Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Mechanical vacuum feedthrough using gas lubricated guiding elements
Heidler, Nils; Gossel, Marcus; Risse, Stefan; Eberhardt, Ramona; Schenk, Christoph
Conference Paper
2012Precision assembly of a miniaturized wire deflector for electron-beam lithography
Risse, Stefan; Damm, Christoph; Hornaff, Marcel; Kamm, Andreas; Mohaupt, Matthias; Eberhardt, Ramona; Schmidt, Ingo; Ramm, Roland; Kühmstedt, Peter; Notni, Gunther; Döring, Hans-Joachim; Elster, Thomas; Kirschstein, Ulf Carsten; Schenk, Christoph
Conference Paper, Journal Article