| | |
|---|
| 2012 | Condensation on the outside surface of window glazing
Gläser, H.J.; Ulrich, S.; Szyszka, B. | Conference Paper |
| 2012 | ITO replacements. Insulator-metal-insulator layers
Szyszka, B. | Book Article |
| 2012 | p-TCOs für transparente Elektronik
Schulz, C.; Ulrich, S.; Szyszka, B. | Journal Article |
| 2012 | Parallel particle-in-cell Monte-Carlo algorithm for simulation of gas discharges under PVM and MPI
Schwanke, C.; Pflug, A.; Siemers, M.; Szyszka, B. | Conference Paper |
| 2012 | Process development for sputtering of p-type TCOs, namely Cu-Al-O mixtures
Schulz, C.; Balmer, C.; Szyszka, B. | Conference Paper |
| 2012 | Recent developments in the field of transparent conductive oxide films for spectral selective coatings, electronics and photovoltaics
Szyszka, B.; Dewald, W.; Gurram, S.K.; Pflug, A.; Schulz, C.; Siemers, M.; Sittinger, V.; Ulrich, S. | Journal Article, Conference Paper |
| 2011 | Evaluation of textured TCOs for a-SI:H/µc-SI:H thin film solar cells by angular resolved light scattering measurements
Dewald, W.; Sittinger, V.; Szyszka, B.; Wippler, D.; Hüpkes, J.; Obermeyer, P.; Hamelmann, F.; Stiebig, H.; Säuberlich, F.; Severin, D.; Klein, S.; Rohde, M.; Schmidt, U. | Conference Paper |
| 2011 | In-line processing of hot wire CVD a-SI:H solar cells using different ZnO:Al morphologies as front contact
Sittinger, V.; Laukart, A.; Harig, T.; Höfer, M.; Dewald, W.; Britze, C.; Schäfer, L.; Szyszka, B.; Bräuer, G. | Conference Paper |
| 2011 | Influence of process parameter and magnetic field strength on DC magnetron sputtered ZnO:Al films from ceramic targets
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B. | Conference Paper |
| 2011 | Kratz-und korrosionsfeste Beschichtungen auf komplexen 3D-Bauteilen: Atomic layer deposition
Szyszka, B.; Tholense, H. | Journal Article |
| 2011 | Magnetron sputtering and its applications
Bräuer, G.; Bandorf, R.; Bewilogua, K.; Diehl, W.; Szyszka, B.; Vergöhl, M. | Conference Paper |
| 2011 | MINERVA - a project for the development of an ultra resistant coating on PC for automotive use
Matthai, A.; Bangert, S.; Grünhagel, O.; Hangleiter, B.; Schulz, U.; Szyszka, B. | Journal Article |
| 2011 | Moderne Glasanwendungen
Szyszka, B. | Journal Article |
| 2011 | Neue Produktionstechnik für leitfähige Schichten auf Glas
Szyszka, B.; Sittinger, V.; Ulrich, S.; Beontoro, W.; Werner, W. | Journal Article |
| 2011 | New approach towards an optimized light trapping morphology of Al-doped ZnO films
Sittinger, V.; Dewald, W.; Szyszka, B.; Säuberlich, F.; Stannowski, B. | Journal Article |
| 2011 | Organic photovoltaic solar cells using thin tungsten oxide as interlayer anode contact material
Ulrich, S.; Rösch, R.; Neubert, T.; Mushin, B.; Szyszka, B.; Gobsch, G.; Hoppe, H. | Conference Paper |
| 2011 | Particle-in-cell Monte Carlo simulation for process analysis and development
Siemers, M.; Pflug, A.; Schwanke, C.; Szyszka, B. | Conference Paper |
| 2011 | Reactive magnetron sputtering of ZnO:Al
Sittinger, V.; Dewald, W.; Szyszka, B.; Ruske, F. | Journal Article |
| 2011 | Simulation of plasma potential and ion energies in magnetron sputtering
Pflug, A.; Siemers, M.; Schwanke, C.; Febty Kurnia, B.; Sittinger, V.; Szyszka, B. | Journal Article |
| 2010 | 8th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings
: Kondruweit, S.; Szyszka, B.; Pütz, J. | Conference Proceedings |
| 2010 | Angular resolved light scattering of structured TCOs for the application in a-Si:H/µc-Si:H solar cells
