Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Crystallisation phenomena of In₂O₃:H films
Muydinov, R.; Steigert, A.; Wollgarten, M.; Michalowski, P.; Bloeck, U.; Pflug, A.; Erfurt, D.; Klenk, R.; Körner, S.; Lauermann, I.; Szyszka, B.
Journal Article
2018Protective coatings for durability enhancement of optical surfaces
Boentoro, W.; Szyszka, B.; Martinu, L.
Book Article
2018Serial cosputtering for aluminum doping manipulated zinc oxide as front contact for Cu(In,Ga)Se₂ solar cells
Körner, S.; Hartig, M.; Muydinov, R.; Erfurt, D.; Klenk, R.; Szyszka, B.; Schlatmann, R.
Journal Article
2016Improvement of the homogeneity of high mobility In2O3:H films by sputtering through a mesh electrode studied by Monte Carlo simulation and thin film analysis
Scherg-Kurmes, H.; Hafez, A.; Siemers, M.; Pflug, A.; Schlatmann, R.; Rech, B.; Szyszka, B.
Journal Article
2015Rotatable serial co-sputtering of doped titania
Sittinger, V.; Pflug, A.; Dewald, W.; Jung, S.; Britze, C.; Kaiser, A.; Werner, W.; Szyszka, B.; Bräuer, G.
Journal Article
2014Hoch absorbierendes Schichtsysstem, Verfahren zur Herstellung des Schichtsystems und dafür geeignetes Sputtertarget
Szyszka, Bernd; Dewald, Wilma; Schlott, Martin; Kastner, Albert; Schultheis, Markus
Patent
2014Model based investigation of Ar+ ion damage in DC magnetron sputtering
Siemers, M.; Pflug, A.; Melzig, T.; Gehrke, K.; Weimar, A.; Szyszka, B.
Journal Article, Conference Paper
2014Recent developments in the field of transparent conductive oxide films and emerging applications for automotive and architectural glazing, oxide electronics and photovoltaics
Szyszka, B.; Muydinov, R.; Pflug, A.; Rech, B.; Ruske, F.; Scherg-Kurmes, H.; Schlatmann, R.; Sittinger, V.; Stannowski, B.; Ulrich, S.
Conference Paper
2014Review on pulse power development
Szyszka, B.; Körner, S.; Hartig, M.; Scherg-Kurmes, H.; Muydinov, R.
Conference Paper
2014Rotatable serial co-sputtering of doped titania
Sittinger, V.; Pflug, A.; Dewald, W.; Jung, S.; Britze, C.; Kaiser, A.; Werner, W.; Szyszka, B.; Bräuer, G.
Conference Paper
2013Advanced properties of Al-doped ZnO films with a seed layer approach for industrial thin film photovoltaic application
Dewald, W.; Sittinger, V.; Szyszka, B.; Säuberlich, F.; Stannowski, B.; Köhl, D.; Ries, P.; Wuttig, M.
Journal Article
2013Applications of HIPIMS metal oxides
Sittinger, V.; Lenck, O.; Vergöhl, M.; Szyszka, B.; Bräuer, G.
Journal Article
2013Licht absorbierende Schichtstruktur
Dewald, Wilma; Szyszka, Bernd; Kastner, Albert; Schneider-Betz, Sabine; Schlott, Martin
Patent
2013Protective coatings for optical surfaces
Boentoro, W.; Szyszka, B.
Book Article
2012Condensation on the outside surface of window glazing
Gläser, H.J.; Ulrich, S.; Szyszka, B.
Conference Paper
2012ITO replacements. Insulator-metal-insulator layers
Szyszka, B.
Book Article
2012Neue Oberflächen für das Auto der Zukunft
Schulz, C.; Szyszka, B.
Journal Article
2012p-TCOs für transparente Elektronik
Schulz, C.; Ulrich, S.; Szyszka, B.
Journal Article
2012Parallel particle-in-cell Monte-Carlo algorithm for simulation of gas discharges under PVM and MPI
Schwanke, C.; Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
2012Process development for sputtering of p-type TCOs, namely Cu-Al-O mixtures
Schulz, C.; Balmer, C.; Szyszka, B.
