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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy
Puthankovilakam, K.; Scharf, T.; Kim, M.S.; Naqavi, A.; Herzig, H.P.; Weichelt, T.; Zeitner, U.; Vogler, U.; Voelkel, R.
Journal Article
2015Intensity and phase fields behind Phase Shifting Masks studied with High Resolution Interference Microscopy
Puthankovilakam, K.; Scharf, T.; Herzig, H.P.; Weichelt, T.; Zeitner, U.; Vogler, U.; Voelkel, R.
Conference Paper