Dewald, W.; Sittinger, V.; Szyszka, B.; Gordijn, A.; Hüpkes, J.; Hamelmann, F.; Stiebig, H.; Säuberlich, F. | Conference Paper |
| 2010 | Development of new transparent conductors and device applications utilizing a multidisciplinary approach
Szyszka, B.; Löbmann, P.; Georg, A.; May, C.; Elsässer, C. | Journal Article, Conference Paper |
| 2010 | Dünnschicht-Photovoltaik in Deutschland
Sittinger, V.; Diehl, W.; Szyszka, B. | Journal Article |
| 2010 | Gepulste Plasmen für industrielle Beschichtungsprozesse
Bräuer, G.; Szyszka, B.; Bandorf, R.; Bewilogua, K.; Brand, J.; Vergöhl, M. | Conference Paper |
| 2010 | Heat treatable TCO film for position 1 based on HiPIMS
Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B. | Conference Paper |
| 2010 | In-Situ Messaufbau für den Einsatz in Beschichtungsanlagen
Szyszka, B.; Pflug, A.; Rademacher, D.; Vergöhl, M. | Patent |
| 2010 | Large area DC sputtered zinc oxide front TCO for a-Si/µc-Si tandem modules
Ring, S.; Säuberlich, F.; Wendelmuth, T.; Sittinger, V.; Szyszka, B. | Conference Paper |
| 2010 | Magnetron sputtering. Milestones of 30 years
Bräuer, G.; Szyszka, B.; Vergöhl, M.; Bandorf, R. | Conference Paper, Journal Article |
| 2010 | Minerva. A project for the development of an ultra resistant coating on PC for automotive use
Matthai, A.; Bangert, S.; Grünhagel, O.; Hangleiter, B.; Schulz, U.; Szyszka, B. | Conference Paper |
| 2010 | New approach towards an optimized light trapping morphology of Al-doped ZnO films
Sittinger, V.; Dewald, W.; Szyszka, B.; Säuberlich, F.; Stannowski, B. | Conference Paper |
| 2010 | Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films
Sittinger, V.; Ruske, F.; Pflug, A.; Pflug, A.; Dewald, W.; Szyszka, B.; Dittmar, G. | Journal Article |
| 2010 | Pathways towards p-type oxide layers for optoelectronic applications
Szyszka, B.; Polenzky, C.; Loebmann, P.; Götzendorfer, S.; Elsaesser, C.; Körner, W. | Conference Paper |
| 2010 | Patterned deposition of transparent and conductive layers - new pathways towards cost efficient manufacturing techniques
Szyszka, B.; May, C.; Götzendörfer, S.; Ulrich, S.; Polenzky, C.; Ruppel, L.; Thomas, M.; Klages, C.-P.; Löbmann, P. | Conference Paper |
| 2010 | Preparation and characterization of Cu'Me"'
Polenzky, C.; Ortner, K.; Szyszka, B. | Conference Paper |
| 2010 | Preparation of photocatalytic TiO2-coatings by hollow cathode gas-flow sputtering
Koeßler, D.; Ortner, K.; Höfer, M.; Szyszka, B.; Jung, T. | Conference Paper |
| 2010 | Rotatable target serial co-sputtering
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S.; Vergöhl, M.; Werner, W.; Kaiser, A.; Jung, S.; Bringmann, U.; Bräuer, G.; Köhl, D.; Austgen, M.; Wuttig, M.; Weis, H.; Herwig, W.; Polle, A.; Herlitze, L. | Conference Paper |
| 2010 | Seebeck effect of as-grown and micro-structured metallic (Zn,Al)O
Homm, G.; Teubert, J.; Henning, T.; Klar, P.J.; Szyszka, B. | Journal Article |
| 2010 | Simulation von Plasma-Beschichtungsprozessen
Pflug, A.; Siemers, M.; Schwanke, C.; Szyszka, B. | Journal Article |
| 2010 | Sputteryield-Amplification. Ein lange bekannter, doch bisher kaum genutzter Effekt zur Ratenerhöhung von Sputterprozessen
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S. | Journal Article |
| 2010 | Transparent conducting oxide deposition techniques for thin-film photovoltaics
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B.; Ruske, F. | Journal Article |
