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| 2013 | Recombination and optical properties of wet chemically polished thermal oxide passivated Si surfaces
Schwab, C.; Wolf, A.; Graf, M.; Wöhrle, N.; Greulich, J.; Kühnhold, S.; Kästner, G.; Biro, D.; Preu, R. | Journal Article |
| 2012 | Atomistic simulations of the silicon surface structure at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R. | Conference Paper |
| 2012 | Cost modeling of silicon solar cell production innovation along the PV value chain
Nold, S.; Voigt, N.; Friedrich, L.; Weber, D.; Hädrich, I.; Mittag, M.; Wirth, H.; Thaidigsmann, B.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2012 | Erratum: "Comprehensive analytical model for locally contacted rear surface passivated solar cells" [J. Appl. Phys. 108, 124510 (2010)]
Wolf, A.; Biro, D.; Nekarda, J.; Kimmerle, A.; Mack, S.; Preu, R. | Journal Article |
| 2012 | Evaluation of via pastes for p- and n-type metal wrap through (MWT) solar cells
Lohmüller, E.; Thaidigsmann, B.; Werner, S.; Clement, F.; Wolf, A.; Biro, D.; Preu, R. | Conference Paper |
| 2012 | High-temperature stability of c-Si surface passivation by thick PECVD Al2O3 with and without hydrogenated capping layers
Saint-Cast, P.; Kania, D.; Heller, R.; Kuehnhold, S.; Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article, Conference Paper |
| 2012 | HIP-MWT solar cells - pilot-line cell processing and module integration
Drews, A.; Clement, F.; Spribille, A.; Thaidigsmann, B.; Linse, M.; Gutscher, S.; Werner, S.; Reitenbach, V.; Ould Chighali, E.; Wolf, A.; Zimmer, M.; Nekarda, J.; Haedrich, I.; Tranitz, M.; Eitner, U.; Wirth, H.; Wilson, H.R.; Biro, D.; Preu, R. | Conference Paper |
| 2012 | Impact of thermal treatment on PECVD Al2O3 passivation layers
Kühnhold, S.; Kafle, B.; Kroely, L.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article, Conference Paper |
| 2012 | Inline microwave-excited plasma deposition of thin amorphous silicon layers
Jeurink, J.; Morzè, N. von; Kroely, L.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2012 | Loss analysis and efficiency potential of p-type MWT-PERC solar cells
Thaidigsmann, Benjamin; Greulich, Johannes; Lohmüller, Elmar; Schmeißer, Simon; Clement, Florian; Wolf, Andreas; Biro, Daniel; Preu, Ralf | Journal Article, Conference Paper |
| 2012 | Multifunctional PECVD layers - cost analysis of the X-pert approach
Seiffe, J.; Nold, S.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2012 | Multifunctional PECVD layers: Dopant source, passivation, and optics
Seiffe, J.; Pillath, F.; Trogus, D.; Brand, A.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article |
| 2012 | MWT solar cell processing by use of isishape® solar etch® SiD for rear contact and edge isolation
Spribille, A.; Greulich, J.; Lohmüller, E.; Clement, F.; Specht, J.; Biro, D.; Preu, R.; Doll, O.; Tüshaus, C.; Stockum, W.; Köhler, I. | Conference Paper |
| 2012 | Nanosecond laser annealing to decrease the damage of picosecond laser ablation of anti-reflection layers on textured silicon surfaces
Brand, A.; Knorz, A.; Zeidler, R.; Nekarda, J.-F.; Preu, R. | Conference Paper |
| 2012 | Passivation of inline wet chemically polished surfaces for industrial PERC devices
Schwab, C.; Wolf, A.; Graf, M.; Nekarda, J.; Kästner, G.; Zimmer, M.; Kühnhold, S.; Hofmann, M.; Biro, D.; Preu, R. | Journal Article, Conference Paper |
| 2012 | The path to industrial production of highly efficient metal wrap through silicon solar cells
Thaidigsmann, Benjamin; Linse, Michael; Wolf, Andreas; Clement, Florian; Biro, Daniel; Preu, Ralf | Journal Article |
| 2012 | Performance requirements of crack detection systems in silicon solar cell production
Aßmus, M.; Nold, S.; Rein, S.; Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article, Conference Paper |
| 2012 | Process characterisation of MWT solar cells - a new method to analyse via contacts
Reitenbach, V.; Spitz, M.; Drews, A.; Weiß, M.; Ould Chighali, E.; Thaidigsmann, B.; Lohmüller, E.; Knorz, A.; Clement, F.; Wolf, A.; Biro, D.; Preu, R. | Conference Paper |
| 2012 | Recombination on locally processed wafer surfaces
Saint-Cast, P.; Nekarda, J.; Hofmann, M.; Kuehnhold, S.; Preu, R. | Journal Article, Conference Paper |
| 2012 | A review and comparison of one-and two-dimensional simulations of solar cells featuring selective emitters
Greulich, J.; Jäger, U.; Rein, S.; Preu, R. | Journal Article |
| 2012 | A review of PECVD aluminum oxide for surface passivation
Saint-Cast, P.; Hofmann, M.; Kühnhold, S.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Trogus, D.; Rentsch, J.; Preu, R. | Conference Paper |
| 2012 | Selective emitters in passivated emitter and rear silicon solar cells enabling 20% on large area P-type silicon
Jäger, U.; Mack, S.; Wufka, C.; Wolf, A.; Biro, D.; Nekarda, J.; Preu, R. | Conference Paper |
| 2012 | Simulating the interface morphology of silver thick film contacts on n-type Si-(100) and Si-(111)
Kontermann, S.; Ruf, A.; Preu, R.; Willeke, G. | Journal Article |
| 2012 | Sputtered aluminum oxide for rear side passivation of p-type silicon solar cells
Krugl, G.; Wolke, W.; Wagner, F.; Rentsch, J.; Preu, R. | Conference Paper |
| 2012 | Synergistic effects of rear-surface passivation and the metal wrap through concept
Thaidigsmann, B.; Drews, A.; Fellmeth, T.; Saint-Cast, P.; Wolf, A.; Clement, F.; Biro, D.; Preu, R. | Journal Article |
| 2012 | Very low surface recombination velocity of boron doped emitter passivated with plasma-enhanced chemical-vapor-deposited AlOx layers
Saint-Cast, P.; Richter, A.; Billot, E.; Hofmann, M.; Benick, J.; Rentsch, J.; Preu, R.; Glunz, S.W. | Journal Article, Conference Paper |
| 2011 | 20% efficient passivated large-area metal wrap through solar cells on boron-doped Cz silicon
Lohmüller, E.; Thaidigsmann, B.; Pospischil, M.; Jäger, U.; Mack, S.; Specht, J.; Nekarda, J.; Retzlaff, M.; Krieg, A.; Clement, F.; Wolf, A.; Biro, D.; Preu, R. | Journal Article |
| 2011 | 20.1% efficient silicon solar cell with aluminum back surface field
Fellmeth, T.; Mack, S.; Bartsch, J.; Erath, D.; Jäger, U.; Preu, R.; Clement, F.; Biro, D. | Journal Article |
| 2011 | Beam Shaping for High Throughput Laser Doped Selective Emitter Solar Cells
Jäger, U.; Fertig, F.; Oesterlin, P.; Büchel, A.; Ullmann, R.; Zühlke, H.-U.; Preu, R. | Conference Paper |
| 2011 | Calculating the specific contact resistance from the nanostructure at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Preu, R.; Willeke, G. | Journal Article |
| 2011 | Charge carrier trapping at passivated silicon surfaces
Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article |
| 2011 | Detection and analysis of micro-cracks in multi-crystalline silicon wafers during solar cell production
Demant, M.; Rein, S.; Krisch, J.; Schoenfelder, S.; Fischer, C.; Bartsch, S.; Preu, R. | Conference Paper |
| 2011 | HIP-MWT - A New Cell Concept for Industrial Processing of High-Performance Metal Wrap Through Silicon Solar Cells
Thaidigsmann, B.; Spribille, A.; Plagwitz, H.; Schubert, G.; Fertig, F.; Clement, F.; Wolf, A.; Biro, D.; Preu, R. | Conference Paper |
| 2011 | HIP-MWT: A simplified structure for metal wrap through solar cells with passivated rear surface
Thaidigsmann, B.; Clement, F.; Wolf, A.; Lohmüller, E.; Fertig, F.; Biro, D.; Preu, R. | Conference Paper, Journal Article |
| 2011 | Impact of hydrogen concentration on the regeneration of light induced degradation
Krugel, G.; Wolke, W.; Geilker, J.; Rein, S.; Preu, R. | Conference Paper, Journal Article |
| 2011 | Increased Ion Energies for Texturing in a High-Throughput Plasma Tool
Piechulla, P.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2011 | Industrially feasible all side passivated silicon based C-MWT concentrator solar cells
