Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018MEMS basierte Ultraschallwandler für die Anwendung in flüssigen und gasförmigen Umgebungen und Möglichkeiten der CMOS Integration
Lange, Nicolas; Grafe, Mario; Koch, Sandro; Kaden, Christiane; Schulze, Matthias
Presentation
2018MEMS integration on foundry-fabricated CMOS backplanes
Hohle, Christoph; Schulze, Matthias
Book Article
2018Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI
Kaden, Christiane; Schulze, Matthias
Presentation
2018Robust Communication for Cooperative Driving Maneuvers
Sawade, Oliver; Schulze, Matthias; Radusch, Ilja
Journal Article
2017How to integrate MEMS on foundry-fabricated CMOS backplanes
Schulze, Matthias; Hohle, Christoph; Friedrichs, Martin
Conference Paper
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2016Requirements and challenges for MEMS on CMOS
Schulze, Matthias
Presentation