Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006Standardization of integrated ellipsometry for semiconductor manufacturing
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Richter, U.; Stehle, J.L.; Piel, J.-P.
Conference Paper
1998In situ spectroscopic ellipsometry for advanced process control in vertical furnaces
Lehnert, W.; Berger, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Stehle, J.L.; Piel, J.-P.; Neumann, W.
Conference Paper
1995Variable-angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings
Zuber, A.; Kaiser, N.; Stehle, J.L.
Journal Article
1994Variable-angle spectroscopic ellipsometry for deep UV characterization of dielectric coatings
Kaiser, N.; Zuber, A.; Stehle, J.L.
Conference Paper