Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20193D applicable ALD film for humidity detection
Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Characterization of the charge transfer in an enhanced pinned photodiode with a collection gate
Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
Conference Paper
2019Diamond like carbon as a hydrophobic material for electrowetting
Türk, Semih; Viga, Reinhard; Vogt, Holger
Conference Paper
2019Fabrication of partly encapsulated vertical nanoelectrodes for an intracellular microelectrode array
Allani, Sonja; Jupe, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermeticity of SI1-XGeX diaphragms for the fabrication of a capacitive post-CMOS pressure sensor
Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
Conference Paper
2019Measurement concept for direct time-of-flight sensors at high ambient light
Haase, Jan F.; Beer, Maik; Schrey, Olaf; Ruskowski, Jennifer; Brockherde, Werner; Vogt, Holger
Conference Paper
2019Mechanical test structures for the determination of normal stress in multilayer freestanding MEMS-membranes
Michel, Marvin D.; Vogt, Holger
Conference Paper
2019Modeling of thermal conductivity for a CMOS-compatible MEMS-ROIC contact by TiN nanotubes
Michel, Marvin D.; Vogt, Holger
Journal Article
2019Optimization of the dielectric layer for electrowetting on dielectric
Türk, Semih; Schug, Alexander; Viga, Reinhard; Jupe, Andreas; Vogt, Holger
Journal Article
2019Post-CMOS 3D-integration of a nanopellistor
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2019Wafer-Level-3D-Integrationsverfahren für hochsensitive optische Sensoren
Kalwa, Lukas; Gläsener, Stefan; Ruskowski, Jennifer; Figge, Martin; Kappert, Holger; Vogt, Holger
Conference Paper
2019With PECVD deposited poly-SiGe and poly-Ge forming contacts between MEMS and electronics
Wang, Qiang; Vogt, Holger
Journal Article
2018Analysis and simulation of super-hydrophobic layers for micro-fluidic applications
Türk, Semih; Jupe, Andreas; Viga, Reinhard; Vogt, Holger
Conference Paper
2018Decreasing the actuation voltage in electrowetting on dielectric with thin and micro-structured dielectric
Türk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger
Conference Paper
2018Development of a MEMS technology for the monolithic post-CMOS integration of capacitive pressure sensors
Walk, Christian
: Vogt, Holger (Erstgutachter); Mokwa, Wilfried
Dissertation
2018Development of a piezoelectric flexural plate-wave (FPW) bioMEMS-sensor for rapid point-of-care diagnostics
Jupe, Andreas; Livshits, Pavel; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Conference Paper
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Die-level patterning of parylene F by laser-ablation for further processing with ALD functional layers
Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
Conference Paper
2018Digital uncooled IRFPAs based on microbolometers with 17 μm and 12μm pixel pitch
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Kuhl, Andreas; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018Evaluation of a median threshold based EEPROM-PUF concept implemented in a high temperature SOI CMOS technology
Willsch, Benjamin; Heesen, Marius te; Hauser, Julia; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout
Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Würfel, Daniel; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger
Conference Paper
2018Multi object detection in direct Time-of-Flight measurements with SPADs
Haase, Jan F.; Beer, Maik; Ruskowski, Jennifer; Vogt, Holger
Conference Paper
2018New concept for post-CMOS pellistor integration
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Vogt, Holger
Conference Paper
2018Penetrating nanoelectrodes for an electrical cell interface on CMOS ASIC
Allani, Sonja; Jupe, Andreas; Utz, Alexander; Schaal, Christopher; Rustom, Amin; Kappert, Holger; Vogt, Holger
Conference Paper
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018Simulation results of prospective next generation 3D thermopile sensor and array circuitry options
Verheyen, Erik; Erbslöh, Andreas; Viga, Reinhard; Vogt, Holger
Journal Article
2018Thin film ALD materials as functional layer for 3D-integrated metal oxide gas-sensors
Knauß, Anna M.; Münchenberger, Finja M.; Dietz, Dorothee; Jupe, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Analysis of semiconductor process variations by means of hierarchical median polish
Willsch, Benjamin; Hauser, Julia; Dreiner, Stefan; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2017Analytical model for thin-film SOI PIN-diode leakage current
Schmidt, Andrei; Dreiner, Stefan; Vogt, Holger; Goehlich, Andreas; Paschen, Uwe
Journal Article
2017Automating wafer-level test of uncooled infrared detectors using wafer-prober