Conference Paper
2012Recent developments in the field of transparent conductive oxide films for spectral selective coatings, electronics and photovoltaics
Szyszka, B.; Dewald, W.; Gurram, S.K.; Pflug, A.; Schulz, C.; Siemers, M.; Sittinger, V.; Ulrich, S.
Journal Article, Conference Paper
2011Atomic Layer Deposition. Kratz- und korrosionsfeste Beschichtungen auf komplexen 3D-Bauteilen
Szyszka, B.; Tholense, H.
Journal Article
2011Evaluation of textured TCOs for a-SI:H/µc-SI:H thin film solar cells by angular resolved light scattering measurements
Dewald, W.; Sittinger, V.; Szyszka, B.; Wippler, D.; Hüpkes, J.; Obermeyer, P.; Hamelmann, F.; Stiebig, H.; Säuberlich, F.; Severin, D.; Klein, S.; Rohde, M.; Schmidt, U.
Conference Paper
2011In-line processing of hot wire CVD a-SI:H solar cells using different ZnO:Al morphologies as front contact
Sittinger, V.; Laukart, A.; Harig, T.; Höfer, M.; Dewald, W.; Britze, C.; Schäfer, L.; Szyszka, B.; Bräuer, G.
Conference Paper
2011Influence of process parameter and magnetic field strength on DC magnetron sputtered ZnO:Al films from ceramic targets
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B.
Conference Paper
2011Magnetron sputtering and its applications
Bräuer, G.; Bandorf, R.; Bewilogua, K.; Diehl, W.; Szyszka, B.; Vergöhl, M.
Conference Paper
2011MINERVA - a project for the development of an ultra resistant coating on PC for automotive use
Matthai, A.; Bangert, S.; Grünhagel, O.; Hangleiter, B.; Schulz, U.; Szyszka, B.
Journal Article
2011Moderne Glasanwendungen
Szyszka, B.
Journal Article
2011Neue Produktionstechnik für leitfähige Schichten auf Glas
Szyszka, B.; Sittinger, V.; Ulrich, S.; Beontoro, W.; Werner, W.
Journal Article
2011New approach towards an optimized light trapping morphology of Al-doped ZnO films
Sittinger, V.; Dewald, W.; Szyszka, B.; Säuberlich, F.; Stannowski, B.
Journal Article
2011Organic photovoltaic solar cells using thin tungsten oxide as interlayer anode contact material
Ulrich, S.; Rösch, R.; Neubert, T.; Mushin, B.; Szyszka, B.; Gobsch, G.; Hoppe, H.
Conference Paper
2011Particle-in-cell Monte Carlo simulation for process analysis and development
Siemers, M.; Pflug, A.; Schwanke, C.; Szyszka, B.
Conference Paper
2011Reactive magnetron sputtering of ZnO:Al
Sittinger, V.; Dewald, W.; Szyszka, B.; Ruske, F.
Journal Article
2011Simulation of plasma deposition processes
Pflug, A.; Siemers, M.; Schwanke, C.; Szyszka, B.
Conference Paper
2011Simulation of plasma potential and ion energies in magnetron sputtering
Pflug, A.; Siemers, M.; Schwanke, C.; Febty Kurnia, B.; Sittinger, V.; Szyszka, B.
Journal Article
20108th International Conference on Coatings on Glass and Plastics, ICCG 2010. Advanced Coatings for Large Area or High-Volume Products. Proceedings
: Kondruweit, S.; Szyszka, B.; Pütz, J.
Conference Proceedings
2010Angular resolved light scattering of structured TCOs for the application in a-Si:H/µc-Si:H solar cells
Dewald, W.; Sittinger, V.; Szyszka, B.; Gordijn, A.; Hüpkes, J.; Hamelmann, F.; Stiebig, H.; Säuberlich, F.
Conference Paper
2010Development of new transparent conductors and device applications utilizing a multidisciplinary approach
Szyszka, B.; Löbmann, P.; Georg, A.; May, C.; Elsässer, C.
Journal Article, Conference Paper
2010Dünnschicht-Photovoltaik in Deutschland
Sittinger, V.; Diehl, W.; Szyszka, B.
Journal Article
2010Gepulste Plasmen für industrielle Beschichtungsprozesse
Bräuer, G.; Szyszka, B.; Bandorf, R.; Bewilogua, K.; Brand, J.; Vergöhl, M.
