Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Combined control of ionization and stoichiometry in reactive highly ionized processes for production lines
Schütte, T.; Neiß, P.; Rieke, J.; Bräuer, G.; Gerdes, H.; Bandorf, R.
Abstract
2019How to run a reliable reactive HIPIMS process over a target lifetime
Schütte, T.; Neiß, P.; Rieke, J.; Gerdes, H.; Bandorf, Ralf; Vergöhl, M.; Bräuer, Günter
Conference Paper
2018Controlling stoichiometry and ionization of reactive HIPIMS processes by using plasma emission monitoring
Rieke, J.; Gerdes, H.; Bandorf, R.; Schütte, T.; Bräuer, G.
Conference Paper
2018Development of 4 nm-Thin PECVD aluminium oxide using plasma analysis and its application to PERC solar cells and modules
Hofmann, Marc; Wagenmann, Dirk; Teßmann, Christopher; Jäcklein, Martin; Saint-Cast, Pierre; Eberlein, Dirk; Kraft, Achim; Dippell, T.; May, F.; Dörr, M.; Cord, B.; Schütte, T.; Neiß, P.; Eichhorn, L.; Klick, M.; Richter, U.; Siemens, M.; Wiedemuth, P.
Conference Paper
2018Novel process control technique for reactive high-density plasmas by combining different control methods
Schütte, T.; Neiß, P.; Rieke, J.; Gerdes, H.; Bandorf, R.
Conference Paper
2015Different approaches for controlling a reactive HIPIMS sputter process
Gerdes, H.; Bandorf, R.; Mark, M.; Schütte, T.; Bräuer, G.
Conference Paper
2015Verfahren und Vorrichtung zur geregelten, gepulsten ionisierten Beschichtung von Substraten in einer Beschichtungskammer
Bandorf, Ralf; Gerdes, Holger; Schütte, Thomas
Patent
2010Optimization and simulation of operating strategies for container terminals
Kaffka, J.; Clausen, U.; Chmielewski, A.; Schütte, T.
Conference Paper