Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Elastic properties of ultrathin diamond/AlN membranes
Zürbig, V.; Hees, J.; Pletschen, W.; Sah, R.E.; Wolfer, M.; Kirste, L.; Heidrich, N.; Nebel, C.; Ambacher, O.; Lebedev, V.
Journal Article
2013Characterization of Al2O3/GaAs interfaces and thin films prepared by atomic layer deposition
Sah, R.E.; Tegenkamp, C.; Baeumler, M.; Bernhardt, F.; Driad, R.; Mikulla, M.; Ambacher, O.
Journal Article
2013Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations
Heidrich, N.; Knöbber, F.; Polyakov, V.M.; Cimalla, V.; Pletschen, W.; Sah, R.E.; Kirste, L.; Leopold, S.; Hampl, S.; Ambacher, O.; Lebedev, V.
Journal Article
2013Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems
Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Journal Article
2013Enhanced mechanical performance of AlN/nanodiamond micro-resonators
Heidrich, N.; Iankov, D.; Hees, J.; Pletschen, W.; Sah, R.E.; Kirste, L.; Zuerbig, V.; Nebel, C.; Ambacher, O.; Lebedev, V.
Journal Article
2013Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
Sah, R.E.; Driad, R.; Bernhardt, F.; Kirste, L.; Leancu, C.-C.; Czap, H.; Benkhelifa, F.; Mikulla, M.; Ambacher, O.
Journal Article
2013Nano-diamond vacuum MEMS for RF applications
Heidrich, N.; Hees, J.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Conference Paper
2013Piezo-actuated tunable diamond/AlN micro lenses
Zürbig, V.; Pätz, D.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Cimalla, V.; Nebel, C.; Ambacher, O.; Lebedev, V.
Conference Paper
2013Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films
Hees, J.; Heidrich, N.; Pletschen, W.; Sah, R.E.; Wolfer, M.; Williams, O.A.; Lebedev, V.; Nebel, C.E.; Ambacher, O.
Journal Article
2013Piezoelectrically actuated diamond cantilevers for high-frequency applications
Heidrich, N.; Zürbig, V.; Iankov, D.; Pletschen, W.; Sah, R.E.; Raynor, B.; Kirste, L.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2013Transparent diamond electrodes for tunable micro-optical devices
Zürbig, V.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2012Electrostatically coupled vibration modes in unimorph complementary mircocantilevers
Lebedev, V.; Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Raynor, B.; Polyakov, V.M.; Cimalla, V.; Ambacher, O.
Journal Article
2012Evaluation of AlN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.
Journal Article
2012Evaluation on AIN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O.
Journal Article, Conference Paper
2012Passivation of InP heterojunction bipolar transistors by strain controlled plasma assisted electron beam evaporated hafnium oxide
Driad, R.; Sah, R.E.; Schmidt, R.; Kirste, L.
Journal Article
2012Static and dynamic characterization of AlN and nanocrystalline diamond membranes
Knöbber, F.; Zürbig, V.; Heidrich, N.; Hees, J.; Sah, R.E.; Baeumler, M.; Leopold, S.; Pätz, D.; Ambacher, O.; Lebedev, V.
Journal Article
2011AlN based microgenerators for powering implantable sensor devices
Bludau, O.; Röhlig, C.-C.; Knöbber, F.; Kirste, L.; Sah, R.E.; Driad, R.; Pletschen, W.; Lebedev, V.; Cimalla, V.
Journal Article, Conference Paper
2011AlN-basierte mikroelektromechanische Strukturen für Implantate
Heidrich, N.; Knöbber, F.; Hampl, S.; Pletschen, W.; Sah, R.E.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Conference Paper
2011Biocompatible AlN-based piezo energy harvesters for implants
Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Hampl, S.; Cimalla, V.; Lebedev, V.
Conference Paper
2011Dynamic characterization of thin aluminum nitride microstructures
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2011Low-temperature grown high-quality piezoelectric AIN Film for sensor application
Sah, R.E.; Bludau, O.; Röhlig, C.-C.; Kirste, L.; Cimalla, V.; Lebedev, V.
