Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W.
Presentation
2019Enabling Users to Specify Correct Privacy Requirements
Rudolph, Manuel; Polst, Svenja; Dörr, Jörg
Conference Paper
2019Hard- und Softwarerealisierung eines Optical Projection Tomography (OPT)-Systems
Weiß, Vitalis
: Rudolph, Mathias (Betreuer Hochschule); Braumann, Ulf-Dietrich (Betreuer)
Master Thesis
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Conference Paper
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2018Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte
Presentation
2018High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J.
Journal Article
2018Satisfying and Efficient Privacy Settings
Rudolph, Manuel; Polst, Svenja
Conference Paper
2018Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J.
Journal Article
2018System zur Steuerung mindestens eines Betriebsmittels zur Herstellung und/oder Montage von Werkstücken
Rudolph, Marco
Patent
2018Verfahren und ein System zur Steuerung mehrerer Betriebsmittel, die für die gesteuerte Fertigung und/oder Montage von Bauteilen oder Komponenten
Bdiwi, Mohamad; Krusche, Sebastian; Pfeifer, Marko; Rashid, Aquib; Rudolph, Marco
Patent
2018Why Users Ignore Privacy Policies
Rudolph, Manuel; Feth, Denis; Polst, Svenja
Conference Paper
2016Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers
Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias
Presentation
2016Evaluation of water based intelligent fluids for resist stripping in single wafer cleaning tools
Rudolph, Matthias; Esche, Silvio; Hohle, Christoph; Schumann, Dirk; Steinke, Philipp; Thrun, Xaver; Sonntag, Justus von
Conference Paper
2016A framework for generating user- and domain-tailored security policy editors
Rudolph, Manuel; Moucha, Cornelius; Feth, Denis
Report
2016A framework for generating user- and domain-tailored security policy editors
Rudolph, Manuel; Moucha, Cornelius; Feth, Denis
Conference Paper
2016Grundlagenentwicklung für ein modellbasiertes Steuerungssystem
Förster, Markus
: Rudolph, Marco
Bachelor Thesis
2016Patterning and Imaging with Electrons: Assessing Multi-Beam SEM for e-Beam Structured CMOS Samples
Garbowski, Tomasz; Panteleit, Friedhelm; Dellemann, Gregor; Gutsch, Manuela; Hohle, Christoph; Reich, Elke; Rudolph, Matthias; Steidel, Katja; Thrun, Xaver; Zeidler, Dirk
Conference Paper
2016Reaktives Ionenätzen zur Mehrfachstrukturierung und Elektrodentrennung für Kondensatoranwendungen in der Halbleiterindustrie
Pätzold, Björn
: Hohle, Christoph; Rudolph, Matthias; Rennekamp, Reinhold
Master Thesis
2016Requirements elicitation and derivation of security policy templates - an industrial case study
Rudolph, Manuel; Feth, Denis; Doerr, Joerg; Spilker, Joerg
Report
2016Requirements elicitation and derivation of security policy templates - an industrial case study
Rudolph, Manuel; Feth, Denis; Doerr, Joerg; Spilker, Joerg
Conference Paper
2016Usable security policy specification
Rudolph, Manuel; Feth, Denis
Report
2016Usable security policy specification
Rudolph, Manuel; Feth, Denis
Conference Paper
2015Dealing with uncertainty in context-aware mobile applications
Jung, Christian; Eitel, Andreas; Feth, Denis; Rudolph, Manuel
Conference Paper
2015Local pre-curing of an adhesive for the fabrication of shaped piezo-metal-compounds
Drossel, Welf-Guntram; Müller, Roland; Ihlemann, J.; Rudolph, M.; Hensel, Sebastian; Nestler, Matthias
Conference Paper
2015Nano patterning at Fraunhofer IPMS-CNT: Fabrication of silicon master for NIL via e-beam direct write
Thrun, Xaver; Choi, Kang-Hoon; Gutsch, Manuela; Hohle, Christoph; Rudolph, Matthias; Seidel, Konrad
Poster
2014Effect of solvent exchange on the stability of sterically functionalized magnetite nanoparticles in poly(methyl methacrylate) solutions and resulting spray dried composites
Bremerstein, Tina; Rudolph, Martin; Peuker, Urs Alexander
Journal Article
2014Electrical signatures of hypervelocity impact plasma with applications in in-situ particle detection
Rudolph, Martin; Schimmerohn, Martin; Osterholz, Jens; Schäfer, Frank
Journal Article, Conference Paper
2014Innovative and water based stripping approach for thick and bulk photoresists
Rudolph, M.; Schumann, D.; Thrun, X.; Esche, S.; Hohle, C.
