Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Hybrid assembled MEMS scanner array with large aperture for fast scanning LIDAR systems
Sandner, T.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.
Journal Article
2019Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter)
Thesis
2018Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo
Journal Article
2018Repetitive nonlinear control for linear scanning micro mirrors
Schroedter, R.; Schwarzenberg, M.; Grahmann, J.; Sandner, T.; Janschek, K.
Conference Paper
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2017Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback
Schroedter, Richard; Schwarzenberg, Markus; Dreyhaupt, André; Barth, Robert; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Poster
2016Automatic path proposal computation for CT-guided percutaneous liver biopsy
Helck, A.; Schumann, C.; Aumann, J.; Thierfelder, K.; Strobl, F.F.; Braunagel, M.; Niethammer, M.; Clevert, D.A.; Hoffmann, R.-T.; Reiser, M.; Sandner, T.; Trumm, C.
Journal Article
2016MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Grahmann, Jan; Dreyhaupt, André; Drabe, Christian; Schroedter, Richard; Kamenz, Jörg; Sandner, Thilo
Conference Paper
2016Micro scanning mirrors and enabling technology for applied optics
Sandner, Thilo
Conference Paper
2016Real-time closed-loop control for micro mirrors with quasistatic comb drives
Schroedter, Richard; Sandner, Thilo; Janschek, Klaus; Roth, Matthias; Hruschka, Clemens
Conference Paper
2016Scanning optical MEMS with very high frequencies
Drabe, Christian; Graßhoff, Thomas; Todt, Ulrich; Flemming, André; Sandner, Thilo; Grahmann, Jan
Presentation
2015Entwurf einer Mehrgrößenregelung zur hochdynamischen und präzisen zweidimensionalen Positionierung eines mikromechanischen Vektorscanners
Volkmann, Stefan
: Sandner, Thilo (Betreuer); Janschek, Klaus (Betreuer)
Thesis
2015Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
Sandner, T.; Baulig, C.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.; Dahlmann, H.-G.; Schwarzer, S.
Conference Paper
2015Modellgestützte flachheitsbasierte Folgeregelung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2014Compact optical position feedback scheme for MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.
Journal Article
2014Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives
Kenda, A.; Kraft, M.; Tortschanoff, A.; Scherf, W.; Sandner, T.; Schenk, H.; Lüttjohann, S.; Simon, A.
Conference Paper
2014Extension of frequency modulated Doppler global velocimetry for the investigation of unsteady spray flows
Fischer, A.; Wilke, U.; Schlüßler, R.; Haufe, D.; Sandner, T.; Czarske, J.
Journal Article
2014Herstellungsverfahren
Langa, Sergiu; Drabe, Christian; Sandner, Thilo
Patent
2014Jerk and current limited flatness-based open loop control of foveation scanning electrostatic micromirrors
Schroedter, Richard; Janschek, Klaus; Sandner, Thilo
Conference Paper
2014Micro mirrors for high-speed laser deflection and patterning
Schenk, Harald; Grahmann, Jan; Sandner, Thilo; Wagner, Michael; Dauderstädt, Ulrike; Schmidt, Jan-Uwe
Conference Paper, Journal Article
2014Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald
Conference Paper
2014Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy
Tortschanoff, A.; Kremer, M.; Sandner, T.; Kenda, A.
Conference Paper
2014Optical position detection for MOEMS scanner mirrors with arbitrary trajectories
Tortschanoff, Andreas; Baumgart, Marcus; Holzmann, Dominik; Mayer, Christoph; Sandner, Thilo; Kenda, Andreas
Conference Paper
2014Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H.
Conference Paper
2014Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H.
Journal Article
2014Quasistatisch-resonanter Mikroscanner zur adaptiven Auflösungssteuerung einer 3D ToF-Kamera
Sandner, T.; Grasshoff, T.; Schrödter, R.; Schwarzenberg, M.
Journal Article
2014Quasistatisch-resonanter Mikroscanner zur adaptiven Auflösungssteuerung einer 3D ToF-Kamera
Sandner, T.; Grasshoff, T.; Schrödter, R.; Schwarzenberg, M.