| 2010 | Transport properties of microstructured MF-sputtered Zn 0.98Al0.02O
Piechotka, M.; Elm, M.T.; Henning, T.; Szyszka, B.; Meyer, B.K.; Klar, P.J. | Journal Article |
| 2010 | Übersicht über die Einsatzgebiete und Anwendungen von transparent leitfähigen Oxiden (TCOs)
Sittinger, V.; Szyszka, B.; Ulrich, S.; Pflug, A.; Ruske, F.; Dewald, W. | Journal Article |
| 2009 | Anordnung umfassend eine transparente elektrisch leitfaehige Schicht, Anordnung umfassend eine photoelektrische Vorrichtung und Verfahren zur Herstellung einer transparenten Elektrode
Säuberlich, F.; Stannowski, B.; Wendelmuth, T.; Sittinger, V.; Szyszka, B. | Patent |
| 2009 | Comparison of different ceramic Al-doped ZnO target materials
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B. | Journal Article |
| 2009 | Comparison of SNO2:F based transparent conductive oxides for use in a-Si:H/µc-Si:H solar cells
Ulrich, S.; Dewald, W.; Szyszka, B. | Conference Paper |
| 2009 | Deposition of amorphous silicon films by gas flow sputtering (GFS)
Mahrholz, J.; Shikolenko, S.; Szyszka, B.; Jung, T. | Conference Paper |
| 2009 | Design tools and simulations for plasma processing in large area coaters
Pflug, A.; Siemers, M.; Szyszka, B. | Conference Paper |
| 2009 | Heat treatable indium tin oxide films deposited with high power pulse magnetron sputtering
Horstmann, F.; Sittinger, V.; Szyszka, B. | Conference Paper, Journal Article |
| 2009 | Heat treatable TCO film for position 1 based on HiPIMS
Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B. | Conference Paper |
| 2009 | Influence of strong magnetic fields on the growth of DC magnetron sputtered ZNO:Al films from a ceramic target
Dewald, W.; Sittinger, V.; Werner, W.; Szyszka, B. | Conference Paper |
| 2009 | Large area deposition of Al-doped ZnO for Si-based thin film solar cells by magnetron sputtering
Sittinger, V.; Dewald, W.; Szyszka, B. | Conference Paper |
| 2009 | Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren
Pflug, A.; Siemers, M.; Sittinger, V.; Szyszka, B.; Ulrich, S. | Patent |
| 2009 | A multidisciplinary approach towards advanced transparent conductive electrodes
Szyszka, B.; Georg, A.; Löbmann, P.; May, C.; Elsaesser, C. | Conference Paper |
| 2009 | A multidisciplinary approach towards novel conductive electrodes for PV applications
Szyszka, B.; Löbmann, P.; Götzendörfer, S.; Georg, A.; Borchert, D.; Elsässer, C.; Körner, W.; May, C. | Conference Paper |
| 2009 | Optical modeling of free electron behavior in highly doped ZnO films
Ruske, F.; Pflug, A.; Sittinger, V.; Szyszka, B.; Greiner, D.; Rech, B. | Journal Article |
| 2009 | Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/µc-Si:H solar cells
Dewald, W.; Sittinger, V.; Werner, W.; Jacobs, C.; Szyszka, B. | Journal Article |
| 2009 | Particle-in-cell Monte Carlo analysis of propagating plasma waves in DC magnetron discharges
Siemers, M.; Pflug, A.; Szyszka, B. | Conference Paper |
| 2009 | Reactive magnetron sputtering of ZnO:Al
Szyszka, B.; Sittinger, V.; Dewald, W.; Pflug, A.; Ulrich, S.; Kaiser, A.; Werner, W. | Conference Paper |
| 2009 | Scratch resistance analysis of coatings on glass and polycarbonate
Boentoro, W.; Pflug, A.; Szyszka, B. | Conference Paper, Journal Article |
| 2009 | Surface technology for automotive engineering
Bewilogua, K.; Bräuer, G.; Dietz, A.; Gäbler, J.; Goch, G.; Karpuschewski, B.; Szyszka, B. | Journal Article |
| 2009 | Survey of thin film photovoltaics in Germany
Sittinger, V.; Diehl, W.; Szyszka, B. | Conference Paper |
