Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald
Presentation
2018CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen
Conrad, Holger; Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann; Schuffenhauer, David; Stolz, Michael; Gaudet, Matthieu; Schenk, Harald
Conference Paper
2018Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Journal Article
2018Grundlegende Untersuchungen zur Phasenmodulation von Licht im Subnanometer-Bereich mittels diffraktiver Mikrospiegelarrays
Sicker, Cornelius
: Schenk, Harald; Reif, Jürgen
Dissertation
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Mikromechanische Bauelemente mit mechanischen Aktuatoren
Conrad, Holger; Gaudet, Matthieu; Schenk, Harald; Uhlig, Sebastian
Patent
2017CMOS-kompatible elektrostatische Biegeaktoren
Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schenk, Harald
Conference Paper
2017Electrostactically in-plane driven silicon micropump for modular configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Electrostatic bending actuators with a liquid filled nanometer scale gap
Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Elektrooptisch induzierte Wellenleiter in paranematischen Flüssigkeitskristallen
Blasl, Martin
: Schenk, Harald (Gutachter); Seibold, Götz (Gutachter); Schröder, Thomas (Gutachter); Küppers, Franko (Gutachter)
Dissertation
2017Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald
Conference Paper
2017Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald
Poster
2017A novel electrostatic actuator technology for integrated RF MEMS and optical switches
Shashank; Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Poster
2017Numerische Optimierung von Mikroaktoren
Schuffenhauer, David
: Gaudet, Matthieu (Betreuer); Schenk, Harald (Betreuer)
Master Thesis
2017Technological aspects of a new micro‑electro‑mechanical actuation principle: Nano‑e‑drive
Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Gaudet, Matthieu; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article
2016Experimentelle Untersuchungen an lateralen elektrostatischen Nanoaktoren
Stolz, Michael
: Schenk, Harald (Betr.); Seibold, Götz (Betr.)
Master Thesis
2016MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Schimmanz, Klaus; Langa, Sergiu
Patent
2016A novel electrostatic actuator class
Conrad, Holger; Kaiser, Bert; Gaudet, Matthieu; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article, Conference Paper
2016A novel electrostatic micro-actuator class and its application potential for optical MEMS
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus
Conference Paper
2016Simulation und Charakterisierung eines neuartigen mikromechanischen elektrostatischen Aktors
Kaiser, Bert
: Schenk, Harald (Betreuer); Bestehorn, Michael (Betreuer); Kupnik, Mario (Betreuer)
Dissertation
2015About stress in filled DRIE-trenches
Kaiser, Bert; Drabe, Christian; Graßhoff, Thomas; Conrad, Holger; Schenk, Harald; Grahmann, Jan
Journal Article
2015Mikroelektromechanisches System zum Durchstimmen von Lasern
Schenk, Harald; Grahmann, Jan; Wagner, Joachim; Ostendorf, Ralf; Rattunde, Marcel
Patent
2015A small-gap electrostatic micro-actuator for large deflections
Conrad, Holger; Schenk, Harald; Kaiser, Bert; Langa, Sergiu; Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Lenz, Miriam
Journal Article
2015Spatially resolved contrast measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer; Wagner, Michael; Schenk, Harald
Conference Paper
2015Widely tuneable quantum cascade lasers for spectroscopic sensing
Wagner, J.; Ostendorf, R.; Grahmann, Jan; Merten, André; Hugger, S.; Jarvis, J.P.; Fuchs, F.; Boskovic, D.; Schenk, Harald
Conference Paper
2014Charakterisierung eines Digitalen Holographischen Mikroskops zur Analyse mikro-mechanischer Aktoren
Epperlein, Nadja
: Schenk, Harald (Betreuer)
Master Thesis
2014Design and fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator
Schirrmann, Christian; Costache, Florenta; Bornhorst, Kirstin; Pawlik, Boscij; Rieck, Andreas; Schenk, Harald
Journal Article, Conference Paper
2014MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring
Hintschich, Susanne; Pügner, Tino; Knobbe, Jens; Schröder, Julia; Reinig, Peter; Grüger, Heinrich; Schenk, Harald
Conference Paper
2014Micro mirrors for high-speed laser deflection and patterning
Schenk, Harald; Grahmann, Jan; Sandner, Thilo; Wagner, Michael; Dauderstädt, Ulrike; Schmidt, Jan-Uwe
Conference Paper, Journal Article
2014Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald
Conference Paper
2014Tunable external cavity quantum cascade lasers (EC-QCL): An application field for MOEMS based scanning gratings
Grahmann, Jan; Merten, André; Ostendorf, Ralf; Fontenot, Michael; Bleh, Daniela; Schenk, Harald; Wagner, Hans-Joachim
Conference Paper
2013Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Schenk, Harald
Conference Paper
2013Hybrid assembly of micro scanner arrays with large aperture and their system integration
Sandner, Thilo; Wildenhain, Michael; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Modulares Anlagenkonzept zur kontinuierlichen, kostengünstigen Fertigung von strukturierten Metallisierungen für Elektronikkomponenten und Biosensoren (P3T)
Beyer, Henry; Borris, Jochen; Diehm, Rolf; Fritsch, Markus; Gründig, Bernd; Hanner, Martina; Hochsattel, Torsten; Reinhardt, Andreas; Schenk, Harald; Seidel, Matthias; Steinhäuser, Raimund; Thomas, Michael; Weidlich, Ernst-Rudolf
Report
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods
Langa, Sergiu; Drabe, Christian; Kunath, Christian; Dreyhaupt, André; Schenk, Harald
Conference Paper
2012The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald
Conference Paper
2012Micromirror displays
Schenk, Harald; Hornbeck, Larry J.
Book Article
2012On-chip electro-optic waveguides in isotropic liquid crystal blends for switching applications
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin; Schenk, Harald
Conference Paper
2012Optical position feedback for electrostatically driven MOEMS scanners
Tortschanoff, Andreas; Baumgart, M.; Frank, Albert; Wildenhain, Michael; Sandner, Thilo; Schenk, Harald; Kenda, Andreas
Conference Paper
2012Realization of a hybrid-integrated MEMS scanning grating spectrometer
Pügner, Tino; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald
Conference Paper
2012Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald
Conference Paper
2011Application specific micro scanning mirrors
Sandner, Thilo; Schenk, Harald; Drabe, Christian
Conference Paper
2011Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation
Kallweit, David; Jung, Denis; Sandner, Thilo; Schenk, Harald
Conference Paper
2011Microscanner with Vertical out of Plane Combdrive
Sandner, Thilo; Jung, Denis; Kallweit, David; Grasshoff, T.; Schenk, Harald
Conference Paper
2010MEMS technologies Dresden. Technology development, pilot-fabrication and foundry services
Schenk, Harald; Müller, Michael; Kade, Johannes
Presentation