Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2017Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg
Conference Paper
2017Kapazitive mikromechanische Ultraschallwandler für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg
Poster
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2011Calibration of diffractive micromirror arrays for microscopy applications
Berndt, Dirk; Heber, Jörg; Sinning, Steffen; Rudloff, Dirk; Wolschke, Steffen; Eckert, Mark; Schmidt, Jan-Uwe; Bring, M.; Wagner, Michael; Lakner, Hubert
Conference Paper
2010Multispectral characterization of diffractive micromirror arrays
Berndt, D.; Heber, J.; Sinning, S.; Kunze, D.; Knobbe, J.; Schmidt, J.-U.; Bring, M.; Rudloff, D.; Friedrichs, M.; Rössler, J.; Eckert, M.; Kluge, W.; Neumann, H.; Wagner, M.; Lakner, H.
Conference Paper
2010Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range
Schmidt, J.-U.; Bring, M.; Heber, J.; Friedrichs, M.; Rudloff, D.; Rößler, J.; Berndt, D.; Neumann, H.; Kluge, W.; Eckert, M.; List, M.; Müller, M.; Wagner, M.
Conference Paper
2010Temperature measurement on MOEMS micromirror plates under illumination
Wullinger, I.; Rudloff, D.; Lukat, K.; Dürr, P.; Krellmann, M.; Kunze, D.; Narayana Samy, A.; Dauderstädt, U.; Wagner, M.
Conference Paper
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2008Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates
Schmidt, J.-U.; Friedrichs, M.; Bakke, T.; Voelker, B.; Rudloff, D.; Lakner, H.
Conference Paper
2007Contrast properties of spatial light modulators for microlithography
Heber, J.; Kunze, D.; Dürr, P.; Rudloff, D.; Wagner, M.; Björnängen, P.; Luberek, J.; Berzinsh, U.; Sandström, T.; Karlin, T.
Conference Paper
2007Technologieentwicklung für 1-Mega-Pixel Mikrospiegel-Arrays mit hohem optischem Füllfaktor und langzeitstabilem Auslenkverhalten
Schmidt, J.-U.; Friedrichs, M.; Rudloff, D.; Lakner, H.
Conference Paper
2006DUV-reflective coatings and novel actuator materials for light modulator arrays
Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert
Presentation
2006Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.; Schenk, H.; Lakner, H.
Conference Paper
2006Micromirror Array of Monocrystalline Silicon
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.
Conference Paper
2005Drift free, highly planar silicon micromirror arrays
Völker, B.; Friedrichs, M.; Rudloff, D.; Bakke, T.
Conference Paper