Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Verfahren und Vorrichtung zur Herstellung eines optischen Bauteils mit mindestens drei monolithisch angeordneten optischen Funktionsflächen und optisches Bauteil
Beier, Matthias; Hartung, Johannes; Damm, Christoph; Risse, Stefan; Satzer, Britta
Patent
2016Verfahren und Vorrichtung zur interferometrischen Prüfung
Beier, Matthias; Stumpf, Daniela; Gebhardt, Andreas; Risse, Stefan; Zeitner, Uwe Detlef
Patent
2015Development, fabrication, and testing of an anamorphic imaging snap-together freeform telescope
Beier, Matthias; Hartung, Johannes; Peschel, Thomas; Damm, Christoph; Gebhardt, Andreas; Scheiding, Sebastian; Stumpf, Daniela; Zeitner, Uwe D.; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas
Journal Article
2015Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications
Schürmann, Mark; Risse, Stefan; Kämmer, H; Franke, Christian; Schlegel, Ralph; Müller, Sandra; Damm, Christoph; Steinkopf, Ralf; Dreisow, F.; Nolte, Stefan; Eberhardt, Ramona; Kaiser, Norbert
Conference Paper
2015Sub-aperture EUV collector with dual-wavelength spectral purity filter
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, F.; Laubis, C.
Conference Paper
2014(Invited) Glass-Glass Direct Bonding
Kalkowski, Gerhard; Risse, Stefan; Zeitner, Uwe; Fuchs, Frank; Eberhardt, Ramona; Tünnermann, Andreas
Conference Paper
2014Figure correction of freeform mirrors with well-defined reference structures by MRF
Beier, Matthias; Scheiding, Sebastian; Gebhardt, Andreas; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas
Conference Paper
2014In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert
Journal Article
2014Metal mirrors for laser applications
Schürmann, Mark; Reinlein, Claudia; Gebhardt, Andreas; Risse, Stefan
Conference Paper
2014Minimizing the bimetallic bending for cryogenic metal optics based on electroless nickel
Kinast, Jan; Hilpert, Enrico; Lange, Nicolas; Gebhardt, Andreas; Rohloff, Ralf-Rainer; Risse, Stefan; Eberhardt; Ramona; Tünnermann, Andreas
Conference Paper
2013Development of a low cost high precision three-layer 3D artificial compound eye
Zhang, Hao; Li, Lei; McCray, David L.; Scheiding, Sebastian; Naples, Neil J.; Gebhardt, Andreas; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas; Yi, Allen Y.
Journal Article
2013Fabrication of high precision metallic freeform mirrors with magnetorheological finishing (MRF)
Beier, Matthias; Scheiding, Sebastian; Gebhardt, Andreas; Loose, Roman; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas
Conference Paper
2013Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features
Scheiding, Sebastian; Beier, Matthias; Zeitner, Uwe-Detlef; Risse, Stefan; Gebhardt, Andreas
Conference Paper
2013High precision injection molding of freeform optics with 3D error compensation strategy
Dick, Lars; Risse, Stefan; Tünnermann, Andreas
Conference Paper
2013Manufacturing of a precision 3D microlens array on a steep curved substrate by injection molding process
Zhang, Hao; Scheiding, Sebastian; Li, Lei; Gebhardt, Andreas; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas; Yi, Allen Y.
Journal Article
2013Silicate and direct bonding of low thermal expansion materials
Kalkowski, Gerhard; Fabian, Simone; Rothhardt, Carolin; Zeller, Paul; Risse, Stefan
Conference Paper
2013Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Trost, Marcus; Schröder, Sven; Duparré, Angela; Risse, Stefan; Feigl, Torsten; Zeitner, Uwe D.; Tünnermann, Andreas
Journal Article
2012Fly-cutting and testing of freeform optics with sub-µm shape deviations
Steinkopf, Ralf; Scheiding, Sebastian; Gebhardt, Andreas; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas
Conference Paper
2012Injection molded high precision freeform optics for high volume applications
Dick, Lars; Risse, Stefan; Tünnerman, Andreas
Journal Article
2012Investigations into an electrostatic chuck design for 450mm Si wafer
Kalkowski, Gerhard; Peschel, Thomas; Hassall, Geoffrey; Risse, Stefan
Conference Paper
2012Mechanical vacuum feedthrough using gas lubricated guiding elements
Heidler, Nils; Gossel, Marcus; Risse, Stefan; Eberhardt, Ramona; Schenk, Christoph
Conference Paper
2012Optical reflector coatings for astronomical applications from EUV to IR
Schürmann, Mark; Jobst, Paul Johannes; Yulin, Sergiy; Feigl, Torsten; Heiße, Hanno; Wilbrandt, Steffen; Stenzel, Olaf; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert
Conference Paper
2012Polierbare Siliziumschichten zur Herstellung ultra-präziser optischer Komponenten
Jobst, Paul Johannes; Schürmann, Mark; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert
Conference Paper
2012Precision assembly of a miniaturized wire deflector for electron-beam lithography
Risse, Stefan; Damm, Christoph; Hornaff, Marcel; Kamm, Andreas; Mohaupt, Matthias; Eberhardt, Ramona; Schmidt, Ingo; Ramm, Roland; Kühmstedt, Peter; Notni, Gunther; Döring, Hans-Joachim; Elster, Thomas; Kirschstein, Ulf Carsten; Schenk, Christoph
Conference Paper, Journal Article