Fellmeth, T.; Drews, A.; Thaidigsmann, B.; Mack, S.; Wolf, A.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2011 | Influence of slow surface states on effective lifetime measurements
Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper, Journal Article |
| 2011 | Interface Characterization of Dry-Etched Emitters
Clement, C.; Seiffe, J.; Hofmann, M.; Rentsch, J.; Preu, R.; Naumann, V.; Werner, M. | Conference Paper |
| 2011 | Investigations on the Impact of Wafer Grippers on Optical and Electrical Properties of Alkaline Textured and A-Si Passivated Surfaces
Nold, S.; Aßmus, M.; Weil, A.; Haunschild, J.; Savio, C.; Hofmann, M.; Rentsch, J.; Preu, R.; Kunz, M. | Conference Paper |
| 2011 | Large-area p-type HIP-MWT silicon solar cells with screen printed contacts exceeding 20% efficiency
Thaidigsmann, B.; Lohmüller, E.; Jäger, U.; Mack, S.; Lottspeich, F.; Spribille, A.; Birmann, K.; Erath, D.; Wolf, A.; Clement, F.; Biro, D.; Preu, R. | Journal Article |
| 2011 | A laser based process for the formation of a local back surface field for n-type silicon solar cells
Jäger, U.; Suwito, D.; Benick, J.; Janz, S.; Preu, R. | Journal Article |
| 2011 | Metal pinning through rear passivation layers: Characterization and effects on solar cells
Saint-Cast, P.; Haunschild, J.; Schwab, C.; Billot, E.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper, Journal Article |
| 2011 | MWT meets PERC: Towards 20% efficient industrial silicon solar cells
Biro, D.; Thaidigsmann, B.; Clement, F.; Wolf, A.; Lohmüller, E.; Mack, S.; Fellmeth, T.; Drews, A.; Spribille, A.; Wotke, E.A.; Lottspeich, F.; Hofmann, M.; Jäger, U.; Preu, R. | Conference Paper |
| 2011 | A Novel Approach for Mask-Free Selective Emitter Technology Combining Laser Doping and Wet Chemical Etch Back
Volk, A.; Jäger, U.; Rentsch, J.; Preu, R. | Conference Paper |
| 2011 | Paths to Achieve Efficiencies over 20% with MWT Silicon Solar Cells
Clement, F.; Thaidigsmann, B.; Lohmüller, E.; Specht, J.; Jäger, U.; Mack, S.; Pospischil, M.; Spribille, A.; Erath, D.; Nekarda, J.; Hofmann, M.; Wolf, A.; Biro, D.; Preu, R. | Conference Paper |
| 2011 | Processing of Highly-Efficient MWT Silicon Solar Cells
Clement, F.; Thaidigsmann, B.; Hoenig, R.; Fellmeth, T.; Spribille, A.; Lohmüller, E.; Krieg, A.; Glatthaar, M.; Wirth, H.; Biro, D.; Preu, R.; Menkoe, M.; Meyer, K.; Lahmer, D.; Krokoszinski, H.-J.; Neidert, M.; Henning, A.; Mohr, C.; Zhang, W. | Journal Article |
| 2011 | Properties of purified direct steam grown silicon thermal oxides
Mack, S.; Wolf, A.; Walczak, A.; Thaidigsmann, B.; Wotke, E.A.; Spiegelman, J.J.; Preu, R.; Biro, D. | Journal Article |
| 2011 | Quantitative comparison of simulated and experimental silver crystal formation at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R. | Conference Paper, Journal Article |
| 2011 | Quantum efficiency analysis of highly doped areas for selective emitter solar cells
Jäger, U.; Thaidigsmann, B.; Okanovic, M.; Preu, R. | Conference Paper, Journal Article |
| 2011 | Recombination at metal-emitter interfaces of front contact technologies for highly efficient silicon solar cells
Fellmeth, T.; Born, A.; Kimmerle, A.; Clement, F.; Biro, D.; Preu, R. | Conference Paper, Journal Article |
| 2011 | Screen Printing Aluminium Pastes for Thin Silicon Solar Cells with Passivated Rear Surface and LFC Contacts
Schwab, C.; Thaidigsmann, B.; Nold, S.; Linse, M.; Lottspeich, F.; Prince, A.; Young, R.; Fuge, G.; Weigand, P.; Wolf, A.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2011 | Surface passivation of crystalline silicon by plasma-enhanced chemical vapor deposition double layers of silicon-rich silicon oxynitride and silicon nitride
Seiffe, J.; Gautero, L.; Hofmann, M.; Rentsch, J.; Preu, R.; Weber, S.; Eichel, R.A. | Journal Article |
| 2011 | Surface Passivation of Highly and Lowly Doped P-Type Silicon Surfaces with PECVD Al2O3 for Industrially Applicable Solar Cell Concepts
Saint-Cast, P.; Billot, E.; Olwal, P.; Kühnhold, S.; Richter, A.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2011 | Variation of the layer thickness to study the electrical property of PECVD Al2O3 / C-Si interface
Saint-Cast, P.; Heo, Y.-H.; Billot, E.; Olwal, P.; Hofmann, M.; Rentsch, J.; Glunz, S.W.; Preu, R. | Conference Paper, Journal Article |
| 2010 | 19.5% efficient screen printed crystalline silicon metal wrap through (MWT) solar cells for concentrator (2-25x) applications
Fellmeth, T.; Fritz, S.; Menkoe, M.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2010 | 21.1 % efficient PERC silicon solar cells on large scale by using inline sputtering for metallization
Reinwand, D.; Specht, J.; Stüwe, D.; Seitz, S.; Nekarda, J.-F.; Biro, D.; Preu, R.; Trassl, R. | Conference Paper |
| 2010 | Accurate IV-measurement for back contact solar cells
Glatthaar, M.; Hohl-Ebinger, J.; Krieg, A.; Greif, M.; Greco, L.; Clement, F.; Rein, S.; Warta, W.; Preu, R. | Conference Paper |
| 2010 | Advanced analytical model for the effective recombination velocity of locally contacted surfaces
Saint-Cast, P.; Rüdiger, M.; Wolf, A.; Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article |
| 2010 | Advanced screen printing technique for high definition front side metallization of crystalline silicon solar cells
Erath, D.; Filipovi, A.; Retzlaff, M.; Goetz, A.K.; Clement, F.; Biro, D.; Preu, R. | Journal Article |
| 2010 | Beam shaping - the key to high throughput selective emitter laser processing with a single laser system
Jäger, U.; Oesterlin, P.; Kimmerle, A.; Preu, R. | Conference Paper |
| 2010 | Challenges and advances in back-side metallization
Preu, R.; Wolf, A.; Hofmann, M.; Clement, F.; Nekarda, J.; Rentsch, J.; Biro, D. | Journal Article |
| 2010 | Characterisation of local Al-BSF formation for PERC solar cell structures
Grasso, F.S.; Gautero, L.; Rentsch, J.; Preu, R.; Lanzafame, R. | Conference Paper |
| 2010 | Characterization and optimization of laser edge isolation
Gutscher, S.; Knorz, A.; Gundel, P.; Greulich, J.; Preu, R. | Conference Paper |
| 2010 | Characterization of aluminium screen-printed local contacts
Grasso, F.S.; Gautero, L.; Rentsch, J.; Preu, R.; Lanzafame, R. | Conference Paper |
| 2010 | Combining the advantages of wrap through metallization and rear surface passivation into industrial MWT-PERC devices
Thaidigsmann, B.; Wolf, A.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2010 | Comparison of different rear contacting approaches for industrial PERC solar cells on MC-SI wafer
Gautero, L.; Kania, D.; Seiffe, J.; Knorz, A.; Specht, J.; Nekarda, J.; Hofmann, M.; Rentsch, J.; Sallese, J.-M.; Preu, R. | Conference Paper |
| 2010 | Comparison of three different metallization concepts for LFC cells
Nekarda, J.-F.; Hörteis, M.; Lottspeich, F.; Wolf, A.; Preu, R. | Conference Paper |
| 2010 | Comprehensive analytical model for locally contacted rear surface passivated solar cells
Wolf, A.; Biro, D.; Nekarda, J.; Stumpp, S.; Kimmerle, A.; Mack, S.; Preu, R. | Journal Article |
| 2010 | Development and modelling of crystalline silicon based metal wrap through (MWT) solar cells
Fellmeth, T.; Meyer, K.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Menkoe, M.; Lahmer, D.; Krokoszinski, H.-J. | Conference Paper |
| 2010 | Dispensing of etching paste and inkjetting of diffusion barrier for MWT solar cell processing
Spribille, A.; Clement, F.; Erath, D.; Specht, J.; Biro, D.; Preu, R.; Köhler, I.; Doll, O.; Stockum, W.; Tueshaus, C. | Conference Paper |
| 2010 | Dry plasma processing for industrial crystalline silicon solar cell production
Hofmann, M.; Rentsch, J.; Preu, R. | Journal Article |
| 2010 | Evaluating luminescence based voltage images of silicon solar cells