Conference Paper
2011Preface
Sah, R.E.
Conference Paper, Journal Article
2011Silicon nitride, silicon dioxide, and emerging dielectrics 11
: Sah, R.E.
Conference Proceedings
2010Correlation between composition and stress for high density plasma CVD silicon nitride films
Sah, R.E.; Baumann, H.; Driad, R.; Wagner, J.
Journal Article
2010Diamond/AlN thin films for optical applications
Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V.
Conference Paper
2010Investigation of stress in AIN thin films for piezoelectric MEMS
Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H.
Conference Paper
2010Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering
Sah, R.E.; Kirste, L.; Baeumler, M.; Hiesinger, P.; Cimalla, V.; Lebedev, V.; Baumann, H.; Zschau, H.-E.
Journal Article
2009Piezoelectrically actuated AlN and Nanodiamond microstructures
Knöbber, F.; Sillero, E.; Röhlig, C.-C.; Williams, O.A.; Sah, R.E.; Kirste, L.; Cimalla, V.; Nebel, C.E.; Calle, F.; Lebedev, V.
Conference Paper
2009Silicon nitride, silicon dioxide, and emerging dielectrics
: Sah, R.E.; Deen, M.J.; Zhang, J.F.; Yota, J.; Toriumi, A.
Conference Proceedings
2009Stress changes in silicon nitride thin films on thermal cycling and deconvolution of seperate contributions
Sah, R.E.; Baumann, H.
Conference Paper
2007Silicon Nitride, Silicon Dioxide and Emerging Dielectrics
: Sah, R.E.; Deen, M.J.; Zhang, J.F.; Yota, J.; Kamakura, Y.
Conference Proceedings
2005Compositional study of silicon oxynitride thin films deposited using electron cyclotron resonance plasma-enhanced chemical vapor deposition technique
Baumann, H.; Sah, R.E.
Journal Article
2005High-density ECR-plasma deposited silicon nitride films for applications in III/V-based compound semiconductor devices
Sah, R.E.; Mikulla, M.; Baumann, H.; Benkhelifa, F.; Quay, R.; Weimann, G.
Conference Paper
2005Passivation of III-V-based compound semiconductor devices using high-density plasma deposited silicon nitride films
Sah, R.E.; Mikulla, M.; Schneider, H.; Benkhelifa, F.; Dammann, M.; Quay, R.; Fleißner, J.; Walther, M.; Weimann, G.
Conference Paper
2005Performance and fabrication of GaN/AlGaN power MMIC at 10 GHz
Benkhelifa, F.; Kiefer, R.; Müller, S.; Raay, F. van; Quay, R.; Sah, R.E.; Dammann, M.; Mikulla, M.; Weimann, G.
Conference Paper
2005Silicon nitride, silicon doxide thin insulating films, and other emerging dielectrics VIII
: Sah, R.E.; Deen, M.; Zhang, J.F.; Yota, J.; Kamakura, Y.
Conference Proceedings
2003Silicon nitride and silicon dioxide thin insulating films VII
: Sah, R.E.
Conference Proceedings
2003Silicon nitride films deposited using ECR-PECVD technique for coating InGaAlAs high power laser facets
Sah, R.E.; Rinner, F.; Baumann, H.; Kiefer, R.; Mikulla, M.; Weimann, G.
Journal Article
2003Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition
Sundaram, K.B.; Sah, R.E.; Baumann, H.; Balachandran, K.; Todi, R.M.
Journal Article
2002High-density plasma deposited silicon nitride films for coating InGaAlAs high-power lasers
Sah, R.E.; Rinner, F.; Kiefer, R.; Mikulla, M.; Weimann, G.
Conference Paper
2002Plasma processing XIV. Proceedings of the International Symposium
: Mathad, G.S.; Allendorf, M.D.; Sah, R.E.; Yang, M.
