Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Assessing surface imperfections of freeforms using a robotic light scattering sensor
Herffurth, T.; Trost, M.; Beier, M.; Steinkopf, R.; Heidler, N.; Pertermann, T.; Schröder, S.
Journal Article
2019Computer Vision for Medical Infant Motion Analysis: State of the Art and RGB-D Data Set
Hesse, Nikolas; Bodensteiner, Christoph; Arens, Michael; Hofmann, Ulrich G.; Weinberger, Raphael; Schroeder, Sebastian A.
Conference Paper
2019Identification of relevant parameters for the metrological adjustment of thermal machine models
Schroeder, S.; Kauschinger, B.; Hellmich, A.; Ihlenfeldt, S.; Phetsinorath, D.
Journal Article
2019International round-robin experiment for angle-resolved light scattering measurement
Finck, A. von; Herffurth, T.; Duparre, A.; Schröder, S.; Lequime, M.; Zerrad, M.; Liukaityte, S.; Amra, C.; Achour, S.; Chalony, M.; Kuperman, Q.; Cornil, Y.; Bialek, A.; Goodman, T.; Greenwell, C.; Gur, B.; Brinkers, S.; Otter, G.; Vosteen, A.; Stover, J.; Vink, R.; Deep, A.; Doyle, D.
Journal Article
2019Low thermal conductivity boulder with high porosity identified on C-type asteroid (162173) Ryugu
Grott, M.; Knollenberg, J.; Hamm, M.; Ogawa, K.; Jaumann, R.; Otto, K.A.; Delbo, M.; Michel, P.; Biele, J.; Neumann, W.; Knapmeyer, M.; Kührt, E.; Senshu, H.; Okada, T.; Helbert, J.; Maturilli, A.; Müller, N.; Hagermann, A.; Sakatani, N.; Tanaka, S.; Arai, T.; Mottola, S.; Tachibana, S.; Pelivan, I.; Drube, L.; Vincent, J.-B.; Yano, H.; Pilorget, C.; Matz, K.D.; Schmitz, N.; Koncz, A.; Schröder, S.E.; Trauthan, F.; Schlotterer, M.; Krause, C.; Ho, T.-M.; Moussi-Soffys, A.
Journal Article
2019On the Properties of Nanoporous SiO2 Films for Single Layer Antireflection Coating
Ghazaryan, L.; Sekman, Y.; Schröder, S.; Mühlig, C.; Stevanovic, I.; Botha, R.; Aghaee, M.; Creatore, M.; Tünnermann, A.; Szeghalmi, A.
Journal Article
2019Ultraprecision optics fabrication and characterization. Special Section Guest Editorial
Kim, D.W.; Suratwala, T.; Schröder, S.
Journal Article
2018Angular resolved power spectral density analysis for improving mirror manufacturing
Pertermann, T.; Hartung, J.; Beier, M.; Trost, M.; Schröder, S.; Risse, S.; Eberhardt, R.; Tünnermann, A.; Gross, H.
Journal Article
2018Characterization of Large-Area Crystalline Coatings for Next-Generation Gravitational Wave Detectors
Cole, G.D.; Deutsch, C.; Follman, D.; Heu, P.; Zederbauer, T.; Rai, A.; Bachmann, D.; Finck, A. von; Schröder, S.; Koch, P.; Lück, H.
Conference Paper
2018Infant automated motion recognition technology using RGB-depth sensors for marker-less, rater-independent detection of abnormal movements in early infancy - in a motion project
Schröder, Sebastian; Hesse, Nikolas; Tacke, Uta; Weinberger, Raphael; Schulz, Anne; Vill, Katharina; Blaschek, Astrid; Gerstl, Lucia; Heinen, Florian; Bodensteiner, Christoph; Arens, Michael; Müller-Felber, Wolfgang
Abstract
2018Learning an infant body model from RGB-D data for accurate full body motion analysis
Hesse, Nikolas; Pujades, Sergi; Romero, Javier; Black, Michael J.; Bodensteiner, Christoph; Arens, Michael; Hofmann, Ulrich G.; Tacke, Uta; Hadders-Algra, Mijna; Weinerger, Raphael; Müller-Felber, Wolfgang; Schröder, Sebastian A.
