Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling
Mathioudaki, S.; Vandenabeele, C.; Tonneau, R.; Pflug, A.; Lucas, S.
Journal Article
2019Correlation of structural and optical properties using virtual materials analysis
Badorreck, H.; Steinecke, M.; Jensen, L.; Ristau, D.; Jupé, M.; Müller, J.; Tonneau, R.; Moskovkin, P.; Lucas, P.; Pflug, A.; Grinevičiūtė, L.; Selskis, A.; Tolenis, T.
Journal Article
2019Crystallisation phenomena of In₂O₃:H films
Muydinov, R.; Steigert, A.; Wollgarten, M.; Michalowski, P.; Bloeck, U.; Pflug, A.; Erfurt, D.; Klenk, R.; Körner, S.; Lauermann, I.; Szyszka, B.
Journal Article
2019DSMC - simulation of the influence of hydrogen addition on the properties of silicon deposited by HWCVD
King, H.; Pflug, A.; Ortner, K.; Höfer, M.; Harig, T.; Sittinger, V.
Journal Article
2019RF plasma cleaning of water-cooled mirror equipped with notch filter based on shorted λ/4 line
Dmitriev, A.M.; Pflug, A. et al.
Journal Article
2019Technisierung - Technische Möglichkeiten zur Verfolgung von Arzneimittelstraftaten im Internet
Steinebach, Martin; Yannikos, York; Halvani, Oren; Pflug, Annika
Book Article
2019Uniformity and wavefront control of optical filters
Vergöhl, M.; Britze, C.; Bruns, S.; Pflug, A.; Zimara, J.; Schäfer, B.; Mann, K.; Kirschner, V.
Conference Paper
2018TiOx deposited by magnetron sputtering
Tonneau, R.; Moskovkin, P.; Pflug, A.; Lucas, S.
Journal Article
2017Analyse extremistischer Bestrebungen in sozialen Netzwerken
Böckler, Nils; Groß, Eva; Allwinn, Mirko; Dörr, Günter; Igel, Christoph; Jarolimek, Stefan; Pflug, Annika; Steinebach, Martin; Hoffmann, Jens; Weber, Kristin; Eppert, Kerstin; Roth, Viktoria; Zick, Andreas
Journal Article
2016Advanced coatings for large-area or high-volume products
: Kondruweit, Simone (Hrsg.); Pflug, Andreas (Hrsg.); Pütz, Jörg (Hrsg.)
Conference Proceedings
2016Authorship verification for different languages, genres and topics
Halvani, Oren; Winter, Christian; Pflug, Anika
Journal Article, Conference Paper
2016Effects of image compression on ear biometrics
Rathgeb, C.; Pflug, A.; Wagner, J.; Busch, C.
Journal Article
2016Improvement of the homogeneity of high mobility In2O3:H films by sputtering through a mesh electrode studied by Monte Carlo simulation and thin film analysis
Scherg-Kurmes, H.; Hafez, A.; Siemers, M.; Pflug, A.; Schlatmann, R.; Rech, B.; Szyszka, B.
Journal Article
2016Multiple scale modeling of PVD sputter processes
Turowski, M.; Jupé, M.; Melzig, T.; Pflug, A.; Demircan, A.; Ristau, D.
Conference Paper
2016Thin-film deposition processes
Pflug, A.; Siemers, M.; Melzig, T.; Keunecke, M.; Schäfer, L.; Bräuer, G.
Book Article
2015Growth condition of amorphous ZTO films from rotatable targets
Sittinger, V.; Pflug, A.; Schulz, C.; Siemers, M.; Melzig, T.; Meyer, B.; Kronenberger, A.; Oberste Berghaus, J.; Bosscher, W. de
Journal Article, Conference Paper
2015Heuristic modeling of the doping efficiency in sputtered TCO layers
Pflug, A.; Siemers, M.; Melzig, T.; Sittinger, V.; Schäfer, L.
Journal Article, Conference Paper
2015Modeling of gas flow and deposition profile in HWCVD processes
Pflug, A.; Höfer, M.; Harig, T.; Armgardt, M.; Britze, C.; Siemers, M.; Melzig, T.; Schäfer, L.
Journal Article, Conference Paper
2015Multiple scale modeling of Al2O3 thin film growth in an ion beam sputtering process
Turowski, M.; Jupé, M.; Melzig, T.; Pflug, A.; Ristau, D.