| 2009 | Transparent P-conducting materials for application in highly efficient thin film solar cells
Polenzky, C.; Ulrich, S.; Szyszka, B.; Bywalez, R.; Götzendorfer, S.; Löbmann, P. | Conference Paper |
| 2009 | Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid
Sittinger, V.; Szyszka, B.; Dewald, W.; Säuberlich, F.; Stanowski, B. | Patent |
| 2008 | Development of advanced transparent conductive electrodes for large-area opto-electronic devices
Szyszka, B.; Gombert, A.; Loebmann, P.; May, C.; Elsaesser, C. | Conference Paper |
| 2008 | Development of advanced transparent conductive electrodes for large-area optoelectronic devices
Szyszka, B.; Gombert, A.; Loebmann, P.; May, C.; Elsaesser, C. | Conference Paper |
| 2008 | Effects of artificially structured micrometer holes on the transport behavior of Al-doped ZnO layers
Elm, M.T.; Henning, T.; Klar, P.J.; Szyszka, B. | Journal Article |
| 2008 | Gas flow and plasma simulation for parallel plate PACVD reactors
Pflug, A.; Siemers, M.; Szyszka, B.; Geisler, M.; Beckmann, R. | Conference Paper |
| 2008 | Glasprodukt
Drescher, T.; Hangleiter, B.; Schuetz, J.; Matthai, A.; Walter, H.; Horstmann, F.; Szyszka, B.; Sittinger, V.; Werner, W.; Boentoro, T.W. | Patent |
| 2008 | High power pulsed magnetron sputtering of transparent conducting oxides
Sittinger, V.; Ruske, F.; Werner, W.; Jacobs, C.; Szyszka, B.; Christie, D.J. | Journal Article |
| 2008 | Optical and XRR methods for analysis and design of low-e coatings and PDP EMI filters
Ulrich, S.; Pflug, A.; Szyszka, B. | Conference Paper |
| 2008 | Optical modeling and XRR/AFM characterization of highly conductive thin Ag layers
Ulrich, S.; Pflug, A.; Schiffmann, K.I.; Szyszka, B. | Journal Article |
| 2008 | Particle-in-cell Monte Carlo analysis of anomalous target erosion in magnetron sputtering
Siemers, M.; Pflug, A.; Szyszka, B. | Conference Paper |
| 2008 | Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J. | Journal Article |
| 2008 | Research on promising applications for high power pulse magnetron sputtering
Sittinger, V.; Szyszka, B.; Bandorf, R.; Vergöhl, M.; Pflug, A.; Christie, D.J.; Ruske, F. | Conference Paper |
| 2008 | Verfahren zur Herstellung einer transparenten und leitfaehigen Metalloxidschicht durch gepulstes, hochionisierendes Magnetronsputtern
Horstmann, F.; Sittinger, V.; Szyszka, B. | Patent |
| 2007 | Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Wiese, R. | Conference Paper, Journal Article |
| 2007 | Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications
Ruske, F.; Jacobs, C.; Sittinger, V.; Szyszka, B.; Werner, W. | Conference Paper, Journal Article |
| 2007 | Plasma for surface technology - examples of current developments
Bräuer, G.; Diehl, W.; Frach, P.; Kirchhoff, V.; Sittinger, V.; Szyszka, B.; Vergöhl, M. | Conference Paper |
| 2007 | Plasma for surface technology - examples of current developments
Bräuer, G.; Diehl, W.; Frach, P.; Kirchhoff, V.; Sittinger, B.; Szyszka, B.; Vergöhl, M. | Conference Paper |
| 2007 | Position and time resolved optical emission spectroscopy and film properties of ITO films deposited by high power pulsed magnetron sputtering
Sittinger, V.; Ruske, F.; Szyszka, B.; Christie, D.J.; Wallendorf, T. | Conference Paper |
| 2007 | Research agenda surface technology: Future demands for research in the field of coatings materials
Uhlmann, Petra; Frenzel, Ralf; Voit, Brigitte; Mock, Ulrike; Szyszka, Bernd; Schmidt, Burkhard; Ondratschek, Dieter; Gochermann, Josef; Roths, Klaus | Journal Article |
