Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Atmospheric pressure dry texturing enabling 20% conversion efficiency on multicrystalline silicon PERC solar cells
Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Hofmann, M.; Rentsch, J.
Conference Paper
2018Development of an Ozone-Based Inline Cleaning and Conditioning Concept
Fischer, A.; Moldovan, A.; Temmler, J.; Zimmer, M.; Rentsch, J.
Conference Paper
2018Emitter Formation and Passivation Dependence on Crystal Grain Orientations after Atmospheric Pressure Dry Nanotexturing
Ridoy, A.I.; Kafle, B.; Saint-Cast, P.; Lohmüller, S.; Norouzi, M.H.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2018Inline PECVD Deposition of Poly-Si-Based Tunnel Oxide Passivating Contacts
Temmler, J.; Polzin, J.-I.; Feldmann, F.; Kraus, L.; Kafle, B.; Mack, S.; Moldovan, A.; Hermle, M.; Rentsch, J.
Journal Article
2018Integrating transparent conductive oxides to improve the infrared response of silicon solar cells with passivating rear contacts
Tutsch, Leonard; Feldmann, Frank; Bivour, Martin; Wolke, Winfried; Hermle, Martin; Rentsch, Jochen
Conference Paper
2017Influence of the transparent electrode sputtering process on the interface passivation quality of silicon heterojunction solar cells
Tutsch, Leonard; Bivour, Martin; Wolke, Winfried; Hermle, Martin; Rentsch, Jochen
Conference Paper
2017Inline PECVD deposition of a-Si layers for heterojunction solar cells on an industrial scale
Temmler, J.; Moldovan, A.; Putra, D.; Bivour, M.; Rentsch, J.
Conference Paper
2017Metallization of passivating and carrier selective contacts: Status and perspectives at Fraunhofer ISE
Bivour, M.; Bartsch, J.; Clement, F.; Cimiotti, G.; Erath, D.; Feldmann, F.; Fellmeth, T.; Glatthaar, M.; Hermle, M.; Jahn, M.; Kluska, S.; Keding, R.; Lorenz, A.; Lacmago Lontchi, I.-C.; Mack, S.; Moldovan, A.; Nekarda, J.; Pospischil, M.; Rodofili, A.; Rentsch, J.; Steinhauser, B.; Schube, J.; Wolke, W.; Preu, R.; Glunz, S.W.
Conference Paper
2017A new pilot research facility for HJT and selective contact solar cells - PV-TEC SELECT
Rentsch, J.; Bivour, M.; Erath, D.; Feldmann, F.; Fischer, A.; Mack, S.; Moldovan, A.; Temmler, J.; Hermle, M.; Glunz, S.W.; Preu, R.
Conference Paper
2017On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Journal Article
2017Rear passivated mc-Si solar cells textured by atmospheric pressure dry etching
Saint-Cast, P.; Kafle, B.; Pandey, R.; Ridoy, A.I.; Hofmann, M.; Clochard, L.; Schwarze, T.; Pittroff, M.; Rentsch, J.; Preu, R.
Conference Paper, Journal Article
2017Recent developments in the industrial silicon heterojunction process chain enabling efficiencies up to 22.7%
Moldovan, A.; Fischer, A.; Temmler, J.; Bivour, M.; Dannenberg, T.; Erath, D.; Lorenz, A.; Sontag, D.; Zhao, J.; Wissen, A.; Clement, F.; Zimmer, M.; Rentsch, J.
Conference Paper, Journal Article
2017Verfahren zur Abscheidung dünner Schichten
Wolke, Winfried; Rentsch, Jochen
Patent
2016Alternative Inline Analysis of Acidic Etching Baths
Mohr, L.; Dannenberg, T.; Zimmer, M.; Rentsch, J.
Conference Paper
2016On the emitter formation in nanotextured silicon solar cells to achieve improved electrical performances
Kafle, B.; Schön, J.; Fleischmann, C.; Werner, S.; Wolf, A.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Journal Article
2016Ozone-Based Surface Conditioning Focused on an Improved Passivation for SHJ Solar Cells
Moldovan, A.; Dannenberg, T.; Temmler, J.; Kroely, L.; Zimmer, M.; Rentsch, J.
Journal Article, Conference Paper
2016Ozone-based surface conditioning: Combining excellent surface passivation and industrial feasibility for SHJ solar cells
Moldovan, A.; Fischer, A.; Dannenberg, T.; Temmler, J.; Bivour, M.; Zimmer, M.; Hermle, M.; Rentsch, J.; Adou-Ras, D.; Sonntag D.; Zhao, J.; Wissen, A.
Presentation
2016Plasma-Free Dry-Chemical Texturing Process for High-Efficiency Multicrystalline Silicon Solar Cells
Kafle, B.; Freund, T.; Mannan, A.; Clochard, L.; Duffy, E.; Werner, S.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper, Journal Article
2015High-resolution structural investigation of passivated interfaces of silicon solar cells
Richter, S.; Kaufmann, K.; Naumann, V.; Werner, M.; Graff, A.; Grosser, S.; Moldovan, A.; Zimmer, M.; Rentsch, J.; Bagdahn, J.; Hagendorf, C.