Glatthaar, M.; Haunschild, J.; Zeidler, R.; Demant, M.; Greulich, J.; Michl, B.; Warta, W.; Rein, S.; Preu, R. | Journal Article |
| 2010 | Fast and precise resistance characterisation of laser drilled and metallized vias
Menkoe, M.; Reitenbach, H.; Hoenig, R.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2010 | Firing stable passivation layers for the front and rear side of high efficiency N-type back-contact back-junction solar cells
Woehl, R.; Mack, S.; Kohn, N.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Front surface passivation for industrial-type solar cells by silicon oxynitride - silicon nitride stacks
Schwab, C.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2010 | Fundamental reactions during the formation of fired silver contacts and solar cell results
Hörteis, M.; Benick, J.; Nekarda, J.; Richter, A.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2010 | Fundamental studies on the front contact formation resulting in a 21% efficiency silicon solar cell with printed rear and front contacts
Hörteis, M.; Benick, J.; Nekarda, J.; Richter, A.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2010 | High efficiency p-type PERC solar cells applying PECVD ALOx layers
Saint-Cast, P.; Benick, J.; Kania, D.; Billot, E.; Richter, A.; Hermle, M.; Hofmann, M.; Rentsch, J.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2010 | High speed laser drilling: Parameter evaluation and characterisation
Knorz, A.; Gutscher, S.; Fell, A.; Gundel, P.; Preu, R. | Conference Paper |
| 2010 | High temperature stability of PECVD aluminium oxide layers applied as negatively charged passivation on c-Si surfaces
Kania, D.; Saint-Cast, P.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2010 | High throughput via-metallization technique for multi-crystalline metal wrap through (MWT) silicon solar cells exceeding 16% efficiency
Clement, F.; Menkö, M.; Kubera, T.; Erath, D.; Hoenig, R.; Kwapil, W.; Wolke, W.; Preu, R. | Journal Article |
| 2010 | High-efficiency c-Si solar cells passivated with ALD and PECVD aluminum oxide
Saint-Cast, P.; Benick, J.; Kania, D.; Weiss, L.; Hofmann, M.; Rentsch, J.; Preu, R.; Glunz, S.W. | Journal Article |
| 2010 | Highly efficient industrially feasible metal wrap through (MWT) silicon solar cells
Fellmeth, T.; Menkoe, M.; Clement, F.; Biro, D.; Preu, R. | Journal Article |
| 2010 | Improved emitters by dry etching
Seiffe, J.; Khandelwal, R.; Clement, C.; Jäger, U.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2010 | Industrial deposition of PECVD AIOx for rear passivation of PERC-type mc-SI solar cells
Rentsch, J.; Sperlich, H.-P.; Kohn, N.; Kania, D.; Saint-Cast, P.; Schetter, C.; Hofmann, M.; Preu, R. | Conference Paper |
| 2010 | Industrial inline PVD metallization for silicon solar cells with laser fired contacts leading to 21.8% efficiency
Nekarda, J.; Reinwand, D.; Hartmann, P.; Preu, R. | Conference Paper |
| 2010 | Industrially feasible rear side concept for n-type silicon solar cells approaching 700 mV of Voc
Suwito, D.; Jäger, U.; Benick, J.; Janz, S.; Hermle, M.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2010 | Influence of doping profile of highly doped regions for selective emitter solar cells
Jäger, U.; Mack, S.; Kimmerle, A.; Wolf, A.; Preu, R. | Conference Paper |
| 2010 | Inkjet structured EWT silicon solar cells with evaporated aluminum metallization and laser-fired contacts
Fallisch, A.; Stüwe, D.; Neubauer, R.; Wagenmann, D.; Keding, R.; Nekarda, J.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Investigation of the minority carrier lifetime reduction during industrial DC-sputtering of metal seed layers
Reinwand, D.; Graf, M.; Hartmann, P.; Preu, R.; Trassl, R. | Conference Paper |
| 2010 | n-Type silicon - enabling efficiencies > 20% in industrial production
Glunz, S.W.; Benick, J.; Biro, D.; Bivour, M.; Hermle, M.; Pysch, D.; Rauer, M.; Reichel, C.; Richter, A.; Rüdiger, M.; Schmiga, C.; Suwito, D.; Wolf, A.; Preu, R. | Conference Paper |
| 2010 | Novel MWT cell design on monocrystalline silicon wafers
Meyer, K.; Krokoszinski, H.-J.; Lahmer, D.; Wütherich, T.; Dupke, M.; Jesswein, R.; Lossen, J.; Zerrer, P.; Prießner, A.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2010 | P-type Cz-Si PERC-type solar cells applying PECVD aluminium oxide rear surface passivation
Saint-Cast, P.; Kania, D.; Billot, E.; Weiss, L.; Hofmann, M.; Gautero, L.; Kohn, N.; Biro, D.; Rentsch, J.; Preu, R. | Conference Paper |
| 2010 | Paste development for screen printed mc-Si MWT solar cells exceeding 17% efficiency
Hoenig, R.; Clement, F.; Menkoe, M.; Retzlaff, M.; Biro, D.; Preu, R.; Neidert, M.; Henning, A.; Mohr, C.; Zhang, W. | Conference Paper |
| 2010 | Photovoltaische Solarzelle und Verfahren zur Herstellung einer photovoltaischen Solarzelle
Thaidigsmann, B.; Clement, F.; Biro, D.; Wolf, A.; Preu, R. | Patent |
| 2010 | Pilot line processing of 18.6% efficient rear surface passivated large area solar cells
Wolf, A.; Wotke, E.A.; Walczak, A.; Mack, S.; Bitnar, B.; Koch, C.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Pilot processing of 18.6% efficient rear surface passivated silicon solar cells with screen printed front contacts
Wolf, A.; Wotke, E.A.; Mack, S.; Nekarda, J.-F.; Biro, D.; Preu, R.; Schlegel, K.; Weber, T.; Lossen, J.; Böscke, T.; Grohe, A.; Engelhart, P.; Müller, J.W.; Schubert, G.; Plagwitz, H.; Gassenbauer, Y. | Conference Paper |
| 2010 | Pilot-line processing of highly-efficient MWT silicon solar cells
Clement, F.; Thaidigsmann, B.; Hoenig, R.; Fellmeth, T.; Spribille, A.; Lohmüller, E.; Krieg, A.; Glatthaar, M.; Wirth, H.; Biro, D.; Preu, R.; Menkoe, M.; Meyer, K.; Lahmer, D.; Krokoszinski, H.-J.; Neidert, M.; Henning, A.; Mohr, C.; Zhang, W. | Conference Paper |
| 2010 | Plasma single-sided etching for rear emitter etch-back and flattening of industrial crystalline silicon solar cells
Khandelwal, R.; Hofmann, M.; Trogus, D.; Gautero, L.; Seiffe, J.; Rentsch, J.; Preu, R. | Conference Paper |
| 2010 | Purified steam for industrial thermal oxidation processes
Mack, S.; Biro, D.; Wolf, A.; Thaidigsmann, B.; Walczak, A.; Spiegelmann, J.J.; Preu, R. | Conference Paper |
| 2010 | Silicon solar cells using aluminum foil as rear side metallization reaching 21.0 % efficiency
Nekarda, J.-F.; Lottspeich, F.; Wolf, A.; Preu, R. | Conference Paper |
| 2010 | A simple laser based process for the formation of a LBSF for n-type silicon solar cells
Jäger, U.; Suwito, D.; Benick, J.; Janz, S.; Hermle, M.; Glunz, S.W.; Preu, R. | Conference Paper |
| 2010 | Simultaneous front emitter and rear surface passivation by thermal oxidation - an industrially feasible approach to a 19% efficient PERC device
Mack, S.; Jäger, U.; Wolf, A.; Nold, S.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Single side polish etching for the rear side of crystalline silicon wafers
Kästner, G.; Zimmer, M.; Birmann, K.; Souren, F.M.M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2010 | SiNTO EWT silicon solar cells
Fallisch, A.; Keding, R.; Kästner, G.; Bartsch, J.; Werner, S.; Stüwe, D.; Specht, J.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Structuring technology and simulation of high efficiency back-contact back-junction silicon solar cells under low concentration
Woehl, R.; Rüdiger, M.; Erath, D.; Stüwe, D.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Towards 19% efficient industrial PERC devices using simultaneous front emitter and rear surface passivation by thermal oxidation
Mack, S.; Jäger, U.; Kästner, G.; Wotke, E.A.; Belledin, U.; Wolf, A.; Preu, R.; Biro, D. | Conference Paper |
| 2010 | Verfahren zur Erzeugung einer selektiven Dotierstruktur in einem Halbleitersubstrat zur Herstellung einer photovoltaischen Solarzelle