Conference Paper
2015Practice-oriented optical thin film growth simulation via multiple scale approach
Turowski, M.; Jupé, M.; Melzig, T.; Moskovkin, P.; Daniel, A.; Pflug, A.; Lucas, S.; Ristau, D.
Journal Article, Conference Paper
2015Rotatable serial co-sputtering of doped titania
Sittinger, V.; Pflug, A.; Dewald, W.; Jung, S.; Britze, C.; Kaiser, A.; Werner, W.; Szyszka, B.; Bräuer, G.
Journal Article
2015Simulation in thin film technology
Turowski, M.; Jupe, M.; Ehlers, H.; Melzig, T.; Pflug, A.; Ristau, D.
Conference Paper
2015Simulation von Plasmaprozessen
Pflug, A.
Conference Paper
20142D PIC-MC Simulation of Reactive Dual Magnetron Discharges on Ti02
Melzig, T.; Siemers, M.; Pflug, A.
Conference Paper
20143D PIC-MC simulation of anode effects in dual magnetron discharges
Melzig, T.; Siemers, M.; Pflug, A.; Rank, R.
Journal Article, Conference Paper
2014Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering
Schmidt, R.M.; Ries, P.; Pflug, A.; Wuttig, M.; Kubart, T.
Journal Article
2014Model based investigation of Ar+ ion damage in DC magnetron sputtering
Siemers, M.; Pflug, A.; Melzig, T.; Gehrke, K.; Weimar, A.; Szyszka, B.
Journal Article, Conference Paper
2014Numerical optimization of baffles for sputtering optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article, Conference Paper
2014PIC-MC simulation of magnetron discharges
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Gehrke, K.
Conference Paper
2014Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system
Vergöhl, M.; Rademacher, D.; Pflug, A.
Journal Article, Conference Paper
2014Recent developments in the field of transparent conductive oxide films and emerging applications for automotive and architectural glazing, oxide electronics and photovoltaics
Szyszka, B.; Muydinov, R.; Pflug, A.; Rech, B.; Ruske, F.; Scherg-Kurmes, H.; Schlatmann, R.; Sittinger, V.; Stannowski, B.; Ulrich, S.
Conference Paper
2014Rotatable serial co-sputtering of doped titania
Sittinger, V.; Pflug, A.; Dewald, W.; Jung, S.; Britze, C.; Kaiser, A.; Werner, W.; Szyszka, B.; Bräuer, G.
Conference Paper
2014Simulation of linear magnetron discharges in 2D and 3D
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Bräuer, G.
Journal Article, Conference Paper
2014Simulation von Plasma-Beschichtungsprozessen
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.
Journal Article
2013Multi-Biometrische Gesichtserkennung
Busch, Christoph; Brömme, Arslan; Pflug, Anika; Zhou, Xuebing; Dose, Michael; Brauckmann, Michael; Weber, Frank; Opel, Alexander; Neugebauer, Peter; Leowsky, Katja
Conference Paper
2013Numerical shaper optimization for sputtered optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article
2013PIC-MC Simulationen zur Untersuchung der Mikroplasmaausbreitung entlang von Hohlraumgrenzflächen unter Atmosphärendruck
Hilbert, T.; Kurrat, M.; Siemers, M.; Pflug, A.
Conference Paper
2013PIC-MC simulations for microplasmapropagation in multiple cavity arrangements at atmospheric pressure conditions
Hilbert, T.; Siemers, M.; Pflug, A.; Kurrat, M.
Conference Paper
2013Simulation von Plasmaprozessen
Pflug, A.
Conference Paper
2012Computational optimization of the thickness uniformity of magnetron-sputtered optical layers by means of particle in cell plasma simulations
Vergöhl, M.; Pflug, A.; Rademacher, D.; Zickenrott, T.
Conference Paper
2012Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
Kubart, T.; Schmidt, R.M.; Austgen, M.; Nyberg, T.; Pflug, A.; Siemers, M.; Wuttig, M.; Berg, S.
Journal Article
2012Optical characterization of high mobility polycrystalline ZnO:Al films
Ruske, F.; Wimmer, M.; Köppel, G.; Pflug, A.; Rech, B.
Conference Paper
2012Parallel particle-in-cell Monte-Carlo algorithm for simulation of gas discharges under PVM and MPI
Schwanke, C.; Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
2012Recent developments in the field of transparent conductive oxide films for spectral selective coatings, electronics and photovoltaics
Szyszka, B.; Dewald, W.; Gurram, S.K.; Pflug, A.; Schulz, C.; Siemers, M.; Sittinger, V.; Ulrich, S.
