Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2014Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias
Conference Paper
2011Aluminum nitride thin film development using statistical methods
Conrad, H.; Pufe, W.; Schenk, H.
Conference Paper
2009Aluminium nitride: A promising and full CMOS compatible piezoelectric material for MOEMS applications
Conrad, H.; Schmidt, J.U.; Pufe, W.; Zimmer, F.; Sandner, T.; Schenk, H.; Lakner, H.
Conference Paper
2007Mikrooptisches reflektierendes Bauelement
Sandner, T.; Pufe, W.; Schenk, H.
Patent
2005Study of sputtered hafnium oxide films for sensor applications
Grüger, H.; Kunath, C.; Kurth, E.; Sorge, S.; Pufe, W.
Conference Paper
2004High quality r.f. sputtered metal oxides (Ta2O5, HfO2) and their properties after annealing
Grüger, H.; Kunath, C.; Kurth, E.; Sorge, S.; Pufe, W.; Pechstein, T.
Conference Paper, Journal Article
2004Improved structural properties of sputtered hafnium dioxide on silicon and silicon oxide for semiconductor and sensor applications
Grüger, H.; Kunath, C.; Kurth, E.; Pufe, W.; Sorge, S.
Conference Paper
1998Model-based signal processing in a CMOS hall sensor row microsystem
Marschner, U.; Fischer, W.-J.; Gottfried-Gottfried, R.; Pufe, W.
Conference Paper
1997Random Access CMOS-Hallsensorzeile zur Positionsdetektion
Gottfried-Gottfried, R.; Pufe, W.; Ulbricht, S.; Seeling, S.
Book Article
1994Ankopplung von Lichtleitfasern an integriert-optische Wellenleiter
Haase, N.; Pufe, W.; Gottfried-Gottfried, R.
Book Article