Makhlouf, Mohamed; Goller, Diana; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Utz, Alexander; Weiler, Dirk; Vogt, Holger
Conference Paper
2017CMOS SiPM with integrated amplifier
Schwinger, Alexander; Brockherde, Werner; Hosticka, Bedrich J.; Vogt, Holger
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017Development of micro electromechanical biosensor for fast detection of respiratory syncytial virus infections in newborns
Livshits, Pavel; Jupe, Andreas; Kahnert, Stefan; Figge, Martin; Mross, Stefan; Görtz, Michael; Vogt, Holger; Goehlich, Andreas
Journal Article, Conference Paper, Poster
2017Elektro-optische Charakterisierung von Ferninfrarot-Bildaufnehmern mittels Bauelementetest in der Serienproduktion
Goller, Diana; Makhlouf, Mohamed; Utz, Alexander; Gendrisch, Lutz; Kolnsberg, Stephan; Vogt, Franz; Weiler, Dirk; Vogt, Holger
Conference Paper
2017Entwicklung eines Hochtemperatur-Trench-Kondensators mit Hilfe von Methoden der Atomlagenabscheidung
Dietz, Dorothee
: Vogt, Holger (Erstgutachter); Fiedler, Horst-Lothar (Zweitgutachter)
Dissertation
2017Fabrication and electrochemical characterization of ruthenium nanoelectrodes
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Journal Article
2017Implementation of an integrated differential readout circuit for transistor-based physically unclonable functions
Willsch, Benjamin; Müller, Kai-Uwe; Zhang, Qi; Hauser, Julia; Dreiner, Stefan; Stanitzki, Alexander; Kappert, Holger; Kokozinski, Rainer; Vogt, Holger
Conference Paper
2017Integrierte thermoelektrische Struktur, Verfahren zur Herstellung einer integrierten thermoelektrischen Struktur, Verfahren zum Betrieb derselben als Detektor, thermoelektrischer Generator und thermoelektrisches Peltier-Element
Kleinfeld, Tobias; Verheyen, Erik; Vogt, Holger; Weiler, Dirk
Patent
2017Optimization of transfer times in pinned photodiodes
Girgenrath, Lutz; Hofmann, Martin; Kühnhold, Ralf; Vogt, Holger
Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Study of enzyme sensors with wide, adjustable measurement ranges for in-situ monitoring of biotechnological processes
Mross, Stefan; Zimmermann, Tom; Zenzes, Sebastian; Kraft, Michael; Vogt, Holger
Journal Article
2017Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Conference Paper
2017Ungekühlte Mikrobolometer-Arrays mit einer Pixelgröße von 12 µm basierend auf einer neuartigen thermisch isolierenden Struktur
Muckensturm, Kai-Marcel; Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Geruschke, Thomas; Wall, Simone; Heß, Jennifer; Lerch, Renee G.; Würfel, Daniel; Vogt, Holger
Journal Article
2017Untersuchung von dreidimensionalen Nanoelektroden für die intrazelluläre Kontaktierung auf integrierten Schaltungen
Allani, Sonja; Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Kappert, Holger; Vogt, Holger
Conference Paper
2016ALD-based 3D-capacitors for harsh environments
Dietz, Dorothee; Celik, Yusuf; Goehlich, Andreas; Vogt, Holger
Conference Paper
2016CMOS-kompatible Nanotube-Mikrobolometer-Infrarot-Detektoren
Muckensturm, Kai-Marcel
: Vogt, Holger (Erstgutachter); Schmechel, Roland (Zweitgutachter)
Dissertation
2016Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Görtz, Michael; Vogt, H.
Conference Paper
2016Digital microfluidics for microchip-based cell sorting
Kahnert, Stefan; Schreiber, Fedor; Goehlich, Andreas; Greifendorf, Dieter; Lennartz, Klaus; Kirstein, Uwe; Bartels, Frank; Janzyk, Udo; Rennings, Andreas; Erni, Daniel; Küppers, Ralf; Vogt, Holger
Conference Paper
2016Entwicklung einer Mikrochip-navigierten Zellsortieranlage
Kahnert, Stefan
: Vogt, Holger (1. Gutachter); Erni, Daniel (2. Gutachter)
Dissertation
2016Entwicklung eines piezoresistiven Drucksensors für Hochtemperaturanwendungen auf Basis eines SOI-Substrats
Goehlich, Andreas; Jupe, Andreas; Stühlmeyer, Martin; Celik, Yusuf; Schmidt, Andrei; Vogt, Holger
Conference Paper
2016Entwicklung und Untersuchung von Photodetektoren in einer Dünnfilm-SOI-Technologie
Schmidt, Andrei
: Vogt, Holger (Erstgutachter); Stöhr, Andreas (Zweitgutachter); Dreiner, Stefan (Betreuer)
Dissertation
2016Experimental reliability studies and SPICE simulation for EEPROM at temperatures up to 450°C
Kelberer, Andreas; Dreiner, Stefan; Grella, Katharina; Dittrich, Dirk; Kappert, Holger; Vogt, Holger; Paschen, Uwe
Journal Article
2016HOT-300 - a multidisciplinary technology approach targeting microelectronic systems at 300 °C operating temperature
Vogt, Holger; Altmann, Frank; Braun, Sebastian; Celik, Yusuf; Dietrich, Lothar; Dietz, Dorothee; Dijk, Marius van; Dreiner, Stefan; Döring, Ralf; Gabler, Felix; Goehlich, Andreas; Hutter, Matthias; Ihle, Martin; Kappert, Holger; Kordas, Norbert; Kokozinski, Rainer; Naumann, Falk; Nowak, Torsten; Oppermann, Hermann; Partsch, Uwe; Petzold, Matthias; Roscher, Frank; Rzepka, Sven; Schubert, Ralph; Weber, Constanze; Wiemer, Maik; Wittler, Olaf; Ziesche, Steffen
Conference Paper