Journal Article, Conference Paper
2012Towards ultra-precise optical interference filters on large area: Computational and experimental optimization of the homogeneity of magnetron-sputtered precision optical coatings
Vergöhl, M.; Pflug, A.; Rademacher, D.
Conference Paper
2011Particle-in-cell Monte Carlo simulation for process analysis and development
Siemers, M.; Pflug, A.; Schwanke, C.; Szyszka, B.
Conference Paper
2011Simulation of plasma deposition processes
Pflug, A.; Siemers, M.; Schwanke, C.; Szyszka, B.
Conference Paper
2011Simulation of plasma potential and ion energies in magnetron sputtering
Pflug, A.; Siemers, M.; Schwanke, C.; Febty Kurnia, B.; Sittinger, V.; Szyszka, B.
Journal Article
2011Sputter yield amplification by tungsten doping of Al2O 3 employing reactive serial co-sputtering: Process characteristics and resulting film properties
Austgen, M.; Koehl, D.; Zalden, P.; Kubart, T.; Nyberg, T.; Pflug, A.; Siemers, M.; Berg, S.; Wuttig, M.
Journal Article
2010In-Situ Messaufbau für den Einsatz in Beschichtungsanlagen
Szyszka, B.; Pflug, A.; Rademacher, D.; Vergöhl, M.
Patent
2010Modelling of sputtering yield amplification effect in reactive deposition of oxides
Kubart, T.; Nyberg, T.; Pflug, A.; Siemers, M.; Austgen, M.; Koehl, D.; Wuttig, M.; Berg, S.
Journal Article
2010Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films
Sittinger, V.; Ruske, F.; Pflug, A.; Pflug, A.; Dewald, W.; Szyszka, B.; Dittmar, G.
Journal Article
2010Rotatable target serial co-sputtering
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S.; Vergöhl, M.; Werner, W.; Kaiser, A.; Jung, S.; Bringmann, U.; Bräuer, G.; Köhl, D.; Austgen, M.; Wuttig, M.; Weis, H.; Herwig, W.; Polle, A.; Herlitze, L.
Conference Paper
2010Simulation von Plasma-Beschichtungsprozessen
Pflug, A.; Siemers, M.; Schwanke, C.; Szyszka, B.
Journal Article
2010Sputteryield-Amplification. Ein lange bekannter, doch bisher kaum genutzter Effekt zur Ratenerhöhung von Sputterprozessen
Szyszka, B.; Pflug, A.; Sittinger, V.; Ulrich, S.
Journal Article
2010Übersicht über die Einsatzgebiete und Anwendungen von transparent leitfähigen Oxiden (TCOs)
Sittinger, V.; Szyszka, B.; Ulrich, S.; Pflug, A.; Ruske, F.; Dewald, W.
Journal Article
2009Design tools and simulations for plasma processing in large area coaters
Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
2009Increase of the deposition rate in reactive sputtering of metal oxides using a ceramic nitride target
Severin, D.; Kappertz, O.; Nyberg, T.; Berg, S.; Pflug, A.; Wuttig, M.
Journal Article
2009Influence of damp heat on the optical and electrical properties of Al-doped zinc oxide
Greiner, D.; Papathanasiou, N.; Pflug, A.; Ruske, F.; Klenk, R.
Conference Paper, Journal Article
2009Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren
Pflug, A.; Siemers, M.; Sittinger, V.; Szyszka, B.; Ulrich, S.
Patent
2009Optical modeling of free electron behavior in highly doped ZnO films
Ruske, F.; Pflug, A.; Sittinger, V.; Szyszka, B.; Greiner, D.; Rech, B.
Journal Article
2009Particle-in-cell Monte Carlo analysis of propagating plasma waves in DC magnetron discharges
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2009Reactive magnetron sputtering of ZnO:Al
Szyszka, B.; Sittinger, V.; Dewald, W.; Pflug, A.; Ulrich, S.; Kaiser, A.; Werner, W.
Conference Paper
2009Scratch resistance analysis of coatings on glass and polycarbonate
Boentoro, W.; Pflug, A.; Szyszka, B.
