Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009A model of self-limiting residual acid diffusion for pattern doubling
Fuhrmann, J.; Fiebach, A.; Uhle, M.; Erdmann, A.; Szmanda, C.R.; Truong, C.
Conference Paper, Journal Article
1999Measuring acid generation efficiency in chemically amplified resists with all 3 beams
Szmanda, C.R.; Brainard, R.L.; Mackevich, J.F.; Awaji, A.; Tanaka, T.; Yamada, Y.; Bohland, J.; Tedesco, S.; Dalzotto, B.; Bruenger, W.; Torkler, M.; Fallmann, W.; Loeschner, H.; Kaesmaier, R.; Nealey, P.M.; Pawloski, A.R.
Journal Article