Conference Paper
2018Roughness and Scatter in Optical Coatings
Trost, M.; Schröder, S.
Conference Paper
2018Simulation of defect-induced scattering in multilayer coatings
Zhang, L.; Zhang, J.; Schröder, S.; Trost, M.; Jiao, H.; Wang, Z.; Cheng, X.
Conference Paper
2017Agile Produktentwicklung
Schuh, Günther; Diels, F.; Ortlieb, C.; Riesener, M.; Schröder, Stephan
Conference Paper
2017Body pose estimation in depth images for infant motion analysis
Hesse, Nikolas; Schröder, Sebastian A.; Müller-Felber, Wolfgang; Bodensteiner, Christoph; Arens, Michael; Hofmann, Ulrich G.
Conference Paper
2017Defined wetting properties of optical surfaces
Felde, N.; Coriand, L.; Schröder, S.; Duparré, A.; Tünnermann, A.
Journal Article
2017A flux conserving meshfree method for conservation laws
Suchde, P.; Kuhnert, J.; Schröder, S.; Klar, A.
Journal Article
2017Light scattering characterization of optical components for space applications
Hauptvogel, M.; Trost, M.; Costille, A.; Penka, D.; Zeitner, U.D.; Schröder, S.; Duparré, A.
Conference Paper
2017Light scattering in poly(vinyl alcohol) hydrogels reinforced with nanocellulose for ophthalmic use
Tummala, G.K.; Felde, N.; Gustafsson, S.; Bubholz, A.; Schröder, S.; Mihranyan, A.
Journal Article
2017Light scattering techniques for the characterization of optical components
Hauptvogel, M.; Schröder, S.; Herffurth, T.; Trost, M.; Finck, A. von; Duparré, A.; Weigel, T.
Conference Paper
2017Markerless motion analysis for early detection of infantile movement disorders
Hesse, Nikolas; Schroeder, Sebastian; Müller-Felber, Wolfgang; Bodensteiner, Christoph; Arens, Michael; Hofmann, Ulrich G.
Conference Paper
2017Optische Beschichtung und Verfahren zur Herstellung einer optischen Beschichtung mit verminderter Lichtstreuung
Finck, Alexander von; Schröder, Sven; Wilbrandt, Steffen; Stenzel, Olaf; Duparré, Angela
Patent
2017Porosity and optical properties of zirconia films prepared by plasma ion assisted deposition
Franke, C.; Stenzel, O.; Wilbrandt, S.; Schröder, S.; Coriand, L.; Felde, N.; Tünnermann, A.
Journal Article
2017Reducing light scattering from surface contaminations by thin film design
Finck, A. von; Wilbrandt, S.; Stenzel, O.; Schröder, S.
Journal Article
2017Reducing light scattering in high-reflection coatings through destructive interference at fully correlated interfaces
Zhang, J.; Wu, H.; Jiao, H.; Schröder, S.; Trost, M.; Wang, Z.; Cheng, X.
Journal Article
2017Scattering properties of hot isostatic pressed multispectral zinc sulfide
Trost, M.; Felde, N.; Schröder, S.; Joseph, S.; Shienmann, A.
Conference Paper
2017Spectral laser damage testing of optical materials
Schröder, S.; Garrick, M.; Munser, A.-S.; Trost, M.
Journal Article
2017Surface characterization of high-end optical components using light scattering
Schröder, S.; Trost, M.; Herffurth, T.; Hauptvogel, M.; Sachkov, M.E.; Zhupanov, V.G.
Conference Paper
2016 Industrie 4.0. Internationaler Benchmark, Zukunftsoptionen und Handlungsempfehlungen für die Produktionsforschung
Gausemeier, J.; Klocke, F.; Dülme, C.; Eckelt, D.; Kabasci, D.; Kohlhuber, M.; Schön, N.; Schröder, S.
Report
2016Determination of the Wenzel roughness parameter by the Power Spectral Density of functional Alumina surfaces
Jardim, P.L.G.; Horowitz, F.; Felde, N.; Schröder, S.; Coriand, L.; Duparre, A.
Journal Article
2016Geschickt kombiniert
Hauptvogel, M.; Schmid, I.; Schröder, S.; Kühmstedt, P.; Notni, G.
