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| 2012 | Light trapping in a-SI:H/µc-SI:H tandem solar cells on differently textured TCOS
Dewald, W.; Feser, C.; Nowak, R.; Chakanga, K; Sergeev, O.; Sittinger, V.; Maydell, K. von | Conference Paper |
| 2012 | Recent developments in the field of transparent conductive oxide films for spectral selective coatings, electronics and photovoltaics
Szyszka, B.; Dewald, W.; Gurram, S.K.; Pflug, A.; Schulz, C.; Siemers, M.; Sittinger, V.; Ulrich, S. | Journal Article, Conference Paper |
| 2011 | Evaluation of textured TCOs for a-SI:H/µc-SI:H thin film solar cells by angular resolved light scattering measurements
Dewald, W.; Sittinger, V.; Szyszka, B.; Wippler, D.; Hüpkes, J.; Obermeyer, P.; Hamelmann, F.; Stiebig, H.; Säuberlich, F.; Severin, D.; Klein, S.; Rohde, M.; Schmidt, U. | Conference Paper |
| 2011 | In-line processing of hot wire CVD a-SI:H solar cells using different ZnO:Al morphologies as front contact
Sittinger, V.; Laukart, A.; Harig, T.; Höfer, M.; Dewald, W.; Britze, C.; Schäfer, L.; Szyszka, B.; Bräuer, G. | Conference Paper |
| 2011 | Influence of process parameter and magnetic field strength on DC magnetron sputtered ZnO:Al films from ceramic targets
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B. | Conference Paper |
| 2011 | Neue Produktionstechnik für leitfähige Schichten auf Glas
Szyszka, B.; Sittinger, V.; Ulrich, S.; Beontoro, W.; Werner, W. | Journal Article |
| 2011 | New approach towards an optimized light trapping morphology of Al-doped ZnO films
Sittinger, V.; Dewald, W.; Szyszka, B.; Säuberlich, F.; Stannowski, B. | Journal Article |
| 2011 | Reactive magnetron sputtering of ZnO:Al
Sittinger, V.; Dewald, W.; Szyszka, B.; Ruske, F. | Journal Article |
| 2011 | Simulation of plasma potential and ion energies in magnetron sputtering
Pflug, A.; Siemers, M.; Schwanke, C.; Febty Kurnia, B.; Sittinger, V.; Szyszka, B. | Journal Article |
| 2010 | Angular resolved light scattering of structured TCOs for the application in a-Si:H/µc-Si:H solar cells
Dewald, W.; Sittinger, V.; Szyszka, B.; Gordijn, A.; Hüpkes, J.; Hamelmann, F.; Stiebig, H.; Säuberlich, F. | Conference Paper |
| 2010 | Dünnschicht-Photovoltaik in Deutschland
Sittinger, V.; Diehl, W.; Szyszka, B. | Journal Article |
| 2010 | Heat treatable TCO film for position 1 based on HiPIMS
Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B. | Conference Paper |
| 2010 | Large area DC sputtered zinc oxide front TCO for a-Si/µc-Si tandem modules
Ring, S.; Säuberlich, F.; Wendelmuth, T.; Sittinger, V.; Szyszka, B. | Conference Paper |
| 2010 | New approach towards an optimized light trapping morphology of Al-doped ZnO films
Sittinger, V.; Dewald, W.; Szyszka, B.; Säuberlich, F.; Stannowski, B. | Conference Paper |
| 2010 | Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films
Sittinger, V.; Ruske, F.; Pflug, A.; Pflug, A.; Dewald, W.; Szyszka, B.; Dittmar, G. | Journal Article |
| 2010 | Rotatable target serial co-sputtering
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S.; Vergöhl, M.; Werner, W.; Kaiser, A.; Jung, S.; Bringmann, U.; Bräuer, G.; Köhl, D.; Austgen, M.; Wuttig, M.; Weis, H.; Herwig, W.; Polle, A.; Herlitze, L. | Conference Paper |
| 2010 | Sputteryield-Amplification. Ein lange bekannter, doch bisher kaum genutzter Effekt zur Ratenerhöhung von Sputterprozessen
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S. | Journal Article |
| 2010 | Transparent conducting oxide deposition techniques for thin-film photovoltaics