Jäger, U.; Biro, D.; Volk, A.-K.; Seiffe, J.; Mack, S.; Wolf, A.; Preu, R. | Patent |
| 2010 | Verfahren zur Herstellung einer Metallstruktur auf einer Oberfläche eines Halbleitersubstrates
Reinwand, D.; Biro, D.; Specht, J.; Preu, R.; Stüwe, D. | Patent |
| 2010 | Verfahren zur Herstellung einer photovoltaischen Solarzelle
Mack, S.; Jäger, U.; Wolf, A.; Biro, D.; Preu, R.; Kästner, G. | Patent |
| 2009 | Advances in electroless nickel plating for the metallization of silicon solar cells using different structuring techniques for the ARC
Aleman, M.; Bay, N.; Barucha, D.; Knorz, A.; Biro, D.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2009 | All-screen-printed 120-µm-thin large-area silicon solar cells applying dielectric rear passivation and laser-fired contacts reaching 18% efficiency
Gautero, L.; Hoffmann, M.; Rentsch, J.; Bitnar, B.; Sallese, J.-M.; Preu, R. | Conference Paper |
| 2009 | All-screen-printed 120-µM-thin large-area silicon solar cells applying dielectric rear passivation and laser-fired contacts reaching 18% efficiency
Gautero, L.; Hofmann, M.; Rentsch, J.; Lemke, A.; Mack, S.; Seiffe, J.; Nekarda, J.; Biro, D.; Wolf, A.; Bitnar, B.; Sallese, J.M.; Preu, R. | Conference Paper |
| 2009 | Control and optimization of thermal oxidation processes for industrial solar cell fabrication
Mack, S.; Lemke, A.; Wolf, A.; Holzinger, B.; Zimmer, M.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Development of crystalline silicon based metal wrap through (MWT) solar cells for low concentrator (2-30x) applications
Fellmeth, T.; Fritz, S.; Menkö, M.; Mingirulli, N.; Glatthaar, M.; Clement, F.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Development of via pastes for high efficiency MWT cells with a low shunting behaviour
Neidert, M.; Clement, F.; Menkö, M.; Hoenig, R.; Henning, A.; Zhang, W.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Firing stable passivation with a-Si/SiNx stack layers for crystalline silicon solar cells
Saint-Cast, P.; Hofmann, M.; Dimitrova, T.; Wagenmann, D.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Front-side metallization of silicon solar cells by nickel plating and light induced silver plating
Aleman, M.; Bay, N.; Barucha, D.; Glunz, S.W.; Preu, R. | Journal Article |
| 2009 | Impact of solar cell manufacturing processes on thermal oxide-passivated silicon surfaces
Mack, S.; Wolf, A.; Wotke, E.A.; Lemke, A.; Holzinger, B.; Dimitrova, T.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Industrial negatively charged c-Si surface passivation by inline PECVD AlOx
Kania, D.; Saint-Cast, P.; Wagenmann, D.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Industrial PVD metallization for high efficiency crystalline silicon solar cells
Nekarda, J.; Reinwand, D.; Grohe, A.; Hartmann, P.; Preu, R.; Trassl, R.; Wieder, S. | Conference Paper |
| 2009 | Industrial sputtering metallization technology for crystalline silicon solar cells
Reinwand, D.; Nekarda, J.; Grohe, A.; Hartmann, P.; Trassl, R.; Preu, R. | Conference Paper |
| 2009 | Industrially feasible mc-Si solar cells with fine line printed front contacts on high emitter sheet resistance towards 17% efficiency
Clement, F.; Menkö, M.; Erath, D.; Retzlaff, M.; Goetz, A.K.; Hörteis, M.; Bartsch, J.; Hoenig, R.; Belledin, U.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Industrially feasible multi-crystalline metal wrap through (MWT) silicon solar cells exceeding 16% efficiency
Clement, F.; Menkoe, M.; Kubera, T.; Harmel, C.; Hoenig, R.; Wolke, W.; Wirth, H.; Biro, D.; Preu, R. | Journal Article, Conference Paper |
| 2009 | Influence of different laser parameters in laser doping from phosphosilicate glass
Okanovic, M.; Jäger, U.; Ahrens, M.; Stute, U.; Grohe, A.; Preu, R. | Conference Paper |
| 2009 | Laser ablation of antireflection coatings for plated contacts yielding solar cell efficiencies above 20 %
Knorz, A.; Aleman, M.; Grohe, A.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2009 | Laser ablation of etch resists for structuring and lift-off processes
Knorz, A.; Grohe, A.; Preu, R. | Conference Paper |
| 2009 | LFC on screen printed aluminium rear side metallization
Nekarda, J.; Stumpp, S.; Gautero, L.; Hörteis, M.; Grohe, A.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Microscopic homogeneity of emitters formed on textured silicon using in-line diffusion and phosphoric acid as the dopant source
Voyer, C.; Buettner, T.; Bock, R.; Biro, D.; Preu, R. | Conference Paper, Journal Article |
| 2009 | Novel laser technologies for crystalline silicon solar cell production
Grohe, A.; Knorz, A.; Nekarda, J.; Jaeger, U.; Mingirulli, N.; Preu, R. | Conference Paper |
| 2009 | Optimizing annealing steps for crystalline silicon solar cells with screen printed front side metallization and an oxide-passivated rear surface with local contacts
Kontermann, S.; Wolf, A.; Reinwand, D.; Grohe, A.; Biro, D.; Preu, R. | Journal Article |
| 2009 | Overview on crystalline silicon solar cells using PECVD rear passivation and laser-fired contacts
Hofmann, M.; Saint-Cast, P.; Suwito, D.; Seiffe, J.; Schmidt, C.; Kambor, S.; Gautero, L.; Kohn, N.; Nekarda, J.-F.; Leimenstoll, A.; Wagenmann, D.; Erath, D.; Catoir, J.; Wolke, W.; Janz, S.; Biro, D.; Grohe, A.; Rentsch, J.; Glunz, S.W.; Preu, R. | Conference Paper |
| 2009 | Physical understanding of the behavior of silver thick-film contacts on n-type silicon under annealing conditions
Kontermann, S.; Hörteis, M.; Kasemann, M.; Grohe, A.; Preu, R.; Pink, E.; Trupke, T. | Journal Article |
| 2009 | Pilot-line processing of Cz-Si MWT solar cells with an efficiency gain of 0,3%
Lahmer, D.; Lossen, J.; Meyer, K.; Krokoszinski, H.-J.; Clement, F.; Menkö, M.; Hoenig, R.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Pilot-line processing of screen-printed Cz-Si MWT solar cells exceeding 17% efficiency
Clement, F.; Menkö, M.; Hoenig, R.; Haunschild, J.; Biro, D.; Preu, R.; Lahmer, D.; Lossen, J.; Krokoszinski, H.-J. | Conference Paper |
| 2009 | PV-TEC: Retrospection to the three years of operation of a production oriented research platform
Biro, D.; Belledin, U.; Weil, A.; Zimmer, M.; Grohe, A.; Rein, S.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Recent developments in rear-surface passivation at Fraunhofer ISE
Hofmann, M.; Janz, S.; Schmidt, C.; Kambor, S.; Suwito, D.; Kohn, N.; Rentsch, J.; Preu, R.; Glunz, S.W. | Conference Paper, Journal Article |
| 2009 | Relevant pinhole characterisation methods for dielectric layers for silicon solar cells
Saint-Cast, P.; Tanay, F.; Aleman, M.; Reichel, C.; Bartsch, J.; Hofmann, M.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | A review on 5 years cell development within the european integrated project crystal clear
John, J.; Beaucarne, G.; Choulat, P.; Ma, Y.; Russell, R.; Romijn, I.; Lamers, M.; Mewe, A.; Weeber, A.; Hofmann, M.; Preu, R.; Gautero, J.; Slaoui, A.; Quang, A.Q. le; Nichiporuk, O.; Canizo, C. del; Pan, A.; Solheim, H.; Evju, J.; Nagel, H.; Bitnar, B.; Heemeier, M.; Weber, T.; Kaes, M.; Raabe, B.; Haverkamp, H.; Struempel, C.; Hahn, G. | Conference Paper |
| 2009 | Selective emitter by laser doping from phosphosilicate glass
Jäger, U.; Okanovic, M.; Hörteis, M.; Grohe, A.; Preu, R. | Conference Paper |
| 2009 | Selective laser ablation of SiNx layers on textured surfaces for low temperature front side metallizations
Knorz, A.; Peters, M.; Grohe, A.; Harmel, C.; Preu, R. | Journal Article |
| 2009 | The SINTO process: Utilizing a SINx anti-reflection layer for emitter masking during thermal oxidation
Wolf, A.; Walczak, A.; Mack, S.; Wotke, E.A.; Lemke, A.; Bertram, C.; Belledin, U.; Biro, D.; Preu, R. | Conference Paper |
| 2009 | Solarzelle und Verfahren zur Herstellung einer Solarzelle aus einem Siliziumsubstrat
