Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2014Densification of thin aluminum oxide films by thermal treatments
Cimalla, V.; Baeumler, M.; Kirste, L.; Prescher, M.; Christian, B.; Passow, T.; Benkhelifa, F.; Bernhardt, F.; Eichapfel, G.; Himmerlich, M.; Krischok, S.; Pezoldt, J.
Journal Article
2013N-type conductivity and properties of carbon-doped InN(0001) films grown by molecular beam epitaxy
Himmerlich, M.; Knübel, A.; Aidam, R.; Kirste, L.; Eisenhardt, A.; Krischok, S.; Pezoldt, J.; Schley, P.; Sakalauskas, E.; Goldhahn, R.; Félix, R.; Mánuel, J.M.; Morales, F.M.; Carvalho, D.; Ben, T.; García, R.; Koblmüller, G.
Journal Article
2011Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Foerster, C.; Cimalla, V.; Stephan, R.; Pezoldt, J.; Stauden, T.; Ambacher, O.; Hein, M.A.
Journal Article
2009Performance modification of SiC MEMS
Niebelschütz, F.; Brueckner, K.; Cimalla, V.; Hein, M.A.; Pezoldt, J.
Conference Paper, Journal Article
2009Wide band gap based MEMS for harsh environment applications
Cimalla, V.; Lebedev, V.; Röhlig, C.-C.; Ambacher, O.; Niebelschütz, F.; Tonisch, K.; Pezoldt, J.; Brueckner, K.; Hein, M.
Conference Paper
2008Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication
Niebelschütz, F.; Pezoldt, J.; Stauden, T.; Cimalla, V.; Tonisch, K.; Brueckner, K.; Hein, M.; Ambacher, O.; Schober, A.
Conference Paper
2008Phase stabilization and phonon properties of single crystalline rhombohedral indium oxide
Wang, C.Y.; Dai, Y.; Pezoldt, J.; Lu, B.; Kups, T.; Cimalla, V.; Ambacher, O.
Journal Article