Journal Article
2016Image processing of light-scattering images for the qualitative surface analysis
Haar, L.; Anding, K.; Schröder, S.; Hauptvogel, M.; Notni, G.
Conference Paper
2016Linking Rayleigh-Rice theory with near linear shift invariance in light scattering phenomena
Stover, J.C.; Schroeder, S.; Staats, C.; Lopushenko, V.; Church, E.
Conference Paper
2016Next generation hardware development
Schuh, Günther; Wetterney, Tim; Lau, Felix; Schröder, Stephan
Conference Paper
2016Next generation hardware development: Requirements and configuration options for the organization of procurement activities in the context of agile new product development
Schuh, Günther; Schröder, Stephan; Lau, Felix; Wetterney, Tim
Conference Paper
2016Next generation hardware development: The role of technology intelligence to reduce uncertainty in agile new product development
Schuh, G.; Lau, F.; Schröder, S.; Wettemey, T.
Conference Paper
2016Reduction of light scattering from contamination by thin film coating design
Finck, Alexander von; Wang, Yuan; Schröder, Sven; Wilbrandt, Steffen; Stenzel, Olaf; Duparré, Angela
Conference Paper
2016Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering
Trost, M.; Schröder, S.; Yulin, S.; Duparre, A.
Conference Paper
2016Scatter reduction of calcium fluoride based DUV optics
Wang, J.; Cangemi, M.J.; Oudard, J.F.; Trost, M.; Herffurth, T.; Schröder, S.; Duparre, A.
Conference Paper
2016Spectral damage testing of thin film coatings
Schröder, S.; Garrick, M.; Trost, M.; Wilbrandt, S.; Stenzel, O.; Duparre, A.
Conference Paper
2016STRING 3: An advanced groundwater visualization tool
Schröder, S.; Michel, I.; Biedert, T.; Gräfe, M.; Seidel, T.; König, C.
Abstract
2016TAIKO wafer ball attach
Schröder, S.; Schröder, M.; Reinert, W.; Priewasser, K.H.
Conference Paper
2015Angle resolved backscatter of HfO2/SiO2 multilayer mirror at 1064 nm
Wang, J.; Schröder, S.; Trost, M.; Hauptvogel, M.; Duparre, A.
Conference Paper
2015Concept for structuring and derivation of technology fields in the context of Cyber-Physical Production Systems (CPPS)
Schuh, Günther; Schröder, Stephan; Schön, Nico; Kabasci, Patrick; Drescher, Toni
Journal Article
2015Einkauf in Technologie-Start-Ups
Schuh, Günther; Schröder, Stephan
Journal Article
2015Origins of light scattering from thin film coatings
Schröder, Sven; Trost, Marcus; Garrick, Méabh; Duparré, Angela; Cheng, Xinbin; Zhang, Jinlong; Wang, Zhanshan
Journal Article
2015Parallelized multichannel BSDF measurements
Finck, A. von; Trost, M.; Schröder, S.; Duparré, A.
Journal Article
2015Standardization of light scattering measurements
Schröder, S.; von Finck, A.; Duparré, A.
Journal Article
2015STRING 3: Full 3D visualization of groundwater flow
Schröder, S.; Michel, I.; Seidel, T.; König, C.M.
Conference Paper
2015Sub-aperture EUV collector with dual-wavelength spectral purity filter
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, F.; Laubis, C.
Conference Paper
2014Angle-resolved diffuse reflectance and transmittance
Germer, T.A.; Stover, J.C.; Schröder, S.
Book Article
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, A. von; Herffurth, T.; Schröder, S.; Duparre, A.; Sinzinger, S.
Journal Article
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Sinzinger, Stefan
Journal Article
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Light scattering characterization of optical components – BRDF, BTDF and scatter losses
Schröder, Sven; Finck, Alexander von; Katsir, Dina; Zeitner, Uwe; Duparré, Angela
Conference Paper
2014Optical scattering
Schröder, Sven
Conference Paper
2014Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Scattering reduction through oblique multilayer deposition
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2014Special Section Guest Editorial: Optical Fabrication, Testing, and Metrology
Malacara-Hernández, D.; Schmit, J.; Schröder, S.