Biro, D.; Schultz-Wittmann, O.; Lemke, A.; Rentsch, J.; Clement, F.; Hofmann, M.; Wolf, A.; Gautero, L.; Mack, S.; Preu, R. | Patent |
| 2009 | Spatially resolved contact-resistance measurements on crystalline silicon solar cells
Kontermann, S.; Hörteis, M.; Ruf, A.; Feo, S.; Preu, R. | Journal Article |
| 2009 | Spectroscopical analysis of wet chemical processes
Zimmer, M.; Oltersdorf, A.; Rentsch, J.; Preu, R. | Journal Article |
| 2009 | Thermal oxidation as a key technology for high efficiency screen printed industrial silicon solar cells
Biro, D.; Mack, S.; Wolf, A.; Lemke, A.; Belledin, U.; Erath, D.; Holzinger, B.; Wotke, E.A.; Hofmann, M.; Gautero, L.; Nold, S.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Thermal stability of PECVD a-Si:H single and PECVD a-Si:H + PECVD a-SiOx:H double layers for silicon solar cell rear side passivation
Hofmann, M.; Schmidt, C.; Raabe, B.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Thermally activated p- and n-doped passivation layers
Seiffe, J.; Suwito, D.; Korte, L.; Hofmann, M.; Janz, S.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Towards a-Si:H rear passivated industrial-type silicon solar cells
Hofmann, M.; Saint-Cast, P.; Bareis, D.; Wagenmann, D.; Rentsch, J.; Preu, R. | Conference Paper |
| 2009 | Verfahren zur Herstellung einer EWT-Solarzelle
Mingirulli, N.; Biro, D.; Preu, R. | Patent |
| 2009 | Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide
Saint-Cast, P.; Kania, D.; Hofmann, M.; Benick, J.; Rentsch, J.; Preu, R. | Journal Article |
| 2009 | Wet chemical processing for c-Si solar cells - status and perspectives
Rentsch, J.; Ackermann, R.; Birmann, K.; Furtwängler, H.; Haunschild, J.; Kästner, G.; Neubauer, R.; Nievendick, J.; Oltersdorf, A.; Rein, S.; Schütte, A.; Zimmer, M.; Preu, R. | Conference Paper |
| 2008 | Analysis of hydrogen passivation by sputtered silicon nitride
Catoir, J.; Wolke, W.; Griesshammer, M.; Preu, R.; Trassl, R.; Grambole, D. | Conference Paper |
| 2008 | Detailed analysis of annealing silver front side contacts on silicon solar cells
Kontermann, S.; Grohe, A.; Preu, R. | Conference Paper |
| 2008 | Industrial approach for the deposition, through-vias wet opening and firing activation of a backside passivation layer applied on solar cells
Gautero, L.; Rentsch, J.; Weiss, L.; Kohn, N.; Eigner, S.; Zimmer, M.; Specht, J.; Nekarda, J.; Stüwe, D.; Retzlaff, M.; Biro, D.; Sallese, J.-M.; Preu, R. | Conference Paper |
| 2008 | Industrial type CZ silicon solar cells with screen-printed fine line front contacts and passivated rear contacted by laser firing
Hofmann, M.; Erath, D.; Bitnar, B.; Gautero, L.; Nekarda, J.; Grohe, A.; Biro, D.; Rentsch, J.; Preu, R. | Conference Paper |
| 2008 | Industrially feasible front-side metallization based on ink-jet masking and nickel plating
Aleman, M.; Bay, N.; Gautero, J.; Specht, J.; Stüwe, D.; Neubauer, R.; Baurcha, D.; Biro, D.; Rentsch, J.; Glunz, S.W.; Preu, R. | Conference Paper |
| 2008 | Industrially feasible mc-Si metal wrap through (MWT) solar cells with high emitter sheet resistances exceeding 16% efficiency
Clement, F.; Belledin, U.; Wotke, E.; Menkö, M.; Kubera, T.; Hönig, R.; Harmel, C.; Spitz, M.; Wirth, H.; Biro, D.; Preu, R. | Conference Paper |
| 2008 | Industrially feasible multi crystalline metal wrap through (mwt) silicon solar cells exceeding 16% efficiency
Clement, F.; Lutsch, M.; Kubera, T.; Wirth, H.; Harmel, C.; Wolke, W.; Biro, D.; Preu, R. | Conference Paper |
| 2008 | Investigation of blistering of sputtered silicon nitride anti-reflection layer
Catoir, J.; Wolke, W.; Hartmann, P.; Gernot, E.; Preu, R.; Trassl, R.; Wieder, S. | Conference Paper |
| 2008 | Passivation of laser-drilled via holes for emitter-wrap-through-cells
Mingirulli, N.; Trittler, S.; Bui, M.; Grohe, A.; Biro, D.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2008 | PECVD-ONO: A new deposited firing stable rear surface passivation layer system for crystalline silicon solar cells
Hofmann, M.; Kambor, S.; Schmidt, C.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R. | Journal Article |
| 2008 | Plasma cluster processing for advanced solar cell manufacturing
Rentsch, J.; Seiffe, J.; Walter, F.; Hofmann, M.; Weiss, L.; Gautero, L.; Decker, D.; Schlemm, H.; Preu, R. | Conference Paper |
| 2008 | Resistance analysis of wrapped through emitters
Mingirulli, N.; Driessen, M.; Grote, D.; Biro, D.; Preu, R. | Conference Paper |
| 2008 | Simulation of MWT-solar cells using a multi 2D circuit calculation tool based on spice
Kubera, T.; Clement, F.; Grote, D.; Thaidigsmann, B.; Biro, D.; Warta, W.; Preu, R. | Conference Paper |
| 2008 | Single side etching - key technology for industrial high efficiency processing
Rentsch, J.; Gautero, L.; Lemke, A.; Eigner, S.; Zimmer, M.; Walter, F.; Hofmann, M.; Preu, R. | Conference Paper |
| 2008 | Single-wafer tracking in PV production lines
Rein, S.; Krieg, A.; Weil, A.; Emanuel, G.; Glatthaar, M.; Grohe, A.; Preu, R.; Sattler, B.; Lorch, P.; Vayhinger, K. | Conference Paper |
| 2008 | Solar cell process development in the european integrated project crystalclear
Beaucarne, G.; John, J.; Choulat, P.; Ma, Y.; Russel, R.; Romijn, I.; Weeber, A.; Hofmann, M.; Preu, R.; Slaoui, A.; Quang, N. le; Nichiporuk, O.; Canizo, C. del; Pan, A.; Solheim, H.; Evju, J.; Nagel, H.; Horzel, J.; Bitnar, B.; Heemeier, M.; Weber, T.; Raabe, B.; Haverkamp, H.; Strümpel, C.; Junge, J.; Riegel, S.; Seren, S.; Hahn, G. | Conference Paper |
| 2008 | Solarzelle und Solarzellenmodul mit einseitiger Verschaltung
Biro, D.; Mingirulli, N.; Clement, F.; Preu, R.; Woehl, R. | Patent |
| 2008 | Stack system of PECVD amorphous silicon and PECVD silicon oxide for silicon solar cell rear side passivation
Hofmann, M.; Schmidt, C.; Kohn, N.; Rentsch, J.; Glunz, S.W.; Preu, R. | Journal Article |
| 2008 | Using hotmelt-inkjet as a structuring method for higher efficiency industrial silicon solar cells
Specht, J.; Biro, D.; Mingirulli, N.; Aleman, M.; Belledin, U.; Efinger, R.; Erath, D.; Gautero, L.; Lemke, A.; Stüwe, D.; Rentsch, J.; Preu, R. | Conference Paper |
| 2008 | Verfahren zur lokalen Kontaktierung und lokalen Dotierung einer Halbleiterschicht
Preu, R.; Grohe, A.; Biro, D.; Rentsch, J.; Hofmann, M.; Wolf, A.; Nekarda, J. | Patent |
| 2007 | Aluminum foil as back side metallization for LFC cells
Nekarda, J.-F.; Grohe, A.; Schultz, O.; Preu, R. | Conference Paper |
| 2007 | Detailed analysis of amorphous silicon passivation layers deposited in industrial in-line and laboratory-type PECVD reactors
Hofmann, M.; Schmidt, C.; Kohn, N.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R. | Conference Paper |
| 2007 | Firing stable surface passivation using all-PECVD stacks of SiOx:H and SiNx:H
Hofmann, M.; Kambor, S.; Schmidt, C.; Grambole, D.; Rentsch, J.; Glunz, S.W.; Preu, R. | Conference Paper |
| 2007 | Industrial realization of dry plasma etching for PSG removal and rear side emitter etching
Rentsch, J.; Decker, D.; Hofmann, M.; Schlemm, H.; Roth, K.; Preu, R. | Conference Paper |
| 2007 | Inkjet printing for high definition industrial masking processes for solar cell production
Biro, D.; Erath, D.; Belledin, U.; Specht, J.; Stüwe, D.; Lemke, A.; Aleman, M.; Mingirulli, N.; Rentsch, J.; Preu, R.; Schlosser, R.; Bitnar, B.; Neuhaus, H. | Presentation |
| 2007 | Investigations of diffusion barriers for application in back-contacted solar cells
Drießen, M.; Mingirulli, N.; Pingel, S.; Schubert, M.; Biro, D.; Preu, R. | Conference Paper |
| 2007 | Investigations on the influence of different annealing steps on silicon solar cells with silver thick film contacts
Kontermann, S.; Grohe, A.; Erath, D.; Preu, R.; Willeke, G. | Conference Paper |