Journal Article
2014Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Gaumont, E.; Schenk, H.; Kenda, A.
Journal Article
2013Adaptive prefilter design for control of quasistatic microscanners
Janschek, K.; Sandner, T.; Schroedter, R.; Roth, M.
Conference Paper
2013Bildgebende und zeitlich hochauflösende Messungen von instationären Strömungsphänomenen mittels FM-DGV und einem Mikroscannerspiegel
Wilke, U.; Czarske, J.; Sandner, T.; Fischer, A.
Conference Paper
2013Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, Andreas; Holzmann, Dominik; Lenzhofer, Martin; Sandner, Thilo; Kenda, Andreas
Conference Paper
2013Flatness-based open loop command tracking for quasistatic microscanners
Janschek, Klaus; Schroedter, Richard; Sandner, Thilo
Conference Paper
2013Hybrid assembly of micro scanner arrays with large aperture and their system integration
Sandner, Thilo; Wildenhain, Michael; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Konzeptioneller Bauelemententwurf eines quasistatischen Mikroscanners mit Hybrid-Antrieb und großer Spiegelapertur zur hochdynamischen und präzisen zweidimensionalen Strahlpositionierung
Kimme, Simon
: Sandner, Thilo (Betreuer)
Thesis
2013MEMS-mirror tilt-detection based on a quadrant diode scheme
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Mayer, Ch.; Sandner, T.
Conference Paper
2013Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, T.; Kimme, S.; Grasshoff, T.; Todt, U.; Graf, A.; Tulea, C.; Lenenbach, A.; Schenk, H.
Conference Paper
2013Modellgestützte Bewegungsführung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2013Optical position feedback of quasi-static 2D MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.
Conference Paper
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-lasercamera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schenk, H.
Conference Paper
2012Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror
Kenda, A.; Sandner, T.; Lüttjohann, S.; Kraft, M.; Tortschanoff, A.; Simon, A.
Conference Paper
2012Ein Beitrag zur Steuerung und Regelung für quasistatische Mikrospiegel
Schroedter, Richard
: Sandner, Thilo (Betreuer)
Thesis
2012Closed-loop control for quasi-static MOEMS mirrors
Tortschanoff, A.; Holzmann, D.; Lenzhofer, M.; Sandner, T.
Conference Paper
2012Design of an optical position detection unit for fast 2D-MOEMS scanners
Tortschanoff, A.; Sandner, Thilo; Kenda, A.
Conference Paper
2012The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald
Conference Paper
2012Micromirror-based sending and detection optical assembly for time-of-flight laser scanners
Satzer, Britta; Baulig, Claudia; Sandner, Thilo; Schwarzer, S.
Conference Paper
2012Optical position feedback for electrostatically driven MOEMS scanners
Tortschanoff, Andreas; Baumgart, M.; Frank, Albert; Wildenhain, Michael; Sandner, Thilo; Schenk, Harald; Kenda, Andreas
Conference Paper
2012Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.
Conference Paper
2012Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald
Conference Paper
2011Advanced FT-IR high-speed spectrometer showing the feasibility of high performance optical MEMS based mid-IR sensing
Kenda, A.; Kraft, M.; Baumgart, M.; Sandner, T.; Lüttjohann, S.; Simon, A.
Conference Paper, Journal Article
2011Application specific micro scanning mirrors
Sandner, Thilo; Schenk, Harald; Drabe, Christian
Conference Paper
2011Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes
Tortschanoff, A.; Frank, A.; Lenzhofer, M.; Wildenhain, Michael; Sandner, Thilo; Kenda, A.
Conference Paper
2011Enabling mid-IR spectroscopic sensing: MEMS-based high-speed FT-IR compact spectrometers
Kenda, A.; Kraft, M.; Sandner, T.; Lüttjohann, S.; Simon, A.
Conference Paper
2011Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation
Kallweit, David; Jung, Denis; Sandner, Thilo; Schenk, Harald
Conference Paper
2011Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
Grahmann, J.; Graßhoff, T.; Conrad, H.; Sandner, T.; Schenk, H.