Conference Proceedings
2001Optoelectronic properties of Photodiodes for the mid- and far-infrared based on the InAs/GaSB/AlSb materials family
Fuchs, F.; Bürkle, L.; Hamid, R.; Herres, N.; Pletschen, W.; Sah, R.E.; Kiefer, R.; Schmitz, J.
Conference Paper
2001Proceedings of the 6th Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
: Sundaram, K.; Deen, M.J.; Landherr, D.; Brown, W.D.; Misra, D.; Sah, R.E.
Conference Proceedings
2001Thermally induced stress changes in high-density plasma deposited silicon nitride films
Sah, R.E.; Baumann, H.; Mikulla, M.; Kiefer, R.; Weimann, G.
Conference Paper
2000Electrical Characterization of InAs/(GaIn)Sb infrared superlattice photodiodes for the 8 to 12 µm range
Bürkle, L.; Fuchs, F.; Kiefer, R.; Pletschen, W.; Sah, R.E.; Schmitz, J.
Conference Paper
1999Effect of aging on stress in silicon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition technique
Sah, R.E.; Baumann, H.; Serries, D.; Kiefer, R.; Braunstein, J.
Conference Paper
1999High-power InAlGaAs laser diodes with high efficiency at 980 nm
Mikulla, M.; Schmitt, A.; Walther, M.; Kiefer, R.; Moritz, R.; Müller, S.; Sah, R.E.; Braunstein, J.; Weimann, G.
Conference Paper
1997Composition and mechanical properties of silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition technique
Sah, R.E.; Baumann, H.; Ohle, T.
Conference Paper
1997ECR-plasma deposited oxygen-free SiN(x) films for low- and high-reflectivity coatings for GaAs based devices
Sah, R.E.; Weimar, U.; Baumann, H.; Wagner, J.; Kiefer, R.; Müller, S.
Conference Paper
1996Damping-limited modulation bandwidths up to 40 GHz in undoped short-cavity In(0.35)Ga(0.65)As-GaAs multiple-quantum-well lasers
Weisser, S.; Larkins, E.C.; Czotscher, K.; Benz, W.; Daleiden, J.; Esquivias, I.; Fleissner, J.; Ralston, J.D.; Romero, B.; Sah, R.E.; Schönfelder, A.; Rosenzweig, J.
Journal Article
1996Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures
Sah, R.E.; Ralston, J.D.; Daleiden, J.; Larkins, E.C.; Weisser, S.; Fleissner, J.; Benz, W.
Journal Article
1996Low-temperature plasma deposition of passivating layers with low hydrogen content for optoelectronic devices
Sah, R.E.; Baumann, H.
Conference Paper
1995Characteristics of a two-component chemically-assisted ion-beam etching techniques for dry etching of high-speed multiple quantum well laser mirrors
Sah, R.E.; Ralston, J.D.; Weisser, S.; Eisele, K.
Journal Article
1995Chemical analysis of a C12/BCl3/IBr3 chemically assisted ion-beam etching process for GaAs and InP laser-mirror fabrication under cryo-pumped ultrahigh vacuum conditions
Daleiden, J.; Eisele, K.; Sah, R.E.; Schmidt, K.H.; Ralston, J.D.
Journal Article
1995CW direct modulation bandwidths up to 40 GHz in short-cavity In0.35Ga0.65As/GaAs MQW lasers with undoped active regions
Weisser, S.; Larkins, E.C.; Esquivias, I.; Fleissner, J.; Maier, M.; Ralston, J.D.; Romero, B.; Sah, R.E.; Schönfelder, A.; Rosenzweig, J.
Book Article
1995Room-temperature, high-deposition-rate, plasma-enhanced chemical vapour deposition of silicon oxynitride thin films producing low surface damage on lattice-matched and pseudomorphic III-V quantum-well structures
Sah, R.E.; Ralston, J.D.; Eichin, G.; Dischler, B.; Rothemund, W.; Wagner, J.; Larkins, E.C.; Baumann, H.
Journal Article
1995Wavelength tunig of high-speed InGaAs-GaAs-AlGaAs pseudomorphic MQW lasers via impurity-free interdiffusion
Bürkner, S.; Ralston, J.D.; Weisser, S.; Sah, R.E.; Fleissner, J.; Larkins, E.C.; Rosenzweig, J.
