Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald
Presentation
2018Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Mikromechanische Bauelemente mit mechanischen Aktuatoren
Conrad, Holger; Gaudet, Matthieu; Schenk, Harald; Uhlig, Sebastian
Patent
2018Smart Medical Information Technology for Healthcare (SMITH)
Winter, Alfred; Stäubert, Sebastian; Ammon, Danny; Aiche, Stephan; Beyan, Oya; Bischoff, Verena; Daumke, Philipp; Decker, Stefan; Funkat, Gert; Gewehr, Jan E.; Greiff, Armin de; Haferkamp, Silke; Hahn, Udo; Henkel, Andreas; Kirsten, Toralf; Klöss, Thomas; Lippert, Jörg; Löbe, Matthias; Lowitsch, Volker; Maassen, Oliver; Maschmann, Jens; Meister, Sven; Mikolajczyk, Rafael; Nüchter, Matthias; Pletz, Mathias W.; Rahm, Erhard; Riedel, Morris; Saleh, Kutaiba; Schuppert, Andreas; Smers, Stefan; Stollenwerk, André; Uhlig, Stefan; Wendt, Thomas; Zenker, Sven; Fleig, Wolfgang; Marx, Gernot; Scherag, André; Löffler, Markus
Journal Article
2017A contribution to the expansion of the applicability of electrostatic forces in micro transducers
Schenk, H.; Conrad, H.; Gaudet, M.; Uhlig, S.; Kaiser, B.; Langa, S.; Stolz, M.; Schimmanz, K.
Conference Paper
2017Electrostactically in-plane driven silicon micropump for modular configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Electrostatic bending actuators with a liquid filled nanometer scale gap
Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald
Conference Paper
2017A novel electrostatic actuator technology for integrated RF MEMS and optical switches
Shashank; Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Poster
2017Technological aspects of a new micro‑electro‑mechanical actuation principle: Nano‑e‑drive
Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Gaudet, Matthieu; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article
2016Laser-induced periodic surface structures of thin, complex multi-component films
Reif, J.; Varlamova, O.; Ratzke, M.; Uhlig, S.
Journal Article
2016A novel electrostatic actuator class
Conrad, Holger; Kaiser, Bert; Gaudet, Matthieu; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article, Conference Paper
2016A novel electrostatic micro-actuator class and its application potential for optical MEMS
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus
Conference Paper
2015Purification and immunodetection of the complete recombinant HER-2[neu] receptor produced in yeast
Chamas, Alexandre; Giersberg, Martin; Friedrich, Katrin; Sonntag, Frank; Kunze, Dietmar; Uhlig, Steffen; Simon, Kirsten; Baronian, Keith; Kunze, Gotthard
Journal Article
2015Self-organized surface structures with ultrafast white-light: First investigation of LIPSS with supercontinuum
Uhlig, S.
Master Thesis
2014Mechanical characterization of glass frit bonded wafers
Vogel, K.; Wuensch, D.; Uhlig, S.; Froemel, J.; Naumann, F.; Wiemer, M.; Gessner, T.
Conference Paper
2012Detection of air trapping in chronic obstructive pulmonary disease by low frequency ultrasound
Morenz, Katrin; Biller, Heike; Wolfram, Frank; Leonhardt, Steffen; Ruter, Dirk; Glaab, Thomas; Uhlig, Stefan; Hohlfeld, Jens M.
Journal Article
2012Development of transfer Electrostatic Carriers (T-ESC®) for thin 300mm wafer handling using seal glass bonding technology
Balaj, I.; Raschke, R.; Baum, M.; Uhlig, S.; Wiemer, M.; Gessner, T.; Grafe, J.
Conference Paper
2012Influence of test speed on the bonding strength of glass frit bonded wafers
Vogel, K.; Wuensch, D.; Uhlig, S.; Froemel, J.; Naumann, F.; Wiemer, M.; Gessner, T.
Abstract
2012Neurally mediated airway constriction in human and other species
Schlepütz, M.; Rieg, A.D.; Seehase, S.; Spillner, J.; Perez-Bouza, A.; Braunschweig, T.; Schroeder, T.; Bernau, M.; Lambermont, V.; Schlumbohm, C.; Sewald, K.; Autschbach, R.; Braun, A.; Kramer, B.W.; Uhlig, S.; Martin, C.
Journal Article
2011Bronchoconstriction in nonhuman primates: A species comparison
Seehase, S.; Schlepütz, M.; Switalla, S.; Mätz-Rensing, K.; Kaup, F.J.; Zöller, M.; Schlumbohm, C.; Fuchs, E.; Lauenstein, H.-D.; Winkler, C.; Kuehl, A.R.; Uhlig, S.; Braun, A.; Sewald, K.; Martin, C.
Journal Article
2011Investigation of domain switching of PZT and KNN - based ceramics
Schönecker, A.J.; Nicolai, M.; Schlenkrich, F.; Henschke, T.; Uhlig, S.
