Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Photocatalytic TiO2 films deposited by reactive magnetron sputtering with unipolar pulsing and plasma emission control systems
Ohno, S.; Takasawa, N.; Sato, Y.; Yoshikawa, M.; Suzuki, K.; Frach, P.; Shigesato, Y.
Journal Article, Conference Paper, Journal Article
2006Silicon nitride thin film with low absorption deposited by high rate reactive pulse magnetron sputtering
Shoji, H.; Fukagawa, T.; Kato, Y.; Bartzsch, H.; Suzuki, K.; Ohno, S.; Takasawa, N.; Sato, Y.; Yoshikawa, M.
Conference Paper
2004Ultra high-rate deposition of photocatalytic TiO2 films by reactive magnetron sputtering with unipolar pulsing and plasma emission control systems
Takasawa, N.; Ohno, S.; Sato, D.; Song, P.K.; Yoshikawa, M.; Suzuki, K.; Frach, P.; Shigesato, Y.
Conference Paper