Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Functional nano patterns realized by aligned nano imprint lithography
Baum, M.; Besser, J.; Wiemer, M.; Thanner, C.; Kreindl, G.; Wimplinger, M.; Gessner, T.
Conference Paper
2012Thermal and UV nanoimprint lithography for applications from the micro to the nano scale
Besser, J.; Baum, M.; Wiemer, M.; Gessner, T.; Sanchez-Ordonez,S.; Thanner, C.; Vetter, C.
Conference Paper
2007Adhesive wafer bonding for wafer-level fabrication of microring resonators
Dragoi, V.; Mittendorfer, G.; Thanner, C.; Alexe, M.; Pintilie, L.; Hamacher, M.; Heidrich, H.
Journal Article
2007III/V wafer bonding technology for wafer-level fabrication of GaInAsP/InP microring resonators
Dragoi, V.; Mittendorfer, G.; Thanner, C.; Lindner, P.; Alexe, M.; Pintilie, L.; Hamacher, M.; Heidrich, H.
Conference Paper
2006Wafer-level fabrication of microring resonators using adhesive wafer bonding
Dragoi, V.; Mittendorfer, G.; Thanner, C.; Lindner, P.; Alexe, M.; Pintilie, L.; Hamacher, M.; Heidrich, H.
Conference Paper