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B.; Ruske, F. | Journal Article |
| 2010 | Übersicht über die Einsatzgebiete und Anwendungen von transparent leitfähigen Oxiden (TCOs)
Sittinger, V.; Szyszka, B.; Ulrich, S.; Pflug, A.; Ruske, F.; Dewald, W. | Journal Article |
| 2009 | Anordnung umfassend eine transparente elektrisch leitfaehige Schicht, Anordnung umfassend eine photoelektrische Vorrichtung und Verfahren zur Herstellung einer transparenten Elektrode
Säuberlich, F.; Stannowski, B.; Wendelmuth, T.; Sittinger, V.; Szyszka, B. | Patent |
| 2009 | Comparison of different ceramic Al-doped ZnO target materials
Sittinger, V.; Dewald, W.; Werner, W.; Szyszka, B. | Journal Article |
| 2009 | Heat treatable indium tin oxide films deposited with high power pulse magnetron sputtering
Horstmann, F.; Sittinger, V.; Szyszka, B. | Conference Paper, Journal Article |
| 2009 | Heat treatable TCO film for position 1 based on HiPIMS
Sittinger, V.; Horstmann, F.; Boentoro, W.; Werner, W.; Szyszka, B. | Conference Paper |
| 2009 | HiPIMS - Technologie und Anwendungsfelder
Bandorf, R.; Vergöhl, M.; Werner, O.; Sittinger, V.; Bräuer, G. | Journal Article |
| 2009 | Influence of strong magnetic fields on the growth of DC magnetron sputtered ZNO:Al films from a ceramic target
Dewald, W.; Sittinger, V.; Werner, W.; Szyszka, B. | Conference Paper |
| 2009 | Large area deposition of Al-doped ZnO for Si-based thin film solar cells by magnetron sputtering
Sittinger, V.; Dewald, W.; Szyszka, B. | Conference Paper |
| 2009 | Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren
Pflug, A.; Siemers, M.; Sittinger, V.; Szyszka, B.; Ulrich, S. | Patent |
| 2009 | Microtribological rating of transparent conducting oxide for thin film solar cells
Yu, J.; Sittinger, V.; Weinhold, W.P.; Schüßler, T. | Journal Article |
| 2009 | Optical modeling of free electron behavior in highly doped ZnO films
Ruske, F.; Pflug, A.; Sittinger, V.; Szyszka, B.; Greiner, D.; Rech, B. | Journal Article |
| 2009 | Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/µc-Si:H solar cells
Dewald, W.; Sittinger, V.; Werner, W.; Jacobs, C.; Szyszka, B. | Journal Article |
| 2009 | Reactive magnetron sputtering of ZnO:Al
Szyszka, B.; Sittinger, V.; Dewald, W.; Pflug, A.; Ulrich, S.; Kaiser, A.; Werner, W. | Conference Paper |
| 2009 | Survey of thin film photovoltaics in Germany
Sittinger, V.; Diehl, W.; Szyszka, B. | Conference Paper |
| 2009 | Verfahren zum Beschichten eines Substrats mit aluminiumdotiertem Zinkoxid
Sittinger, V.; Szyszka, B.; Dewald, W.; Säuberlich, F.; Stanowski, B. | Patent |
| 2008 | Glasprodukt
Drescher, T.; Hangleiter, B.; Schuetz, J.; Matthai, A.; Walter, H.; Horstmann, F.; Szyszka, B.; Sittinger, V.; Werner, W.; Boentoro, T.W. | Patent |
| 2008 | High power pulsed magnetron sputtering of transparent conducting oxides
Sittinger, V.; Ruske, F.; Werner, W.; Jacobs, C.; Szyszka, B.; Christie, D.J. | Journal Article |
| 2008 | Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J. | Journal Article |
| 2008 | Research on promising applications for high power pulse magnetron sputtering
Sittinger, V.; Szyszka, B.; Bandorf, R.; Vergöhl, M.; Pflug, A.; Christie, D.J.; Ruske, F. | Conference Paper |
| 2008 | Verfahren zur Herstellung einer transparenten und leitfaehigen Metalloxidschicht durch gepulstes, hochionisierendes Magnetronsputtern
Horstmann, F.; Sittinger, V.; Szyszka, B. | Patent |