Journal Article
2015Honeycomb structure on multicrystalline silicon Al-BSF solar cell with 17.8% efficiency
Volk, A.-K.; Tucher, N.; Seiffe, J.; Hauser, H.; Zimmer, M.; Bläsi, B.; Hofmann, M.; Rentsch, J.
Journal Article
2015Impact of rear side roughness on optical and electrical properties of a high-efficiency solar cell
Richter, M.; Saint-Cast, P.; Dannenberg, T.; Zimmer, M.; Rentsch, J.
Journal Article, Conference Paper
2015Nanostructuring of c-Si surface by F2-based atmospheric pressure dry texturing process
Kafle, B.; Seiffe, J.; Clochard, L.; Duffy, E.; Rentsch, J.; Hofmann, M.
Journal Article
2015Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes
Bishal, K.; Mannan, A.; Freund, T.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2015Relation between light trapping and surface topography of plasma textured crystalline silicon wafers
Souren, F.M.M.; Rentsch, J.; Sanden, M.C.M. van de
Journal Article
2015Tunnel oxide passivated carrier-selective contacts based on ultra-thin SiO2 layers
Moldovan, A.; Feldmann, F.; Zimmer, M.; Rentsch, J.; Hermle, M.; Benick, J.
Journal Article, Conference Paper
2015Tunnel oxide passivated carrier-selective contacts based on ultra-thin SiO2 layers grown by photo-oxidation or wet-chemical oxidation in ozonized water
Moldovan, A.; Feldmann, F.; Kaufmann, K.; Richter, S.; Werner, M.; Hagendorf, C.; Zimmer, M.; Rentsch, J.; Hermle, M.
Conference Paper
2014Characterization of the rear surface roughness of wet chemical polished industrial-type solar cells
Richter, M.; Zimmer, M.; Rentsch, J.; Friedekind, Y.; Fischer, A.
Conference Paper
2014Fluid wrap around during wet chemical single side treatments
Richter, M.; Narayanan, S.; Hain, A.; Zimmer, M.; Rentsch, J.; Reinecke, H.
Conference Paper
2014Investigations on the passivation mechanism of AlN:H and AlN:H-SiN:H stacks
Krugel, G.; Jenkner, F.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.
Journal Article, Conference Paper
2014Multicrystalline silicon solar cell improvement by atmospheric pressure dry etching process
Kafle, B.; Trogus, D.; Seiffe, J.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Conference Paper
2014Online process control of alkaline texturing baths: Determination of the chemical concentrations
Zimmer, M.; Krieg, K.; Rentsch, J.
Journal Article
2014Optical modelling of the front surface for honeycomb-textured silicon solar cells
Volk, A.-K.; Glover, W.; Greulich, J.; Gutscher, S.; Wolke, W.; Zimmer, M.; Rentsch, J.; Reinecke, H.
Conference Paper
2014PECVD Al2O3 for Surface Passivation: A Review of Solar Cell and Thin Layer Characteristics Silicon Solar Cell
Kühnhold, S.; Saint-Cast, P.; Hofmann, M.; Paramanathan, R.; El-Safoury, M.; Kafle, B.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Rentsch, J.; Preu, R.
Conference Paper
2014Simple Applicable Cleaning and Conditioning of Silicon Surfaces with UV/Ozone Sources
Moldovan, A.; Krugel, G.; Feldmann, F.; Zimmer, M.; Rentsch, J.; Roth-Fölsch, A.; Kaufmann, K.; Hagendorf, C.; Hermle, M.
Conference Paper
2014Vorrichtung und Verfahren zum Aufbringen einer Aluminiumoxidschicht auf ein Halbleitersubstrat
Saint-Cast, Pierre; Hofmann, Marc; Rentsch, Jochen; Preu, Ralf
Patent
2013Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells
Moldovan, A.; Birmann, K.; Rentsch, J.; Zimmer, M.; Gitte, T.; Fittkau, J.
Conference Paper
2013Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R.
Journal Article
2013High-power-plasma PECVD of SiNx and Al2O3 for industrial solar cell manufacturing
Hofmann, M.; Kohn, N.; Schwarz, F.; Nölker, S.; Kastl, S.; Beckmann, R.; Ferré, R.; Pernau, T.; Trogus, D.; Kühnhold, S.; Saint-Cast, P.; Rentsch, J.
Conference Paper
2013Industrial screen-printed solar cells with novel atmospheric pressure dry texturing process
Kafle, B.; Trogus, D.; Dresler, B.; Mäder, G.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Conference Paper
2013Multifunctional PECVD layers: Dopant source, passivation, and optics
Seiffe, J.; Pillath, F.; Trogus, D.; Brand, A.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2013A novel approach to high performance and cost effective surface cleaning for high efficiency solar cells
Moldovan, A.; Zimmer, M.; Rentsch, J.; Ferstl, B.; Rajagopalan, B.; Thate, S.; Hoogboom, J.; Ross, M.
Conference Paper
2013Passivation of solar cell emitters using aluminum nitride
Krugel, G.; Sharma, A.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R.