Conference Paper, Journal Article
2009Verfahren und Vorrichtung zur Plasmabehandlung eines flachen Substrats
Beckmann, R.; Geisler, M.; Zeuner, A.; Fiedler, M.; Grabosch, G.; Pflug, A.; Czarnetzki, U.; Brinkmann, R.; Siemers, M.
Patent
2008Forschungsbedarf zur Erzeugung funktionaler Oberflächen
Diehl, W.; Bandorf, R.; Heckmann, U.; Holeczek, H.; Klotzbach, U.; Kondruweit-Reinema, S.; Leson, A.; Metzner, M.; Pflug, A.; Zimmer, O.
Conference Paper
2008Gas flow and plasma simulation for parallel plate PACVD reactors
Pflug, A.; Siemers, M.; Szyszka, B.; Geisler, M.; Beckmann, R.
Conference Paper
2008Optical and XRR methods for analysis and design of low-e coatings and PDP EMI filters
Ulrich, S.; Pflug, A.; Szyszka, B.
Conference Paper
2008Optical modeling and XRR/AFM characterization of highly conductive thin Ag layers
Ulrich, S.; Pflug, A.; Schiffmann, K.I.; Szyszka, B.
Journal Article
2008Particle-in-cell Monte Carlo analysis of anomalous target erosion in magnetron sputtering
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2008Produktionstechnik für funktionale Oberflächen
Heckmann, Ulrike; Bandorf, Ralf; Diehl, Wolfgang; Holeczek, Harald; Klotzbach, Udo; Kondruweit-Reinema, Simone; Leson, Andreas; Metzner, Martin; Pflug, Andreas; Zimmer, Otmar
Journal Article
2008Produktionstechnik zur Erzeugung funktionaler Oberflächen
: Bandorf, Ralf (Projektleitung); Diehl, Wolfgang (Mitarb.); Heckmann, Ulrike (Mitarb.); Holeczek, Harald (Mitarb.); Klotzbach, Udo (Mitarb.); Kondruweit-Reinema, Simone (Mitarb.); Leson, Andreas (Mitarb.); Metzner, Martin (Mitarb.); Pflug, Andreas (Mitarb.); Zimmer, Otmar (Mitarb.)
Study
2008Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J.
Journal Article
2008Research on promising applications for high power pulse magnetron sputtering
Sittinger, V.; Szyszka, B.; Bandorf, R.; Vergöhl, M.; Pflug, A.; Christie, D.J.; Ruske, F.
Conference Paper
2008Sputtering yield amplification for targets operated in reactive mode
Kubart, T.; Nyberg, T.; Pflug, A.; Kohl, D.; Wuttig, M.; Berg, S.
Conference Paper
2008Tailoring of structure formation and phase composition in reactively sputtered zirconium oxide films using nitrogen as an additional reactive gas
Severin, D.; Sarakinos, K.; Kappertz, O.; Pflug, A.; Wuttig, M.
Journal Article
2008Thesen und Trends - Mit funktionalen Oberflächen in die Zukunft
Bandorf, Ralf; Diehl, Wolfgang; Heckmann, Ulrike; Holeczek, Harald; Klotzbach, Udo; Kondruweit-Reinema, Simone; Leson, Andreas; Metzner, Martin; Pflug, Andreas; Zimmer, Otmar
Journal Article
2007Process technology, applications and potentials of magnetron sputtering technology for optical coatings
Vergöhl, M.; Frach, P.; Bartzsch, H.; Pflug, A.; Rickers, C.
Conference Paper
2007Simulation des reaktiven Magnetron-Sputterns
Pflug, A.
Dissertation
2007Three dimensional model for anomalous target erosion in magnetron sputtering
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2006High power pulsed magnetron sputtering (HPPMS)
Christie, D.; Szyszka, B.; Pflug, A.; Sittinger, V.; Ruske, F.; Werner, W.
Conference Paper
2006Parallel DSMC gasflow simulation of an in-line coater for reactive sputtering
Pflug, A.; Siemers, M.; Szyszka, B.
Conference Paper
2006Plasma stabilization and structure formation during reactive sputtering of metal oxides
Severin, D.; Wuttig, M.; Kappertz, O.; Nyberg, T.; Pflug, A.; Siemers, M.
Conference Paper
2006Potenzialfeld Simulation
Szyszka, B.; Pflug, A.; Zickermann, D.
Book Article
2006Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.