| 2007 | Determination of plasma parameters during deposition of ZnO films by ceramic and metallic targets and correlation with film properties
Wiese, R.; Kersten, H.; Hannemann, M.; Sittinger, V.; Ruske, F.; Menner, R. | Conference Paper, Journal Article |
| 2007 | Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Wiese, R. | Conference Paper, Journal Article |
| 2007 | Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications
Ruske, F.; Jacobs, C.; Sittinger, V.; Szyszka, B.; Werner, W. | Conference Paper, Journal Article |
| 2007 | Plasma for surface technology - examples of current developments
Bräuer, G.; Diehl, W.; Frach, P.; Kirchhoff, V.; Sittinger, V.; Szyszka, B.; Vergöhl, M. | Conference Paper |
| 2007 | Position and time resolved optical emission spectroscopy and film properties of ITO films deposited by high power pulsed magnetron sputtering
Sittinger, V.; Ruske, F.; Szyszka, B.; Christie, D.J.; Wallendorf, T. | Conference Paper |
| 2006 | Deposition of high conductivity ITO films by high power pulsed magnetron sputtering (HPPMS)
Sittinger, V.; Ruske, F.; Gerloff, C.; Werner, W.; Szyszka, B.; Christie, D.J. | Conference Paper |
| 2006 | High power pulsed magnetron sputtering (HPPMS)
Christie, D.; Szyszka, B.; Pflug, A.; Sittinger, V.; Ruske, F.; Werner, W. | Conference Paper |
| 2006 | Plasma characterization tools and application to reactive sputtering of Al-doped ZnO thin films
Sittinger, V.; Ruske, F.; Szyszka, B.; Wiese, R.; Kersten, H. | Journal Article |
| 2006 | Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B. | Journal Article |
| 2006 | Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B. | Conference Paper, Journal Article |
| 2006 | Reactive deposition of Al-doped ZnO thin films using high power pulsed magnetron sputtering (HPPMS)
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J. | Conference Paper |
| 2006 | Stability of CIGS minimodules with ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Menner, R.; Powalla, M.; Dimmler, B. | Conference Paper |
| 2006 | Verfahren zur Abscheidung einer Oxidschicht auf Absorbern von Solarzellen, Solarzelle und Verwendung des Verfahrens
Sittinger, V.; Ruske, F.; Szyszka, B. | Patent |
| 2006 | Verfahren zur Regelung eines reaktiven Hochleistungs-Puls-Magnetronsputterprozesses und Vorrichtung hierzu
Ruske, F.; Sittinger, V.; Szyszka, B. | Patent |
| 2006 | ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Hüpkes, J.; Schöpe, G.; Stiebig, H. | Journal Article |
| 2005 | Aufskalierung reaktiv gesputterter ZnO:Al-Schichten für Dünschicht-Solarmodule
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B. | Conference Paper |
| 2005 | Hydrogen doping of DC sputtered ZnO:Al films from novel target material
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van; Dietrich, K.; Rix, R. | Journal Article |
| 2005 | Hydrogen doping of ZnO:Al films deposited by pulsed DC-sputtering of ceramic targets
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.-U. van; Dietrich, K.; Rix, R. | Conference Paper |
| 2005 | Leuchtmittel mit einem Schichtsystem zur Reflektierung abgegebener infraroter Strahlung
Szyszka, B.; Pflug, A.; Sittinger, V.; Hunsche, B.; Bewig, L.; Kuepper, T. | Patent |
| 2005 | Model prediction and emprical confirmation of rate scaling with peak power for high power pulse magnetron sputtering (HPPMS) deposition of thin Ag films
Christie, D.J.; Pflug, A.; Sittinger, V.; Ruske, F.; Siemers, M.; Szyszka, B.; Geisler, M. | Conference Paper |