Conference Paper
2010Heat treatable TCO film for position 1 based on HiPIMS
Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B.
Conference Paper
2010In-Situ Messaufbau für den Einsatz in Beschichtungsanlagen
Szyszka, B.; Pflug, A.; Rademacher, D.; Vergöhl, M.
Patent
2010Large area DC sputtered zinc oxide front TCO for a-Si/µc-Si tandem modules
Ring, S.; Säuberlich, F.; Wendelmuth, T.; Sittinger, V.; Szyszka, B.
Conference Paper
2010Magnetron sputtering. Milestones of 30 years
Bräuer, G.; Szyszka, B.; Vergöhl, M.; Bandorf, R.
Conference Paper, Journal Article
2010Minerva. A project for the development of an ultra resistant coating on PC for automotive use
Matthai, A.; Bangert, S.; Grünhagel, O.; Hangleiter, B.; Schulz, U.; Szyszka, B.
Conference Paper
2010New approach towards an optimized light trapping morphology of Al-doped ZnO films
Sittinger, V.; Dewald, W.; Szyszka, B.; Säuberlich, F.; Stannowski, B.
Conference Paper
2010Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films
Sittinger, V.; Ruske, F.; Pflug, A.; Pflug, A.; Dewald, W.; Szyszka, B.; Dittmar, G.
Journal Article
2010Pathways towards p-type oxide layers for optoelectronic applications
Szyszka, B.; Polenzky, C.; Loebmann, P.; Götzendorfer, S.; Elsaesser, C.; Körner, W.
Conference Paper
2010Patterned deposition of transparent and conductive layers - new pathways towards cost efficient manufacturing techniques
Szyszka, B.; May, C.; Götzendörfer, S.; Ulrich, S.; Polenzky, C.; Ruppel, L.; Thomas, M.; Klages, C.-P.; Löbmann, P.
Conference Paper
2010Preparation and characterization of Cu'Me"'
Polenzky, C.; Ortner, K.; Szyszka, B.
Conference Paper
2010Preparation of photocatalytic TiO2-coatings by hollow cathode gas-flow sputtering
Koeßler, D.; Ortner, K.; Höfer, M.; Szyszka, B.; Jung, T.
Conference Paper
2010Rotatable target serial co-sputtering
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S.; Vergöhl, M.; Werner, W.; Kaiser, A.; Jung, S.; Bringmann, U.; Bräuer, G.; Köhl, D.; Austgen, M.; Wuttig, M.; Weis, H.; Herwig, W.; Polle, A.; Herlitze, L.
Conference Paper
2010Seebeck effect of as-grown and micro-structured metallic (Zn,Al)O
Homm, G.; Teubert, J.; Henning, T.; Klar, P.J.; Szyszka, B.
Journal Article, Conference Paper
2010Simulation von Plasma-Beschichtungsprozessen
Pflug, A.; Siemers, M.; Schwanke, C.; Szyszka, B.
Journal Article
2010Sputteryield-Amplification. Ein lange bekannter, doch bisher kaum genutzter Effekt zur Ratenerhöhung von Sputterprozessen
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S.
Journal Article
2010Transparent conducting oxide deposition techniques for thin-film photovoltaics
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B.; Ruske, F.
Journal Article
2010Transport properties of microstructured MF-sputtered Zn 0.98Al0.02O
Piechotka, M.; Elm, M.T.; Henning, T.; Szyszka, B.; Meyer, B.K.; Klar, P.J.
Journal Article, Conference Paper
2010Übersicht über die Einsatzgebiete und Anwendungen von transparent leitfähigen Oxiden (TCOs)
Sittinger, V.; Szyszka, B.; Ulrich, S.; Pflug, A.; Ruske, F.; Dewald, W.
Journal Article
2009Anordnung umfassend eine transparente elektrisch leitfaehige Schicht, Anordnung umfassend eine photoelektrische Vorrichtung und Verfahren zur Herstellung einer transparenten Elektrode
Säuberlich, F.; Stannowski, B.; Wendelmuth, T.; Sittinger, V.; Szyszka, B.
Patent
2009Comparison of different ceramic Al-doped ZnO target materials
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B.