Conference Paper
2011MEMS Fourier transform IR spectrometer
Ayerden, N.P.; Holmstrom, S.; Seren, H.R.; Olcer, S.; Sharma, J.; Luettjohann, S.; Sandner, T.; Urey, H.
Conference Paper
2011Microscanner with Vertical out of Plane Combdrive
Sandner, Thilo; Jung, Denis; Kallweit, David; Grasshoff, T.; Schenk, Harald
Conference Paper
2011Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
Tortschanoff, Andreas; Frank, A.; Wildenhain, Michael; Kenda, Andreas; Sandner, Thilo
Journal Article
2011Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners
Tortschanoff, A.; Frank, A.; Wildenhain, M.; Tetikol, H.S.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2011Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.
Conference Paper
2010Lamellar grating based mems fourier transform spectrometer
Seren, H.R.; Ayerden, N.P.; Sharma, J.; Holmström, S.T.S.; Sandner, T.; Grasshoff, T.; Schenk, H.; Urey, H.
Conference Paper
2010Large aperture MEMS scanner module for 3D distance measurement
Sandner, T.; Wildenhain, M.; Gerwig, C.; Schenk, H.; Schwarzer, S.; Wölfelschneider, H.
Conference Paper
2010MEMS devices for laser camera systems for endoscopic applications
Drabe, C.; James, R.; Schenk, H.; Sandner, T.
Conference Paper
2010Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages
Kenda, A.; Kraft, A.; Tortschanoff, A.; Wagner, C.; Lendl, B.; Sandner, T.; Schenk, H.
Conference Paper
2010MOEMS translatory actuator characterisation, position encoding and closed-loop control
Lenzhofer, M.; Tortschanoff, A.; Frank, A.; Sandner, T.; Schenk, H.; Kraft, M.; Kenda, A.
Journal Article
2010Optical position feedback and phase control of MOEMS-scanner mirrors
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2010Position encoding and phase control of resonant MOEMS-mirrors
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper, Journal Article
2010Position feedback and phase control of resonant MOEMS-mirrors with one and two axes
Tortschanoff, A.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2010Synchronized microscanner array for large aperture receiver optics of LIDAR systems
Sandner, T.; Grasshoff, T.; Wildenhain, M.; Schenk, H.
Conference Paper
2010Translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Sandner, T.; Grasshoff, T.; Schenk, H.
Conference Paper
2009Eine 'Reinkarnation' in der Strukturmechanik
Conrad, H.; Sandner, T.; Schenk, H.; Lakner, H.
Journal Article
2009Aluminium nitride: A promising and full CMOS compatible piezoelectric material for MOEMS applications
Conrad, H.; Schmidt, J.U.; Pufe, W.; Zimmer, F.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2009Compact High-Speed Spectrometers Based on MEMS Devices with Large Amplitude In-Plane Actuators
Kenda, A.; Frank, A.; Kraft, M.; Tortschanoff, A.; Sandner, T.; Schenk, H.; Scherf, W.
Conference Paper
2009Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement
Jung, D.; Kallweit, D.; Sandner, T.; Conrad, H.; Schenk, H.; Lakner, H.
Conference Paper
2009Improved MEMS based FT-IR spectrometer: Position encoding and closed loop control
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Kenda, A.; Sandner, T.; Schenk, H.
Conference Paper
2009Improved MOEMS based ultra rapid Fourier transform infrared spectrometer
Tortschanoff, A.; Kenda, A.; Kraft, M.; Sandner, T.; Schenk, H.; Scherf, W.
Conference Paper
2009Integrated position sensing for 2D microscanning mirrors using the SOI-device layer as the piezoresistive mechanical-elastic transformer
Grahmann, J.; Conrad, H.; Sandner, T.; Klose, T.; Schenk, H.
Conference Paper
2009Large stroke MOEMS actuators for optical path length modulation in miniaturized FTIR-spectrometers
Sandner, T.; Drabe, C.; Schenk, H.; Kensa, A.
Conference Paper
2009MEMS based laser imager with diagonal progressive scanning
Sandner, T.; Grasshoff, T.; Klose, T.; Schenk, H.; Massieu, J.L.
