Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Development of 4 nm-Thin PECVD aluminium oxide using plasma analysis and its application to PERC solar cells and modules
Hofmann, Marc; Wagenmann, Dirk; Teßmann, Christopher; Jäcklein, Martin; Saint-Cast, Pierre; Eberlein, Dirk; Kraft, Achim; Dippell, T.; May, F.; Dörr, M.; Cord, B.; Schütte, T.; Neiß, P.; Eichhorn, L.; Klick, M.; Richter, U.; Siemens, M.; Wiedemuth, P.
Conference Paper
2015Using the 3D-SMS for finding starting configurations in imaging systems with freeform surfaces
Satzer, B.; Richter, U.; Lippmann, U.; Metzner, G.S.; Notni, G.; Gross, H.
Conference Paper
2011In situ thickness determination of multilayered structures using single wavelength ellipsometry and reverse engineering
Rademacher, D.; Vergöhl, M.; Richter, U.
Journal Article
2011Interessenvertretungen im Innovationsprozess
Schwarz-Kocher, M.; Kirner, E.; Dispan, J.; Jäger, A.; Richter, U.; Seibold, B.; Weißfloch, U.
Book
2009Multi-component catalysts for the synthesis of SWCNT
Roch, A.; Märcz, M.; Richter, U.; Leson, A.; Beyer, E.; Jost, O.
Journal Article
2008Efficient Delay Interpolation for Wave Field Synthesis
Franck, A.; Brandenburg, K.; Richter, U.
Conference Paper
2007Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements
Janicki, V.; Sancho-Parramon, J.; Stenzel, O.; Lappschies, M.; Görtz, B.; Rickers, C.; Polenzky, C.; Richter, U.
Journal Article
2007Proposal on MEMS-based interferometric profiler for in-situ etching depth control
Smirnov, A.G.; Schreiber, J.; Richter, U.; Wullinger, I.
Conference Paper
2006Deposition of multilayer optical films and rugate filters deposited by reactive magnetron sputtering
Vergöhl, M.; Rickers, C.; Kricheldorf, U.; Schiffmann, K.; Giesel, P.; Dittrich, R.; Richter, U.
Conference Paper
2006Standardization of integrated ellipsometry for semiconductor manufacturing
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Richter, U.; Stehle, J.L.; Piel, J.-P.
Conference Paper
2001In-situ monitoring of optical coatings on architectural glass and comparison of the accuracy of the layer thicknesses attainable with ellipsometry and photometry
Vergöhl, M.; Malkomes, N.; Matthee, T.; Bräuer, G.; Richter, U.; Nickol, F.-W.; Bruch, J.
Conference Paper, Journal Article
2000In-situ monitoring of optical coatings on architectural glass and comparison of the accuracy of the layer thicknesses attainable with ellipsometry and photometry
Vergöhl, M.; Malkomes, N.; Matthee, T.; Bräuer, G.; Richter, U.; Nickol, F.-W.; Bruch, J.
Conference Paper
1999Effizienzsteigerung von Beschichtungsprozessen für optische Funktionsschichten auf Architekturglas durch in-situ Kontrolle und Regelung
Vergöhl, M.; Malkomes, N.; Bräuer, G.; Bruch, J.; Jäger, S.; Richter, U.
Conference Paper
1999Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO2 and SiO2 films for process control
Vergöhl, M.; Malkomes, N.; Staedler, T.; Matthee, T.; Richter, U.
Conference Paper
1999Ex situ and in situ spectroscopic ellipsometry of MF and DC-sputtered TiO2 and SiO2 films for process control
Vergöhl, M.; Malkomes, N.; Staedler, T.; Matthee, T.; Richter, U.
Journal Article
1999In-situ Ellipsometrie und Plasmadiagnostik zur Effizienzsteigerung der Abscheidung optischer Funktionsschichten durch reaktives Magnetron-Sputtern
Vergöhl, M.; Malkomes, N.; Bräuer, G.; Bruch, J.; Jäger, S.; Richter, U.
Conference Paper
1984Bibliographie Bürosysteme der Zukunft
Höring, K.; Boes, G.; Richter, U.; Schäfer, G.; Spengler-Rast, C.; Tiedemann, C.
Book