Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013In-line deposition of silicon-based films by hot-wire chemical vapor deposition
Schäfer, L.; Harig, T.; Höfer, M.; Laukart, A.; Borchert, D.; Keipert-Colberg, S.; Trube, J.
Journal Article, Conference Paper
2001Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Conference Paper, Journal Article
2000Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Conference Paper
1992Diamond membranes for X-ray masks
Löchel, B.; Schliwinski, H.-J.; Huber, H.-L.; Trube, J.; Klages, C.-P.; Lüthje, H.; Schäfer, L.
Conference Paper
1992In situ temperature and distortion measurements of x-ray masks during SR-lithography
Trube, J.; Bernt, H.; Engler, K.; Huber, H.-L.
Conference Paper
1990Anwendung organischer Resistmaterialien in der Synchrotronlithographie
Heuberger, A.; Trube, J.
Journal Article
1990Infrared-measurement of X-ray mask heating during SR-lithography
Trube, J.; Huber, H.-L.; Mourikis, S.; Koch, E.E.; Bernstoff, S.
Conference Paper
1990Procedure and results of mask fabrication via X-ray lithography
Grimm, J.; Trube, J.; Huber, H.-L.
Conference Paper
1989Application of pulse plating to form lead absorber patterns for x-ray masks
Löchel, B.; Trube, J.; Windbracke, W.; Huber, H.-L.
Journal Article
1989Negative-tone high-resolution photocatalytic resist for X-ray lithography
Huber, H.-L.; Oertel, H.; Trube, J.; Dammel, R.; Dössel, K.F.; Lingnau, J.; Theis, J.
Journal Article
1988Subhalf micron critical dimension control in X-ray lithography mask technology
Mescheder, U.; Mund, F.; Trube, J.; Windbracke, W.; Huber, H.-L.; Pongratz, S.
Conference Paper
1987Application of lead electroplating for X-ray absorber patterning
Trube, J.; Huber, H.-L.; Löchel, B.; Windbracke, W.
Journal Article
1987Temperaturänderungen von Silizium-Membranen durch Absorption von Röntgenstrahlung
Trube, J.; Huber, H.-L.
Abstract