Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Encapsulation process for diffraction gratings
Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana
Journal Article
2015Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
Paul, Thomas; Matthes, Andre; Harzendorf, Torsten; Ratzsch, Stephan; Zeitner, Uwe D.
Journal Article
2015Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana
Journal Article
2014An ultra-black silicon absorber
Steglich, Martin; Lehr, Dennis; Ratzsch, Stephan; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Journal Article