Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Direct laser interference patterning and ultrafast laser-induced micro/nano structuring of current collectors for lithium-ion batteries
Zheng, Y.; An, Z.; Smyrek, Peter; Seifert, H.J.; Kunze, Tim; Lang, Valentin; Lasagni, Andrés-Fabián; Pfleging, Wilhelm
Conference Paper
2016Laser interference patterning and laser-induced periodic surface structure formation on metallic substrates
Zheng, Yijing; An, Z.; Smyrek, Peter; Seifert, Hans Jürgen; Pfleging, Wilhelm; Kunze, Tim; Lang, Valentin; Lasagni, Andrés-Fabián
Conference Paper
2014A generative manufacturing-based concept and equipment for flexible, scalable manufacturing of microsystems
Dickerhof, Markus; Kimmig, Daniel; Adamietz, Raphael; Iseringhausen, Tobias; Segal, Joel; Vladov, Nikola; Pfleging, Wilhelm; Torge, Maika
Conference Paper
2014The SMARTLAM 3D-I concept: Design of microsystems from functional elements fabricated by generative manufacturing technologies
Dickerhof, Markus; Kimmig, Daniel; Adamietz, Raphael; Iseringhausen, Tobias; Segal, Joel; Vladov, Nikola; Pfleging, Wilhelm; Torge, Maika
Conference Paper
2013An additive manufacturing and e-printing based approach for flexible scalable manufacturing of Microsystems
Dickerhof, Markus; Kimmig, Daniel; Scholz, Steffen; Wögerer, Christian; Adamietz, Raphael; Pfleging, Wilhelm
Conference Paper
2007Adaptive Silikonmembranlinsen mit integriertem Piezo-Aktor
Schneider, F.; Müller, C.; Ulmer, U.; Eberhard, D.; Besser, H.; Pfleging, W.; Wallrabe, U.
Conference Paper
2000Laser ablation - a new low-cost approach for passivated rear contact formation in crystalline silicon solar cell technology
Preu, R.; Glunz, S.W.; Schäfer, S.; Lüdemann, R.; Wettling, W.; Pfleging, W.
Conference Paper
2000Laser micromachining for applications in thin film technology
Pfleging, W.; Ludwig, A.; Seemann, K.; Preu, R.; Mäckel, H.; Glunz, S.W.
Journal Article
2000New simplified methods for patterning the rear contact of RP-PERC high-efficiency solar cells
Glunz, S.W.; Preu, R.; Schaefer, S.; Schneiderlöchner, E.; Pfleging, W.; Lüdemann, R.; Willeke, G.
Conference Paper
1997Excimer-laser patterning of copper in LDE (laser dry etching)
Pfleging, W.; Vörckel, A.; Duddek, H.; Wesner, D.A.; Kreutz, E.W.
Journal Article
1997KrF-excimer laser pretreatment and metallization of polymers
Weichenhain, R.; Wesner, D.A.; Pfleging, W.; Horn, H.; Kreutz, E.W.
Journal Article
1996CCl4-assisted CF4 etching of silicon in a microwave-assisted LDE(laser dry etching)-process
Pfleging, W.; Wesner, D.A.; Kreutz, E.W.
Journal Article
1996Dry etching and micromachining of precision Silicon components
Kreutz, E.W.; Pfleging, W.; Jandeleit, J.; Urbasch, G.
Conference Paper
1995Laser radiation. A tool for generation of defined thin film properties for application
Kreutz, E.W.; Alunovic, M.; Klotzbücher, T.; Mertin, M.; Wesner, D.A.; Pfleging, W.
Journal Article
1995Patterning of Si(100) in microwave assisted LDE (Laser dry etching)
Pfleging, W.; Wehner, M.; Lupp, F.; Kreutz, E.W.
Conference Paper
1995Structure and chemical composition of BN thin films grown by pulsed-laser deposition -PLD-
Klotzbücher, T.; Pfleging, W.; Mertin, M.; Wesner, D.A.; Kreutz, E.W.
Journal Article
1995Surface analysis of films and film systems produced by pulsed laser deposition
Wesner, D.A.; Pfleging, W.; Klotzbücher, T.; Kreutz, E.W.
Journal Article
1995Tailoring of surface properties by removal and deposition with laser radiation
Kreutz, E.W.; Frerichs, H.; Mertin, M.; Wesner, D.A.; Pfleging, W.
Journal Article
1994PLD of thin films for applications
Voss, A.; Pfleging, W.; Alunovic, M.; Kreutz, E.W.
Conference Paper
1994Properties and applications of single-component -Al2O3, ZrO2, BN- and multi-component films -ZrO2, Ti- fabricated by pulsed laser deposition
Kreutz, E.W.; Alunovic, M.; Voss, A.; Pfleging, W.; Sung, H.; Wesner, D.A.
Journal Article
1992Keramikschichten auf metallischen Substraten
Sung, H.; Pfleging, W.; Voss, A.; Kreutz, E.W.; Erkens, G.
Journal Article