Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1997Characterization of Nanocrystalline Ta(N,O) - Diffusions Barriers for Use in Semiconductor Metallization with Scanning Force Microscopy
Fischer, D.; Meissner, O.; Stavrev, M.; Wenzel, C.; Köhler, B.; Schreiber, J.
Conference Paper
1997Characterization of Nanocrystalline Ta(N,O) - Diffusions Barriers for Use in Semiconductor Metallization and Cu/Ta-Stacks with Scanning Force Microscopy
Meissner, O.; Fischer, D.; Schreiber, J.; Stavrev, M.; Wenzel, C.
Conference Paper