Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1984Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputtering
Schiller, S.; Heisig, U.; Beister, G.; Steinfelder, K.; Strümpfel, J.; Korndörfer, C.; Sieber, W.
Journal Article
1984Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode
Schiller, S.; Beister, G.; Sieber, W.
Journal Article
1981Influence of deposition parameters on the optical and structural properties of TiO2 films produced by reactive D.C. plasmatron sputtering
Schiller, S.; Beister, G.; Sieber, W.; Schirmer, G.; Hacker, E.
Journal Article
1981Reaktives DC-Hochratezerstäuben mit dem Plasmatron für industrielle Anwendungen
Schiller, S.; Heisig, U.; Steinfelder, K.; Strümpfel, J.; Sieber, W.
Journal Article
1980Features of and in situ measurement on absorbing TiOx films produced by reactive D.C. magnetron-plasmatron sputtering
Schiller, S.; Beister, G.; Schneider, S.; Sieber, W.
Journal Article