Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Efficient simulation of light diffraction from 3-dimensional EUV-masks using field decomposition techniques
Erdmann, A.; Kalus, C.K.; Schmöller, T.; Wolter, A.
Conference Paper
2003Rigorous simulation of defective EUV multilayer masks
Sambale, C.; Schmöller, T.; Erdmann, A.; Evanschitzky, P.; Kalus, C.
Conference Paper
2003Rigorous simulation of exposure over nonplanar wafers
Erdmann, A.; Kalus, C.K.; Schmöller, T.; Klyonova, Y.; Sato, T.; Endo, A.; Shibata, T.; Kobayashi, Y.
Conference Paper
2002Modification of boundaries conditions in the FDTD algorithm for EUV masks modeling
Vial, A.; Erdmann, A.; Schmoeller, T.; Kalus, C.
Conference Paper