Conference Paper
2009MOEMS-Based Scanning Light Barrier
Kenda, A.; Frank, A.; Kraft, M.; Tortschanoff, A.; Sandner, T.; Schenk, H.; Scherf, W.
Conference Paper
2009Optisches Filter und ein Verfahren zur Herstellung eines optischen Filters
Schenk, H.; Sandner, T.; Schirrmann, C.; Costache, F.
Patent
2009Position encoding and closed loop control of MOEMS translatory actuators
Lenzhofer, M.; Tortschanoff, A.; Frank, A.; Sandner, T.; Schenk, H.; Kraft, M.; Kenda, A.
Conference Paper
2009Position encoding and phase control of resonant MOEMS-mirrors
Tortschanoff, A.; Lenzhofer, M.; Frank, A.; Wildenhain, M.; Sandner, T.; Schenk, H.; Kenda, A.
Conference Paper
2009Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von traegen Massen
Grasshoff, T.; Sandner, T.; Conrad, H.; Jung, D.
Patent
2009Single crystal silicon micro mirrors
Schenk, H.; Sandner, T.; Drabe, C.; Klose, T.; Conrad, H.
Journal Article, Conference Paper
2009Ultra compact laser based projectors and imagers
Schenk, H.; Sandner, T.; Drabe, C.; Scholles, M.; Frommhagen, K.; Gerwig, C.; Lakner, H.
Conference Paper
20083D hybrid capacitance model for angular vertical comb drives
Jung, D.; Klose, T.; Grasshoff, T.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
20083D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement
Sandner, T.; Wildenhain, M.; Klose, T.; Schenk, H.; Schwarzer, S.; Hinkov, V.; Höfler, H.; Wölfelschneider, H.
Conference Paper
2008Fluidmechanical damping analysis of resonant micromirrors with out-of-plane comb drive
Klose, T.; Conrad, H.; Sandner, T.; Schenk, H.
Conference Paper
2008MEMS-based compact FT-Spectrometers-A platform for spectroscopic mid-infrared sensors
Kraft, M.; Kenda, A.; Sandner, T.; Schenk, H.
Conference Paper
2008Mikromechanisches Bauelement mit Temperaturstabilisierung und Verfahren zur Einstellung einer definierten Temperatur oder eines definierten Temperaturverlaufes an einem mikromechanischen Bauelement
Heber, J.; Klose, T.; Sandner, T.; Bergmann, A.; Gerwig, C.; Knieling, T.
Patent
2008Mikromechanisches Bauelement mit verkippten Elektroden
Jung, D.; Drabe, C.; Schenk, H.; Sandner, T.; Klose, T.
Patent
2008Modelling the thermally induced curvature of multilayer coatings with COMSOL multiphysics
Conrad, H.; Klose, T.; Sandner, T.; Jung, D.; Schenk, H.; Lakner, H.
Conference Paper
2008Optisches Bauelement mit einem Aufbau zur Vermeidung von Reflexionen
Schenk, H.; Sandner, T.
Patent
2008Silicon-based micro-optic modulators
Schenk, H.; Wagner, M.; Gehner, A.; Müller, M.; Sandner, T.; Drabe, C.; Lakner, H.
Conference Paper
2008Translatory MEMS actuators for optical path length modulation in miniaturized fourier-transform infrared spectrometers
Sandner, T.; Drabe, C.; Schenk, H.; Kenda, A.; Scherf, W.
Journal Article
2008Verfahren zur Erzeugung einer mikro-mechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement
Sandner, T.
Patent
2008Verfahren zur Erzeugung einer mikromechanischen Struktur
Jung, D.; Drabe, C.; Sandner, T.; Schenk, H.; Klose, T.; Wolter, A.
Patent
2007Einsatz translatorischer MOEMS-Aktoren für FTIR-Spektrometer
Sandner, T.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2007Integrated piezo-resistive positionssensor for microscanning mirrors
Sandner, T.; Conrad, H.; Klose, T.; Schenk, H.
Conference Paper
2007Investigation and characterization of high-efficient NIR-scanning gratings used in NIR-micro-spectrometer
Zimmer, F.; Heberer, A.; Sandner, T.; Grüger, H.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2007Konzeptionelle Untersuchungen eines elektrothermisch auslenkbaren mikromechanischen Membranspiegels zur aktiven Fokusvariation
Conrad, H.
