Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Defined area polymer working stamp manufacture for S&R UV-NIL by direct laser writing
Rumler, Maximilian; Michel, Felix; Becker, Marco; Baier, Leander; Förthner, Michael; Rommel, Matthias; Schleunitz, Arne; Klein, Jan Jasper
Poster
2012Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
Poster