Conference Paper
2011Mechanisms of bronchoconstriction in precision-cut lung slices of non-human primates are comparable to human
Seehase, Sophie; Schlepütz, M.; Switalla, Simone; Fuchs, E.; Kaup, F.-J.; Ressmeyer, A.R.; Uhlig, S.; Lauenstein, Hans-Dieter; Braun, Armin; Martin, C.; Sewald, Katherina
Conference Paper, Journal Article
2011New generation of electrostatic carrier technology (T-ESC) for reversible thin wafer clamping with seal glass bonding
Balaj, I.; Raschke, R.; Baum, M.; Uhlig, S.; Wiemer, M.; Gessner, T.
Abstract
2011Plasma-enhanced chemical vapour deposition of ZnO for photovoltaic TCO application
Kinski, I.; Schmidt, J.; Michaelis, A.; Uhlig, S.
Journal Article
2011Plasma-enhanced CVD of ZnO with varying doping levels on different substrates
Schmidt, J.; Kinski, I.; Michaelis, A.; Uhlig, S.
Presentation
2009Experimental investigation of non-linear behaviour of PZT piezoceramics at low temperatures
Nicolai, M.; Uhlig, S.; Schönecker, A.; Michaelis, A.
Conference Paper
2009Investigation of domain related topography formation during chemical mechanical polishing of piezoelectric ceramic material
Uhlig, S.; Nicolai, M.; Schönecker, A.; Michaelis, A.
Journal Article
2009Piezokeramische Fasern, Faserkomposite und LTCC-Module zur Integration in Leichtbaustrukturen
Scheithauer, U.; Flössel, M.; Uhlig, S.; Schönecker, A.; Gebhardt, S.; Michaelis, A.
Conference Paper
2008Concepts to control the relative permittivity (er) of nanoscaled inorganic-organic hybrid polymers for various applications in microelectronics
Domann, G.; Bahr, J.; Houbertz, R.; Uhlig, S.
Conference Paper
2008Ex vivo lung function measurements in precision-cut lung slices (PCLS) from chemical allergen-sensitized mice represent a suitable alternative to in vivo studies
Henjakovic, M.; Martin, C.; Hoymann, H.G.; Sewald, K.; Ressmeyer, A.R.; Dassow, C.; Pohlmann, G.; Krug, N.; Uhlig, S.; Braun, A.
Journal Article
2008Ex vivo testing of immune responses in precision-cut lung slices
Henjakovic, M.; Sewald, K.; Switalla, S.; Kaiser, D.; Müller, M.; Veres, T.Z.; Martin, C.; Uhlig, S.; Krug, N.; Braun, A.
Journal Article
2008Investigation of domain-related topography formation during chemical mechanical polishing (CMP) of piezoelectric ceramic material
Uhlig, S.
Conference Paper
2007Development of functional ceramic films for nano- and microsystems
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Meissner, F.; Michaelis, A.; Mayer-Uhma, T.; Uhlig, S.
Conference Paper
2006Advanced packaging materials for optical applications: Bridging the gap between nm-size structures and large-area panel processing
Houbertz, R.; Wolter, W.; Dannberg, P.; Serbin, J.; Uhlig, S.
Conference Paper
2006Development of functional ceramic films for nano and microsystems technology
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Mayer-Uhma, T.; Uhlig, S.
Conference Paper
2006Polymer optical interconnects - a scalable large-area panel processing approach
Uhlig, S.; Fröhlich, L.; Chen, M.; Arndt-Staufenbiel, N.; Lang, G.; Schröder, H.; Houbertz, R.; Popall, M.; Robertsson, M.
Journal Article
2006Preventing of dewetting effects for inorganic-organic hybrid polymers applied in sequentially buildup (SBU) technology without surface pretreatments
Uhlig, S.; Domann, G.; Houbertz, R.; Fröhlich, L.; Schröder, H.; Krissler, J.; Lang, G.; Robertsson, M.
Journal Article
2006Surfactant protein D inhibits early airway response in Aspergillus fumigatus-sensitized mice
Erpenbeck, V.J.; Ziegert, M.; Cavalet-Blanco, D.; Martin, C.; Bälder, R.; Glaab, T.; Braun, A.; Steinhilber, W.; Luettig, B.; Uhlig, S.; Hoymann, H.G.; Krug, N.; Hohlfeld, J.M.
Journal Article
2004Large-area processing of inorganic-organic hybrid polymers (ORMOCER®s) for optical backplane application
Uhlig, S.; Robertsson, M.; Schröder, H.; Lang, G.; Arndt-Staufenbiel, A.; Popall, M.; Fröhlich, L.; Houbertz, R.
Conference Paper
2003Microwave circuits in multilayer inorganic-organic polymer thin film technology on laminate substrates
Johansson, C.; Uhlig, S.; Tageman, O.; Alping, A.; Haglund, J.; Robertsson, M.; Popall, M.; Fröhlich, L.
Journal Article