| 2007 | Three dimensional model for anomalous target erosion in magnetron sputtering
Siemers, M.; Pflug, A.; Szyszka, B. | Conference Paper |
| 2007 | Unsichtbar aber unverzichtbar
Szyszka, B.; Brand, J. | Journal Article |
| 2006 | Deposition of high conductivity ITO films by high power pulsed magnetron sputtering (HPPMS)
Sittinger, V.; Ruske, F.; Gerloff, C.; Werner, W.; Szyszka, B.; Christie, D.J. | Conference Paper |
| 2006 | Forschungsagenda Oberfläche - Vernetztes Handeln für nachhaltiges Wachstum
Szyszka, B.; Gochermann, J.; Ondratschek, D.; Roths, K.; Schmidt, B.; Stenzel, V.; Uhlmann, P. | Journal Article |
| 2006 | High power pulsed magnetron sputtering (HPPMS)
Christie, D.; Szyszka, B.; Pflug, A.; Sittinger, V.; Ruske, F.; Werner, W. | Conference Paper |
| 2006 | Neue Prozess- und Geräteentwicklungen. Forschungsagenda Oberfläche - Hightechpotenziale der Oberflächentechnik
Roths, K.; Gochermann, J.; Ondratschek, D.; Schmidt, B.; Stenzel, V.; Szyszka, B.; Uhlmann, P. | Book Article |
| 2006 | Parallel DSMC gasflow simulation of an in-line coater for reactive sputtering
Pflug, A.; Siemers, M.; Szyszka, B. | Conference Paper |
| 2006 | Plasma characterization tools and application to reactive sputtering of Al-doped ZnO thin films
Sittinger, V.; Ruske, F.; Szyszka, B.; Wiese, R.; Kersten, H. | Journal Article |
| 2006 | Potenzialfeld Simulation
Szyszka, B.; Pflug, A.; Zickermann, D. | Book Article |
| 2006 | Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B. | Journal Article |
| 2006 | Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B. | Conference Paper, Journal Article |
| 2006 | Reactive deposition of Al-doped ZnO thin films using high power pulsed magnetron sputtering (HPPMS)
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J. | Conference Paper |
| 2006 | A second hysteresis effect of reactive magnetron sputtering in compound mode
Pflug, A.; Siemers, M.; Szyszka, B.; Severin, D. | Conference Paper |
| 2006 | Stability of CIGS minimodules with ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Menner, R.; Powalla, M.; Dimmler, B. | Conference Paper |
| 2006 | Three dimensional plasma simulations with a parallelized particle-in-cell Monte Carlo approach
Siemers, M.; Pflug, A.; Szyszka, B. | Conference Paper |
| 2006 | Verfahren zur Abscheidung einer Oxidschicht auf Absorbern von Solarzellen, Solarzelle und Verwendung des Verfahrens
Sittinger, V.; Ruske, F.; Szyszka, B. | Patent |
| 2006 | Verfahren zur Regelung eines reaktiven Hochleistungs-Puls-Magnetronsputterprozesses und Vorrichtung hierzu
Ruske, F.; Sittinger, V.; Szyszka, B. | Patent |
| 2006 | ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Hüpkes, J.; Schöpe, G.; Stiebig, H. | Journal Article |
| 2005 | Aufskalierung reaktiv gesputterter ZnO:Al-Schichten für Dünschicht-Solarmodule
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B. | Conference Paper |
| 2005 | Heuristische Simulation der Plasma-Impedanz beim reaktiven Magnetron-Sputtern
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.; Severin, D.; Wuttig, M. | Conference Paper |
| 2005 | Hydrogen doping of DC sputtered ZnO:Al films from novel target material
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van; Dietrich, K.; Rix, R. | Journal Article |
| 2005 | Hydrogen doping of ZnO:Al films deposited by pulsed DC-sputtering of ceramic targets
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.-U. van; Dietrich, K.; Rix, R. | Conference Paper |
