| | |
|---|
| 2012 | Framework for integration of virtual metrology and predictive maintenance
Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G. | Conference Paper |
| 2012 | IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar | Presentation |
| 2012 | Predictive sampling approach to dynamically optimize defect density control operations
Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J. | Conference Paper |
| 2012 | Process oriented production evaluation
Gottmann, Juliane; Pfeffer, Matthias; Sihn, Wilfried | Conference Paper |
| 2012 | Simulationsgestützte Untersuchung von logistischen Optimierungsstrategien bei Halbleiterfertigungsprozessen
Pfeffer, M. | Dissertation |
| 2011 | Developing a framework for virtual metrology and predictive maintenance
Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther | Journal Article |
| 2011 | Der Produktionsleiter
: Hentschel, Robert (Referent); Pfeffer, Matthias (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2010 | Maßarbeit für die variantenreiche Einzelfertigung
Pfeffer, Matthias; Gottmann, Juliane | Journal Article |
| 2010 | Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Clarysse, T.; Moussa, A.; Parmentier, B.; Bogdanowicz, J.; Vandervorst, W.; Bender, H.; Pfeffer, M.; Schellenberger, M.; Nielsen, P.F.; Thorsteinsson, S.; Lin, R.; Petersen, D. | Journal Article |
| 2010 | Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2010 | Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2009 | Chancen nutzen in Krisenzeiten durch Produktionsoptimierung
Pfeffer, Matthias; Gottmann, Juliane | Journal Article |
| 2009 | Comparison of silicon surface preparation methods for measurement of minority carrier lifetime using the microwave photoconductive decay (µ-PCD) coupled with continuous corona charge (Charge-PCD)
Pavelka, T.; Pap, A.; Kenesei, P.; Varga, M.; Novinics, F.; Tallián, M.; Borionetti, G.; Guaglio, G.; Pfeffer, M.; Don, E. | Conference Paper |
| 2009 | Makyoh-Imaging zur Charakterisierung reflektierender Oberflächen
Finck, A. von; Duparre, A.; Pfeffer, M. | Journal Article |
| 2009 | Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
Pfeffer, M.; Pfitzner, L.; Ocker, B.; Öchsner, R.; Ryssel, H.; Verdonck, P. | Conference Paper |
| 2009 | Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2009 | Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2009 | Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2009 | Properties of TaN thin films produced using PVD linear dynamic deposition technique
Kozlowska, M.; Oechsner, R.; Pfeffer, M.; Bauer, A.J.; Meissner, E.; Pfitzner, L.; Ryssel, H.; Maass, W.; Langer, J.; Ocker, B.; Schmidbauer, S.; Gonchond, J.-P. | Journal, Conference Paper |
| 2009 | Vorrichtung und Verfahren zum Beschichten eines Substrates
Schöpka, U.; Öchsner, R.; Pfeffer, M.; Maass, W.; Langer, J.; Ocker, B. | Patent |
| 2008 | Junction photovoltage metrology and high resolution mapping of ion implants electrically isolated from the wafer surface
Korsós, F.; Kis-Szabo, K.; Don, E.; Pap, A.; Pavelka, T.; Laviron, C.; Pfeffer, M. | Conference Paper |
| 2008 | Lean Controlling in der Produktion
: Adolf, Thomas (Seminarleitung); Pfeffer, Matthias (Seminarleitung) | Conference Proceedings |
| 2008 | Der Produktionsleiter. Kompaktwissen zur effektiven Steuerung der Produktion
: Wesoly, Michael (Referent); Pfeffer, Matthias (Referent); Junginger, Bernd (Referent) | Conference Proceedings |
| 2007 | Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites
Oechsner, R.; Pfeffer, M.; Frickinger, J.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S. | Journal Article |
| 2007 | Lean Controlling in der Produktion. CD-ROM
: Adolf, Thomas (Seminarleitung); Pfeffer, Matthias (Seminarleitung) | Conference Proceedings |
| 2007 | Lean Controlling in der Produktion. CD-ROM
: Adolf, Thomas (Seminarleitung); Pfeffer, Matthias (Seminarleitung) | Conference Proceedings |
| 2007 | Metrology, analysis and characterization in micro- and nanotechnologies