| 2007 | Laser processes for the industrial production of high efficiency silicon solar cells
Grohe, A.; Wütherich, T.; Knorz, A.; Nekarda, J.; Mingirulli, N.; Harmel, C.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2007 | Lifetime studies on laser drilled vias for application in emitter-wrap-through-solar cells
Mingirulli, N.; Grohe, A.; Dohrn, A.; Hofmann, M.; Schubert, M.; Roth, T.; Biro, D.; Preu, R. | Conference Paper |
| 2007 | Mechanisms involved in the formation of phosphosilicate glass by dehydration of sprayed phosphoric acid in an in-line diffusion furnace
Voyer, C.; Biro, D.; Buettner, T.; Preu, R. | Conference Paper |
| 2007 | Method for determination of recombination activity of cylindric conduction channels for back-contacted solar cells
Mingirulli, N.; Biro, D.; Preu, R.; Glunz, S.W.; Riepe, S. | Journal Article |
| 2007 | Phosphorus gettering and multi-crystalline silicon solar cells using in-line diffusion and sprayed phosphoric acid as the dopant source
Voyer, C.; Biro, D.; Buettner, T.; Preu, R. | Conference Paper |
| 2007 | Pilot-line processing of very large (21 x 21 cm²) and thin mc-Si solar cells
Clement, F.; Preu, R.; Reis, I.E.; Biro, D.; Rentsch, J.; Zimmer, M.; Rein, S.; Emanuel, G.; Krieg, A.; Müller, A.; Martin, F. | Conference Paper |
| 2007 | Processing and comprehensive characterisation of screen-printed mc-Si Metal Wrap Through (MWT) solar cells
Clement, F.; Lutsch, M.; Kubera, T.; Kasemann, M.; Kwapil, W.; Harmel, C.; Mingirulli, N.; Erath, D.; Wirth, H.; Biro, D.; Preu, R. | Conference Paper |
| 2007 | Progress in selective laser ablation of dielectric layers
Knorz, A.; Grohe, A.; Harmel, C.; Preu, R.; Luther, J. | Conference Paper |
| 2007 | PV-TEC - Forschungsfabrik für Solarzellen
Preu, R. | Journal Article |
| 2007 | Series resistance characterization of industrial silicon solar cells with screen-printed contacts using hotmelt paste
Mette, A.; Pysch, D.; Emanuel, G.; Erath, D.; Preu, R.; Glunz, S.W. | Journal Article |
| 2007 | Silicon solar cells with screen-printed front side metallization exceeding 19% efficiency
Schultz, O.; Mette, A.; Preu, R.; Glunz, S.W. | Conference Paper |
| 2007 | Thermal oxidation and wet chemical cleaning of silicon wafers for industrial solar cell production
Lemke, A.; Furtwängler, H.; Rentsch, J.; Biro, D.; Preu, R. | Conference Paper |
| 2007 | Verfahren zur Präzisionsbearbeitung von Substraten und dessen Verwendung
Mayer, K.; Aleman, M.; Kray, D.; Glunz, S.; Mette, A.; Preu, R.; Grohe, A. | Patent |
| 2006 | 21%-efficient silicon solar cells using amorphous silicon rear side passivation
Hofmann, M.; Glunz, S.; Preu, R.; Willeke, G. | Conference Paper |
| 2006 | Boundary conditions for the industrial production of LFC cells
Grohe, A.; Fleischhauer, B.; Preu, R.; Glunz, S.W.; Willeke, G.P. | Conference Paper |
| 2006 | Boundary conditions for the industrial production of LFC cells - Results from the joint project INKA
Grohe, A.; Catoir, J.; Fleischhauer, B.; Preu, R.; Glunz, S.W.; Willeke, G.P.; Schneiderlöchner, E.; Lüdemann, R.; Liu, J.; Schramm, S.; Trassl, R.; Wieder, S. | Conference Paper |
| 2006 | Characterisation of silver thick-film contact formation on textured monocrystalline silicon solar cells
Kontermann, S.; Emanuel, G.; Benick, J.; Preu, R.; Willeke, G. | Conference Paper |
| 2006 | Fabrication of textured solar cells using sprayed phosphoric acid as the dopant source for the in-line emitter diffusion
Voyer, C.; Biro, D.; Wagner, K.; Benick, J.; Preu, R. | Conference Paper |
| 2006 | High efficiencies on large area screen printed silicon solar cells and contacting high sheet resistance emitters using hotmelt ink
Mette, A.; Emanuel, G.; Erath, D.; Preu, R.; Willeke, G. | Conference Paper |
| 2006 | High-efficiency solar cells with laser-grooved buried contact front and laser-fired rear for industrial production
Schultz, O.; Glunz, S.W.; Warta, W.; Preu, R.; Grohe, A.; Köber, M.; Willeke, G.P.; Russel, R.; Fernandez, J.; Morilla, C.; Bueno, R.; Vincueria, I. | Conference Paper |
| 2006 | Laser applications in crystalline silicon solar cell production
Grohe, A.; Preu, R.; Glunz, S.W.; Willeke, G. | Conference Paper |
| 2006 | Novel low temperature front side metallisation scheme using selective laser ablation of anti reflection coatings and electroless nickel plating
Grohe, A.; Knorz, A.; Aleman, M.; Harmel, C.; Glunz, S.W.; Preu, R.; Willeke, G.P. | Conference Paper |
| 2006 | PECVD PSG as a dopant source for industrial solar cells
Benick, J.; Rentsch, J.; Schetter, C.; Voyer, C.; Biro, D.; Preu, R. | Conference Paper |
| 2006 | PV-Tec: Photovoltaic technology evaluation center
Biro, D.; Preu, R.; Glunz, S.W.; Rein, S.; Rentsch, J.; Emanuel, G.; Brucker, I.; Faasch, T.; Faller, C.; Willeke, G.; Luther, J. | Conference Paper |
| 2006 | Selective laser ablation of anti-reflection coatings for novel metallization techniques
Grohe, A.; Harmel, C.; Knorz, A.; Glunz, S.W.; Preu, R.; Willeke, G.P. | Conference Paper |
| 2006 | The status of silicon solar cell production technology development at Fraunhofer ISE
Preu, R.; Biro, D.; Rentsch, J.; Clement, F.; Erath, D.; Emanuel, G.; Grohe, A.; Hofmann, M.; Mette, A.; Voyer, C.; Wolke, W.; Glunz, S.W.; Willeke, G.P. | Conference Paper |
| 2006 | Successful market entry of applied materials' ATONM system for sputtered SiN:H
Trassl, R.; Ratschat, H.; Daube, C.; Wieder, S.; Wolke, W.; Preu, R. | Conference Paper |
| 2006 | Technology route towards industrial application of rear passivated silicon solar cells
Rentsch, J.; Schultz, O.; Grohe, A.; Biro, D.; Preu, R.; Willeke, G.P. | Conference Paper |
| 2006 | Verfahren zum Aufbringen von elektrischen Kontakten auf halbleitende Substrate, halbleitendes Substrat und Verwendung des Verfahrens
Aleman, M.; Mette, A.; Glunz, S.; Preu, R. | Patent |
| 2006 | Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung
Biro, D.; Preu, R.; Rentsch, J. | Patent |
| 2005 | Analysis of silver thick-film contact formation on industrial silicon solar cells
Grupp, G.; Biro, D.; Emanuel, G.; Preu, R.; Schitthelm, F.; Willeke, G. | Conference Paper |
| 2005 | Comparison of different dielectric passivation layers for application in industrially feasible high-efficiency crystalline silicon solar cells
Glunz, S.W.; Grohe, A.; Hermle, M.; Hofmann, M.; Janz, S.; Roth, T.; Schultz, O.; Vetter, M.; Martin, I.; Ferré, R.; Bermejo, S.; Wolke, W.; Warta, W.; Preu, R.; Willeke, G. | Conference Paper |
| 2005 | Determining trade-offs between costs of production and cell/module-efficiency with the concept of indifference curves
Jaus, J.; Rentsch, J.; Preu, R. | Conference Paper |
| 2005 | Economical and ecological aspects of plasma processing for industrial solar cell fabrication
Rentsch, J.; Jaus, J.; Roth, K.; Preu, R. | Conference Paper |
| 2005 | Experimental investigation towards high throughput rapid thermal firing of EFG SI solar cells
Horzel, J.; Grupp, G.; Preu, R.; Schmidt, W. | Conference Paper |
| 2005 | Hot melt ink for the front side metallisation of silicon solar cells
Mette, A.; Erath, D.; Ruiz, R.; Emanuel, G.; Kasper, E.; Preu, R. | Conference Paper |
| 2005 | Industrialisation of dry phosphorus silicate glass etching and edge isolation for crystalline silicon solar cells
Rentsch, J.; Schetter, C.; Schlemm, H.; Roth, K.; Preu, R. | Conference Paper |
| 2005 | Isotropic plasma texturing of mc-Si for industrial solar cell fabrication
Rentsch, J.; Kohn, N.; Bamberg, F.; Roth, K.; Peters, S.; Lüdemann, R.; Preu, R. | Conference Paper |
| 2005 | A large area production technology for solar cells - sputter deposition of SiN:H
Ruske, M.; Liu, J.; Wieder, S.; Preu, R.; Wolke, W. | Conference Paper |
| 2005 | Laser soldering - A technology for better contacts?