| 2005 | Leuchtmittel mit einem Schichtsystem zur Reflektierung abgegebener infraroter Strahlung
Szyszka, B.; Pflug, A.; Sittinger, V.; Hunsche, B.; Bewig, L.; Kuepper, T. | Patent |
| 2005 | Model prediction and emprical confirmation of rate scaling with peak power for high power pulse magnetron sputtering (HPPMS) deposition of thin Ag films
Christie, D.J.; Pflug, A.; Sittinger, V.; Ruske, F.; Siemers, M.; Szyszka, B.; Geisler, M. | Conference Paper |
| 2005 | Modeling of the plasma impedance in reactive magnetron sputtering for various target materials
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S. | Conference Paper |
| 2005 | Optimized TCO deposition and etching for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Szyszka, B. | Journal Article |
| 2005 | Simulation of in-line sputtering coaters
Pflug, A.; Szyszka, B.; Bräuer, G. | Journal Article |
| 2005 | Thin film solar cell technology in Germany
Diehl, W.; Sittinger, V.; Szyszka, B. | Journal Article |
| 2005 | Tuning the reactive magnetron sputtering process of Al-doped ZnO on large area substrates for amorphous and microcrystalline silicon solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Schöpe, G.; Hüpkes, J. | Conference Paper |
| 2005 | Verfahren und Vorrichtung zum Magnetronsputtern
Szyszka, B.; Pflug, A. | Patent |
| 2005 | Verfahren zum Beschichten von Substraten in Inline-Anlagen
Kastner, A.; Geisler, M.; Leipnitz, T.; Bruch, J.; Pflug, A.; Szyszka, B. | Patent |
| 2005 | Wasserstoffdotierung von ZnO:Al-Schichten aus keramischen Targets
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van | Conference Paper |
| 2005 | ZnO:Al films for a-Si:H thin film solar cells
Szyszka, B.; Sittinger, V.; Ruske, F.; Werner, W.; Pflug, A.; Rech, B. | Conference Paper |
| 2004 | Combination of X-ray reflectometry and optical spectroscopy as a new tool for thin films parameter determination
Pflug, A.; Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B. | Conference Paper |
| 2004 | Erratum to "comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering" (J. Crystal Growth 253 (2003) 117-128)
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Xu, S.H.; Werner, W.; Heide, G. | Corrigendum |
| 2004 | Heuristic model of the plasma impedance in magnetron sputtering
Pflug, A.; Szyszka, B.; Berg, S.; Nyberg, T.; Kappertz, O. | Conference Paper |
| 2004 | Modeling of the film thickness distribution along transport direction in in-line coaters for reactive sputtering
Pflug, A.; Szyszka, B.; Geisler, M.; Kastner, A.; Braatz, C.; Schreiber, U.; Bruch, J. | Conference Paper |
| 2004 | Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories
Pflug, A.; Sittinger, V.; Ruske, M.; Szyszka, B.; Dittmar, G. | Conference Paper, Journal Article |
| 2004 | Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B. | Conference Paper |
| 2004 | Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B. | Conference Paper |
| 2004 | Texture analysis of Al-doped ZnO thin films prepared by in-line reactive MF magnetron sputtering
Hong, R.J.; Helming, K.; Jiang, X.; Szyszka, B. | Journal Article |
| 2004 | Verfahren zur Deposition von Schichtsystemen, derart beschichtete Substrate und deren Verwendung
Szyszka, B.; Hoeing, T. | Patent |
| 2003 | BESCHICHTETES SUBSTRAT GERINGER EMISSIVITAET
Szyszka, B.; Bierhals, A.; Bringmann, U.; Hoeing, T. | Patent |
| 2003 | Beschichtungsanlage
Geisler, M.; Kastner, A.; Szyszka, B.; Pflug, A.; Malkomes, N. | Patent |
