Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Assessing surface imperfections of freeforms using a robotic light scattering sensor
Herffurth, T.; Trost, M.; Beier, M.; Steinkopf, R.; Heidler, N.; Pertermann, T.; Schröder, S.
Journal Article
2018Angular resolved power spectral density analysis for improving mirror manufacturing
Pertermann, T.; Hartung, J.; Beier, M.; Trost, M.; Schröder, S.; Risse, S.; Eberhardt, R.; Tünnermann, A.; Gross, H.
Journal Article
2018Roughness and Scatter in Optical Coatings
Trost, M.; Schröder, S.
Conference Paper
2018Simulation of defect-induced scattering in multilayer coatings
Zhang, L.; Zhang, J.; Schröder, S.; Trost, M.; Jiao, H.; Wang, Z.; Cheng, X.
Conference Paper
2017Light scattering characterization of optical components for space applications
Hauptvogel, M.; Trost, M.; Costille, A.; Penka, D.; Zeitner, U.D.; Schröder, S.; Duparré, A.
Conference Paper
2017Light scattering techniques for the characterization of optical components
Hauptvogel, M.; Schröder, S.; Herffurth, T.; Trost, M.; Finck, A. von; Duparré, A.; Weigel, T.
Conference Paper
2017Reducing light scattering in high-reflection coatings through destructive interference at fully correlated interfaces
Zhang, J.; Wu, H.; Jiao, H.; Schröder, S.; Trost, M.; Wang, Z.; Cheng, X.
Journal Article
2017Scattering properties of hot isostatic pressed multispectral zinc sulfide
Trost, M.; Felde, N.; Schröder, S.; Joseph, S.; Shienmann, A.
Conference Paper
2017Spectral laser damage testing of optical materials
Schröder, S.; Garrick, M.; Munser, A.-S.; Trost, M.
Journal Article
2017Surface characterization of high-end optical components using light scattering
Schröder, S.; Trost, M.; Herffurth, T.; Hauptvogel, M.; Sachkov, M.E.; Zhupanov, V.G.
Conference Paper
2016Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering
Trost, M.; Schröder, S.; Yulin, S.; Duparre, A.
Conference Paper
2016Scatter reduction of calcium fluoride based DUV optics
Wang, J.; Cangemi, M.J.; Oudard, J.F.; Trost, M.; Herffurth, T.; Schröder, S.; Duparre, A.
Conference Paper
2016Spectral damage testing of thin film coatings
Schröder, S.; Garrick, M.; Trost, M.; Wilbrandt, S.; Stenzel, O.; Duparre, A.
Conference Paper
2015Angle resolved backscatter of HfO2/SiO2 multilayer mirror at 1064 nm
Wang, J.; Schröder, S.; Trost, M.; Hauptvogel, M.; Duparre, A.
Conference Paper
2015Origins of light scattering from thin film coatings
Schröder, Sven; Trost, Marcus; Garrick, Méabh; Duparré, Angela; Cheng, Xinbin; Zhang, Jinlong; Wang, Zhanshan
Journal Article
2015Parallelized multichannel BSDF measurements
Finck, A. von; Trost, M.; Schröder, S.; Duparré, A.
Journal Article
2015Sub-aperture EUV collector with dual-wavelength spectral purity filter
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, F.; Laubis, C.
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Scattering reduction through oblique multilayer deposition
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Cheng, Xinbin; Zhang, Jinlong; Duparré, Angela
Journal Article
2013Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John
Conference Paper
2013Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Evaluation of subsurface damage by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schmitz, David; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Journal Article
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Scattering reduction through oblique multilayer deposition
Trost, Marcus; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Duparré, Angela
Conference Paper
2013Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Trost, Marcus; Schröder, Sven; Duparré, Angela; Risse, Stefan; Feigl, Torsten; Zeitner, Uwe D.; Tünnermann, Andreas
Journal Article
2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela
Conference Paper
2012Light scattering-based measurement of relevant surface roughness
Schröder, Sven; Trost, Marcus; Coriand, Luisa; Duparré, Angela
Conference Paper
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2012Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Verfahren zur hochempfindlichen Streulichtmessung
Trost, Marcus; Schröder, Sven; Herffurth, Tobias
Patent
2012Vorrichtung und Verfahren zur winkelaufgelösten Streulichmessung
Trost, Marcus; Schröder, Sven; Hauptvogel, Matthias; Nothni, G.; Duparré, Angela; Feigl, T.
Patent
2011Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E.
Conference Paper
2011Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2011Nickel plated metal mirrors for advanced applications
Gebhardt, A.; Scheiding, S.; Kinast, J.; Risse, S.; Duparré, A.; Trost, M.; Rohloff, R.-R.; Schönherr, V.; Giggel, V.; Löscher, H.
Conference Paper
2011Rauheitsbewertung auf fertigungsrelevanten Oberflächen mittels Streulichtverfahren
Duparré, A.; Trost, M.
Conference Paper
2011Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Conference Paper
2010Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: Measurement and analysis
Schröder, S.; Herffurth, T.; Trost, M.; Duparre, A.
Journal Article
2010Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N.
Conference Paper
2010Bewertung der Poliergüte schwer zugänglicher Oberflächen durch Streulichtmethoden
Schröder, S.; Trost, M.; Herffurth, T.; Duparré, A.
Abstract
2010Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.
Conference Paper
2010Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N.
Journal Article
2010Roughness measurement of ultra precision surfaces using light scattering techniques and analysis
Herffurth, T.; Schröder, S.; Trost, M.; Duparre, A.
Conference Paper
2009Roughness determination of ultra thin multilayer coatings in cross-section images with poor SNR using edge localization
Brauer-Burchardt, C.; Schröder, S.; Trost, M.; Kuhmstedt, P.; Duparre, A.; Notni, G.
Conference Paper
1998Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Efficient design and optimization of a silicon capacitive accelerometer by integrating commercial simulation tools
Trost, M.; Nagler, O.; Lindmair, N.; Hillerich, B.; Kozlowski, F.
Conference Paper
1997Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.
Conference Paper