Schmidhuber, H.; Klappert, S.; Stollhof, J.; Erfurt, G.; Eberspächer, M.; Preu, R. | Conference Paper |
| 2005 | Low temperature back contact for high efficiency silicon solar cells
Brendle, W.; Nguyen, V.; Brenner, K.; Rostan, P.J.; Grohe, A.; Schneiderlöchner, E.; Preu, R.; Rau, U.; Palfinger, G.; Werner, J.H. | Conference Paper |
| 2005 | Peak firing temperature dependence of the microstructure of Ag thick-film contacts on silicon solar cells - a detailed AFM study of the interface
Grupp, G.; Huljic, D.M.; Preu, R.; Willeke, G.; Luther, J. | Conference Paper |
| 2005 | Progress in the characterisation of laser-fired contacts
Grohe, A.; Zastrow, U.; Meertens, D.; Houben, L.; Brendle, W.; Bilger, G.; Schneiderlöchner, E.; Glunz, S.W.; Preu, R.; Willeke, G. | Conference Paper |
| 2005 | Progress in the use of sprayed phosphoric acid as an inexpensive dopant source for industrial solar cells
Voyer, C.; Biro, D.; Wagner, K.; Benick, J.; Preu, R.; Koriath, J.; Heintze, M.; Wanka, H.N. | Conference Paper |
| 2005 | Status and advancement in transferring the laser-fired contact technology to screen-printed silicon solar cells
Schneiderlöchner, E.; Grohe, A.; Fleischhauer, B.; Hofmann, M.; Glunz, S.W.; Preu, R.; Willeke, G. | Conference Paper |
| 2005 | Surface passivation for solar cells by large scale inline sputtering of silicon nitride
Wolke, W.; Catoir, J.; Preu, R.; Emanuel, G.; Liu, J.; Ruske, M. | Conference Paper |
| 2005 | Texturing of multicrystalline silicon by laser ablation
Rentsch, J.; Bamberg, F.; Schneiderlöchner, E.; Preu, R. | Conference Paper |
| 2005 | Verfahren zur Verminderung der Reflexion an Halbleiteroberflaechen
Schneiderloechner, E.; Rentsch, J.; Preu, R. | Patent |
| 2004 | Comprehensive study of rapid thermal firing for industrial production of crystalline silicon thick-film solar cells
Huljic, D.M.; Grupp, G.; Horzel, J.; Preu, R. | Conference Paper |
| 2004 | Dry phosphorus silicate glass etching for crystalline Si solar cells
Rentsch, J.; Binaie, F.; Schetter, C.; Schlemm, H.; Roth, K.; Theirich, D.; Preu, R. | Conference Paper |
| 2004 | Evaluation of dopant sources and deposition methods suitable for in-line diffusion in the PV industry
Voyer, C.; Biro, D.; Emanuel, G.; Preu, R.; Koriath, J.; Wanka, H. | Conference Paper |
| 2004 | Inline plasma etching of silicon oxides and nitrides for dry processing in silicon solar cell fabrication
Roth, K.; Rentsch, J.; Binaie, F.; Schetter, C.; Preu, R.; Schlemm, H. | Conference Paper |
| 2004 | Innovative and efficient production processes for silicon solar cells and modules - SOLPRO IV
Preu, R.; Emanuel, G.; Untiedt, D.; Klappert, S.; Schmidhuber, H.; Biro, D.; Voyer, C.; Wolke, W.; Schneiderlöchner, E. | Conference Paper |
| 2004 | Laser-fired contact silicon solar cells on p- and n-substrates
Glunz, S.W.; Schneiderlöchner, E.; Kray, D.; Grohe, A.; Hermle, M.; Kampwerth, H.; Preu, R.; Willeke, G. | Conference Paper |
| 2004 | Ökonomische und ökologische Bewertung von Inline-Plasmaätzverfahren zur Herstellung von Siliziumsolarzellen
Jaus, J.
: Rentz, O. (Prüfer); Rosen, J. (Prüfer); Willeke, G. (Prüfer); Preu, R. (Prüfer); Rentsch, J. (Prüfer) | Thesis |
| 2004 | On the photon-enhanced diffusion of phosphorus in silicon wafers during rapid isothermal processing
Peters, S.; Hickel, P.-E.; Horzel, J.; Noel, S.; Preu, R. | Conference Paper |
| 2004 | Plasma etching for industrial in-line processing of c-si solar cells
Rentsch, J.; Emanuel, G.; Schetter, C.; Aumann, T.; Theirich, D.; Gentischer, J.; Roth, K.; Fritzsche, M.; Dittrich, K.-H.; Preu, R. | Presentation |
| 2004 | Production experience and lifetime investigations of industrally fabricated p-type Cz-silicon solar cells
Rentsch, J.; Sparber, W.; Peters, S.; Neuhaus, H.; Glunz, S.W.; Preu, R.; Lüdermann, R. | Conference Paper |
| 2004 | Silicon nitride - silicon oxide stacks for solar cell rear side passivation
Hofmann, M.; Schneiderlöchner, E.; Wolke, W.; Preu, R. | Conference Paper |
| 2004 | Silicon solar cells with screen printed-front contact and dielectrically passivated, laser-fired rear electrode
Schneiderlöchner, E.; Emanuel, G.; Grupp, G.; Lautenschlager, H.; Leimenstoll, A.; Glunz, S.W.; Preu, R.; Willeke, G. | Conference Paper |
| 2004 | SiN:H anti-reflection coatings for c-Si solar cells by large scale inline sputtering
Wolke, W.; Jäckle, A.; Preu, R.; Wieder, S.; Ruske, M. | Conference Paper |
| 2004 | Transport systems for industrial in-line diffusion of silicon solar cells
Biro, D.; Preu, R.; Willeke, G.; Untiedt, D.; Wandel, G.; Gentischer, J. | Conference Paper |
| 2003 | Analysis of laser-fired local back surface fields using n+np+ cell structures
Glunz, S.W.; Grohe, A.; Hermle, M.; Schneiderlöchner, E.; Dicker, J.; Preu, R.; Mäckel, H.; Macdonald, D.; Cuevas, A. | Conference Paper |
| 2003 | Characterization of laser-fired contacts processed on wafers with different resistivity
Grohe, A.; Schneiderlöchner, E.; Hermle, M.; Preu, R.; Glunz, S.W.; Willeke, G.; Walz, S. | Conference Paper |
| 2003 | Comparison of texturing methods for monocrystalline silicon solar cells using KOH and Na2CO3
Sparber, W.; Schultz, O.; Biro, D.; Emanuel, G.; Preu, R.; Poddey, A.; Borchert, D. | Conference Paper |
| 2003 | Lifetime improvements of multicrystalline silicon analysed by spatially resolved lifetime measurements
Emanuel, G.; Wolke, W.; Preu, R. | Conference Paper |
| 2003 | Plasma etching for industrial in-line processing of c-Si solar cells
Rentsch, J.; Emanuel, G.; Schetter, C.; Aumann, T.; Theirich, D.; Gentischer, J.; Roth, K.; Fritzsche, M.; Dittrich, K.-H.; Preu, R. | Conference Paper |
| 2003 | Scanning ND:YAG laser system for industrially applicable processing in silicon solar cell manufacturing
Schneiderlöchner, E.; Grohe, A.; Glunz, S.W.; Preu, R.; Willeke, G. | Conference Paper |
| 2003 | Technology path to the industrial production of highly efficient and thin c-Si solar cells
Preu, R.; Biro, D.; Emanuel, G.; Grohe, A.; Hofmann, M.; Huljic, D.M.; Reis, I.E.; Rentsch, J.; Schneiderlöchner, E.; Sparber, W.; Wolke, W.; Willeke, G. | Conference Paper |
| 2003 | Verfahren zur Herstellung eines Halbleiter-Metallkontaktes durch eine dielektrische Schicht
Preu, R.; Schneiderloechner, E.; Glunz, S.; Luedemann, R. | Patent |
| 2002 | Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells
Biro, D.; Preu, R.; Schultz, O.; Peters, S.; Huljic, D.M.; Zickermann, D.; Schindler, R.; Ludemann, R.; Willeke, G. | Journal Article |
