Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2008 | Plasma cluster processing for advanced solar cell manufacturing
Rentsch, J.; Seiffe, J.; Walter, F.; Hofmann, M.; Weiss, L.; Gautero, L.; Decker, D.; Schlemm, H.; Preu, R. | Conference Paper |
| 2007 | Flexcellence: Towards roll-to-roll mass-production of low cost thin film silicon solar cells
Ballif, C.; Terrazzoni-Daudrix, V.; Haug, F.-J.; Fischer, D.; Soppe, W.; Loffler, J.; Andreu, J.; Fahland, M.; Schlemm, H.; Topic, M. | Conference Paper |
| 2007 | Industrial realization of dry plasma etching for PSG removal and rear side emitter etching
Rentsch, J.; Decker, D.; Hofmann, M.; Schlemm, H.; Roth, K.; Preu, R. | Conference Paper |
| 2005 | Industrialisation of dry phosphorus silicate glass etching and edge isolation for crystalline silicon solar cells
Rentsch, J.; Schetter, C.; Schlemm, H.; Roth, K.; Preu, R. | Conference Paper |
| 2004 | Dry phosphorus silicate glass etching for crystalline Si solar cells
Rentsch, J.; Binaie, F.; Schetter, C.; Schlemm, H.; Roth, K.; Theirich, D.; Preu, R. | Conference Paper |
| 2004 | Inline plasma etching of silicon oxides and nitrides for dry processing in silicon solar cell fabrication
Roth, K.; Rentsch, J.; Binaie, F.; Schetter, C.; Preu, R.; Schlemm, H. | Conference Paper |