Journal Article
1994Dry-etched short-cavity ridge waveguide MQW lasers suitable for monolithic integration with direct modulation bandwidth up to 33 GHz at low drive currents
Weisser, S.; Ralston, J.D.; Eisele, K.; Sah, R.E.; Hornung, J.; Larkins, E.C.; Tasker, P.J.; Benz, W.; Rosenzweig, J.; Bronner, W.; Fleissner, J.; Bender, K.
Conference Paper
1994Enhanced CAIBE for high-speed OEICs
Ralston, J.D.; Eisele, K.; Sah, R.E.; Fleissner, J.; Bronner, W.; Hornung, J.; Raynor, B.
Journal Article
1994Low-bias-current direct modulation up to 33 GHz in GaAs-based pseudomorphic MQW ridge-waveguides lasers suitable for monolithic integration
Ralston, J.D.; Eisele, K.; Sah, R.E.; Larkins, E.C.; Weisser, S.; Fleissner, J.; Bender, K.; Rosenzweig, J.
Conference Paper
1994Low-bias-current direct modulation up to 33 GHz in InGaAs/GaAs/AlGaAs pseudomorphic MQWRidge-waveguide lasers
Ralston, J.D.; Weisser, S.; Eisele, K.; Sah, R.E.; Larkins, E.C.; Rosenzweig, J.; Fleissner, J.; Bender, K.
Journal Article
1991Amorphous, hydrogenated carbon films and related materials - plasma deposition and film properties
Locher, R.; Sah, R.E.; Koidl, P.; Wild, C.
Book Article
1990Amorphous hydrogenated carbon-germanium films for hard multilayer IR optical coatings.
Sah, R.E.; Baumann, H.; Koidl, P.; Wild, C.
Conference Paper
1988Mass spectrometric study of gas evolution from plasma-deposited fluorohydrogenated amorphous carbon films on heating.
Sah, R.E.
Journal Article
1987Composition and structure of plasma deposited a-C - H,F films
Fink, J.; Nücker, N.; Sah, R.E.; Baumann, H.; Bethge, K.; Koidl, P.
Conference Paper
1987Depth profile analysis of hydrogenated carbon layers on silicon and germanium by XPS, AES and SIMS
Sander, P.; Wiedmann, L.; Benninghoven, A.; Sah, R.E.
Conference Paper
1987Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energyloss spectroscopy, and secondary ion mass spectrometry
Sander, P.; Kaiser, U.; Altebockwinkel, M.; Wiedmann, L.; Benninghoven, A.; Sah, R.E.; Koidl, P.
Journal Article
1987Plasma deposition of fluoro-hydrogenated amorphous carbon films
Sah, R.E.; Dischler, B.; Koidl, P.
Conference Paper
1987Rain erosion resistance of hard carbon coated germanium.
Sah, R.E.; Koidl, P.; Schaefer, W.
Conference Paper
1985Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes
Sah, R.E.; Bubenzer, A.; Dischler, B.; Koidl, P.
Journal Article
1985Infrared and raman analysis of hydrogenated amorphous carbon films, prepared by R.F. plasma deposition from C6H6 or C6D6 vapour
Sah, R.E.; Fluhr, W.; Wokaun, A.; Dischler, B.; Koidl, P.
Conference Paper
1985Investigation of the solubility of pleochroic dyes in liquid crystals
Sah, R.E.
Journal Article
1984Investigation of hydrocarbon-plasma-generated carbon films by electron-energy-loss spectroscopy
Sah, R.E.; Fink, J.; Scheerer, B.; Bubenzer, A.; Dischler, B.; Koidl, P.; Mueller-Heinzerling, T.; Pflueger, T.
Journal Article
1980On the conversion of solar radiation with fluorescent planar concentrators
Sah, R.E.; Goetzberger, A.; Heidler, K.; Zastrow, A.; Wittwer, V.
Conference Paper