: Wächter, F.; Sandner, T.
Master Thesis
2007Mikromechanisches Bauelement mit einstellbarer Resonanzfrequenz durch Geometrieaenderung und Verfahren zum Betreiben desselben
Grasshoff, T.; Klose, T.; Sandner, T.
Patent
2007Mikrooptisches reflektierendes Bauelement
Sandner, T.; Pufe, W.; Schenk, H.
Patent
2007Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator
Sandner, T.; Kenda, A.; Drabe, C.; Schenk, H.; Scherf, W.
Conference Paper
2007NIR-Spektroskopie: Entwicklung eines miniaturisierten MOEMS Spektrometer für den Einsatz im NIR-Bereich
Zimmer, F.; Grueger, H.; Heberer, A.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2007Optimierung der dynamischen Deformation von Mikroscannerspiegeln
Klose, T.; Wolter, A.; Sandner, T.; Schenk, H.
Conference Paper
2007Projektionsvorrichtung zum scannenden Projizieren
Sandner, T.; Schenk, H.; Scholles, M.; Schwarzenberg, M.; Wolter, A.
Patent
2007Vorrichtung und Verfahren zum Haeusen mikromechanischer Systeme
Bakke, T.; Sandner, T.
Patent
2006Development of high-efficient NIR-scanning gratings for spectroscopic applications
Zimmer, F.; Sandner, T.; Grüger, H.; Heberer, A.; Wolter, A.; Schenk, H.; Lakner, H.; Kenda, A.; Scherf, W.
Conference Paper
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2006Extended damping model for out-of-plane-comb driven micromirrors
Klose, T.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2006High-performance coatings for micromechanical mirrors
Gatto, A.; Yang, M.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Schenk, H.; Lakner, H.; Heber, J.
Journal Article
2006Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2006Investigations on an integrated optical position detection of micromachined scanning mirrors
Schuster, T.; Sandner, T.; Lakner, H.
Conference Paper
2006Single-detector micro-electro-mechanical scanning grating spectrometer
Kraft, M.; Kenda, A.; Frank, A.; Scherf, W.; Heberer, A.; Sandner, T.; Schenk, H.; Zimmer, F.
Journal Article
2006Untersuchung von nichtresonanten Antriebsprinzipien für Mikroscannerspiegel zur niederfrequenten bzw. quasistatischen Lichtablenkung
Porth, C.
: Sandner, T. (Prüfer)
Thesis
2005Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Gatto, A.; Yang, M.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.
Conference Paper
2005Micro optical devices for light modulation and deflection
Schenk, H.; Sandner, T.; Lakner, H.
Conference Paper
2005Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications
Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Braun, S.; Foltyn, T.; Leson, A.; Gatto, A.; Yang, M.; Kaiser, N.
Conference Paper
2005Stress optimization of a micromechanical torsional spring
Klose, T.; Kunze, D.; Sandner, T.; Schenk, H.; Lakner, H.; Schneider, A.; Schneider, P.
Conference Paper
2005VUV optical coatings for the next-generation micro-mechanical mirrors
Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H.
Conference Paper
2004Damping analysis and measurement for a comb-drive scanning mirror
Sandner, T.; Klose, T.; Wolter, A.; Schenk, H.; Lakner, H.
Conference Paper
2004Verfahren zur tiefenaufgelösten Polarisationsbestimmung in pyroelektrischen Dünnschichten
Sandner, T.; Gerlach, G.; Suchaneck, G.
Conference Paper
2003Verfahren zur tiefenaufgelösten Polarisationsbestimmung von pyroelektrischen PZT-Dünnschichten für IR-Sensoren
Sandner, Thilo
Dissertation
1999Properties of sputtered and sol-gel deposited PZT thin films for sensor and actuator applications
Gerlach, G.; Suchaneck, G.; Köhler, R.; Sandner, T.; Padmini, P.; Krawietz, R.; Pompe, W.; Frey, J.; Jost, O.; Schönecker, A.
Journal Article