Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
: Benoit, Charlot; Mita, Yoshio; Nouet, Pascal; Pellet, Claude; Pressecq, Francis; Schneider, Peter; Smith, Steward
Conference Proceedings
2005Capacitive humidity sensors based on oxidized photoBCB polymer films: Enhanced sensitivity and response time
Tetelin, A.; Pellet, C.; Achen, A.; Toepper, M.
Conference Paper
2005Water solubility and diffusivity in BCB resins used in microelectronic packaging and sensor applications
Tetelin, A.; Achen, A.; Pouget, V.; Pellet, C.; Töpper, M.; Lachaud, J.-L.
Conference Paper