| 2002 | High capacity walking string diffusion furnace
Biro, D.; Emanuel, G.; Preu, R.; Willeke, G. | Conference Paper |
| 2002 | High throughput laser isolation of crystalline silicon solar cells
Emanuel, G.; Schneiderlöchner, E.; Stollhof, J.; Gentischer, J.; Preu, R.; Lüdemann, R. | Conference Paper |
| 2002 | High-efficiency cell structures for medium-quality silicon
Glunz, S.W.; Dicker, J.; Kray, D.; Lee, J.Y.; Preu, R.; Rein, S.; Schneiderlöchner, E.; Sölter, J.; Warta, W.; Willeke, G. | Conference Paper |
| 2002 | High-efficiency silicon solar cells for low-illumination applications
Glunz, S.W.; Dicker, J.; Esterle, M.; Hermle, M.; Isenberg, J.; Kamerewerd, F.; Knobloch, J.; Kray, D.; Leimenstoll, A.; Lutz, F.; Oßwald, D.; Preu, R.; Rein, S.; Schäffer, E.; Schetter, C.; Schmidhuber, H.; Schmidt, H.; Steuder, M.; Vorgrimler, C.; Willeke, G. | Conference Paper |
| 2002 | Innovation in solar cell production technology
Lüdemann, R.; Preu, R.; Willeke, G. | Conference Paper |
| 2002 | Innovative production technologies for solar modules - SOLPRO III
Klappert, S.; Untiedt, D.; Preu, R.; Emanuel, G.; Huljic, D.; Lüdemann, R.; Eversheim, W. | Conference Paper |
| 2002 | Investigations on laser-fired contacts for passivated rear solar cells
Schneiderlöchner, E.; Grohe, A.; Ballif, C.; Glunz, S.W.; Preu, R.; Willeke, G. | Conference Paper |
| 2002 | Laser fired contacts - a fast contact process for passivated rear silicon solar cells
Schneiderlöchner, E.; Grohe, A.; Preu, R.; Glunz, S.W.; Willeke, G. | Conference Paper |
| 2002 | Laser-fired contacts (LFC)
Schneiderlöchner, E.; Preu, R.; Lüdemann, R.; Glunz, S.W.; Willeke, G. | Conference Paper |
| 2002 | Laser-fired contacts - transfer of a simple high efficiency process scheme to industrial production
Preu, R.; Schneiderlöchner, E.; Grohe, A.; Glunz, S.W.; Willeke, G. | Conference Paper |
| 2002 | Laser-fired rear contacts for crystalline silicon solar cells
Schneiderlöchner, E.; Preu, R.; Lüdemann, R.; Glunz, S.W. | Journal Article |
| 2002 | Laserunterstütztes Verfahren zur Kontaktierung der Rückseite von Silicium-Solarzellen
Grohe, A.; Schneiderlöchner, E.; Emanuel, G.; Preu, R. | Conference Paper |
| 2002 | Pad printed front contacts for c-Si solar cells - a technological and economical evaluation
Huljic, D.M.; Thormann, S.; Preu, R.; Lüdemann, R.; Willeke, G. | Conference Paper |
| 2002 | Progress in screen printed front side metallization schemes for CSiTF solar cells
Rentsch, J.; Huljic, D.M.; Reber, S.; Preu, R.; Lüdemann, R. | Conference Paper |
| 2002 | Rapid thermal surface passivation of silicon solar cells
Peters, S.; Ballif, C.; Borchert, D.; Huljic, D.M.; Lee, J.Y.; Preu, R.; Radt, V.; Schindler, R.; Schneiderlöchner, E.; Warta, W. | Conference Paper |
| 2002 | Screen printed selective emitters prepared by fast and rapid thermal diffusion
Biro, D.; Schultz, O.; Preu, R.; Ballif, C.; Zickermann, D.; Lüdemann, R. | Conference Paper |
| 2001 | Advanced diffusion system for low contamination in-line rapid thermal processing of silicon solar cells
Biro, D.; Preu, R.; Schulz, O.; Peters, S.; Huljic, D.M.; Zickermann, D.; Schindler, R.; Lüdemann, R.; Willeke, G. | Conference Paper |
| 2001 | Innovative Produktionstechnologien für kristalline Silicium-Solarzellen
Preu, R. | Dissertation |
| 2000 | Innovative production technologies for solar cells - SOLPRO
Preu, R.; Lüdemann, R.; Emanuel, G.; Wettling, W.; Eversheim, W.; Güthenke, G.; Untiedt, D.; Schweitzer, G. | Conference Paper |
| 2000 | Laser ablation - a new low-cost approach for passivated rear contact formation in crystalline silicon solar cell technology
Preu, R.; Glunz, S.W.; Schäfer, S.; Lüdemann, R.; Wettling, W.; Pfleging, W. | Conference Paper |
| 2000 | Laser micromachining for applications in thin film technology
Pfleging, W.; Ludwig, A.; Seemann, K.; Preu, R.; Mäckel, H.; Glunz, S.W. | Journal Article |
| 2000 | New simplified methods for patterning the rear contact of RP-PERC high-efficiency solar cells
Glunz, S.W.; Preu, R.; Schaefer, S.; Schneiderlöchner, E.; Pfleging, W.; Lüdemann, R.; Willeke, G. | Conference Paper |
| 2000 | Plasma etched PERC and buried base contact solar cells
Schaefer, S.; Preu, R.; Lüdemann, R.; Glunz, S.W. | Conference Paper |
| 2000 | Rapid thermal firing of screen printed contacts for large area crystalline silicon solar cells
Huljic, D.M.; Biro, D.; Preu, R.; Craff-Castillo, C.; Lüdemann, R. | Conference Paper |
| 2000 | Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production
Krempel-Hesse, J.; Preu, R.; Lautenschlager, H.; Lüdemann, R. | Conference Paper |
| 2000 | Sputtering - a key technology for thin film deposition in crystalline silicon solar cell production?
Preu, R.; Krempel-Hesse, J.; Biro, D.; Huljic, D.M.; Mäckel, H.; Lüdemann, R. | Conference Paper |
| 2000 | Verfahren und Vorrichtung zur selektiven Kontaktierung von Solarzellen
Preu, R.; Glunz, S. | Patent |
| 2000 | Vorrichtung zum kontaminationsfreien, kontinuierlichen oder getakteten Transport von scheibenfoermigen Gegenstaenden, insbesondere Substraten oder Wafern, durch eine geschlossene Behandlungsstrecke
Schmutz, W.; Gentischer, J.; Preu, R.; Moeller, R.; Guethenke, G.; Schweitzer, G. | Patent |
| 1999 | Fine-line screen printing for solar cells
Reis, I.E.; Huljic, D.; Hahne, P.; Preu, R.; Zickermann, D.; Bucher, B.; Fleischer, P.V. | Conference Paper |
| 1998 | Pad printing - a novel thick-film technique of fine-line printing for solar cells
Hahne, P.; Reis, I.E.; Hirth, E.; Huljic, D.M.; Preu, R. | Conference Paper |
| 1998 | Screen printed and RT-processed emitters for crystalline silicon solar cells
Preu, R.; Schumacher, J.O.; Hahne, P.; Lautenschlager, H.; Reis, I.E.; Glunz, S.W.; Warta, W. | Conference Paper |
| 1997 | Optimisation of cell interconnectors for PV module performance enhancement
Preu, R.; Koltay, P.; Schmidhuber, H.; Bücher, K. | Conference Paper |
| 1995 | Einfache Beschreibung des temperatur- und einstrahlungsabhängigen Verhaltens von Solarzellen
Kleiss, G.; Lipps, F.; Preu, R.; Reiche, F.; Bücher, K. | Journal Article |
| 1995 | PV-module reflection losses: Measurement, simulation and influence on energy yield and performance ratio
Preu, R.; Kleiss, G.; Reiche, K.; Bücher, K. | Conference Paper |
| 1994 | Effects of advantageous placing of PV cells and modules in generating units
Reiche, K.; Preu, R.; Kleiss, G.; Bücher, K. | Conference Paper |