Conference Paper
2013PECVD Al2O3/a-Si:B as a dopant source and surface passivation
Seiffe, J.; Gahoi, A.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2013Potential-induced degradation on cell level: The inversion model
Saint-Cast, P.; Nagel, H.; Wagenmann, D.; Schön, J.; Schmitt, P.; Reichel, C.; Glunz, S.W.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2013Study of hydrogenated AlN as an anti-reflective coating and for the effective surface passivation of silicon
Krugel, G.; Sharma, A.; Wolke, W.; Rentsch, J.; Preu, R.
Journal Article
2013Surface charge and interface state density on silicon substrates after Ozone based wet-chemical oxidation and hydrogen-termination
Angermann, H.; Wolke, K.; Gottschalk, C.; Moldovan, A.; Roczen, M.; Fittkau, J.; Zimmer, M.; Rentsch, J.
Conference Paper
2013Two-step plasma texturing process for industrial solar cell manufacturing
Seiffe, J.; Bremen, B.; Rappl, S.; Hofmann, M.; Rentsch, J.
Conference Paper
2012Advanced anti-reflection and passivation layer systems produced by high-power plasma in the new manz PECVD system
Schwarz, F.; Beckmann, R.; Kohn, N.; Nölker, S.; Kastl, S.; Hofmann, M.; Ferré, R.; Pernau, T.; Wanka, H.; Rentsch, J.
Conference Paper
2012Analysis of phosphorus doped silicon oxide layers deposited by means of PECVD as a dopant source in diffusion processes
Fallisch, A.; Wagenmann, D.; Keding, R.; Trogus, D.; Hofmann, M.; Rentsch, J.; Reinecke, H.; Biro, D.
Journal Article
2012Application of the inkjet-honeycomb-texture in silicon solar cell production
Nievendick, J.; Stocker, M.; Specht, J.; Glover, W.; Zimmer, M.; Rentsch, J.
Journal Article, Conference Paper
2012Cost modeling of silicon solar cell production innovation along the PV value chain
Nold, S.; Voigt, N.; Friedrich, L.; Weber, D.; Hädrich, I.; Mittag, M.; Wirth, H.; Thaidigsmann, B.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2012Electronic interface properties of silicon substrates after ozone based wet-chemical oxidation studied by SPV measurements
Angermann, H.; Wolke, K.; Gottschalk, C.; Moldovan, A.; Roczen, M.; Fittkau, J.; Zimmer, M.; Rentsch, J.
Journal Article, Conference Paper
2012Formation of a Honeycomb Texture for Multicrystalline Silicon Solar Cells Using an Inkjetted Mask
Nievendick, J.; Specht, J.; Zimmer, M.; Zahner, L.; Glover, W.; Stüwe, D.; Rentsch, J.
Journal Article
2012Fully automated concentration control of the acidic texturisation process
Dannenberg, T.; Zimmer, M.; Rentsch, J.
Journal Article, Conference Paper
2012High-temperature stability of c-Si surface passivation by thick PECVD Al2O3 with and without hydrogenated capping layers
Saint-Cast, P.; Kania, D.; Heller, R.; Kuehnhold, S.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article, Conference Paper
2012Impact of thermal treatment on PECVD Al2O3 passivation layers
Kühnhold, S.; Kafle, B.; Kroely, L.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article, Conference Paper
2012Inline microwave-excited plasma deposition of thin amorphous silicon layers
Jeurink, J.; Morzè, N. von; Kroely, L.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2012Investigation of the cleaning effects regarding organic contaminants on the alkaline texturisation
Sonner, C.; Oltersdorf, A.; Zimmer, M.; Moldovan, A.; Rentsch, J.
Conference Paper
2012Multifunctional PECVD layers - cost analysis of the X-pert approach
Seiffe, J.; Nold, S.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2012Multifunctional PECVD layers: Dopant source, passivation, and optics
Seiffe, J.; Pillath, F.; Trogus, D.; Brand, A.A.; Savio, C.; Hofmann, M.; Rentsch, J.
Conference Paper
2012Novel industrial atmospheric pressure dry texturing procress for silicon solar cell improvement
Dresler, B.; Köhler, D.; Mäder, G.; Kaskel, S.; Beyer, E.; Clochard, L.; Duffy, E.; Kafle, B.; Hofmann, M.; Rentsch, J.
Conference Paper
2012Ozone based chemical oxide growth for crystalline solar cell production
Wolke, K.; Gottschalk, C.; Rentsch, J.; Angermann, H.
Conference Paper
2012Performance requirements of crack detection systems in silicon solar cell production
Aßmus, M.; Nold, S.; Rein, S.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article, Conference Paper
2012Relation between solar cell efficiency and crystal defect etching induced by acidic texturization on multicrystalline silicon material
Nievendick, J.; Zimmer, M.; Souren, F.; Haunschild, J.; Rentsch, J.
Journal Article
2012A review of PECVD aluminum oxide for surface passivation
Saint-Cast, P.; Hofmann, M.; Kühnhold, S.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Trogus, D.; Rentsch, J.; Preu, R.
Conference Paper
2012Sputtered aluminum oxide for rear side passivation of p-type silicon solar cells
Krugl, G.; Wolke, W.; Wagner, F.; Rentsch, J.; Preu, R.
Conference Paper
2012Surface contamination of silicon wafer after acidic texturisation
Oltersdorf, A.; Moldovan, A.; Bayer, M.; Zimmer, M.; Rentsch, J.