Journal Article
2006Process stabilization and increase of the deposition rate in reactive sputtering of metal oxides and oxynitrides
Severin, D.; Kappertz, O.; Kubart, T.; Nyberg, T.; Berg, S.; Pflug, A.; Siemers, M.; Wuttig, M.
Journal Article
2006Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper, Journal Article
2006Reactive deposition of Al-doped ZnO thin films using high power pulsed magnetron sputtering (HPPMS)
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J.
Conference Paper
2006A second hysteresis effect of reactive magnetron sputtering in compound mode
Pflug, A.; Siemers, M.; Szyszka, B.; Severin, D.
Conference Paper
2006Three dimensional plasma simulations with a parallelized particle-in-cell Monte Carlo approach
Siemers, M.; Pflug, A.; Szyszka, B.
Conference Paper
2005Heuristische Simulation der Plasma-Impedanz beim reaktiven Magnetron-Sputtern
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.; Severin, D.; Wuttig, M.
Conference Paper
2005Leuchtmittel mit einem Schichtsystem zur Reflektierung abgegebener infraroter Strahlung
Szyszka, B.; Pflug, A.; Sittinger, V.; Hunsche, B.; Bewig, L.; Kuepper, T.
Patent
2005Model prediction and emprical confirmation of rate scaling with peak power for high power pulse magnetron sputtering (HPPMS) deposition of thin Ag films
Christie, D.J.; Pflug, A.; Sittinger, V.; Ruske, F.; Siemers, M.; Szyszka, B.; Geisler, M.
Conference Paper
2005Modeling of the plasma impedance in reactive magnetron sputtering for various target materials
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.
Conference Paper
2005Modelling of sputter erosion rate enhancement from ceramic targets
Nyberg, T.; Kappertz, O.; Rosen, D.; Kubart, T.; Severin, D.; Pflug, A.; Berg, S.
Conference Paper
2005Simulation of in-line sputtering coaters
Pflug, A.; Szyszka, B.; Bräuer, G.
Journal Article
2005Verfahren und Vorrichtung zum Magnetronsputtern
Szyszka, B.; Pflug, A.
Patent
2005Verfahren zum Beschichten von Substraten in Inline-Anlagen
Kastner, A.; Geisler, M.; Leipnitz, T.; Bruch, J.; Pflug, A.; Szyszka, B.
Patent
2005ZnO:Al films for a-Si:H thin film solar cells
Szyszka, B.; Sittinger, V.; Ruske, F.; Werner, W.; Pflug, A.; Rech, B.
Conference Paper
2004Combination of X-ray reflectometry and optical spectroscopy as a new tool for thin films parameter determination
Pflug, A.; Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.
Conference Paper
2004Heuristic model of the plasma impedance in magnetron sputtering
Pflug, A.; Szyszka, B.; Berg, S.; Nyberg, T.; Kappertz, O.
Conference Paper
2004Modeling of the film thickness distribution along transport direction in in-line coaters for reactive sputtering
Pflug, A.; Szyszka, B.; Geisler, M.; Kastner, A.; Braatz, C.; Schreiber, U.; Bruch, J.
Conference Paper
2004Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories
Pflug, A.; Sittinger, V.; Ruske, M.; Szyszka, B.; Dittmar, G.
Conference Paper, Journal Article
2004Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.
Conference Paper
2004Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper
2003Beschichtungsanlage
Geisler, M.; Kastner, A.; Szyszka, B.; Pflug, A.; Malkomes, N.
Patent
2003Process simulation for advanced large area optical coatings
Pflug, A.; Szyszka, B.; Sittinger, V.; Niemann, J.
Conference Paper
2003Simulation des reaktiven Magnetron-Sputterprozesses in Inline-Anlagen
Pflug, A.; Szyszka, B.; Niemann, J.
Journal Article
2003Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J.
Journal Article
2003Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Pflug, A.
Journal Article
2003Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A.
Journal Article
2002Modeling of NIR free carrier absorption in aluminum-doped zinc oxide layers using the simulation system RIG-VM
Pflug, A.; Sittinger, V.; Szyszka, B.; Dittmar, G.
Conference Paper
2002Simulation of reactive magnetron sputtering kinetics in real in-line processing chambers
Pflug, A.; Malkomes, N.; Sittinger, V.; Szyszka, B.
Conference Paper
2002Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J.
Conference Paper
2002Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering
Szyszka, B.; Sittinger, V.; Jiang, X.; Hong, R.J.; Werner, W.; Pflug, A.; Ruske, M.; Lopp, A.
Conference Paper