Journal Article
2009Comparison of SNO2:F based transparent conductive oxides for use in a-Si:H/µc-Si:H solar cells
Ulrich, S.; Dewald, W.; Szyszka, B.
Conference Paper
2009Deposition of amorphous silicon films by gas flow sputtering (GFS)
Mahrholz, J.; Shikolenko, S.; Szyszka, B.; Jung, T.
Conference Paper
2009Design tools and simulations for plasma processing in large area coaters
Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
2009Heat treatable indium tin oxide films deposited with high power pulse magnetron sputtering
Horstmann, F.; Sittinger, V.; Szyszka, B.
Conference Paper, Journal Article
2009Heat treatable TCO film for position 1 based on HiPIMS
Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B.
Conference Paper
2009Influence of strong magnetic fields on the growth of DC magnetron sputtered ZNO:Al films from a ceramic target
Dewald, W.; Sittinger, V.; Werner, W.; Szyszka, B.
Conference Paper
2009Large area deposition of Al-doped ZnO for Si-based thin film solar cells by magnetron sputtering
Sittinger, V.; Dewald, W.; Szyszka, B.
Conference Paper
2009Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren
Pflug, A.; Siemers, M.; Sittinger, V.; Szyszka, B.; Ulrich, S.
Patent
2009A multidisciplinary approach towards advanced transparent conductive electrodes
Szyszka, B.; Georg, A.; Löbmann, P.; May, C.; Elsaesser, C.
Conference Paper
2009A multidisciplinary approach towards novel conductive electrodes for PV applications
Szyszka, B.; Löbmann, P.; Götzendörfer, S.; Georg, A.; Borchert, D.; Elsässer, C.; Körner, W.; May, C.
Conference Paper
2009Optical modeling of free electron behavior in highly doped ZnO films
Ruske, F.; Pflug, A.; Sittinger, V.; Szyszka, B.; Greiner, D.; Rech, B.
Journal Article
2009Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/µc-Si:H solar cells
Dewald, W.; Sittinger, V.; Werner, W.; Jacobs, C.; Szyszka, B.
Journal Article
2009Particle-in-cell Monte Carlo analysis of propagating plasma waves in DC magnetron discharges
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2009Reactive magnetron sputtering of ZnO:Al
Szyszka, B.; Sittinger, V.; Dewald, W.; Pflug, A.; Ulrich, S.; Kaiser, A.; Werner, W.
Conference Paper
2009Scratch resistance analysis of coatings on glass and polycarbonate
Boentoro, W.; Pflug, A.; Szyszka, B.
Conference Paper, Journal Article
2009Surface technology for automotive engineering
Bewilogua, K.; Bräuer, G.; Dietz, A.; Gäbler, J.; Goch, G.; Karpuschewski, B.; Szyszka, B.
Journal Article
2009Survey of thin film photovoltaics in Germany
Sittinger, V.; Diehl, W.; Szyszka, B.
Conference Paper
2009Transparent P-conducting materials for application in highly efficient thin film solar cells
Polenzky, C.; Ulrich, S.; Szyszka, B.; Bywalez, R.; Götzendorfer, S.; Löbmann, P.
Conference Paper
2009Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid
Sittinger, V.; Szyszka, B.; Dewald, W.; Säuberlich, F.; Stanowski, B.
Patent
2008Development of advanced transparent conductive electrodes for large-area opto-electronic devices
Szyszka, B.; Gombert, A.; Loebmann, P.; May, C.; Elsaesser, C.
Conference Paper
2008Development of advanced transparent conductive electrodes for large-area optoelectronic devices
Szyszka, B.; Gombert, A.; Loebmann, P.; May, C.; Elsaesser, C.
Conference Paper
2008Effects of artificially structured micrometer holes on the transport behavior of Al-doped ZnO layers
Elm, M.T.; Henning, T.; Klar, P.J.; Szyszka, B.
Journal Article
2008Gas flow and plasma simulation for parallel plate PACVD reactors
Pflug, A.; Siemers, M.; Szyszka, B.; Geisler, M.; Beckmann, R.
Conference Paper
2008Glasprodukt
Drescher, T.; Hangleiter, B.; Schuetz, J.; Matthai, A.; Walter, H.; Horstmann, F.; Szyszka, B.; Sittinger, V.; Werner, W.; Boentoro, T.W.
