Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2005 | Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
Mann, K.; Barkusky, F.; Bayer, A.; Peth, C.; Töttger, H.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | Formation and direct writing of color centers in LiF using a laser-induced extreme ultraviolet plasma in combination with a Schwarzschild objective
Barkusky, F.; Peth, C.; Mann, K.; Feigl, T.; Kaiser, N. | Journal Article |
| 2005 | Imaging properties of different optics for EUV radiation
Bayer, A.; Barkusky, F.; Peth, C.; Töttger, H.; Mann, K.; Feigl, T.; Kaiser, N. | Conference Paper |