Conference Paper
2012Thermal stability investigations of PECVD Al2O3 films discussing a possibility of improving surface passivation by re-hydrogenation after high temperature processes
Kafle, B.; Kühnhold, S.; Beyer, W.; Lindekugel, S.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.
Conference Paper
2012Verfahren zum Erzeugen eines Dotierbereiches in einer Halbleiterschicht
Seiffe, Johannes; Rentsch, Jochen; Hofmann, M.; Trogus, D.; Pillath, F.
Patent
2012Very low surface recombination velocity of boron doped emitter passivated with plasma-enhanced chemical-vapor-deposited AlOx layers
Saint-Cast, P.; Richter, A.; Billot, E.; Hofmann, M.; Benick, J.; Rentsch, J.; Preu, R.; Glunz, S.W.
Journal Article, Conference Paper
2011Charge carrier trapping at passivated silicon surfaces
Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2011Diffusion and Characterization of Doped Patterns in Silicon from Prepatterned Boron- and Phosphorus-Doped Silicate Glasses
Keding, R.; Woehl, R.; Stüwe, D.; Fallisch, A.; Hofmann, M.; Rentsch, J.; Biro, D.
Conference Paper
2011In-line measurement of "trench structures" caused by the texturization of mc-silicon solar cells
Nievendick, J.; Zimmer, M.; Demant, M.; Krieg, A.; Rein, S.; Rentsch, J.
Journal Article
2011Increased Ion Energies for Texturing in a High-Throughput Plasma Tool
Piechulla, P.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2011An Industrially Applicable Honeycomb Texture
Nievendick, J.; Specht, J.; Zimmer, M.; Zahner, L.; Glover, W.; Stüwe, D.; Biro, D.; Rentsch, J.
Conference Paper
2011Influence of Contaminations and Cleaning Sequences on Alkaline Texturisation
Sonner, C.; Oltersdorf, A.; Zimmer, M.; Rentsch, J.
Conference Paper
2011Influence of slow surface states on effective lifetime measurements
Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper, Journal Article
2011Influence of trench structures induced by texturization on the breakdown voltage of multicrystalline silicon solar cells
Nievendick, J.; Kwapil, W.; Rentsch, J.
Conference Paper
2011Interface Characterization of Dry-Etched Emitters
Clement, C.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.; Naumann, V.; Werner, M.
Conference Paper
2011Investigations on the Impact of Wafer Grippers on Optical and Electrical Properties of Alkaline Textured and A-Si Passivated Surfaces
Nold, S.; Aßmus, M.; Weil, A.; Haunschild, J.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R.; Kunz, M.
Conference Paper
2011Metal pinning through rear passivation layers: Characterization and effects on solar cells
Saint-Cast, P.; Haunschild, J.; Schwab, C.; Billot, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper, Journal Article
2011A Novel Approach for Mask-Free Selective Emitter Technology Combining Laser Doping and Wet Chemical Etch Back
Volk, A.; Jäger, U.; Rentsch, J.; Preu, R.
Conference Paper
2011Phosphoric Anti-Reflective Coatings as Dopant Source and Front-Side Passivation for Industrial Silicon Solar Cell Manufacturing
Trogus, D.; Seiffe, J.; Pillath, F.; Hofmann, M.; Wolf, A.; Rentsch, J.
Conference Paper
2011Plasma Deposition of a Amorphous Silicon Dopant Sources
Jeurink, J.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2011Removal of Trace Metals Using a Biodegradable Complexing Agent
Treichel, H.; Goldstein, A.; George, M.; Bohling, D.; Rentsch, J.; Oltersdorf, A.; Zimmer, M.; Ostrowski, S.; Mowat, I.; Wang, L.; Kern, W.
Journal Article
2011Surface passivation of crystalline silicon by plasma-enhanced chemical vapor deposition double layers of silicon-rich silicon oxynitride and silicon nitride
Seiffe, J.; Gautero, L.; Hofmann, M.; Rentsch, J.; Preu, R.; Weber, S.; Eichel, R.A.
Journal Article
2011Surface Passivation of Highly and Lowly Doped P-Type Silicon Surfaces with PECVD Al2O3 for Industrially Applicable Solar Cell Concepts
Saint-Cast, P.; Billot, E.; Olwal, P.; Kühnhold, S.; Richter, A.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2011Variation of the layer thickness to study the electrical property of PECVD Al2O3 / C-Si interface
Saint-Cast, P.; Heo, Y.-H.; Billot, E.; Olwal, P.; Hofmann, M.; Rentsch, J.; Glunz, S.W.; Preu, R.
Conference Paper, Journal Article
2011Verfahren zum Erzeugen einer Honeycomb-Textur an einer Oberfläche eines Substrates
Nievendick, Jan; Specht, Jan; Zahner, L.; Rentsch, J.; Biro, D.; Stüwe, D.
Patent
2011Verfahren zur Dotierung von Halbleitersubstraten sowie dotiertes Halbleitersubstrat und Verwendung
Seiffe, J.; Rentsch, J.; Hofmann, M.