Patent
2008High power pulsed magnetron sputtering of transparent conducting oxides
Sittinger, V.; Ruske, F.; Werner, W.; Jacobs, C.; Szyszka, B.; Christie, D.J.
Journal Article
2008Optical and XRR methods for analysis and design of low-e coatings and PDP EMI filters
Ulrich, S.; Pflug, A.; Szyszka, B.
Conference Paper
2008Optical modeling and XRR/AFM characterization of highly conductive thin Ag layers
Ulrich, S.; Pflug, A.; Schiffmann, K.I.; Szyszka, B.
Journal Article
2008Particle-in-cell Monte Carlo analysis of anomalous target erosion in magnetron sputtering
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2008Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J.
Journal Article
2008Research on promising applications for high power pulse magnetron sputtering
Sittinger, V.; Szyszka, B.; Bandorf, R.; Vergöhl, M.; Pflug, A.; Christie, D.J.; Ruske, F.
Conference Paper
2008Verfahren zur Herstellung einer transparenten und leitfaehigen Metalloxidschicht durch gepulstes, hochionisierendes Magnetronsputtern
Horstmann, F.; Sittinger, V.; Szyszka, B.
Patent
2007Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Wiese, R.
Conference Paper, Journal Article
2007Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications
Ruske, F.; Jacobs, C.; Sittinger, V.; Szyszka, B.; Werner, W.
Conference Paper, Journal Article
2007Plasma for surface technology - examples of current developments
Bräuer, G.; Diehl, W.; Frach, P.; Kirchhoff, V.; Sittinger, V.; Szyszka, B.; Vergöhl, M.
Conference Paper
2007Plasma for surface technology - examples of current developments
Bräuer, G.; Diehl, W.; Frach, P.; Kirchhoff, V.; Sittinger, B.; Szyszka, B.; Vergöhl, M.
Conference Paper
2007Position and time resolved optical emission spectroscopy and film properties of ITO films deposited by high power pulsed magnetron sputtering
Sittinger, V.; Ruske, F.; Szyszka, B.; Christie, D.J.; Wallendorf, T.
Conference Paper
2007Research agenda surface technology: Future demands for research in the field of coatings materials
Uhlmann, Petra; Frenzel, Ralf; Voit, Brigitte; Mock, Ulrike; Szyszka, Bernd; Schmidt, Burkhard; Ondratschek, Dieter; Gochermann, Josef; Roths, Klaus
Journal Article
2007Three dimensional model for anomalous target erosion in magnetron sputtering
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2007Unsichtbar aber unverzichtbar
Szyszka, B.; Brand, J.
Journal Article
2006Deposition of high conductivity ITO films by high power pulsed magnetron sputtering (HPPMS)
Sittinger, V.; Ruske, F.; Gerloff, C.; Werner, W.; Szyszka, B.; Christie, D.J.
Conference Paper
2006High power pulsed magnetron sputtering (HPPMS)
Christie, D.; Szyszka, B.; Pflug, A.; Sittinger, V.; Ruske, F.; Werner, W.
Conference Paper
2006Neue Prozess- und Geräteentwicklungen. Forschungsagenda Oberfläche - Hightechpotenziale der Oberflächentechnik
Roths, K.; Gochermann, J.; Ondratschek, D.; Schmidt, B.; Stenzel, V.; Szyszka, B.; Uhlmann, P.
Book Article
2006Parallel DSMC gasflow simulation of an in-line coater for reactive sputtering
Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
2006Plasma characterization tools and application to reactive sputtering of Al-doped ZnO thin films
Sittinger, V.; Ruske, F.; Szyszka, B.; Wiese, R.; Kersten, H.
Journal Article
2006Potenzialfeld Simulation
Szyszka, B.; Pflug, A.; Zickermann, D.
Book Article
2006Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.
Journal Article
2006Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper, Journal Article
2006Reactive deposition of Al-doped ZnO thin films using high power pulsed magnetron sputtering (HPPMS)
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J.
Conference Paper
2006A second hysteresis effect of reactive magnetron sputtering in compound mode
Pflug, A.; Siemers, M.; Szyszka, B.; Severin, D.
Conference Paper
2006Stability of CIGS minimodules with ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Menner, R.; Powalla, M.; Dimmler, B.
