Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration
Ahopelto, J.; Ardila, G.; Baldi, L.; Balestra, F.; Belot, D.; Fagas, G.; Gendt, S. de; Demarchi, D.; Fernandez-Bolaños, M.; Holden, D.; Ionescu, A.M.; Meneghesso, G.; Mocuta, A.; Pfeffer, M.; Popp, R.M.; Sangiorgi, E.; Sotomayor Torres, C.M.
Journal Article
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Conference Paper
2016Advanced detection method for polymer residues on semiconductor substrates
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Conference Paper
2016Contamination control for wafer container used within 300 mm manufacturing for power microelectronics
Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.
Conference Paper
2016Drill-down analysis with equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus
Presentation
2016Leistungsmessung in der außeruniversitären Forschung: Performance Measurement mit der Balanced Scorecard in Non-Profit-Organisationen
Pfeffer, M.
Dissertation
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Journal Article
2016Semiconductor equipment assessment - An enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2015Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning
Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.
Conference Paper
2015Automatisierte Montage von räumlichen Schaltungsträgern mit Standard-SMT-Produktionsanlagen
Maurieschat, Uwe; Pfeffer, Michael
Journal Article
2015Classification and key feature extraction for equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Petzold, Lisa; Pfeffer, Markus; Bauer, Anton
Presentation
2015Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Conference Paper
2015Semiconductor equipment assessment - an enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2014Bewertung von Wertströmen
Pfeffer, Matthias
Book
2013A method for a comprehensive value stream evaluation
Sihn, Wilfried; Pfeffer, Matthias
Journal Article
2013Practical aspects of virtual metrology and predictive maintenance model development and optimization
Schöpka, U.; Roeder, G.; Mattes, A.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Scheibelhofer, P.
Conference Paper
2013Process oriented production evaluation
Gottmann, Juliane; Pfeffer, Matthias; Sihn, Wilfried
Conference Paper, Journal Article
2012Framework for integration of virtual metrology and predictive maintenance
Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G.
Conference Paper
2012IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Presentation
2012Predictive sampling approach to dynamically optimize defect density control operations
Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J.
Conference Paper
2012Process oriented production evaluation
Gottmann, Juliane; Pfeffer, Matthias; Sihn, Wilfried
Conference Paper
2012Simulationsgestützte Untersuchung von logistischen Optimierungsstrategien bei Halbleiterfertigungsprozessen
Pfeffer, M.
Dissertation
2011Developing a framework for virtual metrology and predictive maintenance
Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther
Journal Article
2011Der Produktionsleiter
: Hentschel, Robert (Referent); Pfeffer, Matthias (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2010Maßarbeit für die variantenreiche Einzelfertigung
Pfeffer, Matthias; Gottmann, Juliane
Journal Article
2010Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Clarysse, T.; Moussa, A.; Parmentier, B.; Bogdanowicz, J.; Vandervorst, W.; Bender, H.; Pfeffer, M.; Schellenberger, M.; Nielsen, P.F.; Thorsteinsson, S.; Lin, R.; Petersen, D.
Journal Article
2010Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2010Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2009Chancen nutzen in Krisenzeiten durch Produktionsoptimierung
Pfeffer, Matthias; Gottmann, Juliane
Journal Article
2009Comparison of silicon surface preparation methods for measurement of minority carrier lifetime using the microwave photoconductive decay (µ-PCD) coupled with continuous corona charge (Charge-PCD)
Pavelka, T.; Pap, A.; Kenesei, P.; Varga, M.; Novinics, F.; Tallián, M.; Borionetti, G.; Guaglio, G.; Pfeffer, M.; Don, E.
Conference Paper
2009Makyoh-Imaging zur Charakterisierung reflektierender Oberflächen
Finck, A. von; Duparre, A.; Pfeffer, M.
Journal Article
2009Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
Pfeffer, M.; Pfitzner, L.; Ocker, B.; Öchsner, R.; Ryssel, H.; Verdonck, P.
Conference Paper
2009Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2009Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2009Der Produktionsleiter
: Pfeffer, Matthias (Referent); Hentschel, Robert (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2009Properties of TaN thin films produced using PVD linear dynamic deposition technique
Kozlowska, M.; Oechsner, R.; Pfeffer, M.; Bauer, A.J.; Meissner, E.; Pfitzner, L.; Ryssel, H.; Maass, W.; Langer, J.; Ocker, B.; Schmidbauer, S.; Gonchond, J.-P.
Journal Article, Conference Paper
2009Vorrichtung und Verfahren zum Beschichten eines Substrates
Schöpka, U.; Öchsner, R.; Pfeffer, M.; Maass, W.; Langer, J.; Ocker, B.
Patent
2008Junction photovoltage metrology and high resolution mapping of ion implants electrically isolated from the wafer surface
Korsós, F.; Kis-Szabo, K.; Don, E.; Pap, A.; Pavelka, T.; Laviron, C.; Pfeffer, M.
