Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Modular packaging concept for MEMS and MOEMS
Stenchly, V.; Reinert, W.; Quenzer, H.-J.
Conference Paper
2017Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control
Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W.
Journal Article, Conference Paper
2017Piezoelectrically driven and sensed micromirrors with large scan angles and precise closed-loop control
Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W.
Conference Paper
2017PZT-actuated and -sensed resonant micromirrors with large scan angles applying mechanical leverage amplification for biaxial scanning
Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W.
Journal Article
2016Hermetic packaging concept for laser diodes on wafer level
Stenchly, V.; Reinert, W.; Quenzer, H.-J.
Conference Paper
2015Gas flow sputtered thick layers of columnar lead zirconate titanate on silicon wafers for high frequency ultrasound transducers
Tiefensee, F.; Kaden, D.; Jakob, A.; Quenzer, H.-J.; Jung, T.
Journal Article, Conference Paper
2015Herstellung und Integration von piezoelektrischen Pb(ZrxTi1-x)O3-Schichten außerordentlicher Schichtdicke für die Erschließung neuer Anwendungsgebiete
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Kößler, D.; Sichelschmidt, J.; Jakob, A.; Jung, T.; Tiefensee, F.
Conference Paper
2014Precision micro-optical elements for manufacturing of gas sensors using IR-absorption
Quenzer, H.-J.; Stenchly, V.; Schwarzelbach, S.; Kampmann, M.; Wagner, B.; Dudde, R.
Conference Paper
2014Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
Hofmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Hagge, J.; Quenzer, H.-J.; Weiss, M.; Wantoch, T. von; Mallas, C.; Wagner, B.; Benecke, W.
Journal Article
2014Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application
Hofmann, U.; Senger, F.; Janes, J.; Mallas, C.; Stenchly, V.; Wantoch, T. von; Quenzer, H.-J.; Weiss, M.
Conference Paper
2013Mehrachsiger piezoelektrischer Aktuator für optische Komponenten
Kampmann, M.; Stoppel, F.; Quenzer, H.-J.; Kaden, D.; Janes, J.; Wagner, B.
Conference Paper
2013New fabrication method of glass packages with inclined optical windows for micromirrors on wafer level
Stenchly, V.; Quenzer, H.-J.; Hofmann, U.; Janes, J.; Jensen, B.; Benecke, W.
Conference Paper
2013Resonant biaxial 7-mm MEMSm mirror for omnidirectional scanning
Hoffmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Weiss, M.; Quenzer, H.-J.; Wagner, B.; Benecke, W.
Conference Paper
2012High-Q MEMS resonators for laser beam scanning displays
Hofmann, U.; Janes, J.; Quenzer, H.-J.
Journal Article
2012Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool
Kaden, D.; Quenzer, H.-J.; Kratzer, M.; Castaldi, L.; Wagner, B.; Heinz, B.; Mamazza, R.
Conference Paper
2012Optimised piezoelectric PZT thin film production on 8 silicon wafers for micromechanical applications
Kaden, D.; Gu-Stoppel, S.; Quenzer, H.-J.; Kaltenbacher, D.; Wagner, B.; Dudde, R.
Conference Paper
2012Viscous hot glass forming for optical wafer level packaging of micro mirrors
Stenchly, V.; Quenzer, H.-J.; Hofmann, U.; Eisermann, C.; Benecke, W.
Journal Article, Conference Paper
2011Entwicklung und Integration eines Hochratensputterprozesses für Blei-Zirkonat-Titanat-Dünnschichten
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.; Jakob, A.; Tiefensee, F.
Conference Paper
2011In-situ large scale deposition of PZT films by RF magnetron sputtering
Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; Kaden, D.; Quenzer, H.-J.; Wagner, B.
Conference Paper
2011Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.
Conference Paper
2011MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators
Hofmann, U.; Eisermann, C.; Quenzer, H.-J.; Janes, J.; Schroeder, C.; Schwarzelbach, O.; Jensen, B.; Ratzmann, L.; Giese, T.; Senger, F.; Hagge, J.; Weiss, M.; Wagner, B.; Benecke, W.
Conference Paper
2010Giant magnetoelectric coefficients in (Fe90Co10)(78)Si12B10-AlN thin film composites
Greve, H.; Woltermann, E.; Quenzer, H.-J.; Wagner, B.; Quandt, E.
Journal Article
2010Preparation of functional PZT Films on 6 and 8 silicon wafers by high rate sputtering
Dudde, R.; Kaden, D.; Quenzer, H.-J.; Wagner, B.
Conference Paper
2008Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
Quenzer, H.-J.; Dudde, R.; Jacobsen, H.; Wagner, B.; Föll, H.
Conference Paper
2008A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Janes, J.; Stolte, C.; Gruber, K.; Ites, M.; Sörensen, F.; Wagner, B.
Conference Paper
2008Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays
Hofmann, U.; Oldsen, M.; Quenzer, H.-J.; Janes, J.; Heller, M.; Weiss, M.; Fakas, G.; Ratzmann, L.; Marchetti, E.; D'Ascoli, F.; Melani, M.; Bacciarelli, L.; Volpi, E.; Battini, F.; Mostardini, L.; Sechi, F.; Marinis, M. de; Wagner, B.
Conference Paper
2008Waferlevel vacuum packaging: Essential for microscanners in mobile applications
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Reinert, W.; Wagner, B.
Conference Paper, Journal Article
2007Development of a piezoelectric lead titanate thin film process on silicon substrates by high rate gas flow sputtering
Jacobsen, H.; Jung, T.; Ortner, K.; Schiffmann, K.I.; Quenzer, H.-J.; Wagner, B.
Journal Article
2007Ein gläsernes Prüfmuster für AOI in der Fertigung elektronischer Baugruppen
Ahrens, T.; Lawin, O.; Quenzer, H.-J.
Book Article
2007Influence of bias voltage on the structure of lead zirconate titanate piezoelectric films prepared by gas flow sputtering
Ortner, K.; Koeßler, D.; Jung, T.; Jacobsen, H.; Quenzer, H.-J.
Conference Paper, Journal Article
2007A novel fabrication technology for waferlevel vacuum packaged microscanning mirrors
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Wagner, B.
Conference Paper
2007Thick PZT layers deposited by gas flow sputtering
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.
Conference Paper, Journal Article
2006Ein gläsernes Prüfmuster für die automatische optische Inspektion in der Fertigung elektrischer Baugruppen
Ahrens, T.; Quenzer, H.-J.; Lawin, O.
Journal Article
2006High-rate sputtering of thick PZT layers for MEMS actuators
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.
Conference Paper