Patent
2010Advanced analytical model for the effective recombination velocity of locally contacted surfaces
Saint-Cast, P.; Rüdiger, M.; Wolf, A.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2010Appearance of rift structures created by acidic texturization and their impact on solar cell efficiency
Nievendick, J.; Demant, M.; Haunschild, J.; Krieg, A.; Souren, F.M.M.; Rein, S.; Zimmer, M.; Rentsch, J.
Conference Paper
2010Challenges and advances in back-side metallization
Preu, R.; Wolf, A.; Hofmann, M.; Clement, F.; Nekarda, J.; Rentsch, J.; Biro, D.
Journal Article
2010Characterisation of local Al-BSF formation for PERC solar cell structures
Grasso, F.S.; Gautero, L.; Rentsch, J.; Preu, R.; Lanzafame, R.
Conference Paper
2010Characterization of aluminium screen-printed local contacts
Grasso, F.S.; Gautero, L.; Rentsch, J.; Preu, R.; Lanzafame, R.
Conference Paper
2010Comparison of different rear contacting approaches for industrial PERC solar cells on MC-SI wafer
Gautero, L.; Kania, D.; Seiffe, J.; Knorz, A.; Specht, J.; Nekarda, J.; Hofmann, M.; Rentsch, J.; Sallese, J.-M.; Preu, R.
Conference Paper
2010Dry plasma processing for industrial crystalline silicon solar cell production
Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2010Front surface passivation for industrial-type solar cells by silicon oxynitride - silicon nitride stacks
Schwab, C.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2010High efficiency p-type PERC solar cells applying PECVD ALOx layers
Saint-Cast, P.; Benick, J.; Kania, D.; Billot, E.; Richter, A.; Hermle, M.; Hofmann, M.; Rentsch, J.; Preu, R.; Glunz, S.W.
Conference Paper
2010High temperature stability of PECVD aluminium oxide layers applied as negatively charged passivation on c-Si surfaces
Kania, D.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2010High-efficiency c-Si solar cells passivated with ALD and PECVD aluminum oxide
Saint-Cast, P.; Benick, J.; Kania, D.; Weiss, L.; Hofmann, M.; Rentsch, J.; Preu, R.; Glunz, S.W.
Journal Article
2010Improved emitters by dry etching
Seiffe, J.; Khandelwal, R.; Clement, C.; Jäger, U.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2010Impurity Analysis in Wet Chemical Baths in PV Processes
Oltersdorf, A.; Bayer, M.; Zimmer, M.; Rentsch, J.; Rein, S.
Conference Paper
2010In-line and vertical texturing of mono-crystalline solar cells
Moynihan, M.; O'connor, C.; Barr, B.; Tiffany, S.; Braun, W.; Allardyce, G.; Rentsch, J.; Birmann, K.
Conference Paper
2010Industrial deposition of PECVD AIOx for rear passivation of PERC-type mc-SI solar cells
Rentsch, J.; Sperlich, H.-P.; Kohn, N.; Kania, D.; Saint-Cast, P.; Schetter, C.; Hofmann, M.; Preu, R.
Conference Paper
2010Luminescence imaging for quantitative solar cell material and process characterization
Glatthaar, M.; Haunschild, J.; Zeidler, R.; Rentsch, J.; Rein, S.; Breitenstein, O.; Hinken, D.; Bothe, K.
Conference Paper
2010Online process control of alkaline texturing baths with near-infrared spectroscopy
Zimmer, M.; Birmann, K.; Rentsch, J.
Journal Article
2010P-type Cz-Si PERC-type solar cells applying PECVD aluminium oxide rear surface passivation
Saint-Cast, P.; Kania, D.; Billot, E.; Weiss, L.; Hofmann, M.; Gautero, L.; Kohn, N.; Biro, D.; Rentsch, J.; Preu, R.
Conference Paper
2010Plasma single-sided etching for rear emitter etch-back and flattening of industrial crystalline silicon solar cells
Khandelwal, R.; Hofmann, M.; Trogus, D.; Gautero, L.; Seiffe, J.; Rentsch, J.; Preu, R.
Conference Paper
2010Screen-printed silicon solar cells with LCP selective emitters
Granek, F.; Fleischmann, C.; Kluska, S.; Erath, D.; Rentsch, J.
Conference Paper
2010Single side polish etching for the rear side of crystalline silicon wafers
Kästner, G.; Zimmer, M.; Birmann, K.; Souren, F.M.M.; Rentsch, J.; Preu, R.
Conference Paper
2010Surface texturing for crystalline silicon wafers with wafer thickness down to 100 µm
Souren, F.M.M.; Sanden, M.C.M. van de; Seiffe, J.; Rentsch, J.
Conference Paper
2010Towards the automation of the acidic texturisation process
Zimmer, M.; Dannenberg, T.; Birmann, K.; Rentsch, J.
Conference Paper
2009All-screen-printed 120-µm-thin large-area silicon solar cells applying dielectric rear passivation and laser-fired contacts reaching 18% efficiency
Gautero, L.; Hoffmann, M.; Rentsch, J.; Bitnar, B.; Sallese, J.-M.; Preu, R.