Journal Article
2014Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Cheng, Xinbin; Zhang, Jinlong; Duparré, Angela
Journal Article
2013Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John
Conference Paper
2013Compact light scatter techniques for optical coatings
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela
Conference Paper
2013Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Estimating hemispherical scatter from incident plane measurements of isotropic samples scattering from both bulk and surface irregularities
Stover, J.C.; Schroeder, S.; Finck, A. von; Unglaub, D.; Duparré, A.
Conference Paper
2013Evaluation of subsurface damage by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schmitz, David; Schröder, Sven; Duparré, Angela; Tünnermann, Andreas
Journal Article
2013Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Journal Article
2013Low-scatter HfO2/SiO2 multilayer enhanced mirror for 1064 nm
Wang, J.; Schreiber, H.; Schröder, S.; Hauptvogel, M.; Duparré, A.
Conference Paper
2013Modellierung des Wärmeaustauschs Maschine-Umgebung
Drossel, Welf-Guntram; Ihlenfeldt, Steffen; Zwingenberger, Carsten; Großmann, Knut; Schroeder, S.
Conference Paper
2013Roughness and optical losses of rugate coatings
Herffurth, Tobias; Trost, Marcus; Schröder, Sven; Täschner, Kerstin; Bartzsch, Hagen; Frach, Peter; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2013Roughness, optical and wetting properties of nanostructured thin films
Schröder, Sven; Coriand, Luisa; Duparré, Angela
Conference Paper
2013Scattering reduction through oblique multilayer deposition
Trost, Marcus; Schröder, Sven; Duparré, Angela; Tünnerman, Anderas
Conference Paper
2013Spectral angle resolved scattering of thin film coatings
Schröder, Sven; Unglaub, David; Trost, Marcus; Duparré, Angela
Conference Paper
2013Stochastic methods for fiber-droplet collisions in flow processes
Schröder, S.
Dissertation
2013Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Trost, Marcus; Schröder, Sven; Duparré, Angela; Risse, Stefan; Feigl, Torsten; Zeitner, Uwe D.; Tünnermann, Andreas
Journal Article
2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Estimating hemispherical scatter from incident plane measurements of isotropic samples
Stover, John; Schröder, Sven; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Feature-based visualization of dense integral line data
Schröder, S.; Obermaier, H.; Garth, C.; Joy, K.I.
Conference Paper
2012Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela
Conference Paper
2012Light scattering-based measurement of relevant surface roughness
Schröder, Sven; Trost, Marcus; Coriand, Luisa; Duparré, Angela
Conference Paper
2012Noise investigation in manufacturing systems
Aurich, J.C.; Yang, X.; Schröder, S.; Hering-Bertram, M.; Biedert, T.; Hagen, H.; Hamann, B.
Journal Article
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Quality assessment of precision optical surfaces through light scattering techniques
Schröder, Sven; Finck, Alexander von; Herffurth, Tobias; Duparré, Angela
Conference Paper
2012Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas
Conference Paper
2012Schichtsystem für eine transparente Elektrode und Verfahren zu dessen Herstellung
Füchsel, Kevin; Schröder, Sven; Pulsack, Julian
Patent
2012Sophisticated light scattering techniques from the VUV to the IR regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela
Conference Paper
2012Total integrated scatter from surfaces with arbitrary roughness, correlation widths and incident angles
Harvey, James; Schröder, Sven; Choi, Narak; Duparré, Angela
Journal Article
2012Upper roughness limitations on the TIS/RMS relationship
Stover, John; Schröder, Sven; Duparré, Angela; Germer, Thomas A.
Conference Paper
2012Verfahren zur hochempfindlichen Streulichtmessung
Trost, Marcus; Schröder, Sven; Herffurth, Tobias
Patent
2012Visualization of flow behavior in earth mantle convection
Schröder, S.; Peterson, J.A.; Obermaier, H.; Kellogg, L.H.; Joy, K.I.; Hagen, H.
Journal Article
2012Vorrichtung und Verfahren zur winkelaufgelösten Streulichmessung
Trost, Marcus; Schröder, Sven; Hauptvogel, Matthias; Nothni, G.; Duparré, Angela; Feigl, T.
Patent
2011Angle resolved scattering: An effective method for characterizing thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparre, A.
