Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2004Reactive pulsed magnetron sputtering of SiO2 - influence of process parameters on layer properties
Nyderle, R.; Kirchhoff, V.; Vanecek, R.; Sahm, H.
Conference Paper
2003Influences of pulse parameters on properties of optical coatings deposited by reactive pulsed magnetron sputtering
Vanecek, R.; Liebig, J.; Sahm, H.
Conference Paper