Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter)
Thesis
2018Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo
Journal Article
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2017Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback
Schroedter, Richard; Schwarzenberg, Markus; Dreyhaupt, André; Barth, Robert; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Poster
2016MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Grahmann, Jan; Dreyhaupt, André; Drabe, Christian; Schroedter, Richard; Kamenz, Jörg; Sandner, Thilo
Conference Paper
2016Micro scanning mirrors and enabling technology for applied optics
Sandner, Thilo
Conference Paper
2016Real-time closed-loop control for micro mirrors with quasistatic comb drives
Schroedter, Richard; Sandner, Thilo; Janschek, Klaus; Roth, Matthias; Hruschka, Clemens
Conference Paper
2016Scanning optical MEMS with very high frequencies
Drabe, Christian; Graßhoff, Thomas; Todt, Ulrich; Flemming, André; Sandner, Thilo; Grahmann, Jan
Presentation
2015Entwurf einer Mehrgrößenregelung zur hochdynamischen und präzisen zweidimensionalen Positionierung eines mikromechanischen Vektorscanners
Volkmann, Stefan
: Sandner, Thilo (Betreuer); Janschek, Klaus (Betreuer)
Thesis
2015Modellgestützte flachheitsbasierte Folgeregelung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2014Herstellungsverfahren
Langa, Sergiu; Drabe, Christian; Sandner, Thilo
Patent
2014Jerk and current limited flatness-based open loop control of foveation scanning electrostatic micromirrors
Schroedter, Richard; Janschek, Klaus; Sandner, Thilo
Conference Paper
2014Micro mirrors for high-speed laser deflection and patterning
Schenk, Harald; Grahmann, Jan; Sandner, Thilo; Wagner, Michael; Dauderstädt, Ulrike; Schmidt, Jan-Uwe
Conference Paper, Journal Article
2014Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald
Conference Paper
2014Optical position detection for MOEMS scanner mirrors with arbitrary trajectories
Tortschanoff, Andreas; Baumgart, Marcus; Holzmann, Dominik; Mayer, Christoph; Sandner, Thilo; Kenda, Andreas
Conference Paper
2013Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, Andreas; Holzmann, Dominik; Lenzhofer, Martin; Sandner, Thilo; Kenda, Andreas
Conference Paper
2013Flatness-based open loop command tracking for quasistatic microscanners
Janschek, Klaus; Schroedter, Richard; Sandner, Thilo
Conference Paper
2013Hybrid assembly of micro scanner arrays with large aperture and their system integration
Sandner, Thilo; Wildenhain, Michael; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Konzeptioneller Bauelemententwurf eines quasistatischen Mikroscanners mit Hybrid-Antrieb und großer Spiegelapertur zur hochdynamischen und präzisen zweidimensionalen Strahlpositionierung
Kimme, Simon
: Sandner, Thilo (Betreuer)
Thesis
2013Modellgestützte Bewegungsführung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2012Ein Beitrag zur Steuerung und Regelung für quasistatische Mikrospiegel
Schroedter, Richard
: Sandner, Thilo (Betreuer)
Thesis
2012Design of an optical position detection unit for fast 2D-MOEMS scanners
Tortschanoff, A.; Sandner, Thilo; Kenda, A.
Conference Paper
2012The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald
Conference Paper
2012Micromirror-based sending and detection optical assembly for time-of-flight laser scanners
Satzer, Britta; Baulig, Claudia; Sandner, Thilo; Schwarzer, S.
Conference Paper
2012Optical position feedback for electrostatically driven MOEMS scanners
Tortschanoff, Andreas; Baumgart, M.; Frank, Albert; Wildenhain, Michael; Sandner, Thilo; Schenk, Harald; Kenda, Andreas
Conference Paper
2012Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald
Conference Paper
2011Application specific micro scanning mirrors
Sandner, Thilo; Schenk, Harald; Drabe, Christian
Conference Paper
2011Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes
Tortschanoff, A.; Frank, A.; Lenzhofer, M.; Wildenhain, Michael; Sandner, Thilo; Kenda, A.
Conference Paper
2011Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation
Kallweit, David; Jung, Denis; Sandner, Thilo; Schenk, Harald
Conference Paper
2011Microscanner with Vertical out of Plane Combdrive
Sandner, Thilo; Jung, Denis; Kallweit, David; Grasshoff, T.; Schenk, Harald
Conference Paper
2011Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
Tortschanoff, Andreas; Frank, A.; Wildenhain, Michael; Kenda, Andreas; Sandner, Thilo
Journal Article
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2003Verfahren zur tiefenaufgelösten Polarisationsbestimmung von pyroelektrischen PZT-Dünnschichten für IR-Sensoren
Sandner, Thilo
Dissertation