Conference Paper
2014Introduction of an innovative water based photoresist stripping process using intelligent fluids
Rudolph, Matthias; Felten, Peter; Thrun, Xaver; Schumann, Dirk; Esche, Silvio; Hohle, Christoph
Conference Paper
2014Satellite vulnerability to space debris - an improved 3D risk assessment methodology
Grassi, Lilith; Tiboldo, Francesca; Destefanis, Roberto; Donath, Thérèse; Winterboer, Arne; Evans, Leanne; Janovsky, Rolf; Kempf, Scott; Rudolph, Martin; Schäfer, Frank; Gelhaus, Johannes
Journal Article
2014Security policy specification templates for critical infrastructure services in the cloud
Rudolph, Manuel; Schwarz, Reinhard; Jung, Christian
Report
2014Security policy specification templates for critical infrastructure services in the cloud
Rudolph, Manuel; Schwarz, Reinhard; Jung, Christian
Conference Paper
2014User-friendly and tailored policy administration points
Rudolph, Manuel
Report
201315 days electron beam exposure for manufacturing of large area silicon based NIL master
Thrun, X.; Choi, K.-H.; Freitag, M.; Gutsch, M.; Hohle, C.; Paul, J.; Rudolph, M.; Steidel, K.
Journal Article
2013Computational methodology to predict satellite system-level effects from impacts of untrackable space debris
Welty, N.; Rudolph, M.; Schäfer, F.; Apeldoorn, J.; Janovsky, R.
Journal Article
2013Evaluation of an advanced dual hard mask stack for high resolution pattern transfer
Paul, Jan; Rudolph, M.; Riedel, S.; Thrun, X.; Wege, S.; Hohle, C.
Conference Paper
2013Experiments and FE-simulation of the forming and curing process of bonded piezo-metal-structures
Neugebauer, Reimund; Ihlemann, Jörg; Lachmann, Lutz; Drossel, Welf-Guntram; Hensel, Sebastian; Nestler, Matthias; Rudolph, M.
Conference Paper
2013High resolution patterning for sub 30 nm technology nodes using a ceramic based dual hard mask
Paul, J.; Rudolph, M.; Riedel, S.; Thrun, X.; Beyer, V.; Wege, S.; Hohle, C.
Conference Paper
2013High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures
Weinreich, Wenke; Rudolph, Matthias; Koch, Johannes; Paul, Jan; Seidel, Konrad; Riedel, Stefan; Sundqvist, Jonas
Conference Paper
2013Review of radio frequency emission from hypervelocity impact plasmas
Rudolph, Martin
Conference Paper, Journal Article
2013Review of Radio Frequency Emission from Hypervelocity Impact Plasmas
Rudolph, M.
Conference Paper, Journal Article
2013Scaling and optimization of high-density integrated Si-capacitors
Weinreich, W.; Seidel, K.; Rudolph, M.; Koch, J.; Paul, J.; Riedel, S.; Sundqvist, J.; Steidel, K.; Gutsch, M.; Beyer, V.; Hohle, C.
Conference Paper
2012Computational methodology to predict satellite system-level effects from impacts of untrackable space debris
Welty, N.; Rudolph, M.; Schäfer, F.; Apeldoorn, J.; Janovsky, R.
Conference Paper
2012A critical survey of security indicator approaches
Rudolph, Manuel; Schwarz, Reinhard
Conference Paper
2012A critical survey of security indicator approaches
Rudolph, Manuel; Schwarz, Reinhard
Report
2012Debris Shielding for Inflatable Structures Development and Characterization at Hypervelocity Impacts
Destefanis, R.; Faraud, M.; Rudolph, M.; Weber, K.E.; Lambert, M.; Schäfer, F.
Conference Paper
2012Extending the Applicable Range of the SRL Ballistic Limit Equation to Oblique Hypervelocity Impacts
Rudolph, M.; Welty, N.; Putzar, R.; Schäfer, F.; Koebel, D.; Scheper, M.; Janovsky, R.; Apeldoorn, J.; Lambert, M.