Conference Paper
2006Three dimensional plasma simulations with a parallelized particle-in-cell Monte Carlo approach
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2006Verfahren zur Abscheidung einer Oxidschicht auf Absorbern von Solarzellen, Solarzelle und Verwendung des Verfahrens
Sittinger, V.; Ruske, F.; Szyszka, B.
Patent
2006Verfahren zur Regelung eines reaktiven Hochleistungs-Puls-Magnetronsputterprozesses und Vorrichtung hierzu
Ruske, F.; Sittinger, V.; Szyszka, B.
Patent
2006Vernetztes Handeln für nachhaltiges Wachstum
Szyszka, B.; Gochermann, J.; Ondratschek, D.; Roths, K.; Schmidt, B.; Stenzel, V.; Uhlmann, P.
Journal Article
2006ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Hüpkes, J.; Schöpe, G.; Stiebig, H.
Journal Article
2005Aufskalierung reaktiv gesputterter ZnO:Al-Schichten für Dünschicht-Solarmodule
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.
Conference Paper
2005Heuristische Simulation der Plasma-Impedanz beim reaktiven Magnetron-Sputtern
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.; Severin, D.; Wuttig, M.
Conference Paper
2005Hydrogen doping of DC sputtered ZnO:Al films from novel target material
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van; Dietrich, K.; Rix, R.
Journal Article
2005Hydrogen doping of ZnO:Al films deposited by pulsed DC-sputtering of ceramic targets
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.-U. van; Dietrich, K.; Rix, R.
Conference Paper
2005Leuchtmittel mit einem Schichtsystem zur Reflektierung abgegebener infraroter Strahlung
Szyszka, B.; Pflug, A.; Sittinger, V.; Hunsche, B.; Bewig, L.; Kuepper, T.
Patent
2005Model prediction and emprical confirmation of rate scaling with peak power for high power pulse magnetron sputtering (HPPMS) deposition of thin Ag films
Christie, D.J.; Pflug, A.; Sittinger, V.; Ruske, F.; Siemers, M.; Szyszka, B.; Geisler, M.
Conference Paper
2005Modeling of the plasma impedance in reactive magnetron sputtering for various target materials
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.
Conference Paper
2005Optimized TCO deposition and etching for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Szyszka, B.
Journal Article
2005Simulation of in-line sputtering coaters
Pflug, A.; Szyszka, B.; Bräuer, G.
Journal Article
2005Thin film solar cell technology in Germany
Diehl, W.; Sittinger, V.; Szyszka, B.
Journal Article
2005Tuning the reactive magnetron sputtering process of Al-doped ZnO on large area substrates for amorphous and microcrystalline silicon solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Schöpe, G.; Hüpkes, J.
Conference Paper
2005Verfahren und Vorrichtung zum Magnetronsputtern
Szyszka, B.; Pflug, A.
Patent
2005Verfahren zum Beschichten von Substraten in Inline-Anlagen
Kastner, A.; Geisler, M.; Leipnitz, T.; Bruch, J.; Pflug, A.; Szyszka, B.
Patent
2005Wasserstoffdotierung von ZnO:Al-Schichten aus keramischen Targets
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van
Conference Paper
2005ZnO:Al films for a-Si:H thin film solar cells
Szyszka, B.; Sittinger, V.; Ruske, F.; Werner, W.; Pflug, A.; Rech, B.
Conference Paper
2004Combination of X-ray reflectometry and optical spectroscopy as a new tool for thin films parameter determination
Pflug, A.; Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.
Conference Paper
2004Erratum to "comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering" (J. Crystal Growth 253 (2003) 117-128)
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Xu, S.H.; Werner, W.; Heide, G.
Journal Article
2004Heuristic model of the plasma impedance in magnetron sputtering
Pflug, A.; Szyszka, B.; Berg, S.; Nyberg, T.; Kappertz, O.
Conference Paper
2004Modeling of the film thickness distribution along transport direction in in-line coaters for reactive sputtering
Pflug, A.; Szyszka, B.; Geisler, M.; Kastner, A.; Braatz, C.; Schreiber, U.; Bruch, J.
Conference Paper
2004Nanotechnologie auf dem Vormarsch
Szyszka, B.
