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| 2017 | BEoL post CMP cleaning challenges for 22 nm FD-SOI and beyond
Koch, Johannes; Rehschuh, Stephan; Gerlich, Lukas; Dhavamani, Abitha; Steinke, Philipp; Krause, Robert; Naue, Johannes; Bott, Sascha; Vasilev, Boris; Breuer, Dirk; Seidel, Robert; Preusse, Axel; Bartha, Johann Wolfgang; Uhlig, Benjamin | Conference Paper |
| 2017 | SARA - Subjective and objective data acquisition for physiotherapy treatment support
Bieber, Gerald; Seidel, Robert; Portwich, Rene | Conference Paper |
| 2017 | Transarterial embolization (TAE) as add-on to percutaneous radiofrequency ablation (RFA) for the treatment of renal tumors: Review of the literature, overview of state-of-the-art embolization materials and further perspective of advanced image-guided tumor ablation
Sommer, C.M.; Pallwein-Prettner, L.; Vollherbst, D.F.; Seidel, R.; Rieder, C.; Radeleff, B.A.; Kauczor, H.U.; Wacker, F.; Richter, G.M.; Bücker, A.; Rodt, T.; Massmann, A.; Pereira, PL. | Journal Article |
| 2015 | Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment
Calvo, J.; Steinke, P.; Wislicenus, M.; Gerlich, L.; Seidel, R.; Clauss, E.; Uhlig, B. | Conference Paper |
| 2015 | Porous Ultra Low-k Material Integration Through An Extended Dual Damascene Approach: Pre-/ Post-CMP Curing Comparison
Calvo, J.; Koch, J.; Thrun, X.; Seidel, R.; Clauss, E.; Uhlig, B. | Conference Paper |
| 2015 | Verification of E-Beam direct write integration into 28nm BEOL SRAM technology
Hohle, Christoph; Choi, Kang-Hoon; Gutsch, Manuela; Hanisch, Norbert; Seidel, Robert; Steidel, Katja; Thrun, Xaver; Werner, Thomas | Conference Paper |
| 2014 | Development and Characterization of a High Voltage Amplifier ASIC for MEMS based Piezoelectric Actuator Active Flow Control
Köhler, D.; Seidel, R.; Helke, C.; Hiller, K.; Schüller, M.; Lipowski, M. | Conference Paper |
| 2014 | High Voltage Amplifier ASIC for High Capacitive Load MEMS based Piezoelectric Actuators
Köhler, D.; Seidel, R.; Helke, C.; Hiller, K.; Schüller, M.; Lipowski, M. | Conference Paper |
| 2014 | Integration of e-beam direct write in BEOL processes of 28nm SRAM technology node using mix and match
Gutsch, Manuela; Choi, Kang-Hoon; Hanisch, Norbert; Hohle, Christoph; Steidel, Katja; Thrun, Xaver; Seidel, Robert; Werner, Thomas | Conference Paper |
| 2013 | Influence of high-energy electron irradiation on ultra-low-k characteristics and transistor performance
Steidel, Katja; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Hohle, Christoph; Seidel, Robert; Thrun, Xaver; Werner, Thomas | Conference Paper |
| 2012 | Biologically inspired products
Masselter, T.; Barthlott, W.; Bauer, G.; Bertling, J.; Cichy, F.; Ditsche-Kuru, P.; Gallenmüller, F.; Gude, M.; Haushahn, T.; Hermann, M.; Immink, H.; Knippers, J.; Lienhard, J.; Luchsinger, R.; Lunz, K.; Mattheck, C.; Milwich, M.; Mölders, N.; Neinhuis, C.; Nellesen, A.; Poppinga, S.; Rechberger, M.; Schleicher, S.; Schmitt, C.; Schwager, H.; Seidel, R.; Speck, O.; Stegmaier, T.; Tesari, I.; Thielen, M.; Speck, T. | Book Article |
| 2012 | Polymer based coherent receiver for next generation optical access network
Seidel, R.; Theurer, A.; Zawadzki, C.; Zhang, Z.; Keil, N.; Matiss, A.; Steffan, A.G. | Conference Paper |
| 2012 | Polymer based hybrid integrated coherent receiver for next generation optical access networks
Theurer, A.; Seidel, R.; Ziegler, R.; Zawadzki, C.; Zhang, Z.; Keil, N.; Matiss, A.; Steffan, A.G. | Conference Paper |
| 1999 | Synchronously working micromirrors for beam steering
Kurth, S.; Kehr, K.; Mehner, J.; Kaufmann, C.; Hahn, R.; Seidel, R.; Dötzel, W.; Gessner, T. | Conference Paper |
| 1996 | Combined Surface Treatment of Forging Tools by Plasma Nitriding and PACVD
Doege, E.; Westkämper, E.; Seidel, R.; Romanowski, C.; Andreis, G.; Morlok, O. | Conference Paper |
| 1992 | Investigations of different stainless steel MIM feedstocks with a novel binder system
Petzoldt, F.; Veltl, G.; Kunze, H.-D.; Seidel, R. | Conference Paper |
| 1984 | Digital stochastic simulation - a method for planning and optimizing the availability of manufacturing systems
Seidel, R. | Conference Paper |
| 1983 | Optimization of the availability of complex manufacturing systems - methods and examples
Seidel, R. | Journal Article |
| 1982 | Flexible manufacturing cells - modules of manufacturing systems for complex workpieces in small lot sizes
Warnecke, H.-J.; Seidel, R.; Weber, T. | Journal Article |
| 1982 | Methods for Optimizing The Availability of Manufacturing Systems
Warnecke, H.-J.; Seidel, R. | Journal Article |
| 1982 | Neustrukturierung einer Praezisionswerkzeug-fertigung. Entwicklung von Flexiblen Fertigungszellen
Seidel, R. | Journal Article |
| 1981 | Automatische Handhabung Formkomplexer Wellenförmiger Werkstücke mit Hilfe von Adaptiven Einrichtungen
Seidel, R.; Roth, H.-P. | Journal Article |
| 1981 | Methods for Optimizing The Availability of Manufacturing Systems
Warnecke, H.-J.; Seidel, R. | Conference Paper |
| 1981 | Optimization of the availability of complex manufacturing systems - methods and examples
Seidel, R. | Conference Paper |
| 1980 | Technische Investitionsplanung: Automatische Produktion Kann Kostenvorteile der Niedriglohnlaender Aufheben
Seidel, R.; Vettin, G. | Journal Article |