| 2003 | Comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Xu, S.H.; Werner, W.; Heide, G. | Journal Article |
| 2003 | Deposition of CuInS2 thin films by RF reactive sputtering with a ZnO:Al buffer layer
He, Y.B.; Kriegseis, W.; Krämer, T.; Polity, A.; Hardt, M.; Szyszka, B.; Meyer, B.K. | Journal Article |
| 2003 | Growth behaviours and properties of the ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Heide, G.; Szyszka, B.; Sittinger, V.; Werner, W. | Journal Article |
| 2003 | Process simulation for advanced large area optical coatings
Pflug, A.; Szyszka, B.; Sittinger, V.; Niemann, J. | Conference Paper |
| 2003 | Simulation des reaktiven Magnetron-Sputterprozesses in Inline-Anlagen
Pflug, A.; Szyszka, B.; Niemann, J. | Journal Article |
| 2003 | Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J. | Journal Article |
| 2003 | State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P. | Journal Article |
| 2003 | Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Pflug, A. | Journal Article |
| 2003 | Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A. | Journal Article |
| 2003 | VERFAHREN ZUR REGELUNG VON REAKTIVEN SPUTTERPROZESSEN
Bringmann, U.; Hoeing, T.; Malkomes, N.; Szyszka, B.; Vergoehl, M.; Poeckelmann, R. | Patent |
| 2003 | VERFAHREN ZUR REGELUNG VON SPUTTERPROZESSEN
Szyszka, B.; Malkomes, N. | Patent |
| 2003 | Zinkoxid-Schicht und Verfahren zu dessen Herstellung
Xin, J.; Szyszka, B.; Chunlin, J. | Patent |
| 2002 | Dünne Schichten auf Autoscheiben - heute und morgen
Szyszka, B. | Journal Article |
| 2002 | Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface
Jiang, X.; Jia, C.L.; Szyszka, B. | Journal Article |
| 2002 | Modeling of NIR free carrier absorption in aluminum-doped zinc oxide layers using the simulation system RIG-VM
Pflug, A.; Sittinger, V.; Szyszka, B.; Dittmar, G. | Conference Paper |
| 2002 | Simulation komplexer oberflächentechnischer Produktionsprozesse
Lepski, D.; Mollath, G.; Szyszka, B.; Völlmar, S. | Journal Article |
| 2002 | Simulation of reactive magnetron sputtering kinetics in real in-line processing chambers
Pflug, A.; Malkomes, N.; Sittinger, V.; Szyszka, B. | Conference Paper |
| 2002 | Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J. | Conference Paper |
| 2002 | State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P. | Conference Paper |
| 2002 | Thin films for automotive glazing - today and tomorrow
Szyszka, B. | Journal Article |
| 2002 | Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A. | Conference Paper |
| 2002 | Uniformity in large area ZnO:Al films prepared by reactive midfrequency magnetron sputtering
Hong, R.J.; Jiang, X.; Sittinger, V.; Szyszka, B.; Höing, T.; Bräuer, G.; Heide, G.; Frischat, G.H. | Journal Article |
| 2002 | VERFAHREN ZUR ABSCHEIDUNG VON AMORPHEN, WASSERSTOFFHALTIGEN SILIZIUMSCHICHTEN
Szyszka, B.; Klages, C.; Jiang, X.; Jung, T. | Patent |
| 2001 | Dynamic simulation of process control of the reactive sputter process using two seperate targets and experimental results
Malkomes, N.; Bierhals, A.; Szyszka, B.; Vergöhl, M. | Conference Paper |
| 2001 | Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5-films
Hunsche, B.; Vergöhl, M.; Neuhäuser, H.; Klose, F.; Szyszka, B.; Matthee, T. | Conference Paper, Journal Article |
| 2001 | Large area deposition of transparent and conductive ZnO:Al layers by reactive mid frequency magnetron sputtering