Conference Paper
2008Lean Controlling in der Produktion
: Adolf, Thomas (Seminarleitung); Pfeffer, Matthias (Seminarleitung)
Conference Proceedings
2008Der Produktionsleiter. Kompaktwissen zur effektiven Steuerung der Produktion
: Wesoly, Michael (Referent); Pfeffer, Matthias (Referent); Junginger, Bernd (Referent)
Conference Proceedings
2007Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites
Oechsner, R.; Pfeffer, M.; Frickinger, J.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
Journal Article
2007Lean Controlling in der Produktion. CD-ROM
: Adolf, Thomas (Seminarleitung); Pfeffer, Matthias (Seminarleitung)
Conference Proceedings
2007Lean Controlling in der Produktion. CD-ROM
: Adolf, Thomas (Seminarleitung); Pfeffer, Matthias (Seminarleitung)
Conference Proceedings
2007Metrology, analysis and characterization in micro- and nanotechnologies
Pfitzner, L.; Nutsch, A.; Öchsner, R.; Pfeffer, M.; Don, E.; Wyon, C.; Hurlebaus, M.
Conference Paper
2006Approach for a standardized methodology for mulit-site processing of 300 mm wafers at R&D-sites
Öchsner, R.; Frickinger, J.; Pfeffer, M.; Schellenberger, M.; Roeder, G.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.; Kaushik, V.; Renaud, D.; Danel, A.; Claeys, C.; Bearda, T.; Lering, M.; Graef, M.; Murphy, B.; Walther, H.; Hury, S.
Conference Paper
2006Aufbau eines Kennzahlensystems
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Controlling im schlanken Unternehmen
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Creation of e-learning content for microelectronics manufacturing
Öchsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.; Mey, B. de; Engelhard, M.; O'Murchu, C.; Ditmar, J.; Colson, P.; Madore, M.; Krahn, L.; Kempe, W.; Luisman, E.
Conference Paper
2006Creation of e-learning content for microelectronics manufacturing
Öchsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.; Mey, B. de; Engelhard, M.; O'Murchu, C.; Ditmar, J.; Colson, P.; Madore, M.; Krahn, L.; Kempe, W.; Luisman, E.
Conference Paper
2006Echtzeitfähiges Fabrik-Cockpit für den produzierenden Mittelstand
Kapp, R.; Blond, J. le; Schreiber, S.; Pfeffer, M.; Westkämper, E.
Journal Article
2006Effizientes Anlagen-Controlling
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Flying Wafer - A standardised methodology for multi-site processing of 300 mm wafers at R&D-sites
Frickinger, J.; Oechsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claeys, C.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S.
Conference Paper
2006Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sites
Frickinger, J.; Öchsner, R.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Claes, M.; Bearda, T.; Renaud, D.; Danel, A.; Lering, M.; Graef, M.; Kaushik, V.; Murphy, B.; Fritzsche, M.; Walther, H.; Hury, S.
Conference Paper
2006Kosten-Controlling am Beispiel Bike AG
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Kosten-Controlling für schlanke Unternehmen
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Lean Controlling in der Produktion - Praxis-Seminar
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Metrology and high resolution mapping of shallow junctions formed by low energy implant processes
Don, E.; Pap, A.; Tutto, P.; Pavelka, T.; Wyon, C.; Laviron, C.; Sotta, D.; Oechsner, R.; Pfeffer, M.
Conference Paper
2006Prospects for the realization of APC in a distributed 300 mm R&D-line
Roeder, G.; Schellenberger, M.; Öchsner, R.; Pfeffer, M.; Frickinger, J.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.
Conference Paper
2006Prozessanalyse und -optimierung mit Wertstromdesign
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2006Trends in European R&D - Advanced process control down to atomic scale for micro- and nanotcchnologies
Pfitzner, L.; Schellenberger, M.; Oechsner, R.; Roeder, G.; Pfeffer, M.
Conference Paper
2006Wertstromdesign am Modell der Stanz AG
Adolf, Thomas; Pfeffer, Matthias
Conference Paper
2004E-Learning for microelectronics manufacturing
Oechsner, R.; Pfeffer, M.; Pfitzner, L.; Ryssel, H.; Beer, K.; Boldin, M.
Conference Paper
2004i-plant - die multifunktionale Integrationsplattform
Westkämper, E.; Pfeffer, M.; Dürr, M.
Journal Article
2004Partizipative Fabrikplanung mit skalierbarem Modell
Westkämper, E.; Pfeffer, M.; Dürr, M.
Journal Article
2003Laserscanning
Westkämper, E.; Pfeffer, M.; Rosenbusch, C.
Journal Article
2002Fraunhofer-Institut für Integrierte Schaltungen, Bereich Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2001
: Öchsner, R.; Ryssel, H.; Pfeffer, M.
Annual Report
2002From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)
Oechsner, R.; Pfeffer, M.; Pfitzner, L.; Binder, H.; Müller, E.; Vonderstrass, T.
Conference Paper, Journal Article
2001Fraunhofer-Institut für Integrierte Schaltungen, Bereich Bauelementetechnologie. Leistungen und Ergebnisse. Jahresbericht 2000
: Öchsner, R.; Ryssel, H.; Pfeffer, M.; Schmeing, M.
Annual Report
1995Aufbau einer mikroprozessorgesteuerten Gasmischapparatur
Pfeffer, M.
Thesis