Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Effect of pore structure of nanometer scale porous films on the measured elastic modulus
Vanstreels, K.; Wu, C.; Gonzalez, M.; Schneider, D.; Gidley, D.; Verdonck, P.; Baklanov, M.R.
Journal Article
2013Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films in Cu/low-k interconnects
Wojcik, H.; Hossbach, C.; Kubasch, C.; Verdonck, P.; Barbarin, Y.; Merkel, U.; Bartha, J.W.; Hübner, R.; Engelmann, H.-J.; Friedemann, M.
Journal Article
2009Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
Pfeffer, M.; Pfitzner, L.; Ocker, B.; Öchsner, R.; Ryssel, H.; Verdonck, P.
Conference Paper
2008Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
Prager, L.; Marsik, P.; Wennrich, L.; Baklanov, M.R.; Naumov, S.; Pistol, L.; Schneider, D.; Gerlach, J.W.; Verdonck, P.; Buchmeiser, M.R.
Conference Paper
2008Spectroscopic ellipsometry and ellipsometric porosimetry studies of CVD low-k dielectric films
Marsik, P.; Verdonck, P.; Schneider, D.; Roest, D. de; Kaneko, S.; Baklanov, M.R.
Conference Paper