Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018AlN-based Electro-Acoustic Sensors for Analytics in Liquids
Reusch, Markus
: Ambacher, Oliver (Referent); Fiederle, Michael (Referent)
Dissertation
2018Elastic modulus and coefficient of thermal expansion of piezoelectric Al1-xScxN (up to x = 0.41) thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Prescher, Mario; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Journal Article
2018Insulating and passivating plasma-enhanced atomic layer deposited aluminum oxide thin films for silicon solar cells
Reichel, C.; Reusch, M.; Kotula, S.; Granek, F.; Richter, A.; Hermle, M.; Glunz, S.W.
Journal Article
2018Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, Rachid; Ambacher, Oliver; Zukauskaite, Agne
Conference Paper
2018Piezoelectric characterization of Sc0.26Al0.74N layers on Si (001) substrates
Sinusía Lozano, M.; Pérez-Campos, A.; Reusch, Markus; Kirste, Lutz; Fuchs, Theo; Zukauskaite, Agne; Chen, Z.; Iriarte, G.F.
Journal Article
2018Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Kirste, Lutz; Lebedev, Vadim; Zukauskaite, Agne
Journal Article
2018Temperature cross-sensitivity of AlN-based flexural plate wave sensors
Reusch, Markus; Holc, Katarzyna; Lebedev, Vadim; Kurz, Nicolas; Zukauskaite, Agne; Ambacher, Oliver
Journal Article
2018Temperature dependence of the pyroelectric coefficient of AlScN thin films
Kurz, Nicolas; Lu, Yuan; Kirste, Lutz; Reusch, Markus; Zukauskaite, Agne; Lebedev, Vadim; Ambacher, Oliver
Journal Article
2017Flexural plate wave sensors with buried IDT for sensing in liquids
Reusch, Markus; Holc, Katarzyna; Zukauskaite, Agne; Lebedev, Vadim; Kurz, Nicolas; Ambacher, Oliver
Conference Paper
2017Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
Reusch, Markus; Cherneva, Sabina; Lu, Yuan; Zukauskaite, A.; Kirste, L.; Holc, K.; Datcheva, M.; Stoychev, D.; Lebedev, V.; Ambacher, O.
Journal Article
2017Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver
Journal Article
2016Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
Reusch, M.; Holc, K.; Pletschen, W.; Kirste, L.; Zukauskaité, A.; Yoshikawa, T.; Iankov, D.; Ambacher, O.; Lebedev, V.
Journal Article
2016Electrostatic self-assembly of diamond nanoparticles onto Al- and N-Polar sputtered aluminum nitride surfaces
Yoshikawa, Taro; Reusch, Markus; Zürbig, Verena; Cimalla, Volker; Lee, K.-H.; Kurzyp, M.; Arnault, J.-C.; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim
Journal Article
2016Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers
Yoshikawa, T.; Reusch, M.; Holc, K.; Iankov, D.; Zürbig, V.; Zukauskaité, A.; Nebel, C.E.; Ambacher, O.; Lebedev, V.
Journal Article
2016Piezoelectric AlN films for FPW sensors with improved device performance
Reusch, M.; Holc, K.; Kirste, L.; Katus, P.; Reindl, L.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2016Piezoelectric AlN films for FPW sensors with improved device performance
Reusch, M.; Holc, K.; Kirste, L.; Katus, P.; Reindl, L.; Ambacher, O.; Lebedev, V.
Journal Article, Conference Paper
2015Aluminium nitride membranes with embedded buried IDT electrodes for novel flexural plate wave devices
Reusch, M.; Katus, P.; Holc, K.; Pletschen, W.; Kirste, L.; Zürbig, V.; Iankov, D.; Reindl, L.; Ambacher, O.; Lebedev, V.
Conference Paper
2015Aluminiumnitrid membranen mit vergrabenen IDT für neuartige membranbiegeschwinger
Reusch, M.; Katus, P.; Schilling, C.; Holc, K.; Pletschen, W.; Kirste, L.; Ambacher, O.; Reindl, L.; Lebedev, V.
Conference Paper
2015Tunable multisegment Si(x)N(y)/AlN piezo lenses for wavefront correction
Zürbig, V.; Pätz, D.; Fries, J.; Bichra, M.; Pletschen, W.; Holc, K.; Reusch, M.; Nebel, C.E.; Sinzinger, S.; Ambacher, O.; Lebedev, V.
Conference Paper
2014Doped layer optimization for silicon heterojunctions by injection-level-dependent open-circuit voltage measurements
Bivour, M.; Reusch, M.; Schröer, S.; Feldmann, F.; Temmler, J.; Steinkemper, H.; Hermle, M.
Journal Article
2013Fill factor limitation of silicon heterojunction solar cells by junction recombination
Reusch, M.; Bivour, M.; Hermle, M.; Glunz, S.W.
Journal Article, Conference Paper
2010Decoupling charge carrier collection and metallization geometry of back-contacted back-junction silicon solar cells by using insulating thin films
Reichel, C.; Reusch, M.; Granek, F.; Hermle, M.; Glunz, S.W.
Conference Paper