Journal Article
2011Bestimmung der Messunsicherheit im Mikrometer-Bereich - Strategien, Modelle und Einflussfaktoren
Tan, Özgür; Krah, Thomas; Neuschaefer-Rube, Ulrich; Ehrig, Wiebke; Herffurth, Tobias; Schröder, Sven; Lyda, Wolfram; Eigenbrod, Hartmut; Hoffmann, R.; Weißensee, Karina; Apel, Sebastian; Pedrini, Giancarlo; Gaspar, J.; Schrader, Christian; Zschiegner, N.
Book Article
2011Determining parametric TIS behavior from optical fabrication metrology data
Harvey, J.E.; Schröder, S.; Choi, N.; Duparre, A.
Conference Paper
2011Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E.
Conference Paper
2011Impact of surface roughness on scatter losses and the scattering distribution of surfaces and thin film coatings
Schröder, S.; Herffurth, T.; Duparre, A.
Conference Paper
2011Influence of bonding process parameters on chip cratering and phase formation of Cu ball bonds on AlSiCu during storage at 200 °c
Schmitz, S.; Schneider-Ramelow, M.; Schröder, S.
Journal Article
2011Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2011Modeling of light scattering in different regimes of surface roughness
Schröder, S.; Duparre, A.; Coriand, L.; Tünnermann, A.; Penalvar, D.H.; Harvey, J.E.
Journal Article
2011Noise investigation in manufacturing: a simulation and virtual reality enhanced method
Ya; Yang, X.; Schröder, S.; Hering-Bertram, M.; Biedert, T.; Hagen, H.; Aurich, J.C.
Conference Paper
2011Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Conference Paper
2011Stochastic droplet-fiber collisions
Schröder, S.; Olawsky, F.; Hering-Bertram, M.; Hagen, H.
Journal Article, Conference Paper
2010Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: Measurement and analysis
Schröder, S.; Herffurth, T.; Trost, M.; Duparre, A.
Journal Article
2010ARS: An effective method for characterizing structural and alteration effects in thin film coatings
Schröder, S.; Herffurth, T.; Blaschke, H.; Duparré, A.
Conference Paper
2010Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N.
Conference Paper
2010Bewertung der Poliergüte schwer zugänglicher Oberflächen durch Streulichtmethoden
Schröder, S.; Trost, M.; Herffurth, T.; Duparré, A.
Abstract
2010Influence of substrate finish and thin film roughness on the optical performance of Mo/Si multilayers
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.
Conference Paper
2010Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N.
Journal Article
2010PSD-Analyse: Schlüssel zur funktionsgerechten Rauheitscharakterisierung optischer Oberflächen
Coriand, L.; Schröder, S.; Duparré, A.
Abstract
2010Roughness measurement of ultra precision surfaces using light scattering techniques and analysis
Herffurth, T.; Schröder, S.; Trost, M.; Duparre, A.
Conference Paper
2010Scattering from moderately rough interfaces between two arbitrary media
Harvey, J.E.; Choi, N.; Krywonos, A.; Schröder, S.; Penalver, D.H.
Conference Paper
2010Scattering of roughened TCO films - Modeling and measurement
Schröder, S.; Duparre, A.; Füchsel, K.; Kaiser, N.; Harvey, J.E.; Tünnermann, A.
Conference Paper
2010Separation von Streulichteffekten zur zerstörungsfreien Detektion von Sub-Surface-Damage
Schmitz, D.; Schröder, S.; Duparré, A.
Abstract
2009Angle resolved scattering: A method for investigations of laser induced damage
Schröder, S.; Duparre, A.
Conference Paper
2009Authoring of multi-platform services
Schröder, S.; Hoffmann, D.; Kuhhirt, U.
Conference Paper
2009Roughness determination of ultra thin multilayer coatings in cross-section images with poor SNR using edge localization
Brauer-Burchardt, C.; Schröder, S.; Trost, M.; Kuhmstedt, P.; Duparre, A.; Notni, G.
Conference Paper
2009Vorrichtung und Verfahren zur winkelaufgeloesten Streulichtmessung
Schröder, S.; Duparre, A.; Herffurth, T.; Notni, G.
Patent
2008Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A.
Journal Article
2008Finish assessment of complex surfaces by advanced light scattering techniques
Schröder, S.; Duparre, A.
