Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2014Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias
Conference Paper