Pfitzner, L.; Nutsch, A.; Öchsner, R.; Pfeffer, M.; Don, E.; Wyon, C.; Hurlebaus, M. | Conference Paper |
| 2006 | Approach for a standardized methodology for mulit-site processing of 300 mm wafers at R&D-sites
Öchsner, R.; Frickinger, J.; Pfeffer, M.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S. | Conference Paper |
| 2006 | Aufbau eines Kennzahlensystems
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Controlling im schlanken Unternehmen
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Creation of e-learning content for microelectronics manufacturing
Öchsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.; Mey, B. de; Engelhard, M.; O'Murchu, C.; Ditmar, J.; Colson, P.; Madore, M.; Krahn, L.; Kempe, W.; Luisman, E. | Conference Paper |
| 2006 | Creation of e-learning content for microelectronics manufacturing
Öchsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.; Mey, B. de; Engelhard, M.; O'Murchu, C.; Ditmar, J.; Colson, P.; Madore, M.; Krahn, L.; Kempe, W.; Luisman, E. | Conference Paper |
| 2006 | Echtzeitfähiges Fabrik-Cockpit für den produzierenden Mittelstand
Kapp, R.; Blond, J. le; Schreiber, S.; Pfeffer, M.; Westkämper, E. | Journal Article |
| 2006 | Effizientes Anlagen-Controlling
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Flying Wafer - A standardised methodology for multi-site processing of 300 mm wafers at R&D-sites
Frickinger, J.; Oechsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claeys, C.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S. | Conference Paper |
| 2006 | Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sites
Frickinger, J.; Öchsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S. | Conference Paper |
| 2006 | Kosten-Controlling am Beispiel Bike AG
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Kosten-Controlling für schlanke Unternehmen
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Lean Controlling in der Produktion - Praxis-Seminar
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Metrology and high resolution mapping of shallow junctions formed by low energy implant processes
Don, E.; Pap, A.; Tutto, P.; Pavelka, T.; Wyon, C.; Laviron, C.; Sotta, D.; Oechsner, R.; Pfeffer, M. | Conference Paper |
| 2006 | Prospects for the realization of APC in a distributed 300 mm R&D-line
Roeder, G.; Schellenberger, M.; Öchsner, R.; Pfeffer, M.; Frickinger, J.; Pfitzner, L.; Ryssel, H.; Fritzsche, M. | Conference Paper |
| 2006 | Prozessanalyse und -optimierung mit Wertstromdesign
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2006 | Trends in European R&D - Advanced process control down to atomic scale for micro- and nanotcchnologies
Pfitzner, L.; Schellenberger, M.; Oechsner, R.; Roeder, G.; Pfeffer, M. | Conference Paper |
| 2006 | Wertstromdesign am Modell der Stanz AG
Adolf, Thomas; Pfeffer, Matthias | Conference Paper |
| 2004 | E-Learning for microelectronics manufacturing
Oechsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M. | Conference Paper |
| 2004 | i-plant - die multifunktionale Integrationsplattform
Westkämper, E.; Pfeffer, M.; Dürr, M. | Journal Article |
| 2004 | Partizipative Fabrikplanung mit skalierbarem Modell
Westkämper, E.; Pfeffer, M.; Dürr, M. | Journal Article |
| 2003 | Laserscanning
Westkämper, E.; Pfeffer, M.; Rosenbusch, C. | Journal Article |
| 2002 | Fraunhofer-Institut für Integrierte Schaltungen, Bereich Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2001
: Öchsner, R.; Ryssel, H.; Pfeffer, M. | Annual Report |
| 2002 | From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)
Oechsner, R.; Pfeffer, M.; Pfitzner, L.; Binder, H.; Müller, E.; Vonderstrass, T. | Conference Paper, Journal Article |
| 2001 | Fraunhofer-Institut für Integrierte Schaltungen, Bereich Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2000
: Öchsner, R.; Ryssel, H.; Pfeffer, M.; Schmeing, M. | Annual Report |
| 1995 | Aufbau einer mikroprozessorgesteuerten Gasmischapparatur
Pfeffer, M. | Thesis |