Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2004VERFAHREN UND VORRICHTUNG ZUR UNTERDRUECKUNG VON LICHTABSORPTION, LICHTSTREUUNG UND KONTAMINATION BEI WELLENLAENGEN UNTERHALB VON 200NM
Duparre, A.; Gliech, S.; Notni, G.; Steinert, J.
Patent
2002Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
Ferre-Borrull, J.; Steinert, J.; Duparre, A.
Journal Article
2002Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A.
Journal Article
2002Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications
Duparre, A.; Flemming, M.; Steinert, J.; Reihs, K.
Journal Article
2002Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M.
Journal Article
2001Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G.
Journal Article
2000Advanced Methods for surface and subsurface defect characterization of optical components
Steinert, J.; Gliech, S.; Wuttig, A.; Duparre, A.; Truckenbrodt, H.
Conference Paper
2000DUV/VUV light scattering measurement of optical components for lithography applications
Gliech, S.; Steinert, J.; Flemming, M.; Duparre, A.
Conference Paper
2000Light scattering of UV-optical components
Duparre, A.; Gliech, S.; Steinert, J.
Conference Paper
2000Microroughness analysis of thin film components for VUV applications
Ferre-Borrull, J.; Duparre, A.; Steinert, J.; Ristau, D.; Quesnel, E.
Conference Paper
1999Comparative study of the roughness of optical surfaces and thin films using atomic force microscopy, x-ray scattering, and light scattering methods
Kozhevnikov, I.V.; Asadchikov, V.E.; Duparre, A.; Gilev, O.N.; Havronin, N.A.; Krivonosov, Y.S.; Ostashev, V.I.; Steinert, J.
Conference Paper
1999DUV light scattering and morphology of ion beam sputtered fluoride coatings
Quesnel, E.; Petit dit Dariel, A.; Duparre, A.; Ferre-Borrull, J.; Steinert, J.
Conference Paper
1999Surface roughness and subsurface damage characterization of fused silica substrates
Wuttig, A.; Steinert, J.; Duparre, A.; Truckenbrodt, H.
Conference Paper