Journal Article
2004Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories
Pflug, A.; Sittinger, V.; Ruske, M.; Szyszka, B.; Dittmar, G.
Conference Paper, Journal Article
2004Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.
Conference Paper
2004Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper
2004Texture analysis of Al-doped ZnO thin films prepared by in-line reactive MF magnetron sputtering
Hong, R.J.; Helming, K.; Jiang, X.; Szyszka, B.
Journal Article
2004Verfahren zur Deposition von Schichtsystemen, derart beschichtete Substrate und deren Verwendung
Szyszka, B.; Hoeing, T.
Patent
2003BESCHICHTETES SUBSTRAT GERINGER EMISSIVITAET
Szyszka, B.; Bierhals, A.; Bringmann, U.; Hoeing, T.
Patent
2003Beschichtungsanlage
Geisler, M.; Kastner, A.; Szyszka, B.; Pflug, A.; Malkomes, N.
Patent
2003Comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Xu, S.H.; Werner, W.; Heide, G.
Journal Article
2003Deposition of CuInS2 thin films by RF reactive sputtering with a ZnO:Al buffer layer
He, Y.B.; Kriegseis, W.; Krämer, T.; Polity, A.; Hardt, M.; Szyszka, B.; Meyer, B.K.
Journal Article
2003Growth behaviours and properties of the ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Heide, G.; Szyszka, B.; Sittinger, V.; Werner, W.
Journal Article
2003New cost effective ZnO:Al films deposited by large area reactive magnetron sputtering
Sittinger, V.; Szyszka, B.; Hong, R.J.; Werner, W.; Ruske, M.; Lopp, A.
Conference Paper
2003Process simulation for advanced large area optical coatings
Pflug, A.; Szyszka, B.; Sittinger, V.; Niemann, J.
Conference Paper
2003Simulation des reaktiven Magnetron-Sputterprozesses in Inline-Anlagen
Pflug, A.; Szyszka, B.; Niemann, J.
Journal Article
2003Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J.
Journal Article
2003State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P.
Journal Article
2003Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Pflug, A.
Journal Article
2003Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A.
Journal Article
2003VERFAHREN ZUR REGELUNG VON REAKTIVEN SPUTTERPROZESSEN
Bringmann, U.; Hoeing, T.; Malkomes, N.; Szyszka, B.; Vergoehl, M.; Poeckelmann, R.
Patent
2003VERFAHREN ZUR REGELUNG VON SPUTTERPROZESSEN
Szyszka, B.; Malkomes, N.
Patent
2003Zinkoxid-Schicht und Verfahren zu dessen Herstellung
Xin, J.; Szyszka, B.; Chunlin, J.
Patent
2002Dünne Schichten auf Autoscheiben - heute und morgen
Szyszka, B.
Journal Article
2002Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface
Jiang, X.; Jia, C.L.; Szyszka, B.
Journal Article
2002Modeling of NIR free carrier absorption in aluminum-doped zinc oxide layers using the simulation system RIG-VM
Pflug, A.; Sittinger, V.; Szyszka, B.; Dittmar, G.
Conference Paper
2002Simulation komplexer oberflächentechnischer Produktionsprozesse
Lepski, D.; Mollath, G.; Szyszka, B.; Völlmar, S.
Journal Article
2002Simulation of reactive magnetron sputtering kinetics in real in-line processing chambers
Pflug, A.; Malkomes, N.; Sittinger, V.; Szyszka, B.
Conference Paper
2002Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J.
Conference Paper
2002State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P.
Conference Paper
2002Thin films for automotive glazing - today and tomorrow
Szyszka, B.
Journal Article
2002Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A.
Conference Paper
2002Uniformity in large area ZnO:Al films prepared by reactive midfrequency magnetron sputtering
Hong, R.J.; Jiang, X.; Sittinger, V.; Szyszka, B.; Höing, T.; Bräuer, G.; Heide, G.; Frischat, G.H.
Journal Article
2002VERFAHREN ZUR ABSCHEIDUNG VON AMORPHEN, WASSERSTOFFHALTIGEN SILIZIUMSCHICHTEN
Szyszka, B.; Klages, C.; Jiang, X.; Jung, T.