Conference Paper
2012Feasibility study of optical/e-beam complementary lithography
Hohle, Christoph; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Rudolph, Matthias; Thrun, Xaver; Jaschinsky, Philipp; Kahlenberg, Frank; Klein, Christof; Klikovits, Jan
Conference Paper
2012Fragmentation of hypervelocity aluminum projectiles on fabrics
Rudolph, M.; Schafer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Journal Article
2012Introduction of zirconium oxide in a hardmask concept for highly selective patterning of scaled high aspect ratio trenches in silicon
Paul, Jan; Riedel, Stefan; Rudolph, Matthias; Wege, Stephan; Czernohorsky, Malte; Sundqvist, Jonas; Hohle, Christoph; Beyer, Volkhard
Journal Article, Conference Paper
2012Prototype ATLAS IBL modules using the FE-I4A front-end readout chip
Albert, J.; Alex, M.; Alimonti, G.; Allport, P.; Altenheiner, S.; Ancu, S.; Andreazza, A.; Arguin, J.; Arutinov, D.; Backhaus, M.; Bagolini, A.; Ballansat, J.; Barbero, M.; Barbier, G.; Bates, R.; Battistin, M.; Baudin, P.; Beau, T.; Beccherle, R.; Beck, H.; Benoit, M.; Bensinger, J.; Bomben, M.; Borri, M.; Boscardin, M.; Direito, J.B.; Bousson, N.; Boyd, R.G.; Breugnon, P.; Bruni, G.; Bruschi, M.; Buchholz, P.; Buttar, C.; Cadoux, F.; Calderini, G.; Caminada, L.; Capeans, M.; Casse, G.; Catinaccio, A.; Cavalli-Sforza, M.; Chauveau, J.; Chu, M.; Ciapetti, M.; Cindro, V.; Citterio, M.; Clark, A.; Cobal, M.; Coelli, S.; Colijn, A.; Colin, D.; Collot, J.; Crespo-Lopez, O.; Dalla Betta, G.; Darbo, G.; DaVia, C.; David, P.; Debieux, S.; Delebecque, P.; Devetak, E.; DeWilde, B.; Di Girolamo, B.; Dinu, N.; Dittus, F.; Diyakov, D.; Djama, F.; Dobos, D.; Doonan, K.; Dopke, J.; Dorholt, O.; Dube, S.; Dushkin, A.; Dzahini, D.; Egorov, K.; Ehrmann, O.; Elldge, D.; Elles, S.; Elsing, M.; Eraud, L.; Ereditato, A.
Journal Article
2012Security Indicators - a State of the Art Survey Public Report
Rudolph, Manuel; Schwarz, Reinhard
Report
2012Terminal Ballistics of Flexible Micrometeoroid and Space Debris Protection Shields
Rudolph, M.; Weber, K.E.; Schäfer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Conference Paper
2011Electrical response of current-carrying space-grade harnesses to hypervelocity impact
Rudolph, M.; Welty, N.; Maier, C.; Putzar, R.; Schäfer, F.; Lambert, M.
Conference Paper
2011Fragmentation of hypervelocity aluminum projectiles on fabrics
Rudolph, M.; Schäfer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Conference Paper
2011Light-gas gun launcher concept for high-g proof miniature suborbital payloads
Schäfer, F.; Schimmerohn, M.; Rudolph, M.; Herbrich, S.
Conference Paper
2011Security evaluation of service-oriented systems using the SiSOA method
Jung, Christian; Rudolph, Manuel; Schwarz, Reinhard
Report
2011Security evaluation of service-oriented systems with an extensible knowledge base
Jung, Christian; Rudolph, Manuel; Schwarz, Reinhard
Conference Paper
2011Security evaluation of service-oriented systems with an extensible knowledge base
Jung, Christian; Rudolph, Manuel; Schwarz, Reinhard
Report
2010Fragmentation of aluminum projectiles on fabrics
Rudolph, M.; Schäfer, F.; Destefanis, R.; Faraud, M.; Lambert, M.
Conference Paper
2010Green fluorescent nanodiamond conjugates and their possible applications for biosensing
Opitz, J.; Sorge, M.; Rose, N.; Rudolph, M.; Krueger, P.; Hannstein, I.; Schreiber, J.; Mkandawire, M.; Pompe, W.; Roedel, G.; Lapina, V.A.; Appelhans, D.
Conference Paper
2010Indicator-based architecture-level security evaluation in a service-oriented environment
Antonino, Pablo; Duszynski, Slawomir; Jung, Christian; Rudolph, Manuel
Report
2010Indicator-based architecture-level security evaluation in a service-oriented environment
Antonino, Pablo; Duszynski, Slawomir; Jung, Christian; Rudolph, Manuel
Conference Paper
2000Best before... Unkonventionelle Haltbarmachungsverfahren unter der Lupe
Pfeiffer, T.; Rudolph, M.; Knorr, D.
Journal Article