.; Stein, E.; Zimmer, G.
Conference Paper
1985Material and interface characterisation of buried silicon nitride for SOI-IC technology
Belz, J.; Vogt, H.; Zimmer, G.; Kaat, E.H. te
Conference Paper
1985Technology for VLSI devices on ion implanted buried silicon nitride
Vogt, H.; Zimmer, G.
Conference Paper
1982DICMOS - novel MOS logic
Hosticka, Bedrich J.; Kleine, Ulrich; Vogt, Holger; Zimmer, Günter
Journal Article
1981Performance of a scaled Si gate n-well CMOS technology
Zimmer, Günter; Fiedler, Horst-Lothar; Höfflinger, Bernd; Neubert, E.; Vogt, Holger
Journal Article