Conference Paper
2009All-screen-printed 120-µM-thin large-area silicon solar cells applying dielectric rear passivation and laser-fired contacts reaching 18% efficiency
Gautero, L.; Hofmann, M.; Rentsch, J.; Lemke, A.; Mack, S.; Seiffe, J.; Nekarda, J.; Biro, D.; Wolf, A.; Bitnar, B.; Sallese, J.M.; Preu, R.
Conference Paper
2009Analysis of metal impurities in wet chemical processes by ICP OES and AAS
Oltersdorf, A.; Zimmer, M.; Rentsch, J.
Conference Paper
2009Controlling the surface tension of alkaline etching solutions
Birmann, K.; Zimmer, M.; Rentsch, J.
Conference Paper
2009Firing stable passivation with a-Si/SiNx stack layers for crystalline silicon solar cells
Saint-Cast, P.; Hofmann, M.; Dimitrova, T.; Wagenmann, D.; Rentsch, J.; Preu, R.
Conference Paper
2009Industrial negatively charged c-Si surface passivation by inline PECVD AlOx
Kania, D.; Saint-Cast, P.; Wagenmann, D.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2009NIR-spectroscopical process control for wet chemical processes
Zimmer, M.; Birmann, K.; Hilgert, J.; Rentsch, J.
Conference Paper
2009Online process control of acidic texturisation baths with ion chromatography
Zimmer, M.; Oltersdorf, A.; Rentsch, J.
Journal Article
2009Overview on crystalline silicon solar cells using PECVD rear passivation and laser-fired contacts
Hofmann, M.; Saint-Cast, P.; Suwito, D.; Seiffe, J.; Schmidt, C.; Kambor, S.; Gautero, L.; Kohn, N.; Nekarda, J.-F.; Leimenstoll, A.; Wagenmann, D.; Erath, D.; Catoir, J.; Wolke, W.; Janz, S.; Biro, D.; Grohe, A.; Rentsch, J.; Glunz, S.W.; Preu, R.
Conference Paper
2009PV-TEC: Retrospection to the three years of operation of a production oriented research platform
Biro, D.; Belledin, U.; Weil, A.; Zimmer, M.; Grohe, A.; Rein, S.; Rentsch, J.; Preu, R.
Conference Paper
2009Quantitative characterization of dry textured silicon surfaces
Souren, F.M.M.; Sanden, M.C.M. van de; Kessels, W.M.M.; Rentsch, J.
Conference Paper
2009Recent developments in rear-surface passivation at Fraunhofer ISE
Hofmann, M.; Janz, S.; Schmidt, C.; Kambor, S.; Suwito, D.; Kohn, N.; Rentsch, J.; Preu, R.; Glunz, S.W.
Conference Paper, Journal Article
2009Relevant pinhole characterisation methods for dielectric layers for silicon solar cells
Saint-Cast, P.; Tanay, F.; Aleman, M.; Reichel, C.; Bartsch, J.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2009Solarzelle und Verfahren zur Herstellung einer Solarzelle aus einem Siliziumsubstrat
Biro, D.; Schultz-Wittmann, O.; Lemke, A.; Rentsch, J.; Clement, F.; Hofmann, M.; Wolf, A.; Gautero, L.; Mack, S.; Preu, R.
Patent
2009Spectroscopical analysis of wet chemical processes
Zimmer, M.; Oltersdorf, A.; Rentsch, J.; Preu, R.
Journal Article
2009Thermal oxidation as a key technology for high efficiency screen printed industrial silicon solar cells
Biro, D.; Mack, S.; Wolf, A.; Lemke, A.; Belledin, U.; Erath, D.; Holzinger, B.; Wotke, E.A.; Hofmann, M.; Gautero, L.; Nold, S.; Rentsch, J.; Preu, R.
Conference Paper
2009Thermal stability of PECVD a-Si:H single and PECVD a-Si:H + PECVD a-SiOx:H double layers for silicon solar cell rear side passivation
Hofmann, M.; Schmidt, C.; Raabe, B.; Rentsch, J.; Preu, R.
Conference Paper
2009Thermally activated p- and n-doped passivation layers
Seiffe, J.; Suwito, D.; Korte, L.; Hofmann, M.; Janz, S.; Rentsch, J.; Preu, R.
Conference Paper
2009Towards a-Si:H rear passivated industrial-type silicon solar cells
Hofmann, M.; Saint-Cast, P.; Bareis, D.; Wagenmann, D.; Rentsch, J.; Preu, R.
Conference Paper
2009Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide
Saint-Cast, P.; Kania, D.; Hofmann, M.; Benick, J.; Rentsch, J.; Preu, R.
Journal Article
2009Wet chemical processing for c-Si solar cells - status and perspectives
Rentsch, J.; Ackermann, R.; Birmann, K.; Furtwängler, H.; Haunschild, J.; Kästner, G.; Neubauer, R.; Nievendick, J.; Oltersdorf, A.; Rein, S.; Schütte, A.; Zimmer, M.; Preu, R.
Conference Paper
2008Industrial approach for the deposition, through-vias wet opening and firing activation of a backside passivation layer applied on solar cells
Gautero, L.; Rentsch, J.; Weiss, L.; Kohn, N.; Eigner, S.; Zimmer, M.; Specht, J.; Nekarda, J.; Stüwe, D.; Retzlaff, M.; Biro, D.; Sallese, J.-M.; Preu, R.