Conference Paper
2008Fusion multimodaler Daten am Beispiel eines Mikrolinsen-Arrays
Regin, Johan; Westkämper, Engelbert; Schröder, Sven
Journal Article
2008Hochreflektierende EUV/Röntgen-Mehrschichtspiegel
Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N.
Journal Article
2008Light scattering of optical components at 193 nm and 13.5 nm
Schröder, S.
Dissertation
2008Roughness evolution and scatter losses of multilayers for 193 nm optics
Schröder, S.; Duparre, A.; Tünnermann, A.
Journal Article
2008Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A.
Conference Paper
2008Wavelet filtering of fractal surfaces
Bakucz, P.; Schröder, S.; Krüger-Sehm, R.; Duparre, A.; Tünnermann, A.
Journal Article
2007Characterization of thin films and bulk materials for DUV optical components
Schröder, S.; Kamprath, M.; Duparre, A.
Conference Paper
2007EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2007Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2007Roughness evolution and scatter losses of multilayers for 193 nm
Schröder, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2006Bewertung von Nanorauheiten durch Streulichtmessung
Schröder, S.; Duparre, A.; Tünnermann, A.
Journal Article
2006Bulk scattering properties of synthetic fused silica at 193 nm
Schröder, S.; Kamprath, M.; Duparre, A.; Tünnermann, A.; Kühn, B.; Klett, U.
Journal Article
2006Nano-Rauheitsanalyse an funktionalen Oberflächen
Duparre, A.; Schröder, S.; Tünnermann, A.
Conference Paper
2006Nanostructure assessment of functional surfaces and coatings
Schröder, S.; Flemming, M.; Duparre, A.
Conference Paper
2006Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005CIGS solar modules contacted by conducting adhesives and ultrasonic welding
Herz, K.; Schröder, S.; Powalla, M.; Wuytswinkel, G.v.W.; Dreezen, G.; Luyckx, G.; Schäfer, H.; Kowalik, T.; Marnitz, K.; Züst, R.; Dimmler, B.; Krautter, F.
Conference Paper
2005Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application
Rudisill, J.; Duparre, A.; Schröder, S.
Conference Paper
2005Einsatz von Mikrosphären und Durchflusszytometrie für die Differenzierung von Antithrombozyten-Antikörpern
Wötzel, M.; Schröder, S.; Sack, U.
Journal Article
2005Investigating the ArF laser stability of CaF2 at elevated fluences
Burkert, A.; Mühlig, C.; Triebel, W.; Keutel, D.; Natura, U.; Parthier, L.; Gliech, S.; Schröder, S.; Duparre, A.
Conference Paper
2005Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions
Schröder, S.; Gliech, S.; Duparre, A.
Journal Article
2005Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N.
Conference Paper
2005Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.
Conference Paper
2005Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A.
Conference Paper
2005Streulichtanalyse für die Nanotechnotechnik
Schröder, S.; Gliech, S.; Duparre, A.
Journal Article
2005Surface texture investigation of ultra-precision optical components
Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A.
Conference Paper
2004High-sensitivity light scattering measurement of optical coating components
Gliech, S.; Schröder, S.; Duparre, A.
Conference Paper
2004Untersuchungen zur Kalibrierung und Messung des Streulichts optischer Komponenten bei 193 nm und 157 nm
Schröder, S.
Thesis
2000High tech meets culture in a natural environment: Entwicklungskonzept AURORA für die Region Mecklenburgische Ostseeküste im Dreieck Wismar - Rostock - Güstrow
Braun, G.; Cap, C.; Diensberg, C.; Giersberg, M.; Hamre, H.; Heuer, A.; Schenk, C.; Schröder, S.; Siebert, J.; Slawinski, U.; Thiesen, H.-J.; Urban, B.
Book
1995In situ film thickness and temperature control of molecular beam epitaxy growth by pyrometric interferometry
Böbel, F.G.; Möller, H.; Hertel, B.; Grothe, H.; Schraud, G.; Schröder, S.; Chow, P.
Journal Article
1995Innovation in der Produktion. Eine Fallstudienuntersuchung zur Entwicklung der numerischem Steuerung
Schröder, S.
Book
1990Entwicklungspotentiale der Berliner Maschinenbau- und Elektroindustrie
Spur, G.; Ebert, J.; Schröder, S.; Specht, D.
Journal Article