Szyszka, B.; Höing, T.; Jiang, X.; Bierhals, A.; Malkomes, N.; Vergöhl, M.; Sittinger, V.; Bringmann, U.; Bräuer, G. | Conference Paper |
| 2001 | Nonclassical impedance control of the high rate midfrequency reactive magnetron sputter process using harmonic analysis
Malkomes, N.; Szyszka, B. | Journal Article |
| 2001 | Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering
Malkomes, N.; Vergöhl, M.; Szyszka, B. | Journal Article |
| 2001 | Transparente und leitfähige Oxidschichten
Szyszka, B. | Journal Article |
| 2001 | Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G. | Conference Paper, Journal Article |
| 2001 | Verfahren zur Herstellung von leitfaehigen transparenten Strukturen sowie Verwendung von transparenten, leitfaehigen Oxidschichten zur Strukturierung von leitfaehigen, transparenten Bereichen
Klages, C.; Matthee, T.; Neumann, F.; Szyszka, B. | Patent |
| 2000 | Effect of deposition parameters on optical and mechanical film properties of MF- and DC-sputtered Nb2O5-films
Hunsche, B.; Vergöhl, M.; Neuhäuser, H.; Klose, F.; Szyszka, B.; Matthee, T. | Conference Paper |
| 2000 | Optimization of the reflectivity of magnetron sputter deposited silver films
Vergöhl, M.; Malkomes, N.; Szyszka, B.; Neumann, F.; Matthee, T.; Bräuer, G. | Conference Paper, Journal Article |
| 2000 | Properties of TCO-films prepared by reactive magnetron sputtering
Szyszka, B. | Conference Paper |
| 2000 | Reaktives Magnetronsputtern von transparenten und leitfähigen Oxidschichten
Szyszka, B. | Dissertation |
| 2000 | Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ spectroscopic ellipsometry and plasma diagnostics
Vergöhl, M.; Hunsche, B.; Malkomes, N.; Matthee, T.; Szyszka, B. | Journal Article |
| 2000 | Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ spectroscopic ellipsometry and plasma diagnostics
Vergöhl, M.; Hunsche, B.; Malkomes, N.; Matthee, T.; Szyszka, B. | Journal Article, Conference Paper |
| 2000 | TCO-coating of polymer substrates using reactive MF-magnetron sputtering of ZnO:Al layers
Szyszka, B.; Jiang, X.; Höing, T.; Pöckelmann, R.; Bringmann, U.; Bräuer, G. | Conference Paper |
| 2000 | Transparent and conductive ZnO:Al films prepared by reactive mf magnetron sputtering at high deposition rate
Szyszka, B. | Conference Paper |
| 2000 | Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G. | Conference Paper |
| 1999 | Kein Reflex bei dickem Silber
Szyszka, B. | Journal Article |
| 1999 | Reaktives Magnetronsputtern von TCO-Schichtsystemen - eine neue Technologie für kostengünstige wärmedämmende Beschichtungen
Szyszka, B. | Conference Paper |
| 1999 | Reaktives Magnetronsputtern von transparenten und leitfähigen Oxidschichten
Szyszka, B. | Journal Article |
| 1999 | Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Szyszka, B. | Conference Paper |
| 1999 | Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Szyszka, B. | Journal Article |
| 1998 | Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering
Jäger, S.; Szyszka, B.; Szczyrbowski, J.; Bräuer, G. | Journal Article |
| 1997 | Entwicklung von transparenten und leitfähigen Oxidschichten
Weber, A.; Szyszka, B.; Bringmann, U.; Gadhesi, A.; Siegesmund, M. | Conference Paper |
| 1997 | Optical and electrical properties of doped zinc oxide films prepared by AC reactive magnetron sputtering
Szyszka, B.; Jäger, S. | Conference Paper |
| 1996 | Comparison of transparent conductive oxide thin films prepared by AC and DC reactive magnetron sputtering
Jäger, S.; Szyszka, B.; Szczyrbowski, J.; Bräuer, G. | Conference Paper |