Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Kontaminationsabweisender Spiegel und Verfahren zu dessen Herstellung
Schröder, Sven; Felde, Nadja; Coriand, Luisa; Trost, Marcus; Notni, Gunther
Patent
2015Origins of light scattering from thin film coatings
Schröder, Sven; Trost, Marcus; Garrick, Méabh; Duparré, Angela; Cheng, Xinbin; Zhang, Jinlong; Wang, Zhanshan
Journal Article
2015Sub-aperture EUV collector with dual-wavelength spectral purity filter
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, F.; Laubis, C.
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Scattering reduction through oblique multilayer deposition
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Cheng, Xinbin; Zhang, Jinlong; Duparré, Angela
Journal Article
2013Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John
Conference Paper
2013Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Evaluation of subsurface damage by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schmitz, David; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Journal Article
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Scattering reduction through oblique multilayer deposition
Trost, Marcus; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Duparré, Angela
Conference Paper
2013Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Trost, Marcus; Schröder, Sven; Duparré, Angela; Risse, Stefan; Feigl, Torsten; Zeitner, Uwe D.; Tünnermann, Andreas
Journal Article
2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela
Conference Paper
2012Light scattering-based measurement of relevant surface roughness
Schröder, Sven; Trost, Marcus; Coriand, Luisa; Duparré, Angela
Conference Paper
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2012Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Verfahren zur hochempfindlichen Streulichtmessung
Trost, Marcus; Schröder, Sven; Herffurth, Tobias
Patent
2012Vorrichtung und Verfahren zur winkelaufgelösten Streulichmessung
Trost, Marcus; Schröder, Sven; Hauptvogel, Matthias; Nothni, G.; Duparré, Angela; Feigl, T.
Patent