| 2005 | Optimized TCO deposition and etching for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Szyszka, B. | Journal Article |
| 2005 | Recent progress in amorphous and microcrystalline silicon based solar cell technology
Rech, B.; Repmann, T.; Hüpkes, J.; Berginski, M.; Stiebig, H.; Beyer, W.; Sittinger, V.; Ruske, F. | Conference Paper |
| 2005 | Thin film solar cell technology in Germany
Diehl, W.; Sittinger, V.; Szyszka, B. | Journal Article |
| 2005 | Tuning the reactive magnetron sputtering process of Al-doped ZnO on large area substrates for amorphous and microcrystalline silicon solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Schöpe, G.; Hüpkes, J. | Conference Paper |
| 2005 | Wasserstoffdotierung von ZnO:Al-Schichten aus keramischen Targets
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van | Conference Paper |
| 2005 | ZnO:Al films for a-Si:H thin film solar cells
Szyszka, B.; Sittinger, V.; Ruske, F.; Werner, W.; Pflug, A.; Rech, B. | Conference Paper |
| 2004 | Combination of X-ray reflectometry and optical spectroscopy as a new tool for thin films parameter determination
Pflug, A.; Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B. | Conference Paper |
| 2004 | Erratum to "comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering" (J. Crystal Growth 253 (2003) 117-128)
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Xu, S.H.; Werner, W.; Heide, G. | Corrigendum |
| 2004 | Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories
Pflug, A.; Sittinger, V.; Ruske, M.; Szyszka, B.; Dittmar, G. | Conference Paper, Journal Article |
| 2004 | Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B. | Conference Paper |
| 2004 | Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B. | Conference Paper |
| 2003 | Comparison of the ZnO:Al films deposited in static and dynamic modes by reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Xu, S.H.; Werner, W.; Heide, G. | Journal Article |
| 2003 | Growth behaviours and properties of the ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Heide, G.; Szyszka, B.; Sittinger, V.; Werner, W. | Journal Article |
| 2003 | Process simulation for advanced large area optical coatings
Pflug, A.; Szyszka, B.; Sittinger, V.; Niemann, J. | Conference Paper |
| 2003 | State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P. | Journal Article |
| 2003 | Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Pflug, A. | Journal Article |
| 2003 | Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A. | Journal Article |
| 2002 | Modeling of NIR free carrier absorption in aluminum-doped zinc oxide layers using the simulation system RIG-VM
Pflug, A.; Sittinger, V.; Szyszka, B.; Dittmar, G. | Conference Paper |
| 2002 | Simulation of reactive magnetron sputtering kinetics in real in-line processing chambers
Pflug, A.; Malkomes, N.; Sittinger, V.; Szyszka, B. | Conference Paper |
| 2002 | State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P. | Conference Paper |
| 2002 | Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A. | Conference Paper |
| 2002 | Uniformity in large area ZnO:Al films prepared by reactive midfrequency magnetron sputtering
Hong, R.J.; Jiang, X.; Sittinger, V.; Szyszka, B.; Höing, T.; Bräuer, G.; Heide, G.; Frischat, G.H. | Journal Article |
| 2001 | Large area deposition of transparent and conductive ZnO:Al layers by reactive mid frequency magnetron sputtering
Szyszka, B.; Höing, T.; Jiang, X.; Bierhals, A.; Malkomes, N.; Vergöhl, M.; Sittinger, V.; Bringmann, U.; Bräuer, G. | Conference Paper |