Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Vorrichtung mit Abscheidekammer mit turbulenter Gasführung zur kontinuierlichen Beschichtung von Substraten mittels Gasphasenabscheidung sowie Verfahren zu diesem Zweck unter Verwendung einer solchen Vorrichtung
Keller, Martin; Reber, Stefan; Schillinger, Norbert; Pocza, David; Arnold, Martin; Krogull, Dirk
Patent
2013Comparison between experimental results and CFD model calculations for high-throughout continuous silicon chemical vapour deposition epitaxy
Pócza, D.; Schillinger, N.; Barth, P.; Krogull, D.; Arnold, M.; Keller, M.; Reber, S.
Conference Paper
2013Process optimization and solar cell results of ConCVD epitaxial layers
Keller, M.; Reber, S.; Schillinger, N.; Arnold, M.; Krogull, D.; Heermann, S.
Conference Paper
2013Verfahren und Vorrichtung zur kontinuierlichen Beschichtung von Substraten
Reber, Stefan; Schillinger, Norbert; Pocza, David; Arnold, Martin
Patent
2012Advances in equipment and process development for high-throughput continuous silicon epitaxy
Reber, S.; Pocza, D.; Keller, M.; Arnold, M.; Schillinger, N.; Krogull, D.
Conference Paper
2011In-line silicon epitaxy for photovoltaics using a continous chemical vapour deposition reactor
Keller, M.; Reber, S.; Schillinger, N.; Pocza, D.; Arnold, M.
Journal Article
2010Gasschleuse sowie Beschichtungsvorrichtung mit einer Gasschleuse
Pocza, D.; Reber, S.; Arnold, M.; Schillinger, N.
Patent
2010Haltevorrichtung für Substrate sowie Verfahren zur Beschichtung eines Substrates
Reber, S.; Schillinger, N.; Arnold, M.; Pocza, D.
Patent
2009ConCVD and ProConCVD: Development of high-throughput CVD tools on the way to low-cost silicon epitaxy
Reber, S.; Arnold, M.; Pócza, D.; Schillinger, N.
Conference Paper
2008n-type emitter epitaxy for crystalline silicon thin-film solar cells
Schmich, E.; Lautenschlager, H.; Friess, T.; Trenkle, F.; Schillinger, N.; Reber, S.
Journal Article
2007Silicon CVD deposition for low cost applications in photovoltaics
Schmich, E.; Schillinger, N.; Reber, S.
Conference Paper, Journal Article
2007Vorrichtung und Verfahren zur kontinuierlichen Gasphasenabscheidung unter Atmosphaerendruck und deren Verwendung
Reber, S.; Hurrle, A.; Schillinger, N.
Patent
2006Emitter epitaxy for crystalline silicon thin-film solar cells
Schmich, E.; Reber, S.; Hees, J.; Trenkle, F.; Schillinger, N.; Willeke, G.
Conference Paper
2006Epitaxy of emitters on P- and N-type substrates for crystalline silicon solar cells
Schmich, E.; Reber, S.; Hees, J.; Lautenschlager, H.; Schillinger, N.; Willeke, G.
Conference Paper
2005Progress in crystalline silicon thin-film solar cell work at Fraunhofer ISE
Reber, S.; Eyer, A.; Schmich, E.; Haas, F.; Schillinger, N.; Janz, S.
Conference Paper
2004High-throughput continuous CVD reactor for silicon deposition
Hurrle, A.; Reber, S.; Schillinger, N.; Haase, J.; Reichart, J.G.
Conference Paper
2003The RTCVD160 - a new lab-type silicon CVD processor for silicon deposition on large area substrates
Reber, S.; Haase, C.; Schillinger, N.; Bau, S.; Hurrle, A.
Conference Paper
1998Development and characterization of a CVD system for thin film solar cell manufacturing
Faller, F.R.; Hurrle, A.; Schillinger, N.
Conference Paper
1998Optimization of the CVD-process for low-cost crystalline-silicon thin-film solar cells
Faller, F.R.; Henninger, V.; Hurrle, A.; Schillinger, N.
Conference Paper
1996Mc-Si thin film solar cells by fast CVD on low cost SSP pre-ribbons
Faller, F.; Schillinger, N.; Hurrle, A.; Schetter, C.; Eyer, A.
Conference Paper
1993Crystalline thin film silicon solar cells -CTFSSC-
Wagner, B.; Friedrich, F.; Schillinger, N.; Eyer, A.
Conference Paper
1990Silicon sheets for solar cells grown from silicon powder by the SSP-technique
Schillinger, N.; Eyer, A.; Räuber, A.
Conference Paper
1989Continuous processing of silicon sheet material by the SSP-method
Schillinger, N.; Grabmaier, J.G.; Eyer, A.; Räuber, A.
Conference Paper
1988Silicon ribbons for solar cells grown from powder by the SSP method
Schillinger, N.; Grabmaier, J.G.; Eyer, A.; Räuber, A.
Conference Paper
1987Crystal structure and electrical properties of silicon sheets grown from powder - SSP-Method
Schindler, R.; Reis, I.; Schillinger, N.; Grabmaier, J.G.; Eyer, A.
Conference Paper
1987Verfahren zum Herstellung von grossflaechigen Siliziumkristallkoerpern fuer Solarzellen
Eyer, A.; Raeuber, A.; Schillinger, N.
Patent