Patent
2001Dynamic simulation of process control of the reactive sputter process using two seperate targets and experimental results
Malkomes, N.; Bierhals, A.; Szyszka, B.; Vergöhl, M.
Conference Paper
2001Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5-films
Hunsche, B.; Vergöhl, M.; Neuhäuser, H.; Klose, F.; Szyszka, B.; Matthee, T.
Conference Paper, Journal Article
2001Large area deposition of transparent and conductive ZnO:Al layers by reactive mid frequency magnetron sputtering
Szyszka, B.; Höing, T.; Jiang, X.; Bierhals, A.; Malkomes, N.; Vergöhl, M.; Sittinger, V.; Bringmann, U.; Bräuer, G.
Conference Paper
2001Nonclassical impedance control of the high rate midfrequency reactive magnetron sputter process using harmonic analysis
Malkomes, N.; Szyszka, B.
Journal Article
2001Properties of aluminum-doped zinc oxide films deposited by high rate mid-frequency reactive magnetron sputtering
Malkomes, N.; Vergöhl, M.; Szyszka, B.
Journal Article
2001Transparente und leitfähige Oxidschichten
Szyszka, B.
Journal Article
2001Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Conference Paper, Journal Article
2001Verfahren zur Herstellung von leitfaehigen transparenten Strukturen sowie Verwendung von transparenten, leitfaehigen Oxidschichten zur Strukturierung von leitfaehigen, transparenten Bereichen
Klages, C.; Matthee, T.; Neumann, F.; Szyszka, B.
Patent
2000Effect of deposition parameters on optical and mechanical film properties of MF- and DC-sputtered Nb2O5-films
Hunsche, B.; Vergöhl, M.; Neuhäuser, H.; Klose, F.; Szyszka, B.; Matthee, T.
Conference Paper
2000Optimization of the reflectivity of magnetron sputter deposited silver films
Vergöhl, M.; Malkomes, N.; Szyszka, B.; Neumann, F.; Matthee, T.; Bräuer, G.
Conference Paper, Journal Article
2000Properties of TCO-films prepared by reactive magnetron sputtering
Szyszka, B.
Conference Paper
2000Reaktives Magnetronsputtern von transparenten und leitfähigen Oxidschichten
Szyszka, B.
Dissertation
2000Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ spectroscopic ellipsometry and plasma diagnostics
Vergöhl, M.; Hunsche, B.; Malkomes, N.; Matthee, T.; Szyszka, B.
Journal Article
2000Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ spectroscopic ellipsometry and plasma diagnostics
Vergöhl, M.; Hunsche, B.; Malkomes, N.; Matthee, T.; Szyszka, B.
Journal Article, Conference Paper
2000TCO-coating of polymer substrates using reactive MF-magnetron sputtering of ZnO:Al layers
Szyszka, B.; Jiang, X.; Höing, T.; Pöckelmann, R.; Bringmann, U.; Bräuer, G.
Conference Paper
2000Transparent and conductive ZnO:Al films prepared by reactive mf magnetron sputtering at high deposition rate
Szyszka, B.
Conference Paper
2000Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Conference Paper
1999Kein Reflex bei dickem Silber
Szyszka, B.
Journal Article
1999Reaktives Magnetronsputtern von TCO-Schichtsystemen - eine neue Technologie für kostengünstige wärmedämmende Beschichtungen
Szyszka, B.
Conference Paper
1999Reaktives Magnetronsputtern von transparenten und leitfähigen Oxidschichten
Szyszka, B.
Journal Article
1999Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Szyszka, B.
Conference Paper
1999Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Szyszka, B.
Journal Article
1998Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering
Jäger, S.; Szyszka, B.; Szczyrbowski, J.; Bräuer, G.
Journal Article
1997Entwicklung von transparenten und leitfähigen Oxidschichten
Weber, A.; Szyszka, B.; Bringmann, U.; Gadhesi, A.; Siegesmund, M.
Conference Paper
1997Optical and electrical properties of doped zinc oxide films prepared by AC reactive magnetron sputtering
Szyszka, B.; Jäger, S.
Conference Paper
1996Comparison of transparent conductive oxide thin films prepared by AC and DC reactive magnetron sputtering
Jäger, S.; Szyszka, B.; Szczyrbowski, J.; Bräuer, G.
Conference Paper