Conference Paper
2008Industrial type CZ silicon solar cells with screen-printed fine line front contacts and passivated rear contacted by laser firing
Hofmann, M.; Erath, D.; Bitnar, B.; Gautero, L.; Nekarda, J.; Grohe, A.; Biro, D.; Rentsch, J.; Preu, R.
Conference Paper
2008Industrially feasible front-side metallization based on ink-jet masking and nickel plating
Aleman, M.; Bay, N.; Gautero, J.; Specht, J.; Stüwe, D.; Neubauer, R.; Baurcha, D.; Biro, D.; Rentsch, J.; Glunz, S.W.; Preu, R.
Conference Paper
2008PECVD-ONO: A new deposited firing stable rear surface passivation layer system for crystalline silicon solar cells
Hofmann, M.; Kambor, S.; Schmidt, C.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R.
Journal Article
2008Plasma cluster processing for advanced solar cell manufacturing
Rentsch, J.; Seiffe, J.; Walter, F.; Hofmann, M.; Weiss, L.; Gautero, L.; Decker, D.; Schlemm, H.; Preu, R.
Conference Paper
2008Single side etching - key technology for industrial high efficiency processing
Rentsch, J.; Gautero, L.; Lemke, A.; Eigner, S.; Zimmer, M.; Walter, F.; Hofmann, M.; Preu, R.
Conference Paper
2008Stack system of PECVD amorphous silicon and PECVD silicon oxide for silicon solar cell rear side passivation
Hofmann, M.; Schmidt, C.; Kohn, N.; Rentsch, J.; Glunz, S.W.; Preu, R.
Journal Article
2008Using hotmelt-inkjet as a structuring method for higher efficiency industrial silicon solar cells
Specht, J.; Biro, D.; Mingirulli, N.; Aleman, M.; Belledin, U.; Efinger, R.; Erath, D.; Gautero, L.; Lemke, A.; Stüwe, D.; Rentsch, J.; Preu, R.
Conference Paper
2008Verfahren zur lokalen Kontaktierung und lokalen Dotierung einer Halbleiterschicht
Preu, R.; Grohe, A.; Biro, D.; Rentsch, J.; Hofmann, M.; Wolf, A.; Nekarda, J.
Patent
2007Detailed analysis of amorphous silicon passivation layers deposited in industrial in-line and laboratory-type PECVD reactors
Hofmann, M.; Schmidt, C.; Kohn, N.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R.
Conference Paper
2007Firing stable surface passivation using all-PECVD stacks of SiOx:H and SiNx:H
Hofmann, M.; Kambor, S.; Schmidt, C.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R.
Conference Paper
2007Industrial realization of dry plasma etching for PSG removal and rear side emitter etching
Rentsch, J.; Decker, D.; Hofmann, M.; Schlemm, H.; Roth, K.; Preu, R.
Conference Paper
2007Inkjet printing for high definition industrial masking processes for solar cell production
Biro, D.; Erath, D.; Belledin, U.; Specht, J.; Stüwe, D.; Lemke, A.; Aleman, M.; Mingirulli, N.; Rentsch, J.; Preu, R.; Schlosser, R.; Bitnar, B.; Neuhaus, H.
Presentation
2007Pilot-line processing of very large (21 x 21 cm²) and thin mc-Si solar cells
Clement, F.; Preu, R.; Reis, I.E.; Biro, D.; Rentsch, J.; Zimmer, M.; Rein, S.; Emanuel, G.; Krieg, A.; Müller, A.; Martin, F.
Conference Paper
2007Textur- und Reinigungsmedium zur Oberflaechenbehandlung von Wafern und dessen Verwendung
Mayer, K.; Schumann, M.; Kray, D.; Orellana Peres, T.; Rentsch, J.; Zimmer, M.; Kirchgässner, E.; Zimmer, E.; Biro, D.; Rostas, A.M.
Patent
2007Thermal oxidation and wet chemical cleaning of silicon wafers for industrial solar cell production
Lemke, A.; Furtwängler, H.; Rentsch, J.; Biro, D.; Preu, R.
Conference Paper
2007Verfahren und Vorrichtung zur Bearbeitung von Waferoberflaechen
Mayer, K.; Schumann, M.; Kray, D.; Orellana Peres, T.; Rentsch, J.; Zimmer, M.
Patent
2006Dielectric rear surface passivation for industrial multicrystalline silicon solar cells
Schultz, O.; Rentsch, J.; Grohe, A.; Glunz, S.W.; Willeke, G.P.
Conference Paper
2006Experimental investigation of wire sawing thin multicrystalline wafers
Kray, D.; Schumann, M.; Schultz, O.; Bergmann, M.; Ettle, P.; Rentsch, J.; Eyer, A.; Willeke, G.
Conference Paper
2006PECVD PSG as a dopant source for industrial solar cells
Benick, J.; Rentsch, J.; Schetter, C.; Voyer, C.; Biro, D.; Preu, R.
Conference Paper
2006PV-Tec: Photovoltaic technology evaluation center
Biro, D.; Preu, R.; Glunz, S.W.; Rein, S.; Rentsch, J.; Emanuel, G.; Brucker, I.; Faasch, T.; Faller, C.; Willeke, G.; Luther, J.
Conference Paper
2006The status of silicon solar cell production technology development at Fraunhofer ISE
Preu, R.; Biro, D.; Rentsch, J.; Clement, F.; Erath, D.; Emanuel, G.; Grohe, A.; Hofmann, M.; Mette, A.; Voyer, C.; Wolke, W.; Glunz, S.W.; Willeke, G.P.
Conference Paper
2006Technology route towards industrial application of rear passivated silicon solar cells
Rentsch, J.; Schultz, O.; Grohe, A.; Biro, D.; Preu, R.; Willeke, G.P.
Conference Paper
2006Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung
Biro, D.; Preu, R.; Rentsch, J.
Patent
2005Determining trade-offs between costs of production and cell/module-efficiency with the concept of indifference curves
Jaus, J.; Rentsch, J.; Preu, R.
Conference Paper
2005Economical and ecological aspects of plasma processing for industrial solar cell fabrication
Rentsch, J.; Jaus, J.; Roth, K.; Preu, R.
Conference Paper
2005Industrialisation of dry phosphorus silicate glass etching and edge isolation for crystalline silicon solar cells
Rentsch, J.; Schetter, C.; Schlemm, H.; Roth, K.; Preu, R.
Conference Paper
2005Isotropic plasma texturing of mc-Si for industrial solar cell fabrication
Rentsch, J.; Kohn, N.; Bamberg, F.; Roth, K.; Peters, S.; Lüdemann, R.; Preu, R.
Conference Paper
2005Texturing of multicrystalline silicon by laser ablation
Rentsch, J.; Bamberg, F.; Schneiderlöchner, E.; Preu, R.
Conference Paper
2005Trockentechnologien zur Herstellung von kristallinen Siliziumsolarzellen
Rentsch, J.
Dissertation
2005Verfahren zur Verminderung der Reflexion an Halbleiteroberflaechen
Schneiderloechner, E.; Rentsch, J.; Preu, R.
Patent
2004Dry phosphorus silicate glass etching for crystalline Si solar cells
Rentsch, J.; Binaie, F.; Schetter, C.; Schlemm, H.; Roth, K.; Theirich, D.; Preu, R.
Conference Paper
2004Inline plasma etching of silicon oxides and nitrides for dry processing in silicon solar cell fabrication
Roth, K.; Rentsch, J.; Binaie, F.; Schetter, C.; Preu, R.; Schlemm, H.
Conference Paper
2004Ökonomische und ökologische Bewertung von Inline-Plasmaätzverfahren zur Herstellung von Siliziumsolarzellen
Jaus, J.
: Rentz, O. (Prüfer); Rosen, J. (Prüfer); Willeke, G. (Prüfer); Preu, R. (Prüfer); Rentsch, J. (Prüfer)
Thesis
2004Plasma etching for industrial in-line processing of c-si solar cells
Rentsch, J.; Emanuel, G.; Schetter, C.; Aumann, T.; Theirich, D.; Gentischer, J.; Roth, K.; Fritzsche, M.; Dittrich, K.-H.; Preu, R.
Presentation
2004Production experience and lifetime investigations of industrally fabricated p-type Cz-silicon solar cells
Rentsch, J.; Sparber, W.; Peters, S.; Neuhaus, H.; Glunz, S.W.; Preu, R.; Lüdermann, R.
Conference Paper
2004Solar mini module made with epitaxial crystalline silicon thin-film wafer equivalents
Reber, S.; Schmidhuber, H.; Lautenschlager, H.; Rentsch, J.; Lutz, F.
Conference Paper
2003Application of screen-printing processes for epitaxial silicon thin-film solar cells
Bau, S.; Rentsch, J.; Huljic, D.M.; Reber, S.; Hurrle, A.; Willeke, G.
Conference Paper
2003Plasma etching for industrial in-line processing of c-Si solar cells
Rentsch, J.; Emanuel, G.; Schetter, C.; Aumann, T.; Theirich, D.; Gentischer, J.; Roth, K.; Fritzsche, M.; Dittrich, K.-H.; Preu, R.
Conference Paper
2003Screen printed c-Si thin film solar cells on insulating substrates
Rentsch, J.; Huljic, D.M.; Kieliba, T.; Bilyalov, R.; Reber, S.
Conference Paper
2003Screen-printed epitaxial silicon thin-film solar cells with 13.8% efficiency
Rentsch, J.; Bau, S.; Huljic, D.M.
Journal Article
2003Technology path to the industrial production of highly efficient and thin c-Si solar cells
Preu, R.; Biro, D.; Emanuel, G.; Grohe, A.; Hofmann, M.; Huljic, D.M.; Reis, I.E.; Rentsch, J.; Schneiderlöchner, E.; Sparber, W.; Wolke, W.; Willeke, G.
Conference Paper
2002Progress in screen printed front side metallization schemes for CSiTF solar cells
Rentsch, J.; Huljic, D.M.; Reber, S.; Preu, R.; Lüdemann, R.
Conference Paper
2002Shunt-Analysis of Epitaxial Silicon Thin-Film Solar Cells by Lock-In Thermography
Bau, S.; Huljic, D